Brooks Marathon Express User manual

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Marathon Express™
User Manual
Part Number 605914 Rev. B

Marathon Express
Part Number: 605914 Rev. B
Brooks Automation, Inc.
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Informationprovidedwithinthisdocumentissubjecttochangewithoutnotice,andalthoughbelievedtobeaccurate,
BrooksAutomation,Inc.assumesnoresponsibilityforanyerrors,omissions,orinaccuracies.
ABF™,AcuLigner™,AdvanTag™,Align™,AutoTeach™,ATR™,AXM™,BasicBlue™,BiSymmetrik™,
CenterSmart™,CratetoOperate™,CrossingConnect™,DARTS™,Enerta™,e-RMA™,e-Spares™,e-
Volution™,Falcon™,FastRegen™,FIXLOAD™,FrogLeg™,IndependentTwinLinearExchange™,InLigner™,
Interface™,Isoport™,ITLX™,Jet™,JetEngine™,LEAP™,LowProfile™,M2Nano™,PASIV™,PowerPak™,
PerformanceBlue™,PlateAuditor™,PowerPak™,PowerTools™,PuroMaxx™,QuadraFly™,Radius™,
Radient™,RadientExpress™,Reliance™,RelianceATR™,RetroEase™,SCARA™,SmartPM™,SPOTLevel™,
Sprint™,Synetics™,TheNewPathwaytoProductivity™,TimeOptimizedTrajectory™,TimeOptimalTrajectory™,
TimeOptimizedPath™,TopCooler™,TopLigner™,UltimateBlue™,VAC-407™,VacuTran™,VersaPort™,and
WaferEngine™aretrademarksofBrooksAutomation,Inc.
AcuTran®,Asyst®,CrossingAutomation®,Fusion®,GOLDLink®,Guardian®,Helix®,Leapfrog®,MagnaTran®,
MapTrak®,Marathon®,Marathon2®,MarathonExpress®,Razor®,Spartan®,TrueBlue®,TurboPlus®,Vision®,
Zaris®,andtheBrookslogoareregisteredU.S.trademarksofBrooksAutomation,Inc.
Allothertrademarksarepropertiesoftheirrespectiveowners.
©2023BrooksAutomation,Inc.Allrightsreserved.Theinformationincludedinthismanualisproprietary
informationofBrooksAutomation,Inc.andisprovidedfortheuseofBrookscustomersonlyandcannotbeusedfor
distribution,reproduction,orsalewithouttheexpresswrittenpermissionofBrooksAutomation,Inc.
ThistechnologyissubjecttoUnitedStatesexportAdministrationRegulationsandauthorizedtothedestination
only;diversioncontrarytoU.S.lawisprohibited.
OriginalmanualprintedinEnglish.TranslationoftheoriginalmanualfromEnglish.
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2Copyright © 2023, Brooks Automation, Inc.

Brooks Automation
Part Number: 605914 Rev. B
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Corporate Headquarters
15ElizabethDrive
Chelmsford,MA01824U.S.A.
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ForTechnicalSupport:
Location Contact Number Website
North America [phone](TollFree)
[phone](Local)
http://www.brooks.com/
Europe +498000009347(TollFreeGermany)
+4936417699996(HasToll)
Japan +81120-255-390(TollFree)
+8145-330-9005(Local)
China +8621-5131-7066
Taiwan +886080-003-5556(TollFree)
+8863-5525258(Local)
Korea 1800-5116(TollFree)
Singapore +651-800-4-276657(TollFree)
+6563090701(Local)
ContactTechnicalPublicationsdirectly:[email protected]
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AcceleratingInnovation
Copyright © 2023, Brooks Automation, Inc. 3

