Hamamatsu ENERGETIQ LDLS EQ-77 User manual

Model EQ-77
Laser-Driven Light Source LDLS®
Operation Manual
Revision 6, June 2022
Part Number DOC-7070

©2021 Energetiq Technology, Inc. All rights reserved.
Energetiq products are covered by the following patents: US 7435982, 7786455, 8525138,
8969841, 9048000, 9185786; Japan 5410958, 5628253; Korea 10-1507617; UK
GB2450045. All technical information, including drawings, schematics and specifications
contained in this document are the property of Energetiq and shall not be reproduced in
whole or in part without the written consent of Energetiq. The content of this document is
subject to change without notice.
Energetiq Technology, Inc.
205 Lowell St.
Wilmington, MA 01887
Phone: [phone]
Fax: [phone]
Email:[e-mail]
www.energetiq.com

Table of Contents
1. Introduction ............................................................................................................................................1
2. Safety instructions..................................................................................................................................1
2.1. General Precautions .....................................................................................................................1
2.2. Definition of equipment and document symbols and designations...............................................2
2.3. Laser Information ..........................................................................................................................3
2.4. Labels and Safety Notification.......................................................................................................4
2.5. Safety Interlocks............................................................................................................................5
2.6. External Interlocks.........................................................................................................................5
2.7. Correct disposal of the unit ...........................................................................................................5
3. Preparation of System ...........................................................................................................................5
3.1. Unpacking guide ...........................................................................................................................5
3.2. System Description .......................................................................................................................6
3.3. Physical Specifications..................................................................................................................8
3.4. Utility requirements .......................................................................................................................8
3.5. Remote Interface...........................................................................................................................8
3.6. External interlock connection ........................................................................................................8
4. EQ-77 Setup ..........................................................................................................................................9
4.1. Connections ..................................................................................................................................9
4.1.1 Electrical Power.........................................................................................................................9
4.1.2 Purge Gas.................................................................................................................................9
4.1.3 Cooling Water............................................................................................................................9
4.1.4 Optical Interface......................................................................................................................10
4.1.5 Signal Connections .................................................................................................................10
4.1.6 Lamp House I/O......................................................................................................................11
4.1.7 RS-485 Interface.....................................................................................................................11
4.2. Installation Procedure .................................................................................................................11
4.3. Chiller Information.......................................................................................................................12
5. EQ-77 Operation..................................................................................................................................12
5.1. Startup.........................................................................................................................................12
5.2. Stopping......................................................................................................................................13
6. Service Requirements..........................................................................................................................13
7. Troubleshooting Guide.........................................................................................................................13
7.1. Fault Indicator Block Diagram.....................................................................................................13
8. Accessories..........................................................................................................................................14
9. Warranty ..............................................................................................................................................14
10. Appendix .........................................................................................................................................15
10.1. Dimensional Drawings ................................................................................................................15
10.1.1 Controller Dimensional Drawings........................................................................................15

10.1.2 Lamp Dimensional Drawings ..............................................................................................15
10.2. Environmental Requirements......................................................................................................16
10.3. I/O Connector Pin Assignment....................................................................................................16
10.4. RS-485 Interface Pin Assignment...............................................................................................16
10.5. Remote Interface Schematic.......................................................................................................17
10.6. Serial Interface Commands.........................................................................................................18

1
1. Introduction
The EQ-77 Laser Driven Light Source is a broad-band lamp system for use in a wide variety of applications.
The lamp produces high brightness, broad-band light from DUV wavelengths through visible and beyond.
The output is very stable, and has a long lifetime before any service is required. A simple control interface
ensures ease of use.
Some of the advantages of the EQ-77 include:
▪Very high brightness across complete spectrum
▪190nm through visible and beyond
▪Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
▪Simplified optical system
▪Excellent spatial stability
▪Repeatable measurements
▪Superior short and long term power stability
▪Repeatable measurements
▪Electrodeless operation for long life
▪Reduced consumable costs
▪Minimal recalibration of instrument
The EQ-77 system consists of a Power Supply Controller unit, Lamp House unit, and interconnecting
cable. Connection to AC power is required for operation. Connections to nitrogen purge gas and cooling
water are required.
For additional information contact Energetiq Technology Technical Support Services at [phone]
X111 or e-mail: [e-mail]
2. Safety instructions
2.1. General Precautions
The output beam from the EQ-77 should be blocked when not in use with an electronic shutter or other
appropriate beam blocking device. Due to the possibility of generating ozone with some models of EQ-77
when ambient oxygen is exposed to short wavelength light, the beam should always be enclosed in an
appropriate beam pipe, tube, or enclosed space. We suggest purging any beam transport space with dry
nitrogen gas.
The EQ-77 source must also be cabled correctly and connected to a power source with a protective earth
ground prior to operation.
Refer to the Installation section of this manual in Section 4 for details of the facilities connections.
There are no user-serviceable parts inside the EQ-77. For any problems encountered during operation,
please contact Energetiq Technology for assistance. If there is a component failure, do not attempt to
open the Power Supply Controller or Lamp House enclosure of the EQ-77.
The EQ-77 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp and
possible injury from flying fragments can occur if the lamp is mishandled.

