BRONKHORST MASS-STREAMT D-6300 User manual

MASS-STREAMTM
Instruction Manual
D-6300
Digital Mass Flow Meters / Controllers
Doc. No.: 9.17.104B Date: 27-12-2018
ATTENTION
Before installing and operating the instrument it is strongly recommended
that this instruction manual should be read carefully. Not following the
guidelines could result in personal injury and/or damage to the equipment.

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SCOPE OF THIS INSTRUCTION MANUAL
This instruction manual of M+W Instruments GmbH covers the installation of the digital
Bronkhorst®instrument model series D-6300 for mass flow measurement and control of
gases and the communication between the instrument and the operator according to the
specific (fieldbus) protocol.
Further information can be found in the Bronkhorst®manuals, which are also valid for the
Mass-StreamTM model series D-6300.
The Bronkhorst®manuals for multi-bus instruments have a modular set-up and include:
General instructions digital Mass Flow / Pressure instruments laboratory style /
IN-FLOW (document no. 9.17.022)
Operation instructions digital instruments (document no. 9.17.023)
Instruction Manual FlowPlot (document no. 9.17.030)
Fieldbus- / Interface description:
oFLOW-BUS interface (document no. 9.17.024)
oPROFIBUS DP interface (document no. 9.17.025)
oDeviceNetTM interface (document no. 9.17.026)
oRS232 interface with FLOW-BUS protocol (document no. 9.17.027)
oModbus-RTU interface (document no. 9.17.035)
Multi-Functional Display of the digital D-6300 Mass Flow Meters / Controllers
(document no. 9.17.105)
The information in this manual has been reviewed and is believed to be wholly reliable.
No responsibility, however, is assumed for inaccuracies. The material in this manual is for
information purposes only, and is subject to change without notice.

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Warranty
The M+W Instruments GmbH grants a warranty on its products according to the General
Terms and Conditions. The warranty is limited to the mass flow meters and controllers
and its components. The correct use of the device under the observation of all specified
operation conditions is the precondition for the warranty.
ATTENTION!
The warranty is solely limited to the mass flow meters and controllers and its components.
No warranty claims are accepted in case of a faulty operation of the instrument, like a
wrong electrical hook-up for example.
Any liability is explicitly excluded for any secondary damage, caused by the instrument’s
failure or the malfunction of any component. All wear parts, like seals for example, are
also excluded from the warranty.
All devices are provided with a seal mark upon delivery. In case of a broken seal any
warranty claims are void. The opening of the instruments is only permitted by certified
service personnel authorized by the Customer Service Department (CSD) of our parent
company Bronkhorst High-Tech B.V.
The products of M+W Instruments GmbH are warranted against defects in material and
workmanship for a period of three years from the date of shipment, provided they are
used in accordance with the ordering specifications and they are not subjected to abuse
or physical damage. The products of other manufacturers are warranted for a period of
one year.
Products that do not operate properly during this period may be repaired or replaced at no
charge. Repairs are normally warranted for one year or the balance of the original
warranty, whichever is the longer.

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See also paragraph A-V and B-II of the Terms and Conditions of sales of the
M+W Instruments GmbH.
The warranty includes all initial and latent defects, random failures, and indeterminable
internal causes. It excludes failures and damage caused by the customer, such as
contamination, improper electrical hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly
judged non-warranty may be charged for.
M+W Instruments GmbH prepays outgoing freight charges when any party of the service
is performed under warranty, unless otherwise agreed upon beforehand. However, if the
product has been returned collect to M+W Instruments GmbH, these costs are added to
the repair invoice. Import and/or export charges, foreign shipping methods/carriers are
paid for by the customer.

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Table of Contents
1 SHORT FORM START-UP...................................................................................... 6
2 DIGITAL INSTRUMENTS........................................................................................ 7
2.1 General.................................................................................................................... 7
2.2 Installation............................................................................................................. 9
2.3 Operation and Maintenance.................................................................................11
2.4 Functional Block Diagram................................................................................... 11
2.5 Specifications of MASS-STREAMTM Digital Instruments D-6300……………... 12
2.5.1 8DIN Connector, 8-pole round (female)...................................................14
3 MEASUREMENT PRINCIPLE AND CALIBRATION.............................................15
3.1 CTA Through-Flow Measurement.......................................................................15
3.2 Calibration and Look-up Table............................................................................16
4 OPERATION VIA RS232....................................................................................... 17
4.1 Input Signal via FlowView....................................................................................19
5 MANUAL INTERFACE: Micro Switches and LED’s……………………………… 23
The dimensional drawings and hook-up diagrams of the MASS-STREAMTM Digital
Instruments D-6300 are available for download on our website
www.bronkhorst.com.

