Hamamatsu ENERGETIQ LDLS EQ-77 User manual

Model EQ-77
Laser-Driven Light Source LDLS®
Operation Manual
Revision 6, June 2022
Part Number DOC-7070

©2021 Energetiq Technology, Inc. All rights reserved.
Energetiq products are covered by the following patents: US 7435982, 7786455, 8525138,
8969841, 9048000, 9185786; Japan 5410958, 5628253; Korea 10-1507617; UK
GB2450045. All technical information, including drawings, schematics and specifications
contained in this document are the property of Energetiq and shall not be reproduced in
whole or in part without the written consent of Energetiq. The content of this document is
subject to change without notice.
Energetiq Technology, Inc.
205 Lowell St.
Wilmington, MA 01887
Phone: [phone]
Fax: [phone]
Email:[e-mail]
www.energetiq.com

Table of Contents
1. Introduction ............................................................................................................................................1
2. Safety instructions..................................................................................................................................1
2.1. General Precautions .....................................................................................................................1
2.2. Definition of equipment and document symbols and designations...............................................2
2.3. Laser Information ..........................................................................................................................3
2.4. Labels and Safety Notification.......................................................................................................4
2.5. Safety Interlocks............................................................................................................................5
2.6. External Interlocks.........................................................................................................................5
2.7. Correct disposal of the unit ...........................................................................................................5
3. Preparation of System ...........................................................................................................................5
3.1. Unpacking guide ...........................................................................................................................5
3.2. System Description .......................................................................................................................6
3.3. Physical Specifications..................................................................................................................8
3.4. Utility requirements .......................................................................................................................8
3.5. Remote Interface...........................................................................................................................8
3.6. External interlock connection ........................................................................................................8
4. EQ-77 Setup ..........................................................................................................................................9
4.1. Connections ..................................................................................................................................9
4.1.1 Electrical Power.........................................................................................................................9
4.1.2 Purge Gas.................................................................................................................................9
4.1.3 Cooling Water............................................................................................................................9
4.1.4 Optical Interface......................................................................................................................10
4.1.5 Signal Connections .................................................................................................................10
4.1.6 Lamp House I/O......................................................................................................................11
4.1.7 RS-485 Interface.....................................................................................................................11
4.2. Installation Procedure .................................................................................................................11
4.3. Chiller Information.......................................................................................................................12
5. EQ-77 Operation..................................................................................................................................12
5.1. Startup.........................................................................................................................................12
5.2. Stopping......................................................................................................................................13
6. Service Requirements..........................................................................................................................13
7. Troubleshooting Guide.........................................................................................................................13
7.1. Fault Indicator Block Diagram.....................................................................................................13
8. Accessories..........................................................................................................................................14
9. Warranty ..............................................................................................................................................14
10. Appendix .........................................................................................................................................15
10.1. Dimensional Drawings ................................................................................................................15
10.1.1 Controller Dimensional Drawings........................................................................................15

10.1.2 Lamp Dimensional Drawings ..............................................................................................15
10.2. Environmental Requirements......................................................................................................16
10.3. I/O Connector Pin Assignment....................................................................................................16
10.4. RS-485 Interface Pin Assignment...............................................................................................16
10.5. Remote Interface Schematic.......................................................................................................17
10.6. Serial Interface Commands.........................................................................................................18

