Edwards nRVi User manual

Rotary Vane Pumps
nRVi
INSTRUCTION MANUAL
A65901880_D Original instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2020. All rights reserved.
Associated publicaons
Publicaon tle Publicaon number
Vacuum pump and vacuum system safety P40040100
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Fomblin® is a registered trademark of Ausimont SpA.
Disclaimer
The content of this manual may change from me to me without noce. We accept
no liability for any errors that may appear in this manual nor do we make any
expressed or implied warranes regarding the content. As far as praccal we have
ensured that the products have been designed and constructed to be safe and without
risks when properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.

CE Declaration of Conformity
P20010133E
The following product
AXXX - YY - ZZZ
Pump type Variant Motor description
XXX YY ZZZ
656 = nRV4i 01 to 99 983 = 110/240V EMC 50/60Hz Single Phase
657 = nRV6i
658 = nRV10i
659 = nRV14i
Is in conformity with the relevant requirements of European CE legislation:
2006/42/EC
Machinery directive
2014/30/EU
Electromagnetic compatibility (EMC) directive
2014/34/EU
ATEX directive on use in potentially explosive atmospheres.
Intertek Testing and Certification Limited, 0359
Intertek House, Cleeve Road, Leatherhead, Surrey, KT22 7SB
ATEX marking:
II 3 G Ex h IIB T4 Gc
INTERNAL ATMOSPHERES ONLY
TCF 218
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 1012-2:1996 +A1:2009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory
use. General requirements
EN ISO 80079-36:2016
Explosive atmospheres – Part 36: Non-electrical equipment for explosive atmospheres.
Basic method and requirements
EN ISO 80079-37:2016
Explosive atmospheres - Part 37: Non-electrical equipment for explosive atmospheres --
Non-electrical type of protection constructional safety ''c'', control of ignition sources
''b'', liquid immersion ''k''
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements.
General requirements
Class A Emissions, Industrial Immunity
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK

This product has been manufactured under a quality management system certified to ISO 9001:2015
Documentation Officer:
Jelena Havelkova, Spielberk Office Centre, Holandska 10, Brno, 63900 Czech Republic,

: [phone],

: [email protected]
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 21st May 2020.
Petr Smerek – Engineering Manager
Scientific Vacuum Division
Lutin, CZ
Nina Buta – General Manager
Lutin, CZ

This product has been manufactured under a quality management system certified to ISO 9001:2015
Additional Legislation and Compliance Information
EU RoHS Directive: Material Exemption Information
This product is compliant with the following Annex III Exemptions
•6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
•6(c) Copper alloy containing up to 4% lead by weight
EU REACH Regulation Compliance
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration
This product does contain Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
2015 European Court of Justice ruling in case C-106/14.
•Lead (Pb) added to the Candidate List June 2018
As indicated by the applied RoHS exemption(s) above this substance is present in certain aluminium and brass
components.
ADDITIONAL INFORMATION
The products listed are also in scope for and comply with the requirements of the following:
2012/19/EU
Directive on waste electrical and electronic equipment (WEEE)
CSA-C22.2 No.77-2014
Motors with inherent overheating protection
CSA-C22.2 No.100-2014
Motors and generators
Product is certified to
CSA-C22.2 No.61010-1-12
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
Product conforms to
UL61010-1 3
rd
Edition
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
X O O O O O
铜接头
Brass connectors
X O O O O O
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

This page has been intentionally left blank.