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1 SHORT FORM START-UP
All necessary settings for this instrument are already performed at M+W Instruments
GmbH. Following the next steps carefully is the quickest way to get the instruments
operational in your own system:
Connection
Make sure your PC or PLC is connected to the RS232 interface by means of the correct
cable.
The maximum cable length for communication via RS232 must not exceed 10 m!
Power Supply
Make sure that the instrument or interface is connected to the power supply:
+15 Vdc up to +24 Vdc (please check on instrument label)
COM-Port Settings
Use settings [38400,n,8,1] for your COM-Port:
Baud rate = 38400 Baud, no parity, 8 data bits, 1 stop bit.
In case of any trouble during installation or to set up the communication Bronkhorst®
programs like FlowDDE or Hyperterminal (available in MS-Windows) could be very useful.
Please refer to chapter 4 how to use FlowDDE.

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2 DIGITAL INSTRUMENTS
2.1 General
The digital instruments of M+W Instruments GmbH are measurement devices for thermal
mass flow and control of gases. They are equipped with a digital electronic multi-bus
pc-board and consist of a micro-controller with peripheral circuitry for measuring,
controlling and communication. The flow signal is measured directly in the gas flow,
digitized and processed by means of the internal software (firmware). The measured and
processed values can be output through the analog interface or through the digital
communication line (RS232 or optional fieldbus interface). For controllers the setting for
the actuator is calculated by the firmware. The setpoint can be given through the
analogue interface or through the digital communication line.
Digital instruments have a lot of setting parameters for signal processing, controlling and
many extra features and thus a wide range in use. Reading and changing of these
settings is only possible via RS232 or a fieldbus, except for measured value, setpoint and
valve output, which is also possible through the analogue interface (depending on
parameter setting).
Digital instruments can be operated by means of the following options:
1. Analog interface (0…5 Vdc / 0...10 Vdc / 4…20 mA / 0...20 mA)
2. RS232 interface (connected to COM-Port by means of special cable at 38400 Baud)
3. FLOW-BUS interface
4. PROFIBUS DP interface
5. DeviceNetTM interface
6. Modbus-RTU interface
Depending on the pre-settings options 1 and 2 are always present on multi-bus
instruments. An interface to any available fieldbus is optional.

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The operation via analogue interface, RS232 interface and an optional fieldbus can be
performed at the same time. A special parameter called “control mode” indicates which
connection is controlling the instrument: analogue or digital (via fieldbus or RS232). The
RS232 interface behaves like the Flow-Bus interface. Even when using more interfaces at
the same time, the reading can be done simultaneously. When changing a parameter
value, the last value send by an interface will become valid.
The micro switches and LED’s on top of the instrument can also be used for manual
operations of some options (see chapter 5):
The green LED indicates in which mode the instrument is active.
The red LED indicates address, baud rate etc. and error/warning in relevant situations.
Scope of Delivery
Immediately upon receipt of the incoming goods the package needs to be checked for any
possible damages and the goods have to comply with the scope of delivery listed on the
packing note. In case of any damages the supplier and the freight forwarder have to be
contacted without delay.
In the event of any discrepancies please get in touch with your local distributor (see
www.bronkhorst.com) or contact us directly:
M+W Instruments GmbH
Dorfstr. 1
D-85391 Leonhardsbuch
Tel.: [phone]
Fax: [phone]
Email: [email protected]
When the instrument needs to be returned please include a description of the damage in
a closed envelope.

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ATTENTION!
All instruments for return must have a fully filled-in “Declaration of Decontamination“.
This declaration has to be attached to the shipping documents, allowing free access on
the outside of the package.
The declaration of decontamination is available on our accompanying CD with each
instrument shipment or it can be downloaded from our website www.bronkhorst.com.
Please mention the instrument’s model code and the serial number on your order, as well
as your VAT number when needed.
2.2 Installation
To avoid personal injury and/or damage to the equipment only trained and qualified
personnel shall perform the installation of the instruments:
Read the instrument’s name plate before installation and check the electrical
connection, flow range, media to be measured, inlet and outlet pressure as well as
input and output signals.
The instruments contain electronic components which are sensitive to electronic
discharges (ESD). Contact with electronically charged persons or objects could
possibly endanger these components or even result in their failure.
Ensure that all piping is absolutely clean and without any damage. It is recommended
to install an inlet filter in front of the instrument.
While installing the instrument take care of the arrow marking on the instrument’s flow
body, determining the flow direction.
Avoid piping with small diameter at high flow rates. When possible no abrupt angles or
other disturbances shall be mounted directly in front of the instrument.