2
Do not open the enclosure of either the Lamp House or the Power Supply Controller. Dangerous
invisible infrared laser beams and hazardous voltages exist inside the Lamp House. Opening the
chassis both voids the warranty and exposes the user to dangerous radiation and hazardous voltages.
This AC cord supplied is for EQ-77 only. This AC cord cannot be used with other electrical
equipment.
The power shutdown mechanism of this laser unit is the AC power plug. Do not arrange the
equipment that makes it difficult to connect or disconnect the AC power plug.
WARNING: This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure
to the direct or reflected output beam. Make certain that the appropriate output beam shields and
optics are in place prior to energizing the unit. All interlocks must be satisfied prior to operation;
failure to do so may lead to hazardous conditions.
CAUTION: The EQ-77 emits dangerous levels of UV radiation. Even short exposures to skin or
eyes may cause burns. Ensure that only authorized personnel are in the vicinity of source during
operation. Personnel in vicinity of operating source should wear protective eyewear, clothing, and
gloves. Lighted UV warning lights and signs posted on doors to lab areas may help prevent
accidental exposure.
WARNING: The EQ-77 utilizes an internal Class 4 IR laser capable of causing severe injury to
eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding any problems
with the unit.
WARNING: When working near the emitted light, always wear protective devices (conforming to ISO
4007/4849/4850/4854/4855 or equivalent regulations). The lamp installed in this housing emits intense ultraviolet rays,
which are harmful to the eyes and skin. Looking directly into the emitted light or allowing the light to fall on the skin will
damage eyesight or cause skin burns.
WARNING: If the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment
may be impaired.
The power supply must be properly grounded by the outlet to prevent electrical shocks.
Securely plug in the power supply connector to avoid looseness or play. Loose connections may result in
faulty operation.
2.2. Definition of equipment and document symbols and designations
Do not operate the EQ-77 if the covers are removed or is defective in any way. Contact Energetiq if any
problems with the equipment are suspected.
The EQ-77 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp and
possible injury from flying fragments can occur if the lamp is mishandled.
Do not open the enclosure of either the Lamp or the Controller. Dangerous invisible infrared laser
beams and hazardous voltages exist inside the Lamp. Opening the chassis both voids the warranty and
exposes the user to dangerous radiation and hazardous voltages.

3
CAUTION: controls or adjustments or performance of procedures other than those specified
herein may result in hazardous radiation exposure.
WARNING: Invisible laser radiation avoid eye or skin exposure to direct or scattered radiation
Class 4 laser product
Alternating current
The EQ-77 is a Class 4 Laser Product. All appropriate laser safety measures should be in place before
operating the system. Consult your facility's laser safety officer. Laser protective eyewear should be worn at
all times while operating the system.
For further safety information, refer to ANSI Z136.1 Standard for Safe Use of Lasers, available from Laser
Institute of America (www.laserinstitute.org).
2.3. Laser Information
The EQ-77 uses a patented* laser drive system to excite a plasma that radiates in the UV as well as the
visible bands. A class 4 laser is located in the Lamp House enclosure. The optical configuration of the
Lamp House ensures that the direct laser beam cannot exit the unit. The EQ-77 laser product is designated
as Class 1 during all normal operation.
The parameters of the non-accessible internal laser are given below in Table 1.
Parameter
Value
Wavelength
974 nm
Emission Type
CW
Laser Power for classification
<36 mW via 7mm measurement
aperture
Beam Diameter
~25 mm at aperture
Divergence
>100 mRad
Transverse Beam Mode
Diffuse
Table 1: Embedded Laser Parameters
No regular maintenance is required for the EQ-77. Any service to the system must be performed only by
factory authorized and trained technicians. To avoid injury, under no circumstances should the user open or
modify the Lamp House or Power Supply Controller enclosure.
The unit must not be operated if the covers are removed or it is defective in any way. Contact Energetiq if
any problems with the equipment are suspected.
* US 7435982, 7786455, 8525138, 8969841, 9048000, 9185786 ; Japan 5410958, 5628253; Korea 10-1507617; UK
GB2450045; others pending

