entegris NT User manual

P/N 1088 | REV. C 07/23
NT®Pressure Transducer
for Vacuum Applications
User Guide

NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
1Entegris, Inc. | User Guide
Table of Contents
Introduction .................................. 2
Ordering Information .................. 3
Identifying Nonstandard
Product Configurations ............ 5
Installation ..................................... 6
Mechanical Installation ............ 6
Electrical Installation ................. 7
Power Supply
Requirements ............................. 8
Load Resistance:
Current Output .......................... 9
Unit Operation ............................ 10
Operating Environment ......... 10
Process Connections ............. 10
Pressure Transducer
Cover Assembly ....................... 10
Temperature
Requirements ........................... 10
Pressure Limits ......................... 10
Pressure Reference
Accuracy .................................... 10
Linear Output Signal ............... 11
Troubleshooting ......................... 12
Reference ..................................... 13
Physical Specifications ........... 13
Electrical Specifications ......... 13
Performance
Specifications ........................... 13
Certifications ............................... 14
CE Compliance ........................ 14
Installation Drawings .................. 15
For More Information ................. 21
Terms and Conditions of Sale .... 21
Limited Warranty .......................... 21

NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
2Entegris, Inc. | User Guide
Introduction
This manual is for use with NT®
Pressure Transducers for vacuum
applications, single-port and
flow-through models 4150 and 4250.
These instruments have been
designed for use in high purity
applications in the semiconductor
industry and are compatible with
highly corrosive processes.
These products feature no moving
parts and no filled cavities, which
reduces the possibility of a contami-
nated process. The wetted parts of
these nonmetallic transducers are
constructed with PTFE, sapphire or
other similar high purity inert
materials.

NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
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Ordering Information
CODE BASE MODEL
4150 Single-Port Vacuum Pressure Transducer
CODE PRESSURE RANGE
030V -12 to 30 psig (-83 to 207 kPa)
060V -12 to 60 psig (-83 to 414 kPa)
100V -12 to 100 psig (-83 to 690 kPa)
CODE INLET/OUTLET PORT CONNECTION TYPE
F02 ⁄” Flaretek®
F03 ⁄” Flaretek
F04 ⁄” Flaretek
N02 ⁄” FNPT
N04 ⁄” FNPT
M02 ⁄” MNPT
CODE ELECTRICAL CONNECTOR TYPE
B06 FEP-jacketed 6’ pigtail electrical cable
B12 FEP-jacketed 12’ pigtail electrical cable
B30 FEP-jacketed 30’ pigtail electrical cable
D00 3-pin polypropylene connector
D06 3-pin polypropylene connector and 6’ PVC-jacketed mating cable
D12 3-pin polypropylene connector and 12’ PVC-jacketed mating cable
D30 3-pin polypropylene connector and 30’ PVC-jacketed mating cable
CODE ELECTRICAL OUTPUTS
A4-20 mA (12-28 VDC input)
CODE PRIMARY/SECONDARY SEAL
U3 Perfrez PXC Ultra/Viton
S3 Perfrez PXC Ultra/Perfrez PXC Ultra

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CODE BASE MODEL
4250 Flow-Through Vacuum Pressure Transducer
CODE PRESSURE RANGE
030V -12 to 30 psig (-83 to 207 kPa)
060V -12 to 60 psig (-83 to 414 kPa)
100V -12 to 100 psig (-83 to 650 kPa)
CODE INLET/OUTLET PORT CONNECTION TYPE
F02 ⁄” Flaretek
F03 ⁄” Flaretek
F04 ⁄” Flaretek
F06 ⁄” Flaretek
F08 1” Flaretek (030G, 060G types only)
CODE ELECTRICAL CONNECTOR TYPE
B06 FEP-jacketed 6’ pigtail electrical cable
B12 FEP-jacketed 12’ pigtail electrical cable
B30 FEP-jacketed 30’ pigtail electrical cable
D00 3-pin polypropylene connector
D06 3-pin polypropylene connector and 6’ PVC-jacketed mating cable
D12 3-pin polypropylene connector and 12’ PVC-jacketed mating cable
D30 3-pin polypropylene connector and 30’ PVC-jacketed mating cable
CODE ELECTRICAL OUTPUTS
A4-20 mA (12-28 VDC input)
CODE PRIMARY/SECONDARY SEAL
U3 Perfrez PXC Ultra/Viton
S3 Perfrez PXC Ultra/Perfrez PXC Ultra

NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
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IDENTIFYING NONSTANDARD
PRODUCT CONFIGURATIONS
This User Guide applies to product
manufactured as standard NT
Pressure Transducers single-port
and flow-through models 4150 and
4250. Entegris also manufactures
nonstandard product to meet the
needs of specific applications.
Nonstandard product may have
dierent materials of construction,
accuracy specifications, performance
and other specifications that dieren-
tiate the nonstandard product from
the standard oering.
NOTE: Nonstandard pressure transduc-
ers may be identified by the model
number found on the product label.
Nonstandard single-port pressure
transducers, model 4150 product
line, are identified with a “P” followed
by a number code.
For example, part number
4150-030V-F02-B06-A-P04
the “P04” designates the product as
a nonstandard product manufactured
to certain specifications designated
under the “P04” code.
Nonstandard flow-through pressure
transducers, model 4250 product
line, are identified with a “T” followed
by a number code.
For example, part number
4250-030V-F02-B06-A-T02
the “T02” designates the product as
a nonstandard product manufactured
to certain specifications designated
under the “T02” code.

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Installation
CAUTION! The NT Pressure
Transducer has been factory
sealed. Do not attempt to remove
the coverof the pressure trans-
ducer. Any attempt at removal
of the pressure transducer cover
will void the warranty and damage
the unit.
CAUTION! Do not tighten the
nuts that protect the process
connections during shipment.
Do not tighten the nuts unless
the proper tubing has been
installed. Tightening these
nuts may result in damage to
the pressure transducer process
connections.
MECHANICAL INSTALLATION
NT Pressure Transducers utilize
Flaretek®flared tube connections
and must be used with the proper
tubing size and coupling nut.
When installing flared tubing to the
pressure transducer, the flared tube
is pushed over the transducer’s fitting
until the fitting reaches the smaller
tube diameter. The amount of torque
required to tighten the coupling nut
is dependent upon the size of the
fitting.
Fitting size 11⁄44"33⁄88"11⁄22"33⁄44" 1"
Torque (in•lb) 5 8 11 14 30
Care should be taken when installing
flared tubing onto the pressure
transducer. Do not use excessive
torque or subject the transducer to
high heat during installation. The
transducer should be firmly mounted
to a solid surface to ensure stability.
Verify that the pressure transducer
and the signal cable are free from
mechanical stress or excessive
bending from the surrounding
equipment.

NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
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ELECTRICAL INSTALLATION
The pressure transducer provides
an analog (4-20 mA) electrical
output proportional to the pressure
measured.
NOTE: The white wire is not required,
please refer to the wiring diagram
below.
Pressure transducer
4-20 mA output version
+24 VDCGND
RED
WHITE
BLACK4-20 mA pressure signal
no connection
display
or PLC

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POWER SUPPLY REQUIREMENTS
The pressure transducer requires a
12-28 volt DC power supply with less
than 2% ripple at 100 or 120 Hz. The
required power supply voltage varies
with the load resistance (RLoad),
please refer to the diagrams below
and the formulas on page 9.
The power supply must provide clean
power and must be used only to
power similar measurement-type
devices. The power supply must not
be used to power inductive loads,
such as motors, relays or solenoids.
These devices may produce tran-
sients that may aect the pressure
transducer measurements when the
inductive device is powered-up or
powered down.
NOTE: Be sure to ground the shield of
the cable to local ground.
Figure 1. Power Required for a 4-20 mA Loop
800
0
12 24 28
RLoad(Ohms)
Operating
region
Power Supply Voltage
(VPS)

NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
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LOAD RESISTANCE: CURRENT OUTPUT
(4-20 mA Configuration)
If a load resistor, RLoad, is used in series
with the current output, the value
of RLoad is dependent on the supply
voltage and the meter resistance
and is calculated from the following
formula.
where:
RLoad = maximum load resistance
(ohms)
VPS = power supply voltage (volts)
Rmeter = meter resistance (ohms)
(typically not used, therefore
Rmeter = 0)
Rwire = resistance of
interconnecting wire
RLoad = - (Rmeter +Rwire)
VPS - 12 V
0.020A