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All devices have Withworth pipe threads –type RP –according to ISO228-1
(cylindrical G-threads in inches according to BSPP). The mounting of NPT-fittings will
destroy the inlet threads in the instrument’s body.
Using an inlet pipe with sufficient piping diameter is recommended. The length of the
inlet pipe should be at least 10 times the piping diameter.
Before the first start-up check that the system has absolutely no leakage. If toxic,
explosive and/or corrosive gases are to be used, ensure to purge the system long
enough with a dry, inert gas. This is also required to remove these kinds of gases from
the system.
The instruments’ preferred mounting position is horizontally. Especially when installing
bigger mass flow controllers (D-6371 and bigger) in different ways you should get in
contact with your distributor or M+W Instruments GmbH beforehand.
ATTENTION!
In the event of power loss or when unplugging the main connector the instrument will be
reset into factory settings (=delivery condition).
All instruments described in this manual carry the CE-mark. Therefore they have to
comply with the EMC requirements valid for these instruments. However compliance with
the EMC requirements is not possible without the use of proper cables and
connector/gland assemblies.
In case the instrument is connected to other devices (e.g. power supply) ensure that the
operating voltage complies with the supply voltage given on the name plate and that the
function of the shielding is not affected. M+W Instruments GmbH recommends using
standard cables following the CE-requirements and could supply them when needed.

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2.3 Operation and Maintenance
When the power is switched on a warm-up period of at least 30 sec is required allowing
the instrument’s thermal stabilisation. Afterwards the instrument will work with an
accuracy of approximately 4% FS. It takes around 30 minutes until the optimal stability is
reached and the instrument will work with an accuracy of < 2% FS. This is supposed to be
performed with or without gas flow. To avoid creating gradients it is recommended that
gas and ambient temperature are kept at the same level (max ΔT approx. ± 2…3 °C).
Otherwise the accuracy of this thermal measurement could be affected in an
unpredictable manner.
Be sure that the specified pressures have been applied. Pressure surges, as may occur
during the system pressurisation, must be avoided. The control valve cannot be used as a
shut-off valve. When starting up, always bring the instrument gradually up to the level of
operating conditions.
There are no regular maintenance checks required for the instrument’s operation. It has to
be ensured that a possible mounted inline filter is checked and cleaned on a regular
basis. We recommend having the calibration checked every 24 months by the supplier or
an authorized service partner.
2.4 Functional Block Diagram
Mass flow meter DMFM
The sensor signal is digitised via ADC and processed internally. Being reconverted from
digital to analogue the signal is forwarded as reading on the analogue output by means of
current or voltage. The reading is also available as 2-byte integer at parameter 8 and can
be readout via RS232.
Mass flow controller DMFC
For mass flow controllers the setpoint is added to the above process. The setpoint is
either processed as analogue signal or as 2-byte integer via RS232 (or fieldbus).

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The instrument compares setpoint and actual value and controls the valve, until both
values match within the tolerances.
2.5 Specifications of MASS-STREAMTM Digital Instruments D-6300
Measurement System
Accuracy
(based on calibration with Air)
± 2% FS including non-linearity
(± 1% FS or ± 1.5% FS on request)
Repeatability
< ± 0.2% FS
Pressure sensitivity
± 0.3% RD / bar typical (Air)
Temperature sensitivity
± 0.2% RD / °C (Air)
Response time sensor (τ63%)
D-631● & D-632●: approx. 0.3 s
others: approx. 0.9 s
Settling time controller
plus approx. 2 sec (not applicable for BJ valves)
Leak integrity (outboard)
< 2·10-8 mbar l/sec He

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Mechanical Parts
Sensor
Stainless steel 1.4404 (AISI 316L)
Instrument body
Aluminium EN AW-6082-T6 anodized OR
Stainless steel 1.4404 (AISI 316L)
Sieves
Stainless steel
Distance parts
Teflon or Stainless steel
Protection (with & without display)
IP65
(IP40 with Profibus Sub-D9 connector)
Operating Limits
Measuring range
up to 1…100% (1:100) for meters
up to 2…100% (1:50) for controllers
Temperature
0…50 °C
D-6361/FAS, D-6361/002BI: +10…+50 °C
Pressure
0…10 bar(g) for aluminium body
0…20 bar(g) for stainless steel body
The maximum operating pressure of controllers
also depends on the selected valve!
Warm-up time
30 min for optimum accuracy
within 30 sec for accuracy ± 4% FS
Electrical Properties
Supply voltage
+15 … 24 Vdc ± 10% / with BJ-valve: +24 Vdc
Current peak values
Meter: approx. 75 mA at 0% flow
approx. 125 mA at 100% flow
Controller: add 250 mA
add 30 mA for display, if applicable
add 50 mA for fieldbus, if applicable
Output signal
0…10 Vdc / 0…5 Vdc active
0…20 mA / 4…20 mA active
Instrument connector
8-pin round DIN(male) for analogue and RS232
Optional additional fieldbus connectors:
5-pin M12 (male) for: FLOW-BUS
DeviceNetTM
Modbus-RTU
or 5-pin M12 (female) for: PROFIBUS DP
or 9-pin Sub-D (female) for: PROFIBUS DP

