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About this Manual
We’ve added this manual to the Agilent website in an effort to help you support
your product. This manual is the best copy we could find; it may be incomplete
or contain dated information. If we find a more recent copy in the future, we will
add it to the Agilent website.
Support for Your Product
Agilent no longer sells this product. Our service centers may be able
to perform calibration and repair if necessary, but no other support from
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HP References in this Manual
This manual may contain references to HP or Hewlett-Packard. Please note that
Hewlett-Packard's former test and measurement, semiconductor products and
chemical analysis businesses are now part of Agilent Technologies. We have
made no changes to this manual copy. In other documentation, to reduce
potential confusion, the only change to product numbers and names has been in
the company name prefix: where a product number/name was HP XXXX the
current name/number is now Agilent XXXX. For example, model number
HP8648A is now model number Agilent 8648A.
OPERATION AND SERVICE MANUAL
MODEL 4145A
SEMICONDUCTOR
PARAMETER ANALYZER
SERIAL NUMBERS
This manual applies to instruments with
serial numbers prefixed 2149J- and above.
0 COPYRIGHT: YOKOGAWA-HEWLETT-PACKARD, LTD., 1982
9-1, TAKAKURA-CHO, HACHIOJI-SHI, TOKYO, JAPAN
Manual Part No. 04145-90000
Microfiche Part No. 04145-90050 Printed: AUG. 1984
Table of Contents Model 4145A
TABLE OF CONTENTS
Section Title Page
I GENERAL
INFORMATION
l-l. Introduction . . . . . . . . . . . . . l-l
1-4. Description . . . . . . . . . . . . . . 1-2
1-11. Specifications . . . . . . . . . . . l-3
1-13. Safety Considerations . . . . l-3
1-16. Instruments Covered by
Manual . . . . . . . . . . . . . . . . 1-3
l-21. Options . . . . . . . . . . . . . . . . . . l-4
l-23. Accessories Supplied . . . . . 1-4
l-25. Accessories Available . . . . l-4
l-27. Warranty Limitation for
Accessories . . . . . . . . . . . l-4
II INSTALLATION
2-l. Introduction . . . . . . . . . . . . . 2-l
2-3. Initial Inspection . . . . . . . 2-l
2-5. Preparation for Use . . . . . . 2-l
2-6. Power Requirements . . . . . . . 2-l
2-8. Line Voltage and Fuse
Selection . . . . . . . . . . . . . 2-l
2-10. Line Frequency Filter . . . . 2-l
2-12. Power Cable . . . . . . . . . . . . . . 2-2
2-16. Operating Environment . . . . 2-2
2-19. Installation Instructions.
2-2
2-21. Installation
of Options
907, 908 and 909 . . . . . . 2-2
2-23. Storage and
Shipment . . . . . 2-4
2-24. Environment . . . . . . . . . . . . . . 2-4
2-26. Packaging . . . . . . . . . . . . e. . .
2-4
III
OPERATION
3-l. Introduction . . . . . . . . . . . . . 3-l
3-3. Panel Features . . . . . . . . . . . 3-2
3-5. Flexible Disc Handling . . . 3-10
3-7. CRT Display . . . . . . . . . . . . . . 3-10
3-10. Self Test . . . . . . . . . . . . . . . . 3-12
3-12. Error Messages/Error Codes 3-12
3-14. Initial Control Setting . . 3-18
3-16. User-Area Filing
Operations . . . . . . . . . . . . 3-18
3-18. Arithmetic Capabilities . . 3-19
3-21. Source and Measurement
Channels . . . . . . . . . . . . . . 3-21
3-23. Stimulus/Measurement
Units (SMU) . . . . . . . . . . . 3-21
3-25. Voltage Sources (Vs) and
Voltage Monitors (Vm) . 3-23
3-27. Compliance . . . . . . . . . . . . . . . 3-23
3-29. Sweep Measurement . . . . . . . . 3-24
3-33. Time Domain Measurement . . 3-26
3-35. Integration Time . . . . . . . . . 3-27
ii .
