Edwards T-Station 300 User manual

T-Staon 300
INSTRUCTION MANUAL
D39595880_A Original instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2020. All rights reserved.
Associated publicaons
Publicaon tle Publicaon number
Diaphragm Pump - XDD1 A74602885
Rotary Vane Pump - E2M0.7 / E2M1.5 A37132880
nEXT Turbomolecular Pumps nEXT240, nEXT300 and
nEXT400
B80000880
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Disclaimer
The content of this manual may change from me to me without noce. We accept
no liability for any errors that may appear in this manual nor do we make any
expressed or implied warranes regarding the content. As far as praccal we have
ensured that the products have been designed and constructed to be safe and without
risks when properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.

P20010421A
CE Declaration of Conformity
Declare that the following product
T-station 300
TS300 – XX – 00Y
Where:
XX - Backing pump option. W = Wet, D = Dry, number = pump type
Y - Electrical supply, Inlet flange option.
Is in conformity with the relevant requirements of European CE legislation:
2006/42/EC
Machinery directive
Note: The safety objectives of the Low Voltage Directive 2014/35/
EU were complied with in accordance
Appendix 1 No. 1.5.1 of this directive.
2014/30/EU
Electromagnetic compatibility (EMC) directive
Class A Emissions, Industrial Immunity
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN ISO 12100:2010
Safety of machinery. General principles for design. Risk assessment and risk reduction
EN 1012-2:1996 +A1:2009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory
use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements. General
requirements
Documentation Officer:
Jelena Havelkova, Spielberk Office Centre, Holandska 10, Brno, 63900 Czech Republic,
Tel: [phone], Email: [e-mail]
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 2020-10-14
This declaration becomes invalid if modifications are made to the product.
Petr Smerek – Engineering Manager
Scientific Division
Lutin, CZ
Nina Buta – General Manager
Lutin, CZ
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK

This product has been manufactured under a quality management system certified to ISO 9001:2015
ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION
EU EMC Directive: Class A/B Industrial equipment
Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to
radio reception in such environments.
EU RoHS Directive: Material Exemption Information
This product is compliant with the following Exemptions
Annex III:
•6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
•6(c) Copper alloy containing up to 4% lead by weight
EU REACH Regulation Compliance
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration
This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
2015 European Court of Justice ruling in case C-106/14.
•Lead (Pb)
This substance is present in certain aluminium and brass components.
Additional Applicable Requirements
The product is in scope for and complies with the requirements of the following:
2012/19/EU
Directive on waste electrical and electronic equipment (WEEE)
材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
X O O O O O
铜管管件
Brass pipe fitting
X O O O O O
铜接头
Brass connectors
X O O O O O
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2. General descripon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.1 Operang and storage condions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.2 Mechanical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.3 Pump performance data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.4 Pumped media. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
3.5 Venng gas specicaon and vent control data. . . . . . . . . . . . . . . . . . . . . . . 14
3.6 Materials exposed to gases pumped. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.7 Electrical connecons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.8 Electrical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4.1 Installaon safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4.2 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4.3 Locate the pumping system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.4 Bench top xing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.4.1 Bench top xing with straps. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.4.2 Bench top xing with screws. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.5 Fill the pump with oil. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.6 Connect to the vacuum system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.7 Connect to the exhaust extracon system. . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.8 Connect the electrical supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
4.9 Congure the pumping system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
4.9.1 Turbo pump delay. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
4.9.2 Connect a vacuum gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
5. Commission the system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
5.1 Installaon checklist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
5.2 Test the system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6. Operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
6.1 Control panel descripon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
6.2 Menu structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
6.2.1 Turbo screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
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6.2.2 Gauge screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.2.3 Vent valve screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.2.4 Turbo setpoint screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
6.2.5 Calibrate gauge screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
6.2.6 Units screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
6.3 Gas ballast control (E2M1.5). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
6.4 Electrical supply failure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
7. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
7.1 Maintenance safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
7.2 Maintenance plan. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
7.3 Inspect the hoses, pipelines and connecons. . . . . . . . . . . . . . . . . . . . . . . . . 35
7.4 Factory default sengs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
8. Fault nding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
8.1 Error numbers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
9. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
10. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
11. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
11.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . 40
12. Spares. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
13. Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
13.1 TAV vent valve and vent port adaptor (for nEXT300 turbo pump). . . . . . . . 43
13.2 Outlet mist lter(for E2M1.5 rotary vacuum pump). . . . . . . . . . . . . . . . . . . 43
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List of Figures
Figure 1: General view of the pumping system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Figure 2: Dimensions (T-Staon with E2M1.5 backing pump opon). . . . . . . . . . . . . . . . . . 11
Figure 3: Dimensions (T-Staon with XDD1 backing pump opon). . . . . . . . . . . . . . . . . . . 12
Figure 4: Max allowed rate of pressure rise during venng: pressure against me (pump
inially at full speed). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Figure 5: Pin connecons for 15-way sub-miniature 'D' type socket. . . . . . . . . . . . . . . . . . 16
Figure 6: Pin connecons for an 8-way RJ45. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Figure 7: Bench top xing with straps. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 8: Turbomolecular pump start delay with XDD1 diaphragm pump. . . . . . . . . . . . . . 23
Figure 9: Menu structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Figure 10: Turbo screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 11: Gauge screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Figure 12: Vent valve screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Figure 13: Turbo setpoint screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Figure 14: Turbo setpoint number entry mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Figure 15: Calibrate gauge screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Figure 16: Units screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
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1. Safety and compliance
1.1 Denion of Warnings and Cauons
NOTICE:
For safe operaon from the start, read these instrucons carefully before you install
or commission the equipment and keep them safe for future use.
Read all the safety instrucons in this secon and the rest of this manual carefully
and make sure that you obey these instrucons. The equipment must only be
operated and maintained by trained personnel in the proper condion and as
described in this instrucon manual.
Obey local and state requirements and regulaons. If you have any quesons about
safety, operaon or maintenance of the device, please contact our nearest subsidiary.
Important safety informaon is highlighted as warning and cauon instrucons. Obey
these instrucons.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent symbols are
used according to the type of hazard.
CAUTION:
If you do not obey a cauon, there is a risk of minor injury, damage to equipment,
related equipment or process.
NOTICE:
Informaon about properes or instrucons for an acon which, if ignored, will
cause damage to the pump or the system.
We reserve the right to change the design and the stated data. The illustraons are not
binding.
Keep the instrucons for future use.
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D39595880_A - Safety and compliance