1
1. Introduction
The EQ-77 Laser Driven Light Source is a broad-band lamp system for use in a wide variety of applications.
The lamp produces high brightness, broad-band light from DUV wavelengths through visible and beyond.
The output is very stable, and has a long lifetime before any service is required. A simple control interface
ensures ease of use.
Some of the advantages of the EQ-77 include:
▪Very high brightness across complete spectrum
▪190nm through visible and beyond
▪Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
▪Simplified optical system
▪Excellent spatial stability
▪Repeatable measurements
▪Superior short and long term power stability
▪Repeatable measurements
▪Electrodeless operation for long life
▪Reduced consumable costs
▪Minimal recalibration of instrument
The EQ-77 system consists of a Power Supply Controller unit, Lamp House unit, and interconnecting
cable. Connection to AC power is required for operation. Connections to nitrogen purge gas and cooling
water are required.
For additional information contact Energetiq Technology Technical Support Services at [phone]
X111 or e-mail: [e-mail]
2. Safety instructions
2.1. General Precautions
The output beam from the EQ-77 should be blocked when not in use with an electronic shutter or other
appropriate beam blocking device. Due to the possibility of generating ozone with some models of EQ-77
when ambient oxygen is exposed to short wavelength light, the beam should always be enclosed in an
appropriate beam pipe, tube, or enclosed space. We suggest purging any beam transport space with dry
nitrogen gas.
The EQ-77 source must also be cabled correctly and connected to a power source with a protective earth
ground prior to operation.
Refer to the Installation section of this manual in Section 4 for details of the facilities connections.
There are no user-serviceable parts inside the EQ-77. For any problems encountered during operation,
please contact Energetiq Technology for assistance. If there is a component failure, do not attempt to
open the Power Supply Controller or Lamp House enclosure of the EQ-77.
The EQ-77 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp and
possible injury from flying fragments can occur if the lamp is mishandled.

2
Do not open the enclosure of either the Lamp House or the Power Supply Controller. Dangerous
invisible infrared laser beams and hazardous voltages exist inside the Lamp House. Opening the
chassis both voids the warranty and exposes the user to dangerous radiation and hazardous voltages.
This AC cord supplied is for EQ-77 only. This AC cord cannot be used with other electrical
equipment.
The power shutdown mechanism of this laser unit is the AC power plug. Do not arrange the
equipment that makes it difficult to connect or disconnect the AC power plug.
WARNING: This unit emits ultraviolet (UV) radiation that is harmful to humans. Avoid exposure
to the direct or reflected output beam. Make certain that the appropriate output beam shields and
optics are in place prior to energizing the unit. All interlocks must be satisfied prior to operation;
failure to do so may lead to hazardous conditions.
CAUTION: The EQ-77 emits dangerous levels of UV radiation. Even short exposures to skin or
eyes may cause burns. Ensure that only authorized personnel are in the vicinity of source during
operation. Personnel in vicinity of operating source should wear protective eyewear, clothing, and
gloves. Lighted UV warning lights and signs posted on doors to lab areas may help prevent
accidental exposure.
WARNING: The EQ-77 utilizes an internal Class 4 IR laser capable of causing severe injury to
eyes or skin. Do not open or attempt to service this unit. Contact Energetiq regarding any problems
with the unit.
WARNING: When working near the emitted light, always wear protective devices (conforming to ISO
4007/4849/4850/4854/4855 or equivalent regulations). The lamp installed in this housing emits intense ultraviolet rays,
which are harmful to the eyes and skin. Looking directly into the emitted light or allowing the light to fall on the skin will
damage eyesight or cause skin burns.
WARNING: If the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment
may be impaired.
The power supply must be properly grounded by the outlet to prevent electrical shocks.
Securely plug in the power supply connector to avoid looseness or play. Loose connections may result in
faulty operation.
2.2. Definition of equipment and document symbols and designations
Do not operate the EQ-77 if the covers are removed or is defective in any way. Contact Energetiq if any
problems with the equipment are suspected.
The EQ-77 utilizes a quartz lamp containing a high-pressure gas fill. Explosion of the lamp and
possible injury from flying fragments can occur if the lamp is mishandled.
Do not open the enclosure of either the Lamp or the Controller. Dangerous invisible infrared laser
beams and hazardous voltages exist inside the Lamp. Opening the chassis both voids the warranty and
exposes the user to dangerous radiation and hazardous voltages.

