Edwards STP Series User manual

MT-86E-001-F
STP Series Turbomolecular Pumps
STP-iX457/iXU457 Series
Instruction Manual
Copyright 2017 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Original Instructions

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page i
PAGE
i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 3
1.3.1 Warranty period 3
1.3.2 Item warranted 3
1.3.3 Disclaimer 4
1.3.4 Spare parts 4
1.4 Precautions for safe operation of the STP pump 5
1.4.1 Usable gases 5
1.5 Maintenance and inspection precautions 6
1.6 Labels 6
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 11
2.1 STP pump specifications 11
2.2 Control unit 12
2.3 External appearance of the STP pump 13
2.4 Label affixing positions 17
3 INSTALLATION OF THE STP PUMP 19
3.1 Precautions before installation 19
3.1.1 Operating environment 19
3.1.2 Installation area 21
3.1.3 Bench 22
3.1.4 Insulation test 22
3.2 Unpacking and installation 23
3.3 Name and function of each part 27
3.3.1 Name and function of the pump 27
3.3.2 Name and function of the control unit 28
3.4 How to install the STP pump 30
3.4.1 Cleaning the seal 31
3.4.2 STP pump installation positions 32
3.4.3 Secure the STP pump 33
3.4.4 Legs for securing the base 37
3.4.5 Rotation stopper 38
3.5 External power supply unit 39
3.6 DC power cable 39
3.7 Vent valve 42
3.7.1 Connecting the vent valve 42
3.7.2 Vent valve output 44
3.8 Precautions of vacuum piping 45
3.8.1 Vacuum piping method 46
3.9 Introducing N2gas
(for the STP pump equipped with purge port) 46

STP-iX457/iXU457 Series Turbomolecular Pump
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PAGE
ii CONTENTS (CONTINUED)
Section Title Page
3.10 Attaching a baking heater 47
3.11 Cooling the STP pump 48
3.12 Air-cooling unit U1-86 49
3.12.1 Parts list 49
3.12.2 Installation procedure 49
3.12.3 Maintenance 50
3.13 Connecting to semiconductor equipment 51
3.13.1 Connecting to power 51
3.13.2 Emergency off circuit (EMO circuit) 51
4 OPERATION 53
4.1 Gas pumping, cooling and baking the STP pump 53
4.1.1 Gas pumping 53
4.1.2 How to introduce a purge gas 54
4.2 Baking the STP pump 54
4.3 Before starting the STP pump 55
4.3.1 Confirmation before starting 55
4.3.2 Confirmation of vacuum system 55
4.4 Powering ON 56
4.5 Pump operation 56
4.5.1 Input operation port setting 56
4.5.2 Starting/stopping the STP pump 56
4.6 How to start/stop the STP pump 57
4.6.1 Starting the STP pump after stopping 57
4.6.2 Starting the STP pump after a safety function operates 57
4.6.3 Powering OFF 57
4.7 LED 58
4.8 Parallel port input/output signal 59
4.8.1 Input signal pins 59
4.8.2 Input operation port setting 62
4.8.3 Second speed option 63
4.8.4 Output signal pins 64
5 SERIAL COMMUNICATION PROTOCOL 69
5.1 Introduction 69
5.2 Connection and setting up 70
5.2.1 Signal connection 70
5.2.2 Connecting the RS485 72
5.2.3 Communication parameter setting 73
5.2.4 Input operation port setting 73
5.2.5 Serial communication timeout setting 74
5.2.6 Recommended items about communication cable installation 75
5.3 Protocol specifications 78
5.3.1 General description 78
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 79

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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iii
CONTENTS (CONTINUED)
Section Title Page
5.3.3 Control command
(in the RS232/RS485 single point connection) 80
5.3.4 Query command
(in the RS232/RS485 single point connection) 81
5.3.5 Transmission data format 82
5.3.6 Frame control (checksum) 83
5.3.7 Error control 83
5.3.8 Transmission frame in the RS485 multi-point connection 83
5.3.9 Control command in the RS485 multi-point connection 85
5.3.10 Query command in the RS485 multi-point connection 86
5.3.11 Broadcasting command in the RS485 multi-point connection 87
5.3.12 Application note 88
5.4 Command specifications 92
5.4.1 Command list 92
5.4.2 ReadMeas 93
5.4.3 Command 93
5.4.4 ReadFailMess 94
5.4.5 ReadModFonct 98
5.4.6 ReadVersion 100
5.4.7 ReadCounters 101
5.4.8 ReadSetPoint 102
5.4.9 ReadMotorTemp 102
5.4.10 ReadStatus 103
5.4.11 ReadEvents 104
5.4.12 SetSpeedSetPoint 105
5.4.13 ReadSpeedSetPoint 106
5.4.14 ReadModFonctWithWarning 107
5.4.15 ReadMeasValue 110
5.4.16 ReadOptionFunc 112
5.4.17 SetOptionFunc 116
5.4.18 ReadCondition 119
5.4.19 ReadEventsWithTime 121
5.4.20 SetOptions 125
5.4.20.1 Second speed option setting 125
5.4.20.2 Second speed selection 126
5.4.21 ReadOptions 127
5.4.21.1 Second speed function setting 127
5.4.21.2 Second speed select 128
6 STP-LINK AND POWER SUPPLY UNIT 129
6.1 STP-Link 129
6.2 Power supply unit 130
7 SAFETY FUNCTIONS 131
7.1 Safety functions 131
7.1.1 Power Failure 131
7.1.2 Operation after a power recovery 132