4
2.4. Labels and Safety Notification
The following safety labels appear on the product. Figure 1 shows the location of each label on the EQ-77
system and Table 2 describes their meanings.
Figure 1: EQ-77 Safety labels location
Labels and Safety Notifications
#
Label Picture
Description
1
Non-interlocked housing label –notifies of a potential hazard when covers
are removed
2
Manufacturer’s identification label on lamp house –gives the manufacturer’s
name and address, and the model, serial number, and date of manufacture
of the equipment.
3
UV Hazard warning label –indicates hazardous levels of UV light are
present.
4
Explanatory label –states the classification of the laser product. Class 1 is
the lowest hazard level classification.
5
Certification label –states that the equipment has been tested and verified
to meet the standards indicated

5
6
Manufacturer’s identification label on controller–gives the manufacturer’s
name and address, and the model, serial number, and date of manufacture
of the equipment.
Table 2: Safety Label Meanings
2.5. Safety Interlocks
The EQ-77 is equipped with interlocks to prevent operation of the device when any of the following
conditions are present:
▪An external interlock is open
▪No bulb is installed
2.6. External Interlocks
External interlock pins are provided for the customer’s use. Any suitable normally-open contact or solid-
state switch can operate the interlock circuit. The contact or switch should be rated for 80mA minimum at
5VDC.
The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection
open during operation or standby, the source is immediately disabled, and all light output from the aperture
ceases.
2.7. Correct disposal of the unit
When the EQ-77 has finally been removed from service, observe all local environmental regulations for
proper disposal.
3. Preparation of System
3.1. Unpacking guide
Start by inspecting all parts of the system for completeness and any damage incurred in shipping. The EQ-
77 shipping box should contain:
▪EQ-77 Power Supply Controller unit
▪EQ-77 Lamp House unit
▪Black interconnecting cable from Lamp House to Power Supply Controller (21-pin mixed D-sub)
OPTIONAL
▪EQ-99-RC Remote Control Module with interlock connector
▪I/O cable with 15 pin D- connector at each end
If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any
parts. There are no user-serviceable parts inside the EQ-77 Lamp House or Power Supply Controller unit.

6
3.2. System Description
the EQ-77 system consists of a Power Supply Controller unit, Lamp House, Controller to Lamp house
interconnect cable (not shown), and power input cable (not shown). I/O interface connections (also not
shown) are provided by the user.
The following sections provide descriptions of the system components and controls, and give an overview
of their functions. Refer to the “Installation” section of this manual (Section 4) for more detailed
information.
Figure 2: EQ-77 Controller
EQ-77 Controller
#
Component
Description
1
Power input connector
This is an IEC 320 inlet connector for AC power input. See Section 4 for detailed
information
2
Status indicator
See Table 2 for a list of descriptions
3
I/O Interface connector
Provides access to control and status signals
4
Lamp control connector
(21-pin mixed D-sub)
Provides various power and control signals to/from the Lamp House module. No other
connector or cable may be used with the EQ-77 other than the one supplied.
5
RS-485 Connector (9-pin
D-sub
Connector for optional RS-485 interface. See Section 10.4 for electrical details and
commands.