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Unit Operation
OPERATING ENVIRONMENT
The pressure transducer is to be
mounted in a well vented and
controlled environment. Refer to
the Reference section on page 13
for additional specifications.
PROCESS CONNECTIONS
To avoid possible pressure leaks,
make sure all process connections
have been performed in accordance
with the Mechanical Installation
guidelines on page 6.
PRESSURE TRANSDUCER
COVER ASSEMBLY
NT Pressure Transducer covers are
factory sealed and should not be
tampered with or opened. Opening
the cover shall void the product
warranty.
NOTE: Any attempt to remove or tamper
with the transducer cover will void the
warranty and damage the unit.
TEMPERATURE REQUIREMENTS
The pressure transducer is rated for
use with fluids at process tempera-
tures between 10° to 35°C (50° to
95°F) under normal operating
conditions.
PRESSURE LIMITS
TRANSDUCER
RANGE
MAX. PRESSURE LIMIT
@ 23°C (73°F)
-12 to 30 psig
(-83 to 207 kPa)
45 psig
(310 kPa)
-12 to 60 psig
(-83 to 414 kPa)
90 psig
(621 kPa)
-12 to 100 psig
(-83 to 690 kPa)
150 psig
(1034 kPa)
WARNING! The pressure limits for
NT Pressure Transducers models
4150 and 4250 decrease signifi-
cantly for temperatures above
35°C (95°F) Please consult the
factory.
PRESSURE REFERENCE ACCURACY
The accuracy of the pressure
transducer output is ±1% of span.
For example, a -12 to 30 psig ranged
pressure transducer has a span of
42 psig and an accuracy of ±0.42
psig. This accuracy includes the
eects of linearity, hysteresis and
repeatability, measured at room
temperature.

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LINEAR OUTPUT SIGNAL
The output signal of the NT Pressure
Transducer is a linear function
proportional to the applied pressure.
Current output (mA)
Pressure measurement
-12 psi
gF
ull scale
4 mA
20 mA

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Troubleshooting
Troubleshooting the NT Pressure
Transducers may be accomplished
by measuring the output signal of
the pressure transducer with a battery
powered current/voltage meter. The
meter may be placed in series with
the pressure transducer to measure
the current output or it may be used
to directly measure the voltage
output.
Using the battery powered current/
volt meter is an eective method to
determine whether the device or the
on-site data acquisition system is not
functioning properly.

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Reference
The following lists the specifications
for NT Pressure Transducers, models
4150 and 4250. Consult the factory
for product specifications manufac-
tured for nonstandard applications.
NOTE: Specifications are subject to
change without notice. Please consult
the factory for the most current
information.
PHYSICAL SPECIFICATIONS
CONSTRUCTION MATERIALS
Wetted parts
Body: PTFE
Sensor interface: Sapphire
O-ring: Kalrez 4079, Kalrez 1050 or Perfrez PXC Ultra
Nonwetted parts Polypropylene, polyethylene and PVDF
(In addition to materials listed above)
Connection type Flaretek
ELECTRICAL SPECIFICATIONS
Input power 24 VDC (12-28 VDC)
Pressure signal output ranges 4-20 mA
Electrical connection 6’, 12’, 30’ FEP-coated pigtail or polypropylene
3-pin connector with PVC cable
PERFORMANCE SPECIFICATIONS
Reference accuracy ±1% of span (includes linearity, hysteresis and
repeatability) at 23°C (73°F)
Process temperature 10° to 35°C (50° to 95°F)

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Certifications
CE COMPLIANCE
Entegris products have been tested
to various test standards required by
the EMC 89/336/EEC directive. The
results of this testing are on file at
Entegris and are available upon
request.
Please contact the factory for the
latest information. The most current
specifications may be found on the
Internet at: http://www.nt-intl.com/
ce_etl-info.cfm.