Contents
1. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.1.1 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.1.2 ATEX direcve implicaons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2. General descripon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.2 Pump controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.2.1 Logic interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.3 Operaonal features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.3.1 Mode selector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.3.2 Gas ballast control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.1 Operang and storage condions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.2 Mechanical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.3 Pump performance data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.4 Manufacturing materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.4.1 Other materials of construcon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.5 Noise and vibraon data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.6 Lubricaon data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.7 Electrical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.8 Logic interface data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.9 Valve connector socket. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3.10 Indicator LEDs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.11 Serial protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
4. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
4.1 System design recommendaons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.2 Installaon safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
4.2.1 Gas purges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
4.2.2 Flammable and pyrophoric materials. . . . . . . . . . . . . . . . . . . . . . . . . 37
4.3 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.4 Locate the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
4.5 Fill the pump with oil. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
4.6 Connect the inlets and outlets. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
4.7 Electrical installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
4.7.1 Electrical installaon requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . 40
4.7.2 Connect the logic interface to control equipment. . . . . . . . . . . . . . . 40
4.7.3 Connect the electrical supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
4.8 Connect the parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . 41
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4.9 Connect the analogue speed control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
4.10 Connecon for serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . 44
4.10.1 Connect the serial interface to the customer control equipment. 44
4.10.2 Serial enable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.11 Connecon for mixed parallel and serial. . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.12 Connecon for mul-drop. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
4.13 Leak test the system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
5. Conguraon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
5.1 Congure the pump using serial commands. . . . . . . . . . . . . . . . . . . . . . . . . . 47
5.1.1 Message structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
5.1.2 Command and reply table denions. . . . . . . . . . . . . . . . . . . . . . . . . 48
5.1.3 Standby speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
5.1.4 Normal speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
5.1.5 Factory sengs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
5.1.6 Assigning a mul-drop address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
5.2 Congure the pump using a TIC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
6. Operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
6.1 ATEX direcve implicaons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
6.1.1 Flammable/pyrophoric materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
6.1.2 Gas purges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
6.2 Before starng the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
6.3 Operaon with the pump controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
6.3.1 Start the pump using the pump controller. . . . . . . . . . . . . . . . . . . . . 54
6.3.2 Using the pump controller to acvate standby mode. . . . . . . . . . . . 54
6.3.3 Stop the pump using the pump controller. . . . . . . . . . . . . . . . . . . . . 54
6.4 Operaon with parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . 54
6.4.1 Start the pump with parallel control. . . . . . . . . . . . . . . . . . . . . . . . . . 54
6.4.2 Run the pump at standby speed with parallel control. . . . . . . . . . . . 55
6.4.3 Stop the pump with parallel control. . . . . . . . . . . . . . . . . . . . . . . . . . 55
6.4.4 Parallel monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
Operaon with serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
6.4.1 Start the pump with serial control. . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
6.4.1 Run the pump at standby speed with serial control. . . . . . . . . . . . . 55
6.4.1 Stop the pump with serial control. . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
6.4.1 Monitor temperature readings with serial control. . . . . . . . . . . . . . 56
6.4.1 Monitor link parameter readings with serial control. . . . . . . . . . . . . 56
6.4.1 Monitor measured motor speed with serial control. . . . . . . . . . . . . 57
6.5 Mixed parallel and serial operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
6.6 Operaon with analogue speed control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
6.7 Operaon with mul-drop. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
6.7.1 Assigning a mul-drop address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
6.8 Auto run. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
Page 4