7
Located on the EQ-77 Controller front panel are LED system status indicators. The function of these
indicators is described below in
Table 3.
LED Label
Meaning (when lit)
POWER OK
AC power is connected to the EQ-77 Power Supply Controller
LAMP ON
UV Light is on
LASER ON
Laser power is ON and laser light is being produced within the Lamp
CONTROLLER FAULT
One of the following has occurred in the Power Supply Controller:
▪External interlock open
▪Controller internal temperature too high
▪Laser power not reaching setpoint
▪Laser temperature fault
▪Internal power supply voltage low
LAMP MODULE FAULT
One of the following has occurred in the Lamp House module:
▪Control Cable not connected properly
▪Lamphouse internal temperature too high
▪Ignition Failure
Table 3: Status Indicator LED Functions
Figure 3: EQ-77 Lamp
EQ-77 Lamp
#
Component
Description
1
Nitrogen Purge Inlet
These are the fittings for the required nitrogen purge gas. With no purge, ozone will form from
atmospheric oxygen and attenuate the light output in the 220 –280nm band. In addition,
atmospheric oxygen and water vapor will attenuate the output below 200nm.
2
Nitrogen Purge Outlet
3
Cooling Water Inlet
These fittings are for connection of cooling water required by the Lamp
4
Cooling Water Outlet
5
Control Connector (21-pin
mixed D-sub)
Provides various power and control signals to/from the Power Supply Controller. No other
connector or cable may be used with the EQ-77 other than the one supplied.
6
Retroreflector Assembly
Reflects radiation back to the light source
7
Lamp Window
The lamp windows at the optical output provide protection from the high pressure bulb inside
the Lamp House. An internally-threaded SM1 adapter is provided for easy connection of optical
hardware.

8
3.3. Physical Specifications
Dimensions (H x W x D)
▪Lamp: 128 x 175 x 102 mm (5.0 x 6.9 x 4.0 in)
▪Controller: 152 x 250 x 132 mm (6.0 x 9.8 x 5.2 in)
Weight
▪Lamp: 2.2 kg (4.9 lb)
▪Controller: 2.9 kg (6.5 lb)
3.4. Utility requirements
Electrical: 100 –240 V~ +/- 10%, 50/60 Hz, 350 W (Fuse:F5AL250V)
Purge gas: clean dry nitrogen, filtered to 5um, 20 psig (0.14 MPa) supply pressure
▪Fittings: 4mm push-to-connect
Cooling water: >= 1 liter/minute, 18 –30 °C, 100 psig (0.69 MPa) max. inlet pressure
▪Fittings: ¼ inch Swagelok
3.5. Remote Interface
Digital Inputs
▪Type: Optocoupler LED
▪Logic: Active High
▪Input voltage: 5VDC
▪Input current: 8mA
External Interlock Input Only (pin 13)
▪Type: Relay Coil
▪Logic: Active High
▪Input voltage: 5VDC
▪Input current: 80mA
Digital Outputs
▪Type: Open collector to ground (digital common)
▪Logic: Active Low
▪Voltage: 30VDC max.
▪Sink current: 8mA max.
User Power
▪Voltage: 5VDC, referenced to digital common
▪Current: 200mA maximum
3.6. External interlock connection
External interlock pins are provided for the customer’s use (see Section 4 for connection details). Any
suitable normally-open contact or solid-state switch can operate the interlock circuit. The contact or switch
should be rated for 8mA minimum at 5VDC.
The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection
open during operation or standby, the source is immediately disabled, and all light output from the aperture
ceases.

9
4. EQ-77 Setup
4.1. Connections
Installation of the EQ-77 consists of connecting electrical, water, and purge gas supplies, and connecting
the Lamp House module to the user’s equipment. Read "Installation Procedure" first before making any
connections.
4.1.1 Electrical Power
The EQ-77 requires 100 –240 V~, 50/60 Hz input voltage. Power consumption is 350 W maximum during
normal operation. Some OEM versions have higher current requirements.
4.1.2 Purge Gas
Purge gas required for operation. With no purge, ozone will form from atmospheric oxygen and attenuate
the light output in the 220 –280nm band. In addition, atmospheric oxygen and water vapor will attenuate
the output below 200nm.
The purge port fitting is a push-to-connect type, sized for 4mm O.D. tubing.
Clean and dry nitrogen from either a Dewar or research-grade N2bottle is recommended. Do not use any
other purge gas. Grade 6 or better gas purity is recommended to maintain cleanliness of the optics, and
gas should be filtered to <5um. Supply pressure should be 20 psig (0.14 MPa). With a 20 psig inlet
pressure, the EQ-77 will consume approximately 0.5 slm of flow.
4.1.3 Cooling Water
Cooling water fittings are 1/4-inch Swagelok female. Coolant flow rate of at least 1 liter/minute is required.
Inlet temperature should be between 18°C and 30°C
Care must be taken when making connections to avoid damage to the fittings and tubing. Two wrenches
must always be used –one to hold the fitting body, and another to tighten the nut. See Figure 4.
To make the connection: first insert tubing into the fitting and tighten the nut finger tight. Then tighten the nut
1-1/4 turns from the finger-tight position, using two wrenches as shown.