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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iv
CONTENTS (CONTINUED)
Section Title Page
7.1.3 Abnormal state of magnetic bearing (Disturbance) 133
7.1.4 Excessive vibration (Disturbance) 133
7.1.5 Motor driver overload (DRV Overload) 133
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 133
7.1.7 Overheating inside the control unit (CNT Overheat) 133
7.1.8 Overspeed 134
7.2 "WARNING" function 134
7.2.1 "WARNING" function 134
7.3 Contents of WARNING function 135
7.3.1 First Damage limit 135
7.3.2 Second Damage Limit 135
7.3.3 Pump run time over 135
7.3.4 Pump Overload 136
7.3.5 Imbalance 136
7.3.6 Other Warning 136
7.4 WARNING function setting 137
7.5 Troubleshooting immediately after failure occurs 138
7.5.1 After power failure 138
7.5.2 After other abnormality/error 138
7.6 Troubleshooting 139
7.6.1 Indication of "STATUS" LED (red flash) 139
7.6.2 Indication of "STATUS" LED (green and red alternately) 145
7.6.3 No Indication of the "STATUS" LED (red) 145
8 MAINTENANCE AND INSPECTION 143
8.1 Maintenance and inspection 143
8.2 Cleaning 144
8.3 Inspecting the deposit 144
8.4 Maintenance 145
8.4.1 Recommended overhaul intervals 145
8.4.2 Standard replacement parts 145
8.4.3 Recommended maintenance intervals for main parts 146
8.5 Transporting for repair or overhaul 147
9 STORAGE AND DISPOSAL 153
9.1 Storage of the STP pump 153
9.2 Disposal 154
10 SERVICE, SPARES AND ACCESSORIES 151
10.1 Introduction 151
10.2 Service 151
10.3 Spares 151
10.4 Accessories 152

STP-iX457/iXU457 Series Turbomolecular Pump
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v
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 6
2 Hot surface warning label 6
3 Heavy product caution label 7
4 High voltage device caution label 7
5 Rotation instruction label 7
6 Cross sectional view of the STP pump 8
7 External appearance of STP-iX457 13
8 External appearance of STP-iX457C 14
9 External appearance of STP-iXU457 15
10 External appearance of STP-iXU457C 16
11 Label affixing positions 17
12 Space around the STP pump 21
13 Space around the STP pump
(with air-cooling unit [optional accessory]) 21
14 Example of lifting the STP pump 23
15 Example of lifting the STP pump (horizontal positioning) 24
16 Jack-up the STP pump 25
17 Control unit bottom face 25
18 STP pump with eyebolts 26
19 Configuration of the STP pump 27
20 Control unit 28
21 Installation of the STP pump to the vacuum equipment 30
22 STP pump installation positions 32
23 Positions of the outlet port on the horizontally
or slanted installed STP pump 32
24 Example of securing the STP pump
(when securing the inlet port with bolts) 34
25 Example of securing the STP pump
(when securing the inlet port flange with claw clamps) 35
26 Example of securing the STP pump
(when installing the damper in the inlet port flange) 36
27 Recommended leg for securing base 37
28 Screw holes for securing the base 37
29 Rotation stopper 38
30 DC power cable 41
31 Vent valve connection 42
32 Example of a control method
when introducing the atmosphere (in dashed line) 43
33 Height of purge port 46
34 Baking heater installation position 47
35 Air-cooling unit 48
36 Installation procedure for air-cooling unit U1-86 49
37 Pump operation method 56
38 Flash pattern of STATUS 58
39 X2 REMOTE connector 59
40 X2 REMOTE input signal pins (contact input) 61
41 X2 REMOTE Pin function matrix for input signal
(Type-A PROG-IN) 62
42 X2 REMOTE Pin function matrix for input signal
(Type-B PROG-IN) 62