Marathon Express
Part Number: 605914 Rev. B

Brooks Automation, Inc.
15ElizabethDrive
Chelmsford,MA
01824-2400
Tel:+1978-262-2400
Fax:+1978-262-2500
www.brooks.com
BrooksLocationsWorldwide:
Brooks Automation Inc.
46702BaysideParkway
Fremont,CA94538
Tel:[phone]
Fax:[phone]
Brooks Automation Inc.
AIMServiciosAdministrativos
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ParqueIndustrialLasAméricas
66640Apodaca,NLMexico
Tel:+52818863-6363
Brooks Automation
(Germany) GmbH
Ernst-Ruska-Ring11
07745Jena,Germany
Tel:+4936414821100
Fax:+49364148214100
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Brooks Automation
(Germany) GmbH
Daimler-Straße7
78256Steißlingen,Germany
Tel:[phone]
Fax:[phone]
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Brooks Automation, Inc.
9601DessauRoad,Suite301
Austin,TX78754
Tel:+1512-912-2840
Toll-Free:+1800-367-4887
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Brooks Automation
(Israel) Ltd.
MevoYerach5
Kiryat-Gat82000
Israel
Tel:+97286722988
Fax:+97286722966
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Brooks Technology (Shanghai)
Limited
2ndFloor,No.72,
887ZuchongzhiRoad
ZhangjiangHi-Tech
ParkPudong,Shanghai
China201203
Tel:[phone]
Fax:[phone]
Brooks Japan K.K.
HEADQUARTERS
NissoBldg.No16,9F
3-8-8ShinYokohama,Kohoku-ku
Yokohama,Kanagawa222-0033
Tel:[phone]
Fax:[phone]
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Brooks Japan K.K.
YOKOHAMATECHNICAL
CENTER
852-1Kawamuko-cho,Tsuzuki-ku
Yokohama,Kanagawa224-0044
Tel:[phone]
Fax:[phone]
Brooks Japan K.K.
KUMAMOTOSERVICEOFFICE
202MiraiOfficeII
312-1TatsudamachiYuge
Tatsuda,Kumamoto861-8002
Tel:[phone]
Fax:[phone]
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Brooks CCS Japan K.K.
CONTAMINATIONCONTROL
SOLUTIONS
NissoBldg.No16,9F
3-8-8ShinYokohama,Kohoku-ku
Yokohama,Kanagawa222-0033
Tel:[phone]
Fax:[phone]
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Brooks Automation Ltd.
TAIWANHEADQUARTERS
5F-5,No.32,Tai-YuenStreet
Chu-PeiCity
HsinchuCounty302,Taiwan,
R.O.C.
Tel:+886-3-5525258
Fax(G&A):+886-3-5525255
Fax(Sales):+886-3-5525200
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Brooks Automation Korea, Inc.
#35Giheungdanji-Ro121Beon-
Gil
Giheung-Gu,Yongin-Si
Gyeonggi-Do,17086
Korea
Tel:[phone]
Fax:[phone]
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Brooks Automation CCS RS
AG
Lohstampfestrasse11
CH-8274Tagerwilen,Switzerland
Tel:+4171-666-72-10
Fax:+4171-666-72-11
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Brooks Automation Korea, Inc.
#35Giheungdanji-Ro121Beon-
Gil
Giheung-Gu,Yongin-Si
Gyeonggi-Do,17086
Korea
Tel:[phone]
Fax:[phone]
Brooks Automation (S) Pte Ltd
51-18-C1MenaraBHL,
57JalanAhmadShah,
10050,Penang,
Malaysia
Tel:+6043701012
Fax:+6043701015
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Brooks Automation
(Singapore) Pte Ltd
Blk5008AngMoKioAvenue5
#05-08,TechplaceII
Singapore569874
Tel:[phone]
Fax:[phone]
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Brooks Automation Ltd.
TAINANOFFICE
3F.,No.11,Nanke3rdRd.,Xinshi
Dist.
TainanSciencePark
TainanCity74147,Taiwan
(R.O.C.)
TEL:[phone]
FAX:[phone]
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Brooks Automation
Precise Collaborative Robotics
201LindberghDrive
Livermore,CA94551
Tel:[phone]
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4Copyright © 2023, Brooks Automation, Inc.

Brooks Automation
Part Number: 605914 Rev. B
Revision History
Revision ECO Date Action Author
A EC146354 6/29/2023 Initialrelease. K.Forscher
B EC146805 7/13/2023 AddedACPowerDistributioninformationtothe
OperationalInterfacesandOperationchapters. K.Forscher
Copyright © 2023, Brooks Automation, Inc. 5