10
Figure 4: Water fittings
4.1.4 Optical Interface
See Section 10.1 for dimensional drawings of the lamp.
4.1.5 Signal Connections
The EQ-77 is controlled through the remote I/O connector.
Section 10.3 gives the pin assignments and functions for this interface. Connect to the user’s control
system using a suitable cable. Mating connector is a standard high-density 15-pin d-sub male (for example,
Amp part no. 748364-1 with contacts 1658670-2).
Optionally, connect a model EQ-99-RC remote control module to the I/O connector using the supplied
cable. The EQ-99-RC is shipped with an interlock jumper plug installed. To use the remote interlock
function, connect a remote contact or solid-state switch across pins 1 and 3. Mating connector is a standard
3-pin mini-DIN, CUI Inc. part no. MD-30 or equivalent. See Figure 5 for pin connections.
Hold the fitting body
with one wrench.
Tighten the nut
with the other.

11
Figure 1: EQ-99-RC Remote Control Rear Panel
User I/O can be powered either by the EQ-77 internal isolated power supply, or an external supply.
Section 10.5 shows connection schematics for both configurations.
4.1.6 Lamp House I/O
The black 21-pin mixed D-sub cable is used to connect the Lamp House to the Power Supply Controller.
This cable should be connected before AC power is applied to the Power Supply Controller.
4.1.7 RS-485 Interface
Connector J2 is a standard 9-pin male d-sub. Mating connector is a standard 9-pin female d-sub (for
example, AMP part no. 205203-3 with contacts 1-66504-0). See Section 10.4 for pin connections.
Port settings are 9600 bps, 8 data bits, 1 stop bit, no parity, no handshaking.
Installation of the EQ-77 consists of connecting electrical, water, and purge gas supplies, and connecting
the Lamp House module to the user’s equipment. Read "Installation Procedure" first before making any
connections.
4.2. Installation Procedure
1. Place the Power Supply Controller on a stable surface. The Power Supply Controller must be
placed within 2 meters of the Lamp House due to the length of the interconnecting cable. See
drawing Section 10.1 for dimensional details.
2. Connect the Lamp House unit optical output to the user equipment (after removing the window
cover). The beam should always be either directly coupled to a fiber optic cable, or enclosed in
an appropriate beam pipe, tube, or enclosed space and purged with nitrogen. Operating the
source without any output target or beam transport is not recommended, and may lead to unsafe
operating conditions. Consult Energetiq for applications information and suggested
configurations.
The Lamp House should be mounted with the output window on the side and the lamp mounting
surface oriented horizontally. The lamp has been factory aligned in this position. Mounting the
lamp in a different orientation will cause the plasma position inside the bulb to shift slightly and
may cause performance variations.
PIN 1
PIN 3

12
Setup the Lamp House unit with appropriate ultraviolet safety measures and laser light safety
measures in place. It is recommended that any enclosure or aperture-blocking hardware utilize
switches wired to the EQ-77 external interlock circuit.
See Section 10.1 for dimensional drawings of the lamp.
3. Connect the black 21-pin mixed D-sub interconnect cable from the Power Supply Controller to the
Lamp House.
4. Connect nitrogen purge gas to the Lamp House. Refer to “Connections” above.
5. Connect cooling water to the Lamp House. Refer to “Connections” above.
6. Connect user’s control system to the I/O interface connector per Section 10.3.
7. Alternately, if using the EQ-99-RC Remote Control Module, place it on a clean rigid surface.
Install the supplied 15-pin cable from the Power Supply Controller to the EQ-99-RC.
8. Connect AC input power source to the Controller Unit.
The system is now ready to operate.
4.3. Chiller Information
The system must be connected to a cooling system, see Section 8 for recommended chiller.
5. EQ-77 Operation
5.1. Startup
Once the lamp is set up properly, verify that all personnel that will be in contact with the lamp system are
aware of the potential hazards involved. It is the responsibility of the user to verify that the lamp is being
used safely.
This example assumes the use of the EQ-99-RC Remote Control Module to provide local control. If using a
custom control system, substitute the appropriate digital input and output lines from Section 10.3 for the
switches and LEDs described below.
1. With the EQ-99-RC Remote Control Module connected properly, review the status LEDs on the
Power Supply Controller. The POWER ON LED should be lit, and neither the CONTROLLER
FAULT nor LAMP MODULE FAULT LEDs should be lit.
2. Turn on the OPERATE Switch (place switch in UP position).
3. Within several seconds the LASER ON LED will light. Laser light is now present in the Lamp
House.
4. In approximately 20-150 seconds the igniter will be turned on automatically and the plasma will
ignite. The LAMP ON LED will be lit. The duration of the warm up time (20-150 seconds) will
depend on the temperature and previous operating condition of the EQ-77. The EQ-77 will
automatically detect when the unit has reached the optimum conditions for ignition.
5. If a bulb fails to ignite within 150 seconds after the OPERATE switch was activated, the LASER
ON LED will go out, the LAMP FAULT LED will be lit, and LAMP ON LED will remain off. This is
very unusual. However, if this occurs, turn the OPERATE switch to the OFF position (down) and
begin at Step 1 again. If this occurs multiple times, contact Energetiq.