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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ILLUSTRATIONS (CONTINUED)
Figure Title Page
43 X2 REMOTE output signal pins 66
44 X2 REMOTE output signal pin which changes
according to abnormality notification / warning notification 67
45 X2 REMOTE output signal pin which changes
according to rotation speed 67
46 Serial port 69
47 X2 connector (High density D-Sub15) 70
48 RS485 connections 72
49 Grounding example (Both ends grounding) 75
50 Grounding example (single point grounding) 75
51 Example of ring ferrite core installation 76
52 Example of cable installation in metallic duct 76
53 Example of differential signal waveform 77
54 PC to SIM communication 78
55 Block diagram of communication process example 88
56 Example of answer resending process 89
57 Example of response when the command is sent continuously 89
58 Example of command sending during answer data reply 89
59 Example of communication cycle process 90
60 Example of command sending process 91
61 Power supply unit iPD-240-24V 130

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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vii
TABLES
Table Title Page
1 Environmental requirements for installation 20
2 Eyebolt size 23
3 Pump functions 27
4 Control unit front panel functions 29
5 Tightening torque of bolt 33
6 Maximum torque predicted
and recommended securing bolt for inlet port flange 34
7 Number of claw clamps for flange size 35
8 Suitable parts for DC power cable 41
9 Number of claw clamps for flange size 41
10 X3 OPTION connector function setting 44
11 Vent valve operation setting 44
12 Starting/stopping the STP pump (X2 REMOTE) 56
13 Reset operation (X2 REMOTE) 57
14 X2 REMOTE input signal pins 60
15 Second speed function 63
16 X2 REMOTE output signal pins 64
17 X2 REMOTE output signal pins (continued) 65
18 Rated contacts for four photo relays 66
19 X2 pin position 70
20 Communication parameters 73
21 Input operation port 73
22 Serial communication time out setting 74
23 Transmission control characters 79
24 Pump operation commands 87
25 Command list 92
26 Pump operation commands 94
27 Error message values 96
28 Error message values (continued) 97
29 Pump operation mode 99
30 Remote mode 104
31 Warning value bit assign 108
32 Parameter setting value 114
33 Option function number and parameter list 125
34 Option function number and parameter list 127
35 Functions of STP-Link 129

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STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 1
INTRODUCTION
1
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards
Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). You must use the STP
pump as specified in this manual otherwise the protection provided by the equipment may be
impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the STP-iX457/iXU457 series Turbomolecular
Pump and the STP Pump Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Warning - Heavy object
This symbol denotes the risk of low back pain and fall.
Warning - Hot surface
This symbol denotes the risk of burns.

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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INTRODUCTION
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Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the display unit iDT-001. Note that the words "WARNING" and
"CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions
during the operation. They do not have the same meaning as the much more serious
symbols for "WARNING" and "CAUTION" used in the instruction manual.
1.2 Applied standards
The STP pump conforms to the following directives and standards:
1. Applied Directives
EC Machinery Directive
EC Low Voltage Directive
EC Electromagnetic Compatibility Directive
RoHS Directive *
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates only
to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this statement,
which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply to this vacuum
equipment, we recognize that component compliance is relevant to many of our customers.
2. Applied Standards
EN1012-2
EN61010-1
EN61326-1 (Class A)
EN61000-6-2
EN55011
EN50581
UL61010-1, 3rd Edition (Electrical Equipment for Measurement, Control, Laboratory Use)
SEMI S2-0715

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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INTRODUCTION
1
3. Electromagnetic compatibility
This product is a class A product according to EN61326, and a group 1, class A product
according to EN 55011.
This means that this product does not generate and/or use intentionally radio-frequency energy,
in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment
of material or inspection / analysis purpose and that it is suitable for use in all establishments
other than domestic and those directly connected to a low voltage power supply network which
supplies buildings used for domestic purposes.
This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
This product must not be used in residential areas because it may cause interference if used in
residential areas.
4. REACH Regulation
Some components in this product contain Lead (Pb) which is in the REACH SVHC Candidate
List.
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge.

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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INTRODUCTION
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1.3.3 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (particular gases, strong magnetic field and the radiation are added to the product).
7. Defect resulting from deposit.
8. Water cooling system defect resulting from water quality used.
9. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
10. Deterioration in the external because of use (discoloration, scratches and so forth).
11. Product damage occurred during transport or other factors not attributable to Edwards.
12. Product breakage or damage due to natural disasters, fire or other external factors.
13. Deterioration in the basic performance due to the use of the product beyond limits of the use.
14. Any direct, incidental or consequential damage resulting from the use of the product.
15. When continuously operated without overhaul after the WARNING indication (flashing in red)
on the "STATUS" LED of the control unit or the LCD ("WARNING" message) of the power
supply unit iPD-240-24V.
16. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
Touch down bearing.
Touch down bearing should be replaced at Edwards, contact Edwards.