Marathon Express
Part Number: 605914 Rev. B
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Table of Contents
1.Introduction 12
SystemOverview 12
Options 13
Subsystems 13
SupplementaryandRelatedDocumentation 15
ManualNotation 16
Specifications 17
OperatingSpecifications 17
EnvironmentalSpecifications 18
MechanicalSpecifications 19
ElectricalSpecifications 20
ChamberHeatingandCooling 21
FacilitiesSpecifications 21
CommunicationsSpecifications 24
CenterofGravityandFloorLoading 25
SiteRequirementsforMovingtheMarathonExpress 25
ProcessModuleSpaceAllocation 25
ServiceandExclusionZones 25
2.Safety 27
RegulatoryComplianceandDeclarationofIncorporation 28
ExplanationofHazardsandAlerts 29
SafetyText 29
SafetyIcons 29
SignalWordsandColor 29
AlertExample 30
GeneralSafetyConsiderations 31
IllustrationofHazardLocations 33
SafetyandIdentificationLabels 34
IllustrationofHazardLocations 36
Interlocks 40
Lockout/Tagout 41
MechanicalHazards 42
LidLockout/TagoutProcedure 43
ElectricalHazards 45
DisconnectDevices 46
LaserHazards 46
ThermalHazards 47
VacuumHazards 48
ErgonomicsHazards 50
TipHazard 50
EnvironmentalInformation 51
NoiseEmission 51
Vibration 51
6Copyright © 2023, Brooks Automation, Inc.

Brooks Automation
Part Number: 605914 Rev. B
RefrigerantGasses 51
RecyclingandHazardousMaterials 51
MaterialSafetyInformation 53
3.Installation 54
SiteRequirements 54
FloorSpaceandLoading 54
Environmental 55
Facilities 55
UnpackingandInspection 55
ProcedureCategory 58
RequiredToolsandEquipment 58
UnpackingInstructions 58
InstallationProcedure 60
ProcedureCategory 61
RequiredToolsandEquipment 61
RemoveProtectivePackaging 62
RemovingShippingBrackets 62
InstallingtheVacuumCassetteElevators 63
InstallingtheMarathonExpress 63
MountingtheProcessModulestotheMXSystem 66
IntermoduleConnections 67
FacilitiesConnections 69
Electrical 74
EMOCircuit 75
CommunicationsConnections 78
Power-upSequence 79
4.Subsystems 83
SystemOverview 83
TransportChamber 84
TransportChamberLidAssembly 84
LidOperation 84
FrameAssembly 85
PowerDistribution 86
ACPowerDistribution 86
CircuitProtection 87
VacuumSystems 87
PumpingSystem 87
ChamberIsolationValves 89
VentingSystem 89
VacuumMeasurementSystem 90
Gauges 90
VacuumSystemControl 90
PneumaticSystem 90
GasSystem 91
WaterSystem 92
TransportChamberHeatingSystem 92
Copyright © 2023, Brooks Automation, Inc. 7

Marathon Express
Part Number: 605914 Rev. B
HeaterPowerSupply 93
Heaters 94
TemperatureController 95
ThermalBlankets 96
TransportChamberCoolingSystem 96
ElectricalSystem 97
DeviceNet 98
TopCooler 98
TopLignerVacuumAligner 98
IntegralWaferBufferStation 98
MaterialPresenceSensors 99
MagnaTran7orLEAPVacuumRobot 99
Control/DisplayModule 99
VacuumLoadLocks 100
SVL 100
VCE 101
5.OperationalInterfaces 102
HeaterPowerSupplyRemote 102
ACPowerDistribution 104
PowerConnections 105
ACPowerDistributionCable 106
6.Operation 107
TheoryofOperation 107
StationCoordinateSystem 108
MarathonExpressFramesofReference 110
Robot’sFrameofReference 111
Aligner’sFrameofReference 111
SystemOperationOverview 111
DeterminingMaterialLocations 114
PickandPlaceCommands 114
MaterialPresenceSensing 115
WaferMapping 115
RadialMotionSensors 115
ControlsandIndicators 115
ACPowerDistribution 115
HeaterPowerSupply 116
TemperatureController 118
EthernettoSerialGatewayModule 119
EthernetSwitchModule 120
SafetyInterlocks 121
LidOpen 122
EmergencyOff(EMO)Circuit 122
LidLifterOperation 123
RaisingtheLid 123
LoweringtheLid 124
Control/DisplayModule(CDM)Operation 125
8Copyright © 2023, Brooks Automation, Inc.

