Brooks MARATHON LEAP AX User manual

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MARATHON LEAP AX
User Manual
Part Number 606712 Rev. A

MARATHON LEAP AX
Part Number: 606712 Rev. A
Brooks Automation, Inc.
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Informationprovidedwithinthisdocumentissubjecttochangewithoutnotice,andalthoughbelievedtobeaccurate,
BrooksAutomation,Inc.assumesnoresponsibilityforanyerrors,omissions,orinaccuracies.
ABF™,AcuLigner™,AdvanTag™,Align™,AutoTeach™,ATR™,AXM™,BasicBlue™,BiSymmetrik™,
CenterSmart™,CratetoOperate™,CrossingConnect™,DARTS™,Enerta™,e-RMA™,e-Spares™,e-
Volution™,Falcon™,FastRegen™,FIXLOAD™,FrogLeg™,IndependentTwinLinearExchange™,InLigner™,
Interface™,Isoport™,ITLX™,Jet™,JetEngine™,LEAP™,LowProfile™,M2Nano™,PASIV™,PowerPak™,
PerformanceBlue™,PlateAuditor™,PowerPak™,PowerTools™,PuroMaxx™,QuadraFly™,Radius™,
Radient™,RadientExpress™,Reliance™,RelianceATR™,RetroEase™,SCARA™,SmartPM™,SPOTLevel™,
Sprint™,Synetics™,TheNewPathwaytoProductivity™,TimeOptimizedTrajectory™,TimeOptimalTrajectory™,
TimeOptimizedPath™,TopCooler™,TopLigner™,UltimateBlue™,VAC-407™,VacuTran™,VersaPort™,and
WaferEngine™aretrademarksofBrooksAutomation,Inc.
AcuTran®,Asyst®,CrossingAutomation®,Fusion®,GOLDLink®,Guardian®,Helix®,Leapfrog®,MagnaTran®,
MapTrak®,Marathon®,Marathon2®,MarathonExpress®,Razor®,Spartan®,TrueBlue®,TurboPlus®,Vision®,
Zaris®,andtheBrookslogoareregisteredU.S.trademarksofBrooksAutomation,Inc.
Allothertrademarksarepropertiesoftheirrespectiveowners.
©2023BrooksAutomation,Inc.Allrightsreserved.Theinformationincludedinthismanualisproprietary
informationofBrooksAutomation,Inc.andisprovidedfortheuseofBrookscustomersonlyandcannotbeusedfor
distribution,reproduction,orsalewithouttheexpresswrittenpermissionofBrooksAutomation,Inc.
ThistechnologyissubjecttoUnitedStatesexportAdministrationRegulationsandauthorizedtothedestination
only;diversioncontrarytoU.S.lawisprohibited.
OriginalmanualprintedinEnglish.TranslationoftheoriginalmanualfromEnglish.
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2Copyright © 2023, Brooks Automation, Inc.

Brooks Automation
Part Number: 606712 Rev. A
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Corporate Headquarters
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ForTechnicalSupport:
Location Contact Number Website
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ContactTechnicalPublicationsdirectly:[email protected]
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AcceleratingInnovation
Copyright © 2023, Brooks Automation, Inc. 3

MARATHON LEAP AX
Part Number: 606712 Rev. A

Brooks Automation, Inc.
15ElizabethDrive
Chelmsford,MA
01824-2400
Tel:+1978-262-2400
Fax:+1978-262-2500
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4Copyright © 2023, Brooks Automation, Inc.