6.9 Operaon with a valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
6.10 Use of the mode selector and gas ballast control. . . . . . . . . . . . . . . . . . . . . 60
6.10.1 Mode selector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
6.10.2 Gas ballast control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
6.11 Achieving ulmate vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
6.12 Pumping condensable vapours. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
6.13 Unaended operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
6.14 Shut down the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
7. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
7.1 Maintenance safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
7.2 Maintenance plan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
7.2.1 Check the oil level. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
7.2.2 Replace the oil. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
7.2.3 Decontaminate the oil. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
7.2.4 Inspect and clean the inlet lter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
7.2.5 Inspect and clean the gas ballast control. . . . . . . . . . . . . . . . . . . . . . 67
7.2.6 Clean the oil level sight glass. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
7.2.7 Clean the motor fan cover and enclosure. . . . . . . . . . . . . . . . . . . . . . 69
7.2.8 Clean and overhaul the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
7.2.9 Fit new blades. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
7.2.10 Replace the pump controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
7.2.11 Electrical safety check. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
7.3 Service indicator codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
7.3.1 Replace the oil service indicator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
7.3.2 Replace the oil and clean and overhaul the pump service indicator 70
7.3.3 Replace the oil, clean and overhaul the pump and replace the blades.
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
7.3.4 Replace the pump controller service indicator. . . . . . . . . . . . . . . . . . 71
7.3.5 Reset the service indicator. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
8. Fault nding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
8.1 The controller LEDs do not ash for 0.5 seconds when the system is switched
on. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
8.2 The pump does not start aer a parallel start command is supplied. . . . . . 72
8.3 The pump does not start aer a serial start command is sent. . . . . . . . . . . . 72
8.4 The pump does not start aer a manual start is sent. . . . . . . . . . . . . . . . . . . 72
8.5 The pump does not start aer power is applied in auto run mode. . . . . . . . 72
8.6 The pump does not respond in mul-drop mode. . . . . . . . . . . . . . . . . . . . . . 72
8.7 No serial comms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
8.8 Fail signal or standby signal not working. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
8.9 Yellow service LED is ashing a repeated sequence. . . . . . . . . . . . . . . . . . . . 73
8.10 The red alarm LED is on. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
8.11 The red alarm LED is ashing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
8.12 The pump has failed to start or stop. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Page 5

8.13 The pump has failed to achieve the specied performance (has failed to
reach ulmate vacuum). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
8.14 The pump is noisy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
8.15 The pump surface temperature is above 100 °C. . . . . . . . . . . . . . . . . . . . . . 75
8.16 The vacuum is not fully maintained aer the pump is switched o. . . . . . 75
8.17 The pumping speed is poor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
8.18 There is an external oil leak. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
8.19 Any other problems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
8.20 Alarm indicator codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
8.21 Decoding system status words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
8.22 Decoding service status word. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
9. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
10. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
11. Spares and accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
11.1 Spares. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
11.2 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
11.2.1 Inlet catchpot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
11.2.2 Inlet dust lter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
11.2.3 Inlet desiccant trap. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
11.2.4 Inlet chemical trap. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.5 Foreline trap. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.6 Outlet mist lter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.7 Gas ballast adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.8 Gravity oil drain kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.9 Oil drain extension. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.10 Exhaust nozzle kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.11 Vibraon isolators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.12 Solenoid operated gas ballast valve. . . . . . . . . . . . . . . . . . . . . . . . 88
11.2.13 Solenoid operated pipeline valve. . . . . . . . . . . . . . . . . . . . . . . . . . 89
11.2.14 Electrical cables. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
11.2.15 Pump to controller cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
12. PFPE-prepared rotary vane pumps. . . . . . . . . . . . . . . . . . . . . . . . . . 90
12.1 Installaon of PFPE-prepared rotary vane pumps. . . . . . . . . . . . . . . . . . . . . 90
12.2 Operaon of PFPE-prepared rotary vane pumps. . . . . . . . . . . . . . . . . . . . . . 90
12.3 Maintenance of PFPE-prepared rotary vane pumps. . . . . . . . . . . . . . . . . . . 90
13. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
13.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . 92
Page 6

List of Figures
Figure 1: General view of the nRVi pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Figure 2: Pump controls and indicators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Figure 3: nRV4i performance graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 4: nRV6i performance graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 5: nRV10i performance graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 6: nRV14i performance graph. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 7: Valve connector showing pin numbers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 8: Logic interface connecons - parallel control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Figure 9: Logic interface connecons - analogue speed control. . . . . . . . . . . . . . . . . . . . . . 43
Figure 10: Analogue speed control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Figure 11: Logic interface connecons - RS232 serial control. . . . . . . . . . . . . . . . . . . . . . . . 44
Figure 12: Logic interface connecons - RS485 serial control. . . . . . . . . . . . . . . . . . . . . . . . 44
Figure 13: Logic interface connecons - mixed parallel and serial control. . . . . . . . . . . . . . 45
Figure 14: RS485 mul-drop connecons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Figure 15: Serial and parallel control owchart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Figure 16: Inlet lter assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Figure 17: Gas ballast control assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Figure 18: Oil level sight glass assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Figure 19: Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Page 7