Brooks Automation
Part Number: 605914 Rev. B
DCPowerSupply 125
HeatingSystem 125
PowerSupply 126
Operation 127
StandardOperation 128
TemperatureController 128
WatlowTemperatureControllerOverview 129
HeatingModes 129
HeatingControl 130
WaterCoolingSystems 132
ChamberCoolingSystem 133
PumpCoolingSystem 133
WaferCoolingSystem 133
Pneumatic(AirDistribution)System 134
GasFacilitiesOperation 134
ControlsandIndicators 135
TopCoolerOperation 135
TopLignerVacuumAlignerOperation 135
VacuumSystemOperation 136
InitialConditions 136
ChamberBakeout 136
Start-up 136
ExchangeWafersintheLoadLocks 136
Shutdownfromhighvacuum 137
VentTransportChamber 137
VentLoadLocks 137
VentingtheChambers-ProfiledVent 137
Start-up 138
NormalRunning 139
7.CommandReference 140
8.SystemAlignment 141
Overview 141
ProcedureCategory 142
RequiredToolsandTestEquipment 142
AlignmentStrategy 142
AlignmentOverview 143
AlignmentProcess 144
LeveltheVCEPlatforms 146
LeveltheProcessModulesandDocktotheMarathonExpress 146
AdjusttheRobot’sEndEffectors 146
SystemPreparation 148
InitializingtheVacuumCassetteElevators 149
InitializingtheTopLigner 150
InitializingtheTopCooler 150
InitiatingtheCDM 150
OpeningtheChamberLid 150
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Marathon Express
Part Number: 605914 Rev. B
AlignmentProcedures 151
SettingtheOptionsfortheVacuumRobot 151
TeachtheRobottotheTopLignerVacuumAligner 151
ProcedureCategory 151
RequiredToolsandTestEquipment 152
ConfigurationandAlignmentStrategy 152
TeachtheRobottheAlignerStation 152
TeachtheRobotwiththeTopCooler 154
TeachtheRobottheCoolerStation 155
VacuumCassetteElevatorConfigurationandAlignment 156
ConfigurationandAlignmentStrategy 157
SettheRobottotheVCEWTP 158
AdjusttheLoadLockPlatform 161
SettheLoadLockTandRCoordinates 163
AligntheLoadLock’sSPS 165
TeachtheRobottheIntegralWaferBufferStation 165
Procedure 166
TeachtheRobottheProcessModules 167
Procedure 168
TeachingPan’B’onaDualEnd-EffectorArmSet 169
Fine-TuningtheStationAssignment 170
UsingtheAlignerasaTruePositionReference 170
UsingPhysicalLocationasaTruePositionReference 171
SystemAlignmentCheck-out 171
AlignmentProcedure 172
9.MaintenanceandRepair 174
PreventativeMaintenance 174
Parts 175
PadCleaningProcedure 175
MaintenanceProcedure 176
CleaningProcedure 177
MaintenanceProcedure 178
TopCoolerCoolChuckCleaning 179
MaintenanceProcedure 180
O-RingRemoval/Replacement/Cleaning 181
MaintenanceProcedure 182
VerifyingFlatnessofRobot’sEndEffector 183
MeasurementProcedure 184
AdjustingtheRobot’sEndEffector(s) 185
AdjustmentProcedure 186
RepairPhilosophy 187
RepairProcedures 187
WaferChange-OverProcedure 187
MaintenanceProcedure 189
Removing/ReplacingViewports 189
LidReplacement 192
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Brooks Automation
Part Number: 605914 Rev. B
LidLifterReplacement 194
VacuumRobot,Arm,orEndEffectorReplacement 196
PadRemoval/Replacement 199
HeaterCartridgeReplacement 200
TopCoolerPoppetOpen/CloseSensorAdjustment 202
TopLignerSupportPinReplacement 202
IsolationValveReplacement 202
10.Troubleshooting 203
InitialTroubleshooting 203
Interlocks 204
MaterialTransport 204
TopLignerVacuumAligner 204
Pressure/IndicatorSwitch 205
VacuumSystem 205
11.FieldReplaceableUnits 207
MarathonExpress 208
12.Appendices 218
AppendixA:ContactBrooksAutomationTechnicalSupport 219
AppendixB:FactoryDefaultSettings 220
DefaultRobotSettings 220
DefaultVCE6DriveSettings 220
DefaultTopLignerVacuumAlignerSettings 220
AppendixC:StationIdentification 221
AppendixD:DocumentAbbreviations 222
AppendixE:Consumables 223
AppendixF:PackingandShippingInstructions 224
PackingProcedure 226
AppendixG:MaterialSafetyInformation 229
Copyright © 2023, Brooks Automation, Inc. 11

