Edwards STP Series User manual

MT-92E-1A1-D
Model name Voltage
STP-XF813Y1BV155 / XF1313Y1BV155 200 - 240 V AC
STP-XF813Y2CV155 / XF1313Y2CV155 200 - 240 V AC
STP Series Turbomolecular Pumps
STP-XF813/XF1313 series
Pump Specific Information
Instruction Manual (B)
STP pump consists of the four-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
(This Instruction Manual)
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
Instruction Manual (D):
STC-U eTMS unit for Turbomolecular Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
2023.08

Declaration of Conformity
This product has been manufactured under a quality management system certified to ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
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3
This declaration of conformity is issued under the sole responsibility of the manufacturer:
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 76-85 3
Japan
Documentation Officer
Jana Sigmunda 300
Lutín , 78349
Czech Republic
T: [phone]
[email protected]
Product Name:
T
urbomolecular pump
Model Number:
STP
-
XF803
series
,
XF1303 series
STP-XF813 series, XF1313 series
Is in conformity with the relevant requirements of European CE legislation:
006/4 /EC
Machinery directive
Note: The safety objectives of the Low Voltage Directive 2014/35/ U were
complied with in accordance with Annex 1 No. 1.5.1 of this directive.
014/30/EU
Electromagnetic compatibility (EMC) directive
Class A Emissions, Industrial Immunity
011/65/EU
Restriction of certain hazardous s
ubstances (RoHS)
d
irective
as amended by Delegated Directive (EU) 015/863
Based on the relevant requirements of harmonised standards:
EN ISO 1 100: 010
Safety of machinery. General principles for design. Risk assessment and risk
reduction
EN 101
-
:1996 +A1: 009
Compressors and vacuum pumps. Safety requirements. Vacuum
pumps
EN 613 6
-
1: 013
Electrical equipment for measurement, control and laboratory use. EMC
requirements
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 11th-Oct- 0
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Martin Tollner
President, Semiconductor Chamber Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

Declaration of Conformity
This product has been manufactured under a quality management system certified to ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI
-
DOC
-
92
-
00
3
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 76-85 3
Japan
Documentation Officer
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
[email protected]
This declaration of conformity is issued under the sole responsibility of the manufacturer.
Product Name:
T
urbomolecular pump
Model Number:
STP
-
XF803
series
,
XF1303 series
STP-XF813 series, XF1313 series
The object of the declaration described above is in conformity with relevant statutory requirements:
Supply of Machinery (Safety) Regulations 008
The objectives of the lectrical quipment (Safety) Regulations 2016 are governed by Annex 1 1.5.1 of this regulation.
Electromagnetic Compatibility Regulations 016
Class A Emissions, Industrial Immunity
Restriction of the Use of Certain Hazardous Substances in Electrical and
Electronic Equipment Regulations 01
Relevant designated standards or technical specifications are as follows:
EN ISO 1 100: 010
Safety of machinery. General principles for design. Risk assessment and risk
reduction
EN 101
-
:1996 +A1: 009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 613 6
-
1: 013
Electrical equipment for measurement, control and laboratory use. EMC
requirements. General requirements. Class A Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 11th-Oct- 0
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Martin Tollner
President, Semiconductor Chamber Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

This product has been manufactured under a quality management system certified to ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI
-
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ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION
RoHS (EU, UK): Material Exe ption Infor ation
This product is compliant with the following Exemptions
Annex III:
• 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
• 6(c) Copper alloy containing up to 4% lead by weight
• 7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more lead)
• 7(c) I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in
capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound
REACH (EU, UK)
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction
to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration:
This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
015 European Court of Justice ruling in case C-106/14.
• Lead (Pb)
This substance is present in certain steel / aluminium / brass / electrical or electronic components.
W ASTE F RAMEWORK D IRECTIVE
(EU)

This product has been manufactured under a quality management system certified to ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
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材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
× 〇 〇 〇 〇 〇
铜管管件
Brass pipe fitting
× 〇 〇 〇 〇 〇
电缆/电线/连接器
Cable/wire/connector
× 〇 〇 〇 〇 〇
电子元件和控件
Electronics and
Controls
× 〇 〇 〇 〇 〇
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 657 标准规定的限量要求 。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 657 .
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T 657 标准规定的限量要求 。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T 657 .