1. Introducon
This manual provides installaon, operaon and maintenance instrucons for the RV3,
RV5, RV8 and RV12 Rotary Vane Pumps. The pump must be used as specied in this
manual.
1.1 Denion of Warnings and Cauons
NOTICE:
This manual meets our obligaon to provide you with informaon. For safe operaon
from the start, read these instrucons carefully before you install or commission the
equipment.
Read all the safety instrucons in this secon and the rest of this manual carefully
and make sure that you obey these instrucons. The equipment must only be
operated and maintained by trained personnel in the proper condion and as
described in this instrucon manual.
Obey local and state requirements and regulaons. If you have any quesons about
safety, operaon or maintenance of the device, please contact our nearest subsidiary.
Important safety informaon is highlighted as warning and cauon instrucons. Obey
these instrucons.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent symbols are
used according to the type of hazard.
CAUTION:
If you do not obey a cauon, there is a risk of minor injury, damage to equipment,
related equipment or process.
NOTICE:
Informaon about properes or instrucons for an acon which, if ignored, will
cause damage to the pump or the system.
We reserve the right to change the design and the stated data. The illustraons are not
binding.
Keep the instrucons for future use.
1.1.1 Safety symbols
The safety symbols on the products shows the areas where care and aenon is
necessary.
Page 8
A65901880_D - Introducon

The safety symbols that follow are used on the product or in the product
documentaon.
Warning/Cauon
A safety instrucon which must be followed.
Warning - Heavy object
Idenes a possible hazard from a heavy object.
Warning - Dangerous voltage
Idenes possible hazards from dangerous voltages.
Warning - Hot surfaces
Idenes a potenal hazard from a hot surface.
Warning - Use protecve equipment
Use appropriate protecve equipment.
Warning - Risk of explosion
An indicaon that there is a risk of explosion when you do the task.
1.1.2 ATEX direcve implicaons
This equipment is designed to meet the requirements of Group II Category 3 equipment
in accordance with Direcve 2014/34/EU of the European Parliament and the Council of
26th February 2014 on the approximaon of the laws of the Member States concerning
equipment and protecve systems intended for use in potenally explosive
atmospheres. (The ATEX Direcve).
The ATEX Category 3 applies in respect of potenal ignion sources internal to the
equipment. An ATEX Category has not been assigned in respect of potenal ignion
sources on the outside of the equipment as the equipment has not been designed for
use where there is an external potenally explosive atmosphere. There is no potenal
source of ignion within the pump during normal operaon but there may be potenal
sources of ignion under condions of predictable and rare malfuncon as dened in
the Direcve.
There is no potenal source of ignion within the pump during normal operaon but
there may be potenal sources of ignion under condions of predictable and rare
malfuncon as dened in the Direcve. Accordingly, although the pump is designed to
pump ammable materials and mixtures, operang procedures should ensure that
under all normal and reasonably predictable condions, these materials and mixtures
are not within explosive limits. Category 3 is considered appropriate for the avoidance of
ignion in the case of a rare malfuncon which allows ammable materials or mixtures
to pass through the pump while within their explosive limits.
Page 9
A65901880_D - Introducon

When ammable or pyrophoric materials are present within the equipment:
▪ Do not allow air to enter the equipment.
▪ Ensure that the system is leak ght.
For further informaon, please contact us: refer to our website
www.edwardsvacuum.com for details of your nearest company.
Page 10
A65901880_D - Introducon