1. Introduction Marathon Express
System Overview Part Number: 605914 Rev. B
1. Introduction
ThisIntroductionprovidesabriefoverviewoftheBrooksAutomationMarathonExpress™Cluster
ToolIntegrationPlatformhighlightingitsfeatures,components,operation,andspecifications.
Additionally,thechapterorganizationandadescriptionofeachchapter’scontentsispresented,
andnotationconventionsareexplained.
ThisMarathonExpressisintendedforusebyindustrialcustomersandshouldbeservicedonlyby
BrooksorBrookstrainedrepresentatives.Theservicemanualsandrelatedmaterialsareprovided
inEnglishatnochargeandareintendedforusebyexperiencedtechnicians.Itistheresponsibility
oftheusertoobtainandassuretheaccuracyofanyneededtranslationsofmanuals.Ifyourequire
assistancepleasecontactBrooksservicedepartment.Contactinformationcanbefoundat
www.brooks.com.
System Overview
TheBrooksAutomationMarathonExpress(MX)ClusterToolIntegrationPlatformtransfers100mm
to200mmwafersor100mmto150mmsquaresubstratesfromaVacuumCassetteElevatorLoad
LockintoaVacuumBackEndforaccesstomultipleProcessModulesformulti-stepprocessing
withoutleavingthevacuumenvironment.TheMXsystemprovidesSEMI-standardcompatible
processmoduleandmaterialcarrierinterfacesystems,withafullsetofoptions,tomeetfactory
interfacerequirements.
TheBrooksAutomationMXsystemisdesignedforuseinavacuumtransportclustertoolsystem.
ThefullMarathonExpresssystemincludestheclustertoolplatformthataccommodatesupto6
ProcessModules,twovacuumcassetteelevators,andavacuumrobot.Figure1-1showsa
MarathonExpressClusterToolwithallBrooksAutomationcomponents.
12 Copyright © 2023, Brooks Automation, Inc.

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B System Overview
Figure 1-1: Brooks Automation Marathon Express
TheSEMIS2andCEregulatorycompliantMarathonExpressClusterToolIntegrationPlatform
offersintegralsupportforallsystemstructures.TheintegratedframearchitectureoftheMXsystem
supportsstandardOEMSEMIrollupstyleprocessmoduleswithstandardinterfacingtoframeand
facetandMESCboltonstyleprocesschambers.
Options
lTopCooler(wafercoolmodule)
lVXAligner(vacuumaligner)
lCompleteslotvalve/processmodule/robothardwareinterlockingdependingonSystemIntegrationLevel
Subsystems
TheMarathonExpressismadeupofseveralfunctionalsubsystemsdesignedforeaseofuse,
maintenance,andrepair.Thesesubsystemsaremodularindesigntoalloweaseofmaintenance
andtominimizeMeanTimeToRepair(MTTR).TheindividualmodulesthatmakeuptheMX
systemaredescribedbrieflybelowandindetailin"Subsystems".
MarathonExpress™VacuumTransportSystem
TheBrooksAutomationMarathonExpressVacuumBackEndisamultifacetedClusterTool
IntegrationPlatformutilizingprovenBrookscomponentssuchastheVCEvacuumcassette
elevatorandMagnaTranLEAPvacuumrobot.
Copyright © 2023, Brooks Automation, Inc. 13