Section Title Page
3-37. Auto-Calibration ........ 3-27
3-40. Display Pages ........... 3-28
3-42. Page Control ............ 3-28 .
3-45. MENU Page ............... 3-30
3-47. CHANNEL
DEFINITION Page . 3-30
3-49.
SOURCESETUP Page .... ..'. 3-30
3-51. MEAS & DISP MODESETUP
Page ................. 3-30
3-53. GRAPHICS PLOT Page ...... 3-30
3-55. LIST DISPLAY Page ....... 3-30
3-57. MATRIX DISPLAY Page ..... 3-30
3-59. SCHMOOPLOT Page ........ 3-30
3-61. AUTO SEQUENCESETUP Page. 3-31
3-63. OUTPUT SEQUENCESETUP
Page ................. 3-31
3-65. USER FILE CATALOGPage . . 3-31
3-67.
OPERATION GUIDE Page .... 3-31
3-69.
DIAGNOSTICS Page ........ 3-31
3-71. Softkey Prompt (SKP) .... 3-31
3-73. System Messages ......... 3-31
3-75. Time Domain Measurement
Setup ................ 3-74
3-77. DUT Connection .......... 3-76 _1 .-'
3-79. DUT Connection Using the
16058A ............... 3-76
3-81. DUT Connection Using the
Connector Plate ...... 3-80
3-83. Floating Measurement .... 3-82
3-85. Guarding ................ 3-82
3-87. Applications Package .... 3-83
3-89.
HP-IB Interface ......... 3-86
3-91.
Connection to
HP-IB ..... 3-86
3-93. HP-IB
Status Indicators . 3-86
3-95.
LOCAL Key ...............
3-86
3-97.
HP-IB
Control Switch .... 3-86
3-99. HP-IB Interface
Capabilities ......... 3-87
3-101. HP-IB Control Modes ..... 3-87
3-103.
HP-GL
Control of the CRT 3-87
3-105. Remote Program Codes and
Parameter Setting .... 3-88
3-107. HP-GL Commands .......... 3-97
3-109. Device Clear ............ 3-100
3-111. Data Output ............. 3-101
3-113. Service Request Status
Byte ................. 3-102
3-115. Programming Guide for
4145A ................ 3-104
3-117.
PLOT .................... 3-108 __
3-119. PRINT ................... 3-110
3-121. External Display ........ 3-111' ‘-*we
3-123. Disc Copy ............... 3-112
3-125. Head Cleaning ........... 3-113
Model 4145A Table of Contents
TABLE OF CONTENTS
L’
Section Title Page
3-127. Protection againt Hazard-
ous Voltage Exceeding
+42V . . . ..d........... 3-114
3-129. PLOT/PRINT Operations
Using HP-IB Controller 3-114
3-131. Measurement Ranges and
Resolution . . . . . . . . . . . 3-116
3-133. Resolution and Format for
Displayed Data and Data
Output . . . . . . . . . . . . . . . 3-118
IV PERFORMANCETEST
4-l.
Introduction . .. . . . . . . . . . . 4-1
4-3. Equipment Required . . . . . . . 4-1
4-5. Test Record . . . . . . . . . . . . . . 4-l
4-7. Calibration Cycle .* . . . . . . 4-1
4-9. Graphics Display Unit
Intensity and Focus
Check . . . . . . . . . . . . . . . . . 4-2
4-10. Page and Key Function
Check . . . . . . . . . . . . . . . . . 4-4
4-11. SMU Accuracy Test . . . . . . . . 4-5
4-12. VS Accuracy Test . . . . . . . . . 4-19
4-13. VM Accuracy Test . . . . . . . . . 4-22
4-14. External CRT X-Y-Z Output
L' Check . . . .._............ 4-25
4-15.