The description of this product consists of the four-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
•STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
•STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System (TMS)
Instruction Manual (C)
•STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link
•EdCentra (for SCU-801 series only）
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Instruction Manual (D)
•STC-U eTMS unit for Turbomolecular Pump:
•Introduction
•Technical data
•Installation
•Operation
•Maintenance and inspection
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page i
PAGE
i
CONTENTS
Section Title Page
1TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 1
1.1.1.1 STP-XF813Y1BV155/XF1313Y1BV155 2
1.1.1.2 STP-XF813Y2CV155/XF1313Y2CV155 4
1.1.1.3 Condition for the water-cooling unit 6
1.1.2 Safety function of blade temperature sensor 7
1.2 External appearance of the STP pump 8
1.3 Label affixing positions 10
1.4 Accessories 11
2HOW TO SECURE THE STP PUMP 13
3TEMPERATURE MANAGEMENT SYSTEM (TMS) 17
3.1 Configuration of the STP pump with the TMS 17
3.2 TMS heater 18
3.3 TMS valve 18
3.4 Outlet port heater 18
3.5 Installation of the TMS unit 18
3.5.1 Connecting cables to the TMS unit 18
3.5.2 Connecting the pump and TMS valve 19
3.6 Specification of TMS unit 20
3.7 Condition for the TMS unit 21
3.8 Accessories 22

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page ii
TECHNICAL DATA
PAG
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ii
PAGE
ii
ILLUSTRATIONS
Figure Title Page
1 STP- XF813 / XF1313 series 8
2 Label affixing positions for the STP pump 10
3 Methods of securing the STP pump 15
4 Configuration of the TMS 17
5 Water cooling pipe piping diagram 19
TABLES
Table Title Page
1 Tightening torque of bolt 13
2 Destructive torque and recommended securing bolt
for inlet port flange 14

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 1
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name
Specification
Applicable Control unit
STP-XF813Y1BV155 / XF1313Y1BV155
Extreme High-flow type
Corrosion resistant type*1
High-emissivity coating type*2
TMS unit*4
SCU-800/801 *5
STP-XF813Y2CV155 / XF1313Y2CV155
Extreme High-flow type
Corrosion resistant type*1
Special material/coating type*3
TMS unit*4
SCU-800/801 *5
*1 Corrosion resistant: STP pump with anti-corrosive treatment.
*2 High-emissivity coating: STP pump with rotor covered with high-emissivity coating.
*3 Special material / coating: STP pump with special material and coating.
*4 Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
temperature with the thermistor in the turbomolecular pump, and performing the TMS heater ON/OFF control in order to
maintain a constant temperature of the STP pump.
*5 The dedicated control unit for STP-XF803/XF1303/XF813/XF1313 series.
1.1.1 STP pump specifications
The following specifications are available for STP-XF813 / XF1313 series pumps.
TMS Heater
set point （⁰C）
TMS Valve
set point （⁰C）
Rated speed
（rpm）
Remarks
STP-XF813Y1BV155
STP-XF1313Y1BV155
150
93
28,000
Section 1.1.1.1
STP-XF813Y2CV155
STP-XF1313Y2CV155
140
93
28,000
Section 1.1.1.2