Brooks Automation
Part Number: 606712 Rev. A
Revision History
Revision ECO Date Action Author
A EC146978 7/20/2023 Initialrelease. K.Forscher
Copyright © 2023, Brooks Automation, Inc. 5

MARATHON LEAP AX
Part Number: 606712 Rev. A

Table of Contents
1.Safety 11
ExplanationofHazardsandAlerts 12
SafetyText 12
SafetyIcons 12
SignalWordsandColor 12
AlertExample 13
GeneralSafetyConsiderations 14
SafetyandIdentificationLabels 17
Interlocks 28
ShuttleMotionInterlock 28
CarrierDetectionInterlock 29
WaferSlide-outInterlock 29
DIOMotionInterlock 29
Lockout/Tagout 31
NitrogenPurgeInterlockTripRecovery 32
LocationofHazardousPoints 34
FireandExplosionHazards 35
AsphyxiationHazards 36
MechanicalHazards 37
ElectricalHazards 39
Grounding 39
SystemGroundingPoint 40
ErgonomicsHazards 41
TipHazard 41
TripHazard 42
EnvironmentalInformation 43
NoiseEmission 43
Vibration 43
RecyclingandHazardousMaterials 43
PersonalProtectiveEquipment(PPE) 43
EMOConsiderations 44
EMOActivation 44
SafetyPrecautions 44
EquipmentLockout/TagoutProcedure 45
HardwareSafetyInterlock 48
Lockout/Tagout 49
RegulatoryComplianceandDeclarationofIncorporation 50
SafetyDataSheets 51
2.Overview 52
SystemOverview 52
GeneralUsageOverview 53
N2PurgeOverview 54
UsingthisManual 55
6Copyright © 2023, Brooks Automation, Inc.

Brooks Automation
Part Number: 606712 Rev. A
ConceptsandTerminology 56
ProductIllustration 57
FrontIllustration 57
RearIllustration 58
RightSideIllustration 59
LeftSideIllustration 60
MARATHONLEAPLoadPorts 61
LoadPortFrontView 61
LoadPortRearView 62
Shuttle 63
FIMSDoor 66
WaferMapper(Optional) 68
WaferMapMotors(PartofWaferMapper) 68
DoorDriveMechanism 69
N2Purge 69
UserInterface 69
PlumbingArchitecture 70
N2Flow 71
FlowRateSpecs 71
3.SpecificationsandSiteRequirements 72
Specifications 72
UnitDimensions 72
SiteRequirements 72
SpaceRequirements 72
EnvironmentalRequirements 73
PowerSpecifications 74
ElectricalSystem 74
FacilitiesSpecifications 75
NetworkInterfaceConnections 76
StandardEthernetIPAddressandSerialGatewayPortAddresses 76
WaferEngineSpecifications 77
SystemSpecifications 77
EC-6Controller 78
Specifications 78
4.Installation 79
5.AlignmentandTeaching 80
Overview 80
MARATHONLEAPAXSystemAlignmentandTeaching 80
RequiredToolsandTestEquipment 81
AlignmentProcess 81
AdjusttheLoadPortModules(LPMs) 83
VerifytheLeveloftheLoadLocks/ProcessToolHandoffandCustomModules 83
AdjusttheEndEffector(s) 84
MountTie-DownBrackets 84
FinalCheckout 86
ProcedureCategory 86
Copyright © 2023, Brooks Automation, Inc. 7

MARATHON LEAP AX
Part Number: 606712 Rev. A
RequiredToolsandTestEquipment 86
CheckoutProcedure 86
EndEffectorLeveling-Validation 87
AlignerLeveling-Validation 87
TeachingStationsOverview 90
Scope 90
Prerequisites 90
RequiredTools 91
Preparation 91
TeachingLoadPortHandOffs 92
Prerequisites 92
RequiredTools 92
Preparation 92
TeachingtheLoadPort 92
PassiveEndEffector 96
FilmFrameEndEffector 97
300mmPassiveEdgeContact 98
TeachthePre-AlignerStationwithFixture 100
6.Operation 104
Overview 104
TheoryofOperation 105
OperationOverview 106
BlockDiagrams 108
StationNamingSystem 108
FrameofReference 109
SystemFrameofReference 109
WaferEngineFrameofReference 110
Start-Up 111
SafeShutdown 112
SafetyInterlocks 115
DoorInterlockCircuit 116
EmergencyOff(EMO)Circuit 116
SystemLockout/TagoutProcedure 117
RemoveSystemLockout/Tagout 119
WaferEngineLockout/TagoutProcedure 119
RemoveWaferEngineLockout/Tagout 120
FanFilterUnit(FFU) 120
Description 121
OperationalInterlocks 121
FacilitiesPanel 122
FacilitiesPanelFunctions 123
Connections,Controls,andIndicators 123
PowerDistributionUnit-PDU 125
PDUFunctions 125
LoadPortSwapConfigurationSetupProcedure 127
InternalLighting 130
8Copyright © 2023, Brooks Automation, Inc.