1. Introduction Marathon Express
System Overview Part Number: 605914 Rev. B
VCE6VacuumCassetteElevator
TheBrooksAutomationVCEallowsSEMIstandardH-barwafercassettestobeintroducedinto,
andremovedfrom,thehigh-vacuumenvironmentoftheTransportModulewithoutdisturbingthat
vacuumenvironment.TheVCEconsistsofawafercassetteelevatingmechanismhousedinan
aluminumvacuumloadlockchamber.Theelevatorraisesorlowersacassettesothatindividual
slotsarealignedwiththesystemMaterialTransportPlaneforwafertransportbythevacuumrobot.
SeetheVCEUserManualformoreinformationontheVCE.
Seetherobotmanualformoreinformationontherobot.
VacuumAligners
TThevacuumalignersacceptrandomly-orientedwafersandrotatesthemwhilescanningfor
fiduciallocationandeccentricity.Usingtheeccentricityinformationprovidedtherobotcanthenpick
upthewaferusinganoffsettocenterthewaferontheendeffector.
WaferCoolStation
TheBrooksAutomationTopCoolerisdesignedtocoolwafersinSEMI-standard100mmthrough
200mmsizespriortofurtherprocessingorreinsertionintoacassette.Thecoolingcycleinvolves
dischargingafixedquantityofgasintotheclosedcoolchamber,whichprovidesconductiveheat
transferbetweenthegasandachillplatetocoolthewafer.
Controls
TheMarathonExpressisavailablewithseveraldifferentcontrolconfigurations.Theseconfiguration
aredescribedbrieflybelowandindetailin"ElectricalSystem"onpage97.
Configuration
TheconfigurationoftheMarathonExpressisdeterminedbytheuserandisbasedontheBasic
ConfigurationneededandtheSystemIntegrationLevelrequired.
Basic Configuration
TheBasicConfigurationoftheMarathonExpressisdeterminedbythewafersizeandthenumberof
ProcessModules(PMs)accommodated.
System Integration Level
TheSystemIntegrationLevelisdeterminedbytheuser’srequirementsforsystemintegrationand
controlsandisavailableinLevelsasdescribedbelow.Thismanualprovidescompletecoveragefor
thehardwareusedinallintegrationlevelsoftheMarathonExpressandthesoftwareusedthrough
theLevel2.5integratedsystems.
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Brooks Automation 1. Introduction
Part Number: 605914 Rev. B Supplementary and Related Documentation
Level1-MarathonExpressComponents:
ThisisthebaseMarathonExpresssystemprovidingonlytheautomationcomponentsand
mechanicalintegration.ThissystemincludestheTransportChamber,Frame,andFullAutomation
ComponentSetasdetailedbelow.
lTransportchamberandframe
lVCEvacuumloadlockswithmanualdoor
lVacuummaterialhandlingrobotdrive,transferarm,andendeffector(s)
lSystemdocumentation
Level2-MarathonExpresswithVacuumSystem
ThislevelofintegrationprovidesaVacuumPumpingSystem,includingVentingandFacilities.This
systemincludesallcomponents,integration,andtestingforacompleteMechanicalsolution.Level
2includesthecompletecomponentsetfromLevel1andfacilitiesplumbingasdetailedbelow.
lAllLevel1items
lFacilitiessubsystems,includingnitrogen,air,andwater
lApplicationspecificVacuum/Ventsubsystemsincludingcommonroughingandventingsystem,hard
vacuumlines,vacuummanifolds,valves,andgauges
lHighVacuumpumps(ifrequired)
Level2.5-MarathonExpresswithElectricalIntegration
ThislevelofintegrationprovidescompleteElectricalIntegration,includingControlsWiringand
SystemPower.Thissystemincludesallcomponents,integration,andtestingforacomplete
Controlssolution.Level2.5providesacompletecomponentsetincludingallcablingandcomplete
PowerDistributionasdetailedbelow.
lAllLevel2items
lConnectorpanelwithinternalwiringandpowerdistribution
Supplementary and Related Documentation
ThisusermanualprovidesdocumentationforoperationandmaintenanceoftheBrooksAutomation
MarathonExpressClusterToolIntegrationPlatform.Whilethisdocumentcoversspecific
informationandadjustmentsfortheMarathonExpress,theremaybeinformationinothermanuals
whichaffectthesettingsoroperatingmodeoftheMXsystemandtheattachedcomponents.
TheMarathonExpressissettosystemspecificationsandacceptancetestedatBrooksAutomation.
BeforeadjustingorchangingsettingsonaMarathonExpress,consultthefollowingdocumentation:
lBrooksAutomationrobotmanuals
lBrooksAutomationVCEUserManual
lOEMComponentsManuals(suppliedwiththismanual)
lProcessModuleUserManual
lProcessModuleControllerUserManual
lTransportControllerUserManual

Copyright © 2023, Brooks Automation, Inc. 15

1. Introduction Marathon Express
Supplementary and Related Docu-
mentation Part Number: 605914 Rev. B
NOTE: Alldocumentscitedshouldbethelatestrevision.Thismanualisintendedto
provideinformationaboutawidevarietyofMarathonExpressconfigurationsand
options.Itmaycontainreferencestoitemsnotinstalledonaspecificsystem.

ThecommandsforcontrollingtherobotsandothercomponentsusedintheMarathonExpressare
definedintheirusermanuals.Thisusermanualmayreferthereadertothesemanualsforadditional
information.
Thismanualcontains,asaddendumsandattachments,customizeddocumentsforaspecificbuild
oftheMarathonExpress.Thesedocumentsareprovidedtoallowservicepersonneltoidentify
specificpartswithinthesystemandaidinmaintenanceandtroubleshooting.