3
CAUTION: controls or adjustments or performance of procedures other than those specified
herein may result in hazardous radiation exposure.
WARNING: Invisible laser radiation avoid eye or skin exposure to direct or scattered radiation
Class 4 laser product
Alternating current
The EQ-77 is a Class 4 Laser Product. All appropriate laser safety measures should be in place before
operating the system. Consult your facility's laser safety officer. Laser protective eyewear should be worn at
all times while operating the system.
For further safety information, refer to ANSI Z136.1 Standard for Safe Use of Lasers, available from Laser
Institute of America (www.laserinstitute.org).
2.3. Laser Information
The EQ-77 uses a patented* laser drive system to excite a plasma that radiates in the UV as well as the
visible bands. A class 4 laser is located in the Lamp House enclosure. The optical configuration of the
Lamp House ensures that the direct laser beam cannot exit the unit. The EQ-77 laser product is designated
as Class 1 during all normal operation.
The parameters of the non-accessible internal laser are given below in Table 1.
Parameter
Value
Wavelength
974 nm
Emission Type
CW
Laser Power for classification
<36 mW via 7mm measurement
aperture
Beam Diameter
~25 mm at aperture
Divergence
>100 mRad
Transverse Beam Mode
Diffuse
Table 1: Embedded Laser Parameters
No regular maintenance is required for the EQ-77. Any service to the system must be performed only by
factory authorized and trained technicians. To avoid injury, under no circumstances should the user open or
modify the Lamp House or Power Supply Controller enclosure.
The unit must not be operated if the covers are removed or it is defective in any way. Contact Energetiq if
any problems with the equipment are suspected.
* US 7435982, 7786455, 8525138, 8969841, 9048000, 9185786 ; Japan 5410958, 5628253; Korea 10-1507617; UK
GB2450045; others pending

4
2.4. Labels and Safety Notification
The following safety labels appear on the product. Figure 1 shows the location of each label on the EQ-77
system and Table 2 describes their meanings.
Figure 1: EQ-77 Safety labels location
Labels and Safety Notifications
#
Label Picture
Description
1
Non-interlocked housing label –notifies of a potential hazard when covers
are removed
2
Manufacturer’s identification label on lamp house –gives the manufacturer’s
name and address, and the model, serial number, and date of manufacture
of the equipment.
3
UV Hazard warning label –indicates hazardous levels of UV light are
present.
4
Explanatory label –states the classification of the laser product. Class 1 is
the lowest hazard level classification.
5
Certification label –states that the equipment has been tested and verified
to meet the standards indicated

5
6
Manufacturer’s identification label on controller–gives the manufacturer’s
name and address, and the model, serial number, and date of manufacture
of the equipment.
Table 2: Safety Label Meanings
2.5. Safety Interlocks
The EQ-77 is equipped with interlocks to prevent operation of the device when any of the following
conditions are present:
▪An external interlock is open
▪No bulb is installed
2.6. External Interlocks
External interlock pins are provided for the customer’s use. Any suitable normally-open contact or solid-
state switch can operate the interlock circuit. The contact or switch should be rated for 80mA minimum at
5VDC.
The interlock circuit must be connected to enable the operation of the unit. Should the interlock connection
open during operation or standby, the source is immediately disabled, and all light output from the aperture
ceases.
2.7. Correct disposal of the unit
When the EQ-77 has finally been removed from service, observe all local environmental regulations for
proper disposal.
3. Preparation of System
3.1. Unpacking guide
Start by inspecting all parts of the system for completeness and any damage incurred in shipping. The EQ-
77 shipping box should contain:
▪EQ-77 Power Supply Controller unit
▪EQ-77 Lamp House unit
▪Black interconnecting cable from Lamp House to Power Supply Controller (21-pin mixed D-sub)
OPTIONAL
▪EQ-99-RC Remote Control Module with interlock connector
▪I/O cable with 15 pin D- connector at each end
If any part is missing or appears damaged, contact Energetiq immediately. Do not attempt to substitute any
parts. There are no user-serviceable parts inside the EQ-77 Lamp House or Power Supply Controller unit.