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Installation Drawings
Electrical Connector Information
WIRE 4-20 mA OUTPUT VERSION
Red 24 VDC (+) 4-20 mA
Black Ground (-) 4-20 mA
White Not used
INLET/OUTLET
PORT CONNECTION A B
⁄” Flaretek 73.7 mm (2.90”) 25.2 mm (0.99”)
⁄” Flaretek 73.7 mm (2.90”) 26.9 mm (1.06”)
⁄” Flaretek 73.7 mm (2.90”) 29.0 mm (1.14”)
Ø47.8 mm (1.88”)
25.4 mm (1.00”)
A
B
4150 FEP-Jacketed Electrical Cable Connection, Single-Port
3 conductor Teflon
®-jacketed cable,
pigtail connection (BXX)
(Cable length up to 30 feet
)

NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
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Electrical Connector Information
WIRE 4-20 mA OUTPUT VERSION
Black Ground (-) 4-20 mA
Red 24 VDC (+) 4-20 mA
White Not used
INLET/OUTLET
PORT CONNECTION A B
⁄” Flaretek 73.7 mm (2.90”) 25.2 mm (0.99”)
⁄” Flaretek 73.7 mm (2.90”) 26.9 mm (1.06”)
⁄” Flaretek 73.7 mm (2.90”) 29.0 mm (1.14”)
Ø4
7.8 mm (1.88”)
76.2 mm (3.00”)
A
B
4150 Polypropylene Connector Connection, Single-Port
3 conductor connector/cable (dxx)
(Cable length up to 30 feet
)

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Electrical Connector Information
WIRE 4-20 mA OUTPUT VERSION
Red 24 VDC (+) 4-20 mA
Black Ground (-) 4-20 mA
White Not used
INLET/OUTLET
PORT CONNECTION A B
⁄” MNPT MALE 73.7 mm (2.90”) 15.0 mm (0.59”)
⁄” FNPT FEMALE 82.3 mm (3.24”) –
⁄” FNPT FEMALE 88.9 mm (3.50”) –
Ø47.8 mm (1.88”)
25.4 mm (1.00”)
A
B
4150 FEP-Jacketed Electrical Cable Connection, Single-Port (NPT version)
3 conductor Teflon
®-jacketed cable,
pigtail connection (BXX)
(Cable length up to 30 feet
)

NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
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Electrical Connector Information
WIRE 4-20 mA OUTPUT VERSION
Black Ground (-) 4-20 mA
Red 24 VDC (+) 4-20 mA
White Not used
INLET/OUTLET
PORT CONNECTION A B
⁄” MNPT MALE 73.7 mm (2.90”) 15.0 mm (0.59”)
⁄” FNPT FEMALE 78.0 mm (3.07”) –
⁄” FNPT FEMALE 84.6 mm (3.33”) –
Ø47.8 mm (1.88”)
76.2 mm (3.00”)
A
B
4150 FEP-Jacketed Electrical Cable Connection, Single-Port (NPT version)
3 conductor connector/cable (dxx)
(Cable length up to 30 feet
)

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Electrical Connector Information
WIRE 4-20 mA OUTPUT VERSION
Red 24 VDC (+) 4-20 mA
Black Ground (-) 4-20 mA
White Not used
INLET/OUTLET
PORT CONNECTION A B C
⁄” Flaretek 89.7 mm (3.53”) 94.5 mm (3.72”) 18.5 mm (0.73”)
⁄” Flaretek 89.7 mm (3.53”) 98.3 mm (3.87”) 17.0 mm (0.67”)
⁄” Flaretek 96.0 mm (3.78”) 102.4 mm (4.03”) 21.6 mm (0.85”)
⁄” Flaretek 104.4 mm (4.11”) 108.5 mm (4.27”) 25.4 mm (1.00”)
1” Flaretek 112.5 mm (4.43”) 120.7 mm (4.75”) 30.5 mm (1.20”)
5.1 mm (0.20”) (2)
A
B
3 conductor Teflon®-jacketed cable,
pigtail connection (BXX)
(Cable length up to 30 feet)
4250 FEP-Jacketed Electrical Cable Connection, Flow-Through
59.9 mm
(2.36”)
44.5 mm
(1.75”)
47.2 mm
(1.86”)
44.5 mm
(1.75”)
C
25.4 mm (1.00”)
6.4 mm
(0.25”)