Brooks Automation
Part Number: 606712 Rev. A
Description 130
ConfiguringLEDs 131
LEDFrontPanel 131
VisionLED.Config.xmlConfigurationFileStructure 131
ConfigurableLEDsandNon-ConfigurableLEDs 132
ChangingtheVisionLED.Config.xmlConfigurationFile 133
SettingtheStateofUser-DefinedLEDs 137
ChangingLEDColors 138
VisionMLPLEDsFrontIndicatorBezel 138
LEDsConfigurationKit 139
ChangingColoredDisksandNameplates 140
OptionalIonizers 142
Description 142
OptionalOpticalCharacterReadingMounting 143
Description 143
OptionalLightTower 144
Description 144
TheoryofOperation 145
OptionalSEMIE84Interface 146
Description 146
TheoryofOperation 147
SafetyInterlocks 147
OptionalWaferMapping 147
Description 147
WaferEngineCameraMapperSetup 148
7.PreventativeMaintenance 159
PSP1RadialMotorsBeltTensioning 159
RequiredTools 159
Pre-Service 160
AccesstheMini-Environment 160
RemoveSlideBodyCover 161
VerifyBeltTension 162
AttachingtheBeltTensionMeasurementTool 163
AdjustingtheTension 164
RemoveBeltTensionMeasurementTool 165
Post-Service 165
PSP2-XPSDriveBeltTensioning 167
RequiredTools 167
Pre-Service 167
AdjusttheXPSDriveBeltTension 168
Post-Service 171
PSP3-PeriodicInspection/CleaningofAllwaferContactSurfaces 172
RequiredToolsandMaterials 172
Pre-Service 172
Clean/InspecttheWaferContactSurfaces 173
Post-Service 174
Copyright © 2023, Brooks Automation, Inc. 9

MARATHON LEAP AX
Part Number: 606712 Rev. A
PSP4-IonizerInspectionandCleaning 174
PSP5-FFUSensorCalibration 174
PSP6-LoadPortInspectionandCleaning 175
PSP7-LoadPortAPHDModuleInspection 177
PSP8-InternalWipeOut 179
8.Troubleshooting 181
SMARTFRUPartNumbers 182
SMARTFRUWarningMessageInstructions 182
ProblemIdentification 182
ProbableCauseTheory 182
TesttheTheory 182
PlanofAction 182
FullsystemFunctionalityVerifcation/PreventativeMeasures 182
Documentation 183
9.Appendices 184
AppendixA:LayoutDrawings 185
AppendixB:ContactBrooksAutomationTechnicalSupport 186
10 Copyright © 2023, Brooks Automation, Inc.

Brooks Automation 1. Safety
Part Number: 606712 Rev. A
1. Safety
Read the Safety Chapter
FailuretoreviewtheSafety chapterandfollowthesafetywarningscanresultindeathor
seriousinjury.
lAllpersonnelinvolvedwiththeoperationormaintenanceofthisproductmustread
andunderstandtheinformationinthissafetychapter.
lFollowallapplicablesafetycodesofthefacilityaswellasnationalandinternational
safetycodes.
lKnowthefacilitysafetyprocedures,safetyequipment,andcontactinformation.
lReadandunderstandeachprocedurebeforeperformingit.