13
5.2. Stopping
To turn the LAMP off, simply turn the OPERATE Switch to the OFF position. If the lamp will not be used for
some time, the AC supply can be turned off.
To minimize wear on the ignition components, it is best to avoid frequently starting and stopping the lamp. It
is recommended to run the lamp continuously if long off-periods are not required.
6. Service Requirements
There are no user-serviceable parts inside the EQ-77. For any problems encountered during operation,
please contact Energetiq Technology for assistance.
If there is a component failure, do not attempt to open the Controller or Lamp enclosure of the EQ-
77.
Any service to the system must be performed only by factory authorized and trained technicians. To avoid
injury, under no circumstances should the user open or modify the Lamp or Controller enclosure.
7. Troubleshooting Guide
7.1. Fault Indicator Block Diagram
Figure 7: Fault Indicator Block Diagram
Lamp Fault
Asserted
(pin 3 on remote)
Diagnosti
c
Safet
y
Bulb Interlock
Open
Lamp Head
Overtemp > 85C
Control Cable Not
Connected
Plasma
Extinguished
(after ignition)
Controller
Fault Asserted
(pin 4 on remote)
Laser Overtemp
(>60C)
Controller PCB
Overtemp (>82C)
Laser Current
Regulation Error
External
Interlock Open
Laser Temperature
Regulation Error
Signal Available on User Interface
Internal Logic That Generates Signal
Lamp On
De-Asserted
(pin 1 on remote)
Laser On
De-Asserted 150 sec
after Operate
Command
(pin 2 on remote)
Fail to Ignite
Failed Ignition

14
See below if any problems are encountered in operating the EQ-77.
Condition:
Controller Fault and/or Lamp House Fault LED(s) are ON.
Action:
▪Always begin operation of the source by verifying the interlocks.
▪Confirm that the external interlockcontact is closed (or that the black jumper plug is fully inserted
into the back of the EQ-99-RC Remote Control Box)
▪To reset or clear a Fault condition, actuate the “Operate” switch from the ON position to the OFF
position. If a fault was generated while the “Operate” switch was in the OFF position, first actuate
the switch tothe ON position, then to the OFF position. The unit will not turn on if a fault condition
exists.
▪If all ofthe interlocks are OK and either the lamp or controller interlock faults will not clear, please
contact the factory.
Condition:
Lamp fails to ignite after several tries.
Action: Contact Energetiq.
8. Accessories
The EQ-77 requires a chiller to maintain the cooling requirements in Section 3.4. For your convenience
Energetiq offers a suitable chiller produced by Solid State Cooling, Inc. You may also choose to procure
a chiller directly through your local Solid State Cooling, Inc representative (SSC Model U190 W Chiller .
PN
Description
EQ-77-CHILLER-KIT
EQ-77 Chiller / with Tubing Kit
Note: Cooling fluid is not included and must be locally sourced.
9. Warranty
Energetiq Technology, Inc’s warranty for the product is set forth in Section 5 of Energetiq Technology
Inc’s standard terms and conditions, found at www.energetiq.com.

15
10. Appendix
10.1.Dimensional Drawings
10.1.1 Controller Dimensional Drawings
EQ-77 Controller (in. [mm])
10.1.2 Lamp Dimensional Drawings
EQ-77 Lamp (mm)