1.2 Safety symbols
The safety symbols on the products shows the areas where care and aenon is
necessary.
The safety symbols that follow are used on the product or in the product
documentaon.
Warning/Cauon
An appropriate safety instrucon must be followed or cauon to a po-
tenal hazard exists.
Warning - Dangerous voltage
Idenes possible hazards from dangerous voltages.
Warning - Heavy object
Idenes a possible hazard from a heavy object.
Warning - Hot surfaces
Idenes a potenal hazard from a hot surface.
Warning - Moving parts present
Idenes parts that move. You must let the parts that turn stop before
you remove the electrical power.
Warning - Risk of explosion
There is a risk of explosion when you do the task.
Warning - Use protecve equipment
Use appropriate protecve equipment for the task.
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D39595880_A - Safety and compliance

2. General descripon
For the general descripon of the major components used on the T-Staon 300, refer to
the appropriate instrucon manual.
Product Publicaon number
Diaphragm pump - XDD1 A74602885
Rotary vane pumps - E2M0.7 or E2M1.5 A37132880
Turbomolecular pumps - nEXT300 B80000880
2.1 Overview
The T-Staon 300 is a small, compact and fully automac pumping system which is
suitable for a wide range of vacuum applicaons.
The system can be supplied with either an XDD1 oil-free diaphragm pump or an E2M1.5
rotary vane pump. Both system variants use a nEXT300 turbomolecular pump.
The system is controlled by an easy to use touch pad control module. A single gauge
input included can be connected to a range of our acve gauges allowing for pressure
measurement and/or control management of the turbomolecular pump.
The compact size of the T-Staon 300 is ideal for use on bench tops or suitable mobile
plaorms. The open system conguraon allows easy maintenance of the main pump
components.
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D39595880_A - General descripon

Figure 1 General view of the pumping system
A. Front view (T-Staon with E2M1.5
backing pump opon)
B. Front view (T-Staon with XDD1 backing
pump opon)
A. Front view (T-Staon with E2M1.5
backing pump opon)
B. Front view (T-Staon with XDD1 backing
pump opon)
1. Turbomolecular pump connector 2. Mains input
3. E2M1.5 gas ballast control 4. T-Staon xing points for bench top
mounng
5. T-Staon control unit 6. Backing pump mains connector
7. Backing pump 8. Turbomolecular pump inlet
1. Turbomolecular pump connector 2. Mains input
3. E2M1.5 gas ballast control 4. T-Staon xing points for bench top
mounng
5. T-Staon control unit 6. Backing pump mains connector
7. Backing pump 8. Turbomolecular pump inlet
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D39595880_A - General descripon