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 2
TECHNICAL DATA
PAG
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2
1
1.1.1.1 STP-XF813Y1BV155/XF1313Y1BV155
The values shown below are typical. They are not guaranteed.
Item
STP-XF813Y1BV155
STP-XF1313Y1BV155
Flange size
Inlet port flange
VG150/ISO160F
ICF203
VG200/ISO200F
ICF253
Outlet port flange
KF40
Maximum pumping
speed
N2
L/s
800
1,300
Ar
L/s
670
1,100
H2
L/s
550
600
Maximum compression
ratio
N2
2.0×107
Ar
7.0×107
H2
3.3×102
Ultimate pressure
Pa (Torr)
10-7 (10-9) order [after baking]
Maximum backing pressure *1
Pa (Torr)
200 (1.5)
Allowable flow backing pressure *2
Pa (Torr)
97(0.73)
Critical operating backing pressure *3
Pa (Torr)
160 (1.2)
Enable exhaust gas
Chlorine or fluorine system gases can be used.
When you use the following gases, contact
Edwards.
・Gases including alkaline metals except Li gas.
・Gases including Ga, Hg, ln, or Sn.
・Gases including HBr
・Gases including CLF3
Flow rate of purge gas <N2>
Pa·m3/s
(SCCM)
5.91×10-1 ±8.45×10-2 (350±50)*4
Rated speed
rpm
28,000
Backup rotational speed *5
rpm
Approximately 8,000
Starting time
min
≦9
Stopping time
min
≦11
Noise
dB
<50 (at 28,000 rpm)
Temperature Management System (TMS)
Available
Baking temperature
°C
<120
Rotor temperature
sensor
Precision
°C
±3 *6
Safety function
Available *7
Lubricating oil
Not necessary

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 3
TECHNICAL DATA
1
Installation position
Free *8
Cooling method
Water cooling
Recommended backing-pump
L/min
>10,000
Mass *9
kg
52
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
-25 to 55
Applicable Control unit
SCU-800/801
*1 Maximum backing pressure indicates the outlet pressure at which the inlet pressure suddenly increases without gas flow.
*2 Allowable flow backing pressure indicates the outlet pressure when the maximum gas flow rate of nitrogen is continuously
exhausted using the back pump (maximum exhaust speed 10,000 L / min).
*3 Critical operating backing pressure indicates the outlet pressure that can be operated continuously without gas flow.
*4 If the flow rate of N2purge gas is out of the specification, the rotor temperature sensor may not function properly. In order to
prevent deposition of product on the magnetic bearing parts, be sure to introduce a purge gas while process gas is present
inside the pump.If the Deposit attaches to the stator column, the rotor has the potential to be scratched or locked. Be sure
always introduce N2purge gas at the specified flow rate.
*5 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*6 The accuracy of the rotor temperature sensor is that at rated speed.
*7 The function is enabled when the rotation speed is 22,500 rpm or more. Refer to Section 1.1.2 , “Safety function of blade
temperature sensor” for the safety function of the rotor temperature sensor.
*8 Refer to Section 2.3.2, “STP pump installation positions” on the STP Series Turbomolecular Pumps Generic Instruction
Manual.
*9 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
Maximum gas flow-rate *10
Gas
Backing
pressure
TMS
Heater
set
point
TMS
Valve
set
point
Inlet
port
flange
temp.
Purge gas N2
gas flow rate
Maximum gas
flow-rate
[Pa]
[Torr]
[Pa･m3/s]
[SCCM]
[Pa･m3/s]
[SCCM]
N2
97
0.73
150 C
93 C
117 C
5.91×10-1
±8.45×10-2
350±50
4.23
2,500
Ar
66.5
0.50
1.69
1,000
*10 The maximum gas flow-rate is applicable under conditions that N2or Ar gas is vacuumed continuously and the
backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is
exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 4
TECHNICAL DATA
PAG
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4
1
1.1.1.2 STP-XF813Y2CV155/XF1313Y2CV155
The values shown below are typical. They are not guaranteed.
Item
STP-XF813Y2CV155
STP-XF1313Y2CV155
Flange size
Inlet port flange
VG150/ISO160F
ICF203
VG200/ISO200F
ICF253
Outlet port flange
KF40
Maximum pumping
speed
N2
L/s
800
1,300
Ar
L/s
670
1,100
H2
L/s
550
600
Maximum compression
ratio
N2
2.0×107
Ar
7.0×107
H2
3.3×102
Ultimate pressure
Pa (Torr)
10-7 (10-9) order [after baking]
Maximum backing pressure *1
Pa (Torr)
200 (1.5)
Allowable flow backing pressure *2
Pa (Torr)
102.3 (0.77)
Critical operating backing pressure *3
Pa (Torr)
160 (1.2)
Enable exhaust gas
Chlorine or fluorine system gases can be used.
When you use the following gases, contact
Edwards.
・Gases including alkaline metals except Li gas.
・Gases including Ga, Hg, ln, or Sn.
・Gases including HBr
Flow rate of purge gas <N2>
Pa·m3/s
(SCCM)
5.91×10-1 ±8.45×10-2 (350±50)*4
Rated speed
rpm
28,000
Backup rotational speed *5
rpm
Approximately 8,000
Starting time
min
≦9
Stopping time
min
≦11
Noise
dB
<50 (at 28,000 rpm)
Temperature Management System (TMS)
Available
Baking temperature
°C
<120
Rotor temperature
sensor
Precision
°C
±3 *6
Safety function
Available *7
Lubricating oil
Not necessary
Installation position
Free *8