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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INTRODUCTION
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1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
Gases including alkaline metals except Li gas.
Gases including Ga, Hg, In, or Sn.
HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine
system gases.
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
Warn of the danger of the gas with the warning label when the use gas is hazardous
chemical material.
WARNING
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
CAUTION
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
CAUTION
Introduce a dry N2gas (purge gas) to protect the inside of the STP pump when using reactive or
corrosive gas, gas including hydrogen. The use of these gases may result in product damage.

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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INTRODUCTION
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1.5 Maintenance and inspection precautions
Perform any maintenance or inspection of the STP pump under the condition that no power is
applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8,
"MAINTENANCE AND INSPECTION".
1.6 Labels
The following labels are affixed to the STP pump. Read the contents of the labels before operation.
1. STP pump installation warning label
This label describes installation of the STP pump. Install the STP pump according to the
precautions. Install the STP pump according to the precautions of Section 3, "INSTALLATION
OF THE STP PUMP".
Figure 1 - STP pump installation warning label
2. Hot surface warning label
This label instructs operators so as not to touch the hot surface of the baking heater.
The baking heater may lead to a considerable rise in temperatures outside of the STP pump.
(only with baking heater)
Figure 2 - Hot surface warning label

STP-iX457/iXU457 Series Turbomolecular Pump
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INTRODUCTION
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3. Heavy product caution label
This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of
Section 3.2, "Unpacking and installation" so as not to cause any accident during handling.
Figure 3 - Heavy product caution label
4. Prohibition of disassembly label
This label prohibits the decomposition of the control unit. Follow Section 8, “MAINTENANCE
AND INSPECTION” for maintenance and inspection.
Figure 4 - Prohibition of disassembly label
5. Rotational direction instruction label
This label describes the rotational direction of the STP pump. The STP pump rotates in this
direction.
Figure 5 - Rotation instruction label

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
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INTRODUCTION
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1.7 Operation principle of the STP pump
Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat panel,
solar battery.
The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The STP-iX457/iXU457 series pump is a magnetically-levitated turbomolecular pumps, each with the
following features:
1. Oil free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
(a) STP-iX457 series (b) STP-iXU457 series
1. Rotor blade 4. Radial electromagnet
7. Touch down bearing
2. Stator blade 5. Axial sensor 8.
Control unit
3. Radial sensor 6. Axial electromagnet
Figure 6 - Cross sectional view of the STP pump
1
2
4
6
7
3
5
8
7
5
3

STP-iX457/iXU457 Series Turbomolecular Pump
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INTRODUCTION
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1. Oil free
Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP
pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings.
2. Low vibration
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the
radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3)
and radial electromagnet (4). A pair of axial direction active magnetic bearings consists of axial
sensor (5) and axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is
supported without mechanical contact, it can rotate at low vibration.
3. High reliability
There is no periodic replacement of magnetic bearings unlike conventional turbomolecular pumps
using ball bearings because there is no friction. Taking into consideration a breakage of magnetic
bearings, touch down bearings (7) have been installed. They do not contact with the rotor during the
rated operation. The status of the rotor and magnetic bearing is continuously monitored via circuits
detecting rotor displacement, rotational speed and pump temperature. If an abnormality/error occurs,
the rotor will stop.
4. Compact size (Integrated control unit)
To save space for installation, the STP pump mounts the control unit (8) that includes the power
supply which converts the alternating input to direct current output. In addition, the following circuits
are integrated; the magnetic bearing control circuit, the motor drive circuit which drives rotor blade,
the supervisor circuit which monitors pump operation status and operates the pump in remote
operation mode.

STP-iX457/iXU457 Series Turbomolecular Pump
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INTRODUCTION
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1.8 STP pump specification
External appearance, installation and unpacking method differ depending to the STP pump
specification. Refer to the followings:
Standard type
(Without anticorrosion
treatment type)
Corrosion resistant type
STP-iX457/iXU457 STP-iX457C/iXU457C
Naming convention:
"C" following a pump model name indicates a corrosion resistant*1 type.
(e.g. STP-iX457C)
"U" following a pump model name ”iX” indicates an low vibration specification with a built-in
damper. (e.g. STP-iXU457)
*1 Corrosion resistant: STP pump with anti-corrosive treatment.
The power supply unit iPS-240-24V is available as an optional accessory with the STP-iX457/iXU457
series. The power supply unit iPS-240-24V operates the STP pump, confirms the pump status and
sets various settings. (refer to Section 6.2 , the Instruction Manual of the "Display Unit iDT-001" and
“Power supply unit iPS-240-24V”.)
Power supply unit iPS-240-24V