3. Technical data
Note:
The operang, storage condions and performance of the pumping system may depend
on the type of backing pump used. Refer to the technical data in the appropriate
supplementary publicaons as listed in General descripon on page 8.
3.1 Operang and storage condions
Table 1 Operang and storage condions
Parameter Value Units
Ambient operang temperature range 12 to +35 °C
Ambient storage temperature range -10 to +60 °C
Maximum operang humidity maximum 90
condensing at 40 % RH and °C
Maximum operang altude 2000 maximum m
Sound level
Declared dual number noise emission val-
ues in accordance with ISO4871
56 ± 3 dB(A)
Polluon degree (EN61010) 2 -
Maximum outlet pressure
▪ XDD1 pump
▪ E2M1.5 pump
1.1 (1.1 x 105)
1.5 (1.5 x 105)bar absolute (Pa)
Maximum system throughput (N2) 65 sccm
System leak ghtness <1x10-6 mbar l s-1
3.2 Mechanical data
Table 2 Mechanical data
Parameter Data
Dimensions Refer to Figure: Dimensions
Degree of protecon (to IEC34-5:1981) IP20
Mass
▪ XDD1 and nEXT ISO100 combinaon 21 kg
▪ XDD1 and nEXT CF100 combinaon 24 kg
▪ E2M1.5 and nEXT ISO100 combinaon 26 kg
▪ E2M1.5 and CF100 combinaon 29 kg
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D39595880_A - Technical data

Figure 2 Dimensions (T-Staon with E2M1.5 backing pump opon)
All measurements indicated are shown in mm (inches)
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D39595880_A - Technical data

Figure 3 Dimensions (T-Staon with XDD1 backing pump opon)
All measurements indicated are shown in mm (inches)
3.3 Pump performance data
Table 3
Pump performance data - nEXT300
Parameter nEXT300D
ISO100
nEXT300D
CF100
Inlet pumping speed:
▪ Nitrogen 300 ls-1 300 ls-1
▪ Helium 340 ls-1 340 ls-1
▪ Hydrogen 280 ls-1 280 ls-1
Inlet compression rao:
▪ Nitrogen > 1 x 1011 > 1 x 1011
▪ Helium 1 x 1061 x 106
▪ Hydrogen 5 x 1045 x 104
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D39595880_A - Technical data