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 5
TECHNICAL DATA
1
Cooling method
Water cooling
Recommended backing-pump
L/min
>10,000
Mass *9
kg
52
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
-25 to 55
Applicable Control unit
SCU-800/801
*1 Maximum backing pressure indicates the outlet pressure at which the inlet pressure suddenly increases without gas flow.
*2 Allowable flow backing pressure indicates the outlet pressure when the maximum gas flow rate of nitrogen is continuously
exhausted using the back pump (maximum exhaust speed 10,000 L / min).
*3 Critical operating backing pressure indicates the outlet pressure that can be operated continuously without gas flow.
*4 If the flow rate of N2purge gas is out of the specification, the rotor temperature sensor may not function properly. In order to
prevent deposition of product on the magnetic bearing parts, be sure to introduce a purge gas while process gas is present
inside the pump.If the Deposit attaches to the stator column, the rotor has the potential to be scratched or locked. Be sure
always introduce N2purge gas at the specified flow rate.
*5 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*6 The accuracy of the rotor temperature sensor is that at rated speed.
*7 The function is enabled when the rotation speed is 22,500 rpm or more. Refer to Section 1.1.2 , “Safety function of blade
temperature sensor” for the safety function of the rotor temperature sensor.
*8 Refer to Section 2.3.2, “STP pump installation positions” on the STP Series Turbomolecular Pumps Generic Instruction
Manual.
*9 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
Maximum gas flow-rate *10
Gas
Backing
pressure
TMS
Heater
set
point
TMS
Valve
set
point
Inlet
port
flange
temp.
Purge gas N2
gas flow rate
Maximum gas
flow-rate
[Pa]
[Torr]
[Pa･m3/s]
[SCCM]
[Pa･m3/s]
[SCCM]
N2
102.3
0.77
140 C
93 C
117 C
5.91×10-1
±8.45×10-2
350±50
4.56
2,700
Ar
62.8
0.47
1.52
900
*10 The maximum gas flow-rate is applicable under conditions that N2or Ar gas is vacuumed continuously and the
backing-pump (pumping speed: 10,000 L/min) is used. It is changed depending on condition. For example, when the gas is
exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 6
TECHNICAL DATA
PAG
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6
1
1.1.1.3 Condition for the water-cooling unit
Common to all three specifications.
Item
Specification
Port type
Middle stage
3/8-inch tube fitting (SUS)
Lower stage
Rc1/4(ISO standard, Female, SUS)
Flow rate*1
L/min
2
Water temperature*1
°C
17~32
Water pressure*1
MPa (kgf/cm2)
<0.3 (3)
*1 The values are the recommended value.