2. General descripon
2.1 Overview
The nRVi rotary vane pump is a two-stage, oil-sealed, sliding vane vacuum pump. The
pumping mechanism is driven by a three phase motor with power taken from a single
phase supply via the pump controller.
Refer to Figure: General view of the pump on page 12 for item numbers in brackets in
the following descripons.
The pump has NW25 inlet and outlet ports, a gas ballast control and a mode selector.
When the pump is switched o, an inlet valve seals the inlet and prevents the suck back
of air and oil into the vacuum system.
All nRVi pump variants are ed with a liing bracket for use with suitable liing
equipment.
An oil pump delivers pressurised oil to the vacuum pumping mechanism in the pump.
The oil level and condion can be inspected in the oil box through a sight glass. Two oil
ller plugs and an oil drain plug are provided on the oil box.
The pump mechanism is driven directly by an electric driver and electric motor and
through a exible motor coupling. The motor is totally enclosed and is cooled by the
motor cooling fan which directs air along the motor ns. The pumps are cooled by an
addional fan aached to the motor coupling.
The pump is mounted on a base plate on rubber feet. Details of suitable vibraon
isolators and other accessories are provided in Accessories on page 86.
Refer to PFPE-prepared rotary vane pumps on page 90 for addional informaon if the
pump is PFPE-prepared.
Page 11
A65901880_D - General descripon

Figure 1 General view of the nRVi pump
1. Liing eye 2. NW25 inlet port
3. Gas ballast control 4. Oil ller plug
5. NW25 outlet port 6. Oil level sight glass
7. Oil drain plug 8. Rubber feet (4 o)
9. Mode selector 10. Motor fan cover
11. Pump controller 12. Correct direcon of rotaon
13. Electrical inlet connector 14. Pump controller user interface
1. Liing eye 2. NW25 inlet port
3. Gas ballast control 4. Oil ller plug
5. NW25 outlet port 6. Oil level sight glass
7. Oil drain plug 8. Rubber feet (4 o)
9. Mode selector 10. Motor fan cover
11. Pump controller 12. Correct direcon of rotaon
13. Electrical inlet connector 14. Pump controller user interface
2.2 Pump controller
The integral pump controller manages the supply of current to a three-phase electric
motor in accordance with operang condions. The controller monitors power and
temperature and will protect the pump in the event of operaon under sustained high
load or under fault condions.
The controller provides the user interface. The pump may be operated in these modes:
▪Manually, using the buons on the interface panel.
▪Remotely via serial communicaons or digital and analogue process control
(parallel), via the 15-way D-type logic interface connector. Refer to Logic interface
on page 14.
Page 12
A65901880_D - General descripon

Figure 2 Pump controls and indicators
1. Valve connector 2. Mains power connector
3. 15-way D-Type logic interface connector 4. USB port (service mode only)
5. Standby speed increase buon 6. Standby speed increase indicator
7. Standby speed decrease buon 8. Standby speed decrease indicator
9. Standby mode select buon
1. Valve connector 2. Mains power connector
3. 15-way D-Type logic interface connector 4. USB port (service mode only)
5. Standby speed increase buon 6. Standby speed increase indicator
7. Standby speed decrease buon 8. Standby speed decrease indicator
9. Standby mode select buon
Table 1
Descripons of pump controls and indicators
Item Number Descripon Details
1 Valve connector Connecon point for a valve.
2 Mains power connector The pump will remain o (factory default).
The power indicator will illuminate.
3 15-way D-Type logic interface
connector
Interface for all control signals that go in and
out of the pump.
4 USB port (service mode only) USB port for use in service mode only.
5 Standby speed increase
buon
The pump speed will increase. The increase
standby indicator will remain illuminated
when the pump reaches a maximum of 100%
of full speed.
6 Standby speed increase
indicator
The indicator will blink with every short push
of the standby speed increase buon. The
indicator will remain on when maximum
standby speed has been reached.
7 Standby speed decrease
buon
The pump speed will decrease. The decrease
standby indicator will remain illuminated
when the pump reaches a minimum of 67%
of full speed.
8 Standby speed decrease
indicator
The indicator will blink with every short push
of the standby speed decrease buon. The
indicator will remain on when minimum
standby speed has been reached.
9 Standby mode select buon When engaged, the standby indicator will
illuminate and the pump will run at the
standby speed seng. Factory default is 83%
of full speed.
10 Standby indicator Indicates that the standby mode has been
selected.
Page 13
A65901880_D - General descripon