HP-IB
Interface Test . . . . . 4-27
V
ADJUSTMENT
5-l. Introduction . . . . . . . . . . . . . 5-1
5-3. Safety Requirement . . . . . . . 5-l
5-7. Equipment.Required . . . . . . . 5-l
5-9. Adjustment Relationships . 5-1
5-11. Adjustment Locations . . . . . 5-1
5-13.
Initial
Operation
Procedure . . . . . . . . . . . . . 5-3
5-15. Basic Operating Checks . . . 5-3
5-17. Top Cover Removal . . . . . . . . 5-3
5-19. Bottom Cover Removal . . . . . 5-3
5-21. A3 Board Access . . . . . . . . . . 5-3
5-23. Graphics Display Unit
Intensity and Focus
Check and Adjustment . . 5-6
5-24. DC Power Supply Adjustment 5-8
5-25. Sample Hold Switch AC
Offset Adjustment . . . . . 5-11
5-26. Demultiplexer Noise
Rejection Adjustment . . 5-13
5-27. D-A Converter Gain
Adjustment . . . . . . . . . . . . 5-16
5-28. A-D Converter Gain
Adjustment . . . . . . . . . . . . 5-18
5-29. VM Range Adjustment . . . . . . 5-20
5-30. Mass Storage Unit Test . . . 5-23
5-32. Flexible-disc Drive Access 5-23
Section
5-34.
5-36.
5-38.
5-40.
5-43.
5-46.
5-49.
5-52.
Title Page
Disc Check . . . . . . . . . . . . . . .
Flexible-disc Drive Checks
and Adjustments ..a....
Sure Flexible-disc Drive
Checks and Adjustment .
MSU DIAGNOSTICS Mode . . . . .
MSU Read Test . . . . . . . . . . . .
MSU Write Test . . . ...*.....
MSU EXERCISER . . . . . . . . . ..e
Drive Belt Tension Check
and Adjustment . . . . . . . .
5-23
5-23
5-23
5-24
5-26
5-28
5-30
5-32
5-53.
Index
Timing Check and
Adjustment . . . . . . . . . . . . 5-33
5-54. Track Alignment Check
and Adjustment'........ 5-34
5-55. Track Zero Switch Check
and Adjustment . ..e....e 5-38
5-56.
Jitter
Check and
Adjustment . . . . . . . . e. . . 5-41
5-57. Index Detector Alignment
Check and Adjustment . . 5-43
VI REPLACEABLEPARTS
6-l. Introduction . . . . . . . . . . . . . 6-l
6-3. Abbreviations .....O...... 6-l
6-5. Replaceable Parts List ..* 6-l
6-7. Ordering Information . . . . . 6-2
6-10. Direct Mail Order System . 6-2
VII
MANUAL CHANGES
7-1. Introduction . . . . . . . . . . . . . 7-1
7-3. Manual Changes . . . . . . . . . . . 7-l
VIII SERVICE ’
8-l.
Introduction . . . . . . . . . . . . . 8-l
8-3. Safety Considerations . . . . 8-l
8-5. Recommended Test Equipment 8-l
8-7. Troubleshooting . . . . . . . . . . 8-l
8-9. Repair . . . . . . . . . . . . . . . . . . . 8-l
8-11. Block,,iDiagram Discussion . 8-2
8-13. Board Level Theory . . . . . . . 8-4
8-15. Troubleshooting Guide . . . . 8-6
8-17. Assembly Removal . . . . . . . . . 8-8
8-18. Assembly Locations . . . . . . . 8-8
8-20. Al through A8 Board Removal 8-9
8-22. Al3 through Al6
Board Removal . . . . . . . . . . 8-9
8-24. Front Panel Removal . . . . . . 8-9 ry
8-26. Display (1345A) Removal . . 8-10
8-28. Rear Assembly A Removal 8-11
8-30. All and A12 Board Remova;: 8-11
8-32. Rear Assembly B Removal . . 8-12
8-34. FDD and A9 Board Removal . 8-13
8-36. Al Graphic Display
Control Board. . . . . . . . . . 8-69
...