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 7
TECHNICAL DATA
1
1.1.2 Safety function of blade temperature sensor
CAUTION
When R TMP OVERHEAT occurs or R TMP HIGHER frequently occurs, continuous use of the pump may
lead to serious failure such as rotor blade breakage. The cause of the WARNIGN/failure may be an
overload on the pump, accumulation of deposits in the pump, deterioration or damage of parts, or other
reasons. Therefore, review the pump use conditions or immediately overhaul the pump.
To let the temperature sensor adequately function, be sure to observe the purge gas flow rate indicated in
“STP pump specifications” in Section 1.1.1.
On a model equipped with a blade temperature sensor with its safety function enabled, a
warning/error (RTMP HIGHER or RTMP OVERHEAT) is issued when the temperature of the rotor
blade has risen to the setting temperature or higher.
For other WARNING and failure messages, refer to the Instruction Manual for STP Control Unit (C).
WARNING and failure
message
RTMP HIGHER
RTMP OVERHEAT
Pump operation
Operation can continue
Stop
LED indication on STP
control unit
No change to the LED indication
Failure lamp in LED indication
lights
LCD display message on
STP control unit
RTMP HIGHER
RTMP OVERHEAT
Cancellation of WARNING
and failure
When the temperature of the rotor
blade has fallen to the cancellation
temperature or below, the warning
is automatically cancelled.
If the temperature of the rotor
blade is cancellation
temperature or below after the
pump has stop, the error can be
cancelled by following the reset
signal.

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 8
TECHNICAL DATA
PAG
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8
1
1.2 External appearance of the STP pump
Figure 1 - STP- XF813 / XF1313 series
Inlet port
flange
VG150
VG200
ISO160F
ISO200F
ICF203
ICF253
φA
235
300
225
285
203
253
φB
237
237
237
237
237
237
C
12
16
16
16
22
25
D
387
349
387
349
389
349
E
145
107
145
107
147
107
φF
210
270
200
260
181
231.8
G
45°
22.5°
15°
15°
9°
7.5°
H
8-φ12
8-φ15
8-φ11
12-φ11
20-φ8.4
24-φ8.4
I
235
197
235
197
237
197
J
267
229
267
229
269
229
K
264
226
264
226
266
226
L
343
305
343
305
345
305
M
342
304
342
304
344
304
N
338
300
338
300
340
300
O
320
282
320
282
322
282

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 9
TECHNICAL DATA
1
No.
Item
Description
1
Inlet port flange
2
Height of the purge port
3
TMS sensor
4
TMS heater
5
TMS heater cover
6
Outlet port heater
7
Middle stage cooling water port
2-3/8 inch
8
Lower stage cooling water port
2-Rc*11/4
9
Outlet port flange
KF40
10
Purge port
KF10
11
TMS heater connector
12
Blade temperature sensor connector
13
STP connector
14
Outlet port heater connector
15
Screw hole for legs
8-M12 depth 20
*1 ISO

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 10
TECHNICAL DATA
PAG
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10
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 3 and 5 to 9, 11, 13, 14.
Figure 2 - Label affixing positions for the STP pump
1
STP pump/control unit caution label
2
Connector caution label
3
Protective earth label (M4)
4
Company logo
5
Rotational direction instruction label
6
STP pump installation warning label
7
Heavy product caution label
8
TMS heater caution label
9
Hot surface warning label
10
Parts number
11
Identification label
12
Name plate
13
Water cooling line notice label
14
Overhaul warning label
4
8
6
10
12
7
11
13
9
3
14
2
1
5

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 11
TECHNICAL DATA
1
1.4 Accessories
Item
Q’ty
Remarks
Inlet port cover
1
Outlet port cover
1
STP connector cover
1
Purge port cover
1
Leg
8
Included in pump
Instruction Manual (B)
1
This manual

STP-XF813/XF1313 series Turbomolecular Pump
MT-92E-1A1-D
Page 12
TECHNICAL DATA
PAG
E
12
1
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