Item Number Descripon Details
11 Start buon The pump will accelerate up to full running
speed. * The run indicator will ash while
accelerang. The run indicator will remain on
when the pump reaches full speed.
12 Run indicator Indicates that the pump is running.
13 Stop buon The pump will decelerate and stop running.
The run indicator will ash while
decelerang. The run indicator will go o
when the pump has stopped.
14 Power indicator Indicates that electrical mains supply to the
pump is on.
15 Service indicator Indicates that a service interval has been
reached.
16 Alarm indicator Indicates an alarm has been triggered.
17 Auto run indicator Indicates that the auto run mode has been
selected.
* The pump is set to 30 Hz rotaonal full speed (factory default)
2.2.1 Logic interface
The pump controller can be operated using a 15-way D-type logic interface connector.
There are two types signals on the logic interface.
The signal types are:
▪ Control inputs: these are switch-type and analogue signals that are used to control
the pump.
▪Status outputs: these outputs idenfy the status of the system.
The logic interface has been designed to support both serial and parallel control and
monitoring, operang through one connector. For serial control either RS232 or RS485
can be selected.
For control modes, refer to Table: Typical installaon system conguraons on page 34.
For more informaon about the logic interface, refer to Logic interface data on page 24.
2.3 Operaonal features
The pump has two controls: the mode selector and the gas ballast control. Six possible
combinaons of these controls allow for a wide choice of operang characteriscs to
opmise the performance of the pump for a given applicaon.
2.3.1 Mode selector
The pump has a mode selector which has two selectable posions to control the High
Vacuum and High Throughput.
▪The High Vacuum mode is specied by the symbol.
▪The High Throughput mode is specied by the symbol.
Page 14
A65901880_D - General descripon

With the mode selector set to High Vacuum mode, pressurised oil is fed to the low
vacuum stage only. In this mode of operaon, the pump provides the best possible
ulmate vacuum.
With the mode selector set to High Throughput mode, pressurised oil is fed to the high
vacuum and low vacuum stages. In this mode of operaon, the pump can sustain long
term high inlet pressures.
2.3.2 Gas ballast control
To pump high vapour loads, gas ballast is delivered into the pump to prevent
condensaon of the vapour carried by the pumped gases.
Air can be introduced to the low vacuum stage through the gas ballast valve.
Alternavely, an inert gas such as nitrogen can be supplied through a suitable external
valve.
The gas ballast control has three posions:
▪Closed (posion ‘0’)
▪Low ow (posion ‘I’)
▪ High ow (posion ‘II’)
Page 15
A65901880_D - General descripon

3. Technical data
3.1 Operang and storage condions
Table 2 Operang and storage condions
Parameter Value Units
Ambient operang temperature range*12 to + 40 °C
Ambient storage temperature range - 30 to + 70 °C
Normal surface temperature of the pump
body§
+ 50 to + 70 °C
Maximum operang humidity 90 % RH
Maximum operang altude ‡2000 m
Installaon category (BS5295) II -
Polluon degree (EN61010) 2 -
* Under cold start condions the smart drive accelerates the pump in a controlled way
and it may take up to 90 seconds to reach full speed.
§ At ulmate vacuum, with ambient temperature of + 20 °C.
‡ The pump can operate safely up to 3000 m, when operang above 2000 m contact us
for advice.
Note:
To comply with IEC/UL/CSA 61010 standards, the pump must be installed and used
indoors, and within the operang condions specied.
3.2 Mechanical data
Table 3 Mechanical data
Parameter nRV4i nRV6i nRV10i nRV14i Units
Dimensions Refer to Figure: Dimensions on page 17 mm
Maximum lt angle 10 degrees
Nominal rotaonal
speed
1800 rpm
Standby rotaonal
speed
Factory default set to 83% of nominal speed
Customer can set standby speed between 67% and
100% of nominal full speed
% rpm
Page 16
A65901880_D - Technical data