Edwards STP Series User manual

MT-46E-101-A
Model name Voltage
STP-1603 series 200 - 240 Va.c.
STP Series Turbomolecular Pumps
STP-A1603 Series
Pump Specific Information
Instruction Manual (B)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Supplied with STP pump
Instruction Manual (B):
(This Instruction Manual)
STP pump specific information
Supplied with STP pump
Instruction Manual (C): STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.

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The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP Pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link (except for SCU-750)
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP-A1603 Series Turbomolecular Pump
July 08 i Issue 1-a
PAGE
i
CONTENTS
Section Title Page
1 TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 3
1.3 Label affixing positions 6
1.4 Accessories 7
2 HOW TO SECURE THE STP PUMP 9
2.1 When securing the inlet port with bolts 10
2.2 When securing the inlet port flange with claw clamps 11
2.3 When installing the damper in the inlet port flange 12
3 TEMPERATURE MANAGEMENT SYSTEM (TMS) 13
3.1 Configuration of the STP pump with the TMS 13
3.2 TMS connection cable 14
3.3 TMS heater 14
3.4 TMS valve 14
3.5 TMS sensor cable 14
3.6 Installation of the TMS unit 15
3.6.1 Connecting the TMS connection cable to the STP control unit 15
3.6.2 Connecting the pump and TMS valve 15
3.6.3 Connecting TMS connection cable to STP pumps 15
3.7 Replacing the fuses in the TMS connection cable 16
3.8 Condition for the TMS unit 16
3.9 Accessories 16

STP-A1603 Series Turbomolecular Pump
July 08 ii Issue 1-a
PAGE
ii ILLUSTRATIONS
Figure Title Page
1 STP-A1603 series: ISO200F/VG200 4
2 STP-A1603 series: ICF253 5
3 Label Affixing Positions for the STP Pump 6
4 Example of securing the STP pump
(when securing the inlet port with bolts) 10
5 Example of securing the STP pump
(when securing the inlet port flange with claw clamps) 11
6 Example of securing the STP pump
(when installing the damper in the inlet port flange) 12
7 Configuration of the STP pump with the TMS 13
8 External view of TMS connection cable 14
TABLES
Table Title Page
1 Tightening torque of bolt 9
2 Maximum torque predicted and recommended securing bolt
for inlet port flange 10
3 Number of claw clamps for flange size 11

STP-A1603 Series Turbomolecular Pump
July 08 1 Issue 1-a
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name Specification Applicable Control unit
STP-A1603 series Advanced high-throughput type SCU-750/SCU-800
Naming convention:
•"C" following a pump model name indicates a corrosion resistant*1 type (e.g. STP-A1603C).
•"CV" indicates an enhanced corrosion resistant type with TMS*2 (e.g. STP-A1603CV).
*1 Corrosion resistant: STP pump with anti-corrosive treatment.
*2 Temperature Management System: TMS unit (optional accessory) maintains the temperature at the base of the
turbomolecular pump by monitoring the temperature with the temperature sensor in the
base of the turbomolecular pump, and performing the TMS valve and base heater
ON/OFF control.

STP-A1603 Series Turbomolecular Pump
July 08 2 Issue 1-a
TECHNICAL DATA
PAG
E
2
1
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item A1603 series
Inlet port flange ISO200F/VG200/ICF253Flange size
Outlet port flange KF40
N2L/s 1600Pumping speed
H2L/s 1200
N2>108Compression ratio
H27×103
Ultimate pressure Pa (Torr) 10-7 (10-9) order [after baking]
Maximum gas flow rate*1 N2Pa·m3/s
(SCCM)
4.2 (2500): Water Cooling
1.7 (1000): TMS unit used (60 °C)
Ar Pa·m3/s
(SCCM)
1.7 (1000): Water Cooling
0.8 (500): TMS unit used (60 °C)
Allowable backing pressure*1 Pa (Torr) 266 (2): Water cooling/TMS unit used
Flow rate of purge gas <N2> Pa·m3/s
(SCCM)
3.4×10-2 to 8.4×10-2
（20 to 50）
Rated speed rpm 36,500
Backup rotational speed*2 rpm Approximately 8,000
Starting time min 7
Stopping time min 9
Noise dB <50 (at 36,500 rpm)
Temperature Management System (TMS) Available
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Recommended backing-pump L/min >1,300
Mass*3 kg 35
Ambient temperature range °C 0 to 40
Storage temperature range °C -25 to 55
Applicable Control unit SCU-750/SCU-800

STP-A1603 Series Turbomolecular Pump
July 08 3 Issue 1-a
TECHNICAL DATA
1
*1 The pressure is applicable under conditions that N2or other similar gas is vacuumed and the backing-pump (pumping
speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow rate can be
exhausted. Consult Edwards about conditions.
*2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
1.1.2 Condition for the water-cooling unit
Item Specification
Port type Rc 1/4 (Female) *1
Flow rate L/min 2
Water temperature °C 5 to 25
Water pressure MPa (kgf/cm2) 0.3 (3)
*1 Standard type
1.2 External appearance of the STP pump
See the next page.

