
Brooks Automation, Inc.
Information provided within this document is subject to change without notice, and although believed to be accurate, Brooks
Automation, Inc. assumes no responsibility for any errors, omissions, or inaccuracies.
ABF™, AcuLigner™, Advan Tag™, Align™, AquaTran™, AutoTeach™, ATR™, AXM™, Basic Blue™, BioStore™,
BiSymmetrik™, CenterSmart™, Cool Solutions™, Crate to Operate™, CrossingConnect™, Cryotiger™, DARTS™, Enerta™, e-
RMA™, e-Spares™, e-Volution™, Falcon™, FastRegen™, FIXLOAD™, FrogLeg™, Independent Twin Linear Exchange™,
InCooler™, InLigner™, Interface™, Isoport™, ITLX™, Jet™, Jet Engine™, LEAP™, LowProfile™, M2 Nano™, PASIV™,
PowerPak™, PerformanceBlue™, Plate Auditor™, PowerPak™, PowerTools™, PuroMaxx™, QuadraFly™, Radius™,
Radient™, Radient Express™, RapidThaw™, Reliance™, Reliance ATR™, RetroEase™, SCARA™, SmartPM™, SPOTLevel™,
Sprint™, Synetics™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time Optimal Trajectory™, Time
Optimized Path™, TopCooler™, TopLigner™, Tube Auditor™, Ultimate Blue™, VAC-407™, VacuTran™, VersaPort™, and
WaferEngine™ are trademarks of Brooks Automation, Inc.
AcuTran®, AquaTrap®, Asyst®, the Cool Solutions logo, Crossing Automation®, Cryodyne®, Cryo-Torr®, Fusion®, GOLDLink®,
Guardian®, Helix®, Leapfrog®, MagnaTran®, MapTrak®, Marathon®, Marathon 2®, Marathon Express®, Razor®, REMP®,
Spartan®, TrueBlue®, TurboPlus®, Vision®, Xpeel®, XTape®, Zaris®, the Brooks logo, and the Brooks Life Sciences logo are
registered U.S. trademarks of Brooks Automation, Inc.
All other trademarks are properties of their respective owners.
© 2021 Brooks Automation, Inc. All rights reserved. The information included in this manual is proprietary information of Brooks
Automation, Inc. and is provided for the use of Brooks customers only and cannot be used for distribution, reproduction, or sale
without the express written permission of Brooks Automation, Inc.
This technology is subject to United States export Administration Regulations and authorized to the destination only; diversion
contrary to U.S. law is prohibited.
Original manual printed in English. Translation of the original manual from English.
Copyright © 2021, Brooks Automation, Inc.