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2.5.1 8DIN Connector, 8-pin round (female)
Be sure that the integrity of the shielding is not affected when connecting the system to
other devices (e.g. to PLC). Only shielded wire terminals can be used.
SERIE 423 99.5672.19.08
8 DIN CONNECTOR BINDER
O-RING
DETAIL
THE CABLE.(THE SHIELD MUST BE AROUND
FOLD THE SHIELD OF THE CABLE BACK OVER
DETAIL
CONNECTED TO THE CONNECTORHOUSING
SHIELD OF THE CABLE SHOULD BE
BLACK TUBING
THE CABLE)
CABLE LIYCY 8x0.25mm
4.0
20 mm
2
SHRINK SOLDERCONTACTS WITH SHRINKTUBING
BRE 160 BLACK OR EQ.
7
3
8
52
6
1
4
solder-side
Binder 8-pin
DIN connector female

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3 MEASUREMENT PRINCIPLE AND CALIBRATION
3.1 CTA Through-Flow Measurement
The direct through-flow measurement with CTA (Constant Temperature Anemometry) is
also named inline measurement. The working principle is based on King’s law of the ratio
between the heater energy and the heat degradation by means of gas flow or liquid flows
published in 1914.
Two elements, a heater and a temperature probe, are positioned in the gas flow. CTA is
aiming to keep the difference in temperature T between both sensor pins at a constant
level. The flow rate and the heater energy required to maintain this constant T are
proportional and thus indicate the mass flow of the gas. The relation between the heater
energy and the mass flow is described by the following formula:
P = P0+ C · mn
P …Heater power
P0 …Heater power offset at zero flow
C …Constant (device-dependent)
 m …Mass flow
n …dimensionless figure (type 0,5)

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3.2 Calibration and Look-up Table
The calibration is processed with a mass flow controller which functions as a reference.
The controller and the gas inlet pressure forward a defined gas flow, thus a raw signal of
the sensor can be allocated to each specific mass flow. To generate and store the look-up
table in the instrument up to 21 measurement points are recorded and equally arranged
over the total measurement range. Using the look-up table the instrument’s firmware
relates the correct gas flow to each raw signal via interpolation. This method allows
processing almost any sensor raw signal, given that the signal is monotonically
increasing.
Multi-fluid and multi-range instruments can store up to 8 look-up tables for a variety of
applications.
Design of a Look-up Table
Index
Raw signal X
Standardized value Y
0
X0
Y0
1
X1
Y1
2
X2
Y2
3
X3
Y3
4
X4
Y4
…
…
…
20
X20
Y20

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4 OPERATION VIA RS232
To operate the device from a personal computer via the serial interface it is recommended
to install the FlowDDE software. Like other software it can be found on the CD which is
accompanying the despatched goods. FlowDDE is required for the following software
operations.
Set-up communication between device and computer:
Hook-up of the instrument following the schematic description in chapter 2.5.
Start of FlowDDE and select the COM-Port connected to the instrument.
Set the Arbitration to “Autobusmaster + optimize“, then select “Parameter“ and
“Process“ in the menu for chaining.

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Having selected the COM-Port and Baud-Rate you need to start the communication
between a personal computer and the instrument via ‚F3’ or by clicking on the menu
“Communication“, being followed by a second click on “Open communication“.
FlowDDE on your monitor should show the following picture:

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4.1 Input Signal via FlowView
The Bronkhorst®FlowView software is ideal for easily used standard operations.
FlowView can be found on the CD which is accompanying the despatched goods and can
be down-loaded from http://downloads.bronkhorst.com.
Covered Functions:
Setpoint adjustment
Actual reading
Gas selection for multi-gas instruments
Alarm functions (configurable)
Counter functions (configurable)
Operations procedure
Start FlowDDE and open the communication
Start FlowView
Following the instrument’s pre-settings one of the following pictures should be
displayed (Example for a controller)
Analogue Digital
pre-settings pre-settings

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With analogue pre-settings the setpoint can be set via the designated pin 3 in the
DIN8 connector or, following the changeover to the control mode, via RS232.
To change over in the above named control mode click on “Advanced“ to open further
options. Click on „Setpoint/Control Mode“ and select „18. RS232“. The requested
setpoint can now be adjusted via the task bar or by typing the value in the description
field below ‘Setpoint’.