Itistheresponsibilityofeachpersonworkingonthisproducttoknowtheapplicableregulatorysafetycodesas
wellasthefacilitysafetyprocedures,safetyequipment,andcontactinformation.

ThisproductisintendedforusebyindustrialcustomersandshouldbeservicedonlybyBrooksor
Brookstrainedrepresentatives.TheservicemanualsandrelatedmaterialsareprovidedinEnglish
atnochargeandareintendedforusebyexperiencedtechnicians.Itistheresponsibilityoftheuser
toobtainandassuretheaccuracyofanyneededtranslationsofmanuals.Ifyourequireassistance
pleasecontactBrooksservicedepartment.Contactinformationcanbefoundatwww.brooks.com.

Copyright © 2023, Brooks Automation, Inc. 11

1. Safety MARATHON LEAP AX
Explanation of Hazards and Alerts Part Number: 606712 Rev. A
Explanation of Hazards and Alerts
Thismanualandthisproductuseindustrystandardhazardalertstonotifytheuserofpersonalor
equipmentsafetyhazards.Hazardalertscontainsafetytext,safetyicons,signalwords,andcolor.
Safety Text
Hazardalerttextfollowsastandard,fixed-order,three-partformat.
lIdentifythehazard,
lStatetheconsequencesifthehazardisnotavoided,
lStatehowtoavoidthehazard.
Safety Icons
lHazardalertscontainsafetyiconsthatgraphicallyidentifythehazard.
lThesafetyiconsinthismanualconformtoISO3864andANSIZ535standards.
Signal Words and Color
Signalwordsinformofthelevelofhazard.
Dangerindicatesahazardoussituationwhich,ifnotavoided,will
result in death or serious injury.
Dangersignalwordiswhiteonaredbackgroundwithaniconic
exclamationpointinsideayellowtrianglewithblackborder.
Warningindicatesahazardoussituationwhich,ifnotavoided,could
result in death or serious injury.
Warningsignalwordisblackonanorangebackgroundwithaniconic
exclamationpointinsideayellowtrianglewithblackborder.
Cautionindicatesahazardoussituationorunsafepracticewhich,if
notavoided,may result in minor or moderate personal injury.

Cautionsignalwordisblackonayellowbackgroundwithaniconic
exclamationpointinsideayellowtrianglewithblackborder.
Indicatesasituationorunsafepracticewhich,ifnotavoided,may
result in equipment damage.
Noticesignalwordiswhiteonbluebackgroundwithnoicon.

12 Copyright © 2023, Brooks Automation, Inc.

Brooks Automation 1. Safety
Part Number: 606712 Rev. A Explanation of Hazards and Alerts
Alert Example
ThefollowingisanexampleofaWarning hazardalert.
Figure 1-1: Components of a Safety Alert
A HowtoAvoidtheHazard
B SourceofHazardandSeverity
C GeneralAlertIcon
D SignalWord
E TypeofHazard
F HazardSymbol(s)
Copyright © 2023, Brooks Automation, Inc. 13

1. Safety MARATHON LEAP AX
General Safety Considerations Part Number: 606712 Rev. A
General Safety Considerations
Unauthorized Service
Personalinjuryordamagetoequipmentmayresultifthisproductisoperatedorserviced
byunauthorizedpersonnel.
lOnlyqualifiedpersonnelareallowedtotransport,assemble,operate,ormaintain
theProduct.
lProperlyqualifiedpersonnelarethosewhohavereceivedcertifiedtrainingand
havetheproperqualificationsfortheirjobs.

Training and Unauthorized Service
Personalinjuryordamagetoequipmentmayresultifthisproductisoperatedorserviced
byuntrainedorunauthorizedpersonnel.
lOnlyqualifiedpersonnelwhohavereceivedcertifiedtrainingandhavetheproper
qualificationsfortheirjobsareallowedtotransport,assemble,operate,ormaintain
theproduct.