STP-A1603 Series Turbomolecular Pump
July 08 4 Issue 1-a
TECHNICAL DATA
PAG
E
4
1
A
(13)
φ270
φ237
≧ 315
35 10.5
φ210
15ﾟ
φ260
12-φ11
φ285 φ300
8-φ15
φ270
22.5ﾟ
20ﾟ
30ﾟ
30ﾟ
35ﾟ
25ﾟ
147.5
(175)
147
(9)
(10)
(8)
(11)
(5)
(4) (6)
129
16
262
276.5
309
322
(3)268.5
303.5
90 137
(1) (2)
(12)
(7)
16
Figure 1 - STP-A1603 series: ISO200F/VG200
No. Item Description
1 Inlet port flange ISO*2200F
2 Inlet port flange VG*1200
3 Height of the purge port
4 Bending dimension of the STP
connection cable
5 Temperature sensor connector Optional accessory
6 Screw hole of legs M12*1 depth 20
7 Screw hole for legs M12*1 depth 24
8 Outlet port flange KF*140
9 Cooling water port 2-Rc*21/4
10 Purge port KF*110
11 STP connector
12 Screw hole for legs 8-M12*1 depth 24
13 Viewed from arrow A
*1 JIS
*2 ISO

STP-A1603 Series Turbomolecular Pump
July 08 5 Issue 1-a
TECHNICAL DATA
1
A
(12)
φ270
φ237
≧ 315
35 10.5
φ210
20ﾟ
30ﾟ
30ﾟ
35ﾟ
25ﾟ
147.5
(175)
147
(8)
(9)
(7)
(10)
(4)
(3) (5)
167
300
314.5
347
360
(2)306.5
341.5
90 175
(1)
(11)
(6)
φ231.8
15ﾟ
24-φ8.4
7.5ﾟ
φ253
25
Figure 2 - STP-A1603 series: ICF253
No. Item Description
1 Inlet port flange ICF*1253
2 Height of the purge port
3 Bending dimension of the STP
connection cable
4 Temperature sensor connector Optional accessory
5 Screw hole of legs M12*2 depth 20
6 Screw hole for legs M12*2 depth 24
7 Outlet port flange KF*240
8 Cooling water port 2-Rc*31/4
9 Purge port KF*210
10 STP connector
11 Screw hole for legs 8-M12*2 depth 24
12 Viewed from arrow A
*1 JVIS
*2 JIS
3 ISO

STP-A1603 Series Turbomolecular Pump
July 08 6 Issue 1-a
TECHNICAL DATA
PAG
E
6
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 7.
Figure 3 - Label affixing positions for the STP pump
1 STP pump installation warning label
2 Hot surface warning label
3 Heavy product caution label
4 Connector caution label
5 STP pump/control unit caution label
7 Rotational direction instruction label
8 Name plate
9 Company logo
9
2
8 31
5
7
4

STP-A1603 Series Turbomolecular Pump
July 08 7 Issue 1-a
TECHNICAL DATA
1
1.4 Accessories
Item Q’ty Remarks
Inlet port cover 1
Outlet port cover 1
STP connector cover 1
Blank flange for purge port 1 KF10 or KF16
Clamping ring for purge port 1 KF10 or KF16
O-ring washer for purge port 1 KF10 or KF16
Leg 8 4 legs are attached to the STP
pump
Rubber foot for leg 4
Instruction Manual (B) 1 This manual

STP-A1603 Series Turbomolecular Pump
July 08 8 Issue 1-a
TECHNICAL DATA
PAG
E
8
1
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STP-A1603 Series Turbomolecular Pump
July 08 9 Issue 1-a
HOW TO SECURE THE STP PUMP
2
2 HOW TO SECURE THE STP PUMP
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
The method of securing the STP pump will depend on the installation requirements. Secure the STP
pump to the vacuum equipment as follows:
Design and secure the mounting for the STP pump so that it can withstand the maximum rotational
torque. Refer to Table 2 for torque in pump abnormality.
In some cases, the damper and the claw clamper securing cannot be used.
This will depend on the type of STP pump. Refer to Table 1 for torque tightening the bolts used.
Bolt size Tightening torque (Nm)
M8 12
M10 24
M12 42
Table 1 - Tightening torque of bolt
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600N/mm2or more.
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
Note: When using any securing method other than that specified in this manual, contact Edwards.
Damper
Yes
No
With bolts
With claw clamps
Secure the inlet port
Refer to Section 2.1
Refer to Section 2.2
Refer to Section 2.3