Thismanualandalladdendumsandattachmentsarenotcontrolled.Changesmayhavebeenmadeoradditional
documentsordrawingsaddedtothesystemdocumentationatanytime.Toidentifythecurrentrevisionsorto
obtainacurrentsetofdrawingsanddocuments,contactBrooksAutomationCustomerSupport.

Manual Notation
Thismanualusesastandardnotationsystemtoprovideconsistentdescriptionsofallitemsand
functionsassociatedwithallBrooksAutomationdevices.Thesestandardsinclude;hardware
notation,softwarenotation,anddescriptivewarnings.Thesenotationstandardsidentifytaskstobe
performedbytheuserduringaservice,installation,oroperationprocedure,orasaspecificinputto
theMarathonExpress.
Inapplicationswhere“should”or“shall”isused,conformancetothisapplicationisrequired.Where
“may”,“suggested”,or“preferred”isused,conformanceisnotrequired.
16 Copyright © 2023, Brooks Automation, Inc.

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B Specifications
Specifications
TheBrooksAutomationMarathonExpressisahighreliabilityintegrationplatformsupportingupto6
ProcessModulesand2LoadLockModules.ThespecificationsfortheMarathonExpressandits
subsystemsaredetailedbelow.
NOTE: AllspecificationsareforthestandardMXsystemconfiguration,specifications
canvaryforcustomizedconfigurations.
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Operating Specifications
Specification Value
RangeofMotion
960.0mm(37.80in)nominalendeffectorextensionbeyondtoolat
centerofallprocessmodulefacets(towafercenter)
NOTE: ThesedimensionsareforstandardMXsystem
configurations,dimensionscanvaryforcustomized
configurations
MaximumNoiseLevel 55dB(A)
TransportPlane
900mmatVCEplatform(SEMIstandard)
1100mm(43.31in)perSEMIE21atProcessModuleside
(3.78mm(0.15in)aboveslotcenterline)
MaterialSizes(wafers)
100mm
25mm
150mm
200mmwithorwithoutnotchedfiducialperSEMIM1
MaterialSizes(substrates)
100mmsquare
125mmsquare
150mmsquare
MaterialWeight 400gmaximumwithBiSymmetrikarms
200gmaximumwithLeapfrogarms
MaterialThickness 6mmmaximumwithBiSymmetrikarms
3mmmaximumwithLeapfrogarms
MaterialTransparency 0to96%
VacuumChamberVolume(typicalvalues
shown,canvarybasedonconfiguration):
MX800:Approximately117.7liters(7,184in3)
MX700:Approximately117.1liters(7,150in3)
MX600:Approximately69.0liters(4,212in3)
VCE6:Approximately50.0liters(3,051in3)(each)
Table 1-1: Operating Specifications
Copyright © 2023, Brooks Automation, Inc. 17

1. Introduction Marathon Express
Specifications Part Number: 605914 Rev. B
Specification Value
BaseVacuum 5x10-8Torrwithcryo/turbopumpingsystem
5x10-7Torrwithturbopumpingsystem
LeakRate 1.0x10-8Torr-l/secHemax.
WorkingPressure -15psivacuum
+1psioverpressure
ReliefPressure 1-3psi
CassettemapPeriod 20seconds(typical)
LaserLight Class1Laser(usedinwafermappers)
WaferSensing Sensors:Polar-reflectivebeambreak,bottommount
Sensorradius:364.0mm(14.32in)
VacuumAlignerModules Alignmentmode:rotary
Alignmenttime:4.8sec(wafer)9-13.8sec(squaresubstrate)
WaferCoolerModule
ThermalTransferGas:Argon,Nitrogen(factory)optional
GasDeliveryPressure:20psimax
GasConsumption:2cc/cycleatregulatorpressure
IntegralWaferBufferStation Capacity:4wafersat5.5mm(0.22in)pitch
BufferStation Capacity:4wafersat6.0mm(0.236in)pitch
Volume:Approximately4.5liters(276in3)
SmallVolumeLock Mounting:Facetmountwithslotvalveandatmosphericdoor
Volume:Approximately12.0liters(732in3)
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Environmental Specifications
ISO14644-1ClassISO6orbettercleanroomambient.
Specification Value
Temperature
Operating:20°Cto30°C(68°Fto86°F)
Shipping:-25°Cto55°C(-13°Fto131°F),upto65°C(149°F)for24hrs.max
Storage:-25°Cto55°C(-13°Fto131°F),upto65°C(149°F)for24hrs.max
Humidity 30%to55%(relative,non-condensing)
Lighting
StandardlightingprovidedinthecleanroomenvironmentwheretheMarathonExpressis
installedissufficientforproperoperation.Maintenancemayrequireauser-suppliedservice
light(i.e.,flashlight).
Table 1-2: Environmental Specifications
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18 Copyright © 2023, Brooks Automation, Inc.