Personal Protective Equipment
Thisproductcontainsheavyobjectsthatmaycausepersonalinjury.
lUsesafetyshoesandheadprotectionwheninstallingormaintainingtheproduct.
lWearprotectiveeyewearwhensettinguportestingthesystem.

Seismic Restraint
Theuseofthisproductinanearthquakeproneenvironmentmaycauseequipment
damageorpersonalinjury.
Theuserisresponsiblefordeterminingwhethertheproductisusedinanearthquake
proneenvironmentandinstallingtheappropriateseismicrestraintsinaccordancewith
localregulations.
14 Copyright © 2023, Brooks Automation, Inc.

Brooks Automation 1. Safety
Part Number: 606712 Rev. A General Safety Considerations

Inappropriate Use
Useofthisproductinamannerorforpurposesotherthanforwhatitisintendedmay
causeequipmentdamageorpersonalinjury.
lOnlyusetheproductforitsintendedapplication.
lDonotmodifythisproductbeyonditsoriginaldesign.
lAlwaysoperatethisproductwiththecoversinplace.

Damaged Components
Theuseofthisproductwhencomponentsorcablesappeartobedamagedmaycause
equipmentmalfunctionorpersonalinjury.
lDonotusethisproductifcomponentsorcablesappeartobedamaged.
lPlacetheproductinalocationwhereitwillnotgetdamaged.
lRoutecablesandtubingsothattheydonotbecomedamagedanddonotpresenta
personalsafetyhazard.

Nitrogen Purge
Thisproductisincompletemachineryintendedtobeintegratedintoafinalproduct.The
useoftheNitrogenpurgefunctionofthisproductmayexposetheoperatororservice
techniciantoexcessNitrogenfromthepurgeoperation.ExcessiveNitrogen
concentrationsinbreathingaircancausepersonalinjuryorasphyxiation.

Theproductshouldbeusedinafacilitythathasadequateairflow.Itistheresponsibility
ofthefinalintegratortosafelycontroltheNitrogenexposuretooperatorsandservice
personnel.

Itistheresponsibilityofeachpersonworkingonthisproducttoknowtheapplicableregulatorysafetycodesas
wellasthefacilitysafetyprocedures,safetyequipment,andcontactinformation.

Copyright © 2023, Brooks Automation, Inc. 15

1. Safety MARATHON LEAP AX
General Safety Considerations Part Number: 606712 Rev. A
Pleasefollowallfacilityandlocalwiringregulationsbeforeoperatingorservicingtheproduct.

Whererequired,itistheresponsibilityoftheequipmentsuppliertostatethatProtectivePersonalEquipment
(PPE)shouldbeused.IfPPEisrequired,itshouldbeusedinaccordancewiththesupplier'sinstructions.
16 Copyright © 2023, Brooks Automation, Inc.

Brooks Automation 1. Safety
Part Number: 606712 Rev. A Safety and Identification Labels
Safety and Identification Labels
LabelsareusedtoalertpersonneltohazardsonorwithintheMARATHONLEAPAXandtoprovide
informationaboutthesystem.ThefollowingtableliststhelabelsthatareplacedontheMARATHON
LEAPAXsystem,thenameofthelabel,thepartnumber,quantity,andapproximatelocation.To
replacealostordamagedlabel,orderfromBrooksAutomationusingthelabelpartnumber.
Thefollowinggraphicshavealphabeticalcallouts.RefertoTable1-1forlabelnamesand
descriptions.
Copyright © 2023, Brooks Automation, Inc. 17

1. Safety MARATHON LEAP AX
Safety and Identification Labels Part Number: 606712 Rev. A
18 Copyright © 2023, Brooks Automation, Inc.

Brooks Automation 1. Safety
Part Number: 606712 Rev. A Safety and Identification Labels
*TopofX-axis
Copyright © 2023, Brooks Automation, Inc. 19

1. Safety MARATHON LEAP AX
Safety and Identification Labels Part Number: 606712 Rev. A
20 Copyright © 2023, Brooks Automation, Inc.