STP-A1603 Series Turbomolecular Pump
July 08 10 Issue 1-a
HOW TO SECURE THE STP PUMP
2
2.1 When securing the inlet port with bolts
Refer to Table 2 for maximum predicted torque in any pump abnormality and for the recommended
type of securing bolt for inlet port flange.
Secure the inlet port flange with the correct size bolts as specified in the Inlet Port Flange Standard.
Secure the base with either the 8 screws for legs or the 8 attached legs. Ensure instructions with
regard to legs and bolts for securing the base are adhered to page 9. Make sure that the
recommended securing bolt is the correct one depending on the method of securing the base.
Pump mode STP-A1603 series
Flange type ISO200F*2 VG200 ICF253
Torque in pump abnormality
[Nm] 4.0×1044.0×1044.0×104
Base (8 positions) securing No Yes No Yes No Yes
Shape Standard Standard Standard Standard Standard Standard
Material*1Carbon steel
Alloyed steel Stainless steel Carbon steel Alloyed steel Stainless steel Carbon steel Alloyed steel Stainless steel
Recommended
securing bolt for
flange
Strength*112.9 or more 70 or more 12.9 or more 70 or more 12.9 or more 70 or more
*1 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054) and AMS6419 (Aerospace Material Specification).
*2 Maximum predicted torque of ISO flange type pump is the same as that of ISO_F flange type pump.
Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange
(A) When the base is not secured (B) When the base is secured
1. Recommended fitting bolt for flange
2. Secure the base
Figure 4 - Example of securing the STP pump (when securing the inlet port with bolts)
1
2

STP-A1603 Series Turbomolecular Pump
July 08 11 Issue 1-a
HOW TO SECURE THE STP PUMP
2
2.2 When securing the inlet port flange with claw clamps
Refer to Table 2 for rotational torque.
When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot
withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum
equipment withstand abnormal torque, secure the base with either the 8 screws for legs or the 8
attached legs. Ensure instructions with regard to legs and bolts for securing the base are adhered to
page 9.
For the claw clamp-type, use the required number of claw clamps as specified in Table 3. Position
the claw clamps evenly on the circumference.
Flange size Number of Claw Clamps
ISO 160 or less 4 or more
ISO 200 to 250 6 or more
ISO 320 or more 8 or more
Table 3 - Number of claw clamps for flange size
1. Vacuum equipment
2. Claw clamps
3. Secure the base
Figure 5 - Example of securing the STP pump
(when securing the inlet port flange with claw clamps)
1
2
3

STP-A1603 Series Turbomolecular Pump
July 08 12 Issue 1-a
HOW TO SECURE THE STP PUMP
2
2.3 When installing the damper in the inlet port flange
CAUTION
Use a damper only at the vertically upright position.
CAUTION
DO NOT remove the bolts and nuts attached to reinforce the damper.
Refer to Table 2 for rotational torque.
When using a damper, secure the base with either the 8 screws for legs or the 8 attached legs.
Ensure instructions with regard to legs and bolts for securing the base are adhered to page 9.
When the base cannot be secured because of the equipment design, install the pump with a torque
restraint like the one shown in Figure 6 (B).
(A) When securing the base (B) When installing not to rotate
1. Damper
2. Secure the base
3. Hole to prevent from rotating
4. Leg
Figure 6 - Example of securing the STP pump (when installing the damper in the inlet port flange)
1
234

STP-A1603 Series Turbomolecular Pump
July 08 13 Issue 1-a
TEMPERATURE MANAGEMENT SYSTEM
3
3 TEMPERATURE MANAGEMENT SYSTEM (TMS)
WARNING
The STP pump operates at high temperatures while the Temperature Management
System (TMS) unit is in operation. NEVER touch the STP pump and its peripheral
equipment while TMS unit are in operation. Operators can burn hands.
The Temperature Management System (TMS) maintains the temperature of the turbomolecular
pump by monitoring the temperature with temperature sensor in the base of the turbomolecular pump,
and performing the TMS valve and TMS heater ON/OFF control.
3.1 Configuration of the STP pump with the TMS
1. STP control unit 4. TMS valve
2. STP connection cable 5. TMS connection cable
3. TMS heater (Built-in) 6. Power cable
Figure 7 - Configuration of the STP pump with the TMS
Note: The shape of each part is an example. It varies according to specifications.
2
1
3
4
5
6

STP-A1603 Series Turbomolecular Pump
July 08 14 Issue 1-a
TEMPERATURE MANAGEMENT SYSTEM
3
3.2 TMS connection cable
The components of the TMS connection cables are as follows: (see Figure 8)
Item Description Function
1 Connector X5A For the STP control unit
2 CON1 HEATER OUT connector For the TMS heater
3 CON2 COOLING VALVE OUT connector For the TMS valve
65.3
17
18
21.7
49
φ21.5
98
φ31
L m
+5 %
-0 %
100
200
maxφ10
Figure 8 - External view of TMS connection cable
Note: The shape of the TMS connection cable is an example. It varies according to specifications.
3.3 TMS heater
The TMS heater heats the base of the STP pump. It’s fitted with the STP-A1603CV series at the
factory. A fuse is set in the TMS heater cable of the STP-A1603CV series
3.4 TMS valve
The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP
pump. The shape of the TMS valve varies according to specifications.
3.5 TMS sensor cable
The sensor cable is not required for STP-A1603CV series.
1
2
3