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B Specifications
Mechanical Specifications
AlldrawingswithinthismanualaregenericandmaynotreflectspecificbuildsoftheMarathonExpress.Toobtain
acompleteandcurrentsetofdrawingsanddocumentscontactBrooks’CustomerSupport.SeeContactUs.
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Specification Value
Dimensions
RefertoFigure1-2onpage24andTable1-7fortypicalphysicaldimensions,fortheactual
dimensionsofthespecificsystem,includingfootandseismictie-downlocationsrefertothe
MechanicalLayoutDrawingsuppliedwiththismanual.
Weight
RefertoTable1-7fortypicalsystemweights,fortheactualweightofthespecificsystem,
includingFloorLoadingandCenterofGravityrefertotheMechanicalLayoutDrawingsup-
pliedwiththismanual.
ExposedMaterials
(Atmosphere)
AnodizedAluminum,6061T6Aluminum,5080RAluminum,316StainlessSteel,AM350
StainlessSteel,ColdRolledSteel,BakedPowderCoatedEpoxy,7740Pyrex®,7056
Glass,Viton®,Lexan®
ExposedMaterials
(Vacuum)
6061T6Aluminum,5080RAluminum,316StainlessSteel,AM350StainlessSteel,Sintered
Nickel,ElectrolessNickelPlate,7740Pyrex,7056Glass,BK7Glass,Teflon®,Viton,
Kalrez®,TinnedCopperWire,Quartz(TopCooleroption)
CassetteType
100mm,125mm,150mm,and200mm
SEMIstandardcassettes
25or26wafercassetteconfigurations
VacuumPorts
AtVCEinterfacepanel
Asspecifiedbyuser
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AtMarathonExpressVacuumTransportSystem
ISO160PortforHighVacuumPump
ISO200PortforHighVacuumPump
KF50PortforVenting
KF40PortforRoughPump
KF25PortforMaterialSensor(xfacetnumber)
KF25PortforVacuumGauging(x2)
KF16PortforVacuumGauging(x2)
NitrogenPort
1/4inchVCRfittingatNitrogenFacilitiesConnection
Tosupportventingcapacity,aminimumofa3/8inchO.D.lineisrequiredwithareducerto
connecttothe1/4inchVCRfitting.
ArgonPort 1/4inchVCRfittingatTopCoolerFacilitiesConnection
PneumaticPort 10mmQuickConnect
Water 1/2inchODtubing,Swagelokinterface
Table 1-3: Mechanical Specifications
Copyright © 2023, Brooks Automation, Inc. 19

1. Introduction Marathon Express
Specifications Part Number: 605914 Rev. B
Specification Value
ExhaustPort 12mmQuickConnect
Drain 1/2inchODtubing,Swagelokinterface
GroundClearance Atnominalheight,0.4inchunderforktubes
LevelingProvision AdjustablefeettomeetWTP
-0.4/+1.0inchrange
RollingProvision 3casters,removable
LiftingProvision Built-inforktubes,one-sideaccess
Hold-downPro-
visions Usersuppliedandinstalledbrackets
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Electrical Specifications
OvervoltageCategory
Table1-4describeselectricalovervoltagecategories.BrooksAutomationhasdesignedthe
MarathonExpressasanOvervoltageCategoryIIdevice.
Category Description
CategoryI Signallevel(specialequipmentorpartsofequipment,telecommunications,etc.)withsmallertran-
sientovervoltagesthanOvervoltageCategoryII.
CategoryII Locallevel(appliances,portableequipment,etc.)withsmallertransientovervoltagesthanOver-
voltageCategoryIII.
CategoryIII Distributionlevel(fixedinstallation,buildingwiring,etc.)withsmallertransientovervoltagesthan
OvervoltageCategoryIV.
CategoryIV Primarysupplylevel(overheadlines,cablesystems,etc.).
Table 1-4: Overvoltage Category
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20 Copyright © 2023, Brooks Automation, Inc.