Parameter nEXT300D
ISO100
nEXT300D
CF100
Ulmate pressure* < 6 x 10-8 mbar < 5 x 10-10 mbar
* Ulmate pressure 48 hours aer bakeout for CF version and without bakeout for ISO
version with 2-stage rotary vane backing pump.
3.4 Pumped media
WARNING: DANGEROUS GASES
Risk of injury or damage to equipment. Vent dangerous gases and gas mixtures safely.
Do not expose people to these gases. If pumping hazardous gases or vapours,
observe the safety recommendaons of the supplier of the gas/vapour.
WARNING: RISK OF EXPLOSION
Risk of injury or damage to equipment. Do not use the pump to pump pyrophoric or
explosive gas mixtures as it is not suitable for this purpose. The pump and its
connecons are not designed to contain an explosion.
WARNING:
Risk of injury or death of people. Do not expose any part of the human body to the
vacuum.
CAUTION: CONDENSABLE MEDIA
Risk of damage to equipment. Do not use the pump to pump parculates or
condensable media. Deposion may occur within the pump which will degrade pump
performance and reduce the pump life.
CAUTION: FAILURE OF PUMP
Risk of damage to equipment. Do not use the pump to pump gases containing more
than 20% oxygen. This will cause the lubricant to polymerise and the pump to fail
prematurely.
The turbo pump is designed to pump the following residual gases normally used in high
vacuum systems:
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▪ Air
▪ Carbon monoxide
▪ Neon
▪ Ethane
▪ Methane
▪ Nitrogen
▪ Krypton
▪ Argon
▪ Propane
▪ Carbon dioxide
▪ Helium
▪ Hydrogen
▪ Butane
The pump can be used to pump oxygen and water vapour, subject to the following
condions:
▪ Oxygen - When the pump is purged by an inert gas, oxygen can be pumped at
concentraons above 20% by volume. Refer to the nEXT pump instrucon manual
(B80000880) for purge gas specicaon. However, if the pump is not purged, the
oxygen concentraon must be less than 20% by volume.
▪ Water vapour - Ensure that vapour does not condense inside the pump.
To pump a gas not in the list above, contact the supplier for advice. Failure to contact the
supplier may invalidate the warranty on the pump. The pump is not suitable for pumping
aggressive or corrosive gases.
Note:
Concentraons of gases may be modied by the compression of the pump.
3.5 Venng gas specicaon and vent control data
Although the pump may be vented to atmosphere, high relave humidity of the air may
greatly increase the subsequent pump down me. To reduce pump down mes the
pump should be vented with dry, clean gases.
Refer to the nEXT pump instrucon manual (B80000880) for the vent valve connecon.
Refer to Vent valve screen on page 28 for conguring the venng opons.
Table 4 Vent gas specicaon and vent control
Vent gas specicaon and control Reference data
Vent gas Dry air, nitrogen, argon or other inert
gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of parculates 1 μm
Maximum concentraon of oil 0.1 parts per million
Recommended me for rotaonal speed to
reach 50% > 15 seconds
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Vent gas specicaon and control Reference data
Maximum allowed rate of pressure rise
Refer to Figure: Maximum allowed
rate of pressure rise during venng:
pressure against me (pump inially
at full speed)
Maximum allowable vent gas supply pressure 1 bar (gauge), 14.5 psig, 2 x 105 Pa
Figure 4 Max allowed rate of pressure rise during venng: pressure against me (pump inially at
full speed)
3.6 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped:
▪ aluminium alloys
▪ stainless steels
▪uoroelastomer and nitrile O-rings
▪ hydrocarbon lubricant
▪ felt
▪ rare earth magnets
▪ silicon nitride
▪ carbon bre reinforced epoxy resin
▪re retardant polypropylene
▪ polyamide
▪ PVC
3.7 Electrical connecons
Table 5
Electrical connecons
Parameter Value
Electrical supply
▪ Inlet plug type IEC60320
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Parameter Value
▪ Integral fuse rang 10 A Type T, 20 mm
Backing pump
▪ Outlet socket type IEC60320
Turbomolecular pump
▪ Connector type 15-way sub-miniature 'D' type socket
▪ Power supply 24 V d.c. nominal
▪ Maximum power rang 4 W
Acve gauge
▪ Connector type RJ45 8-way
▪ Power supply 24 V d.c. nominal
▪ Maximum power rang 4 W
Figure 5 Pin connecons for 15-way sub-miniature 'D' type socket
Table 6 Turbo pump connector pin-out
Pin Funcon
1 Power supply posive
2 Signal common
3 Start signal output
4 RS232 Tx
5 Serial enable output
6 Power supply posive
7 RS232 Rx
8 Power supply common
9 Speed signal input
10 Screen
11 Power supply posive
12 Screen
13 Power supply common
14 Power supply common
15 Normal signal input
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Figure 6 Pin connecons for an 8-way RJ45
Table 7 Acve gauge connector pin-out
Pin Funcon
1 Power supply posive
2 Power supply common
3 Signal input
4Idencaon
5 Signal common
6 Control line 1
7 Control line 2
8 Not connected
3.8 Electrical data
If the pumping system uses an E2M1.5, the motor start up current is drawn for less than
one second, so slow-blow fuses must be used to prevent unnecessary fuse failure when
the pump starts. If using the pump at temperatures lower than 12 °C (53.6 °F), the start
up current will be drawn for longer, this may cause the motor thermal overload device to
open.
Table 8 Electrical data
Supply voltage
50/60 Hz
Current (A) Power (W)
Full load Start
XDD1 / nEXT300
100 3.5 - 350
120 2.9 - 350
200 1.75 - 350
230 1.52 - 350
E2M1.5 / nEXT300
100 5.1 13.6 510
120 4.25 12.0 510
200 2.55 6.4 510
230 2.22 5.7 510
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4. Installaon
4.1 Installaon safety
WARNING: INSTALLATION SAFETY
Risk of injury or damage to equipment. Follow the safety instrucons and take note
of all appropriate precauons.
▪ When referring to a manual supplied as a Supplementary Publicaon, all of the
WARNING and CAUTION instrucons in the manual must be obeyed.
▪ A suitably trained and supervised technician must install the pumping system.
▪ Check that all the required parts are available and of the correct type before
commencing work.
▪ Ensure that the installaon technician is familiar with the safety procedures which
relate to the products pumped.
▪ Wear the appropriate safety clothing when coming into contact with contaminated
components.
▪ Isolate the other components in the system from the electrical supply so that they
cannot be operated accidentally.
▪ Do not reuse O-rings and co-seals if they are damaged.
▪ Dispose of components, grease and oil safely (refer to Disposal on page 39).
▪ Take care to protect sealing faces from damage.
▪ Leak tesng the system aer installaon is complete to ensure opmum vacuum
performance is recommended.
4.2 Unpack and inspect
1. Remove the outer cover and all packing materials. Remove the protecve covers
from the inlet and outlet ports and inspect the system for any damage.
2. If the pumping system is damaged, nofy the supplier and the carrier in wring
within three days, state the item number of the pumping system together with the
order number and the supplier's invoice number. Do not use the pump if it is
damaged.
3. Retain all packing materials for inspecon.
4. Check that the package contains the items listed in . If any of these items are
missing, nofy the supplier in wring within three days.
5. If the pump is not to be used immediately, replace the protecve covers and store
in suitable condions as described in Storage on page 38.
Table 9
Checklist of items
Quanty Descripon Check
1T-Staon 300 q
1 CD instrucon manual P45000000 q
1 Ultragrade 15 oil 1 litre (supplied with E2M1.5 only) q
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