111
-
Table of Contents Model 4145A
TABLE OF CONTENTS i
Section
Title Page Section Title
‘---I
Page
8-38.
A2 Microprocessor
Digital Control Board . . . . . . 8-72
8-40.
A3 SMU Control and A-D
Converter Board . . . . . . . . . . . . 8-78
8-42. A4 D-A Converter Board . . . . . . . 8-84
8-44. A5
SMU Board . . . . . . . . . . . . . . . . . 8-98
8-46. A9 HP-IB and MSU
Control Board . . . . . . . . . . . . . . 8-111
8-48.
A10 Keyboard and
Display Control Board .. . . . . 8-115
8-50.
All Switching Power
Supply Board . . . . . . . ...*....
8-120
8-52. Al3
SMU Power Source
Board . . . . . . . . . . . . . . . . .. . . . . 8-129
8-54.
A16 Vs/Vm Board . . . . . . . . .. . . . . 8-138
LIST OF TABLES
Number Title Page Number Title Page
l-l. Specifications ................ l-5
1-2.
Reference Data ................ 1-13
1-3.
Accessories Supplied .......... 1-16
HP-IB Interface Test Program . m 4-29
Controller Instructions and
Operator Response for
HP-IB
Interface Test Program . . . . . 4-33
Error Messages for HP-IB
Interface Test Program . . . . . 4-35 .- u
4-12.
4-l 3.
4-14.
3-l.
4145A Self Test . . . . . . . . . . . . . . .
3-l 2
3-2.
Error Messages . . . . . . . ..?......
3-13
3-3.
Operational Error-Codes . . . . . . .
3-l 5
3-4.
Self Test Error-Codes . . . . . . . . .
3-17
3-5.
Arithmetic Operators . . . . . . . . . . 3-19
3-6.
SMU Source Ranges . . . . . . . . . . . . .
3-22
3-7.
Application Package Setups . . . .
3-83
3-8. HP-IB Interface Capabilities . . 3-87
3-9.
HP-GL Commands . . . . . . . . . . . . . . . .
3-97
3-l 0.
Recommended HP-IB Plotters . . . .
3-l 08
3-l 1.
Recommended
HP-IB
Printers . . . .
3-110
3-12.
Recommended External Displays .
3-l
11
3-13.
Number of Output/Display Digits 3-118
5-l. Adjustable Components . ...+.... 5-2
5-2.
Adjustment Requirements . . . . . . . 5-4
5-3.
Check Points and Limits . . ...*. 5-10
5-4.
Test Point/Trimmer Capacitor
5-5.
5-6.
5-7.
Combination . . . . . . . . . . . . . . . . 5-14
MSU
DIAGNOSTICS
Mode . . . . . . . . . . 5-24
Message on MSU
EXERCISER
Page . 5-30
MSU EXERCISER
Softkey Prompts . 5-31
List of Reference Designators
and Abbreviations .......... 6-l
Manufacturers Codes ........... 6-2
Replaceable Parts ............. 6-3
6-l.
4-A
4-8
4-T.
4-2.
4-3.
Recommended Test Equipment . . . .
Source Parameter Changes . . . . . .
Test Limits for Voltage Control
Accuracy Test . . . . . . . . . . . . . .
Source Parameter Changes . . . . . .
Test Limits for Voltage
Measurement Accuracy Test . .
Source Parameter Changes . . . . . .
Test Limits for Current
Measurement Accuracy Test . .
Source Parameter Changes . . ..e.
Test Limits for Current Control
Accuracy Test . . . . . . . . . . . . . .
Test Limits for SU Accuracy
Test ......................e
Test Limits for MU Accuracy
Test ..*....................
6-2.
6-3.
4-8
4-l 2
4-4.
4-5.
7-l. Manual Chanqes by Serial
4-12
4-15
Number .:....l.............. 7-l
Parts Change Information ...... 7-27
4-6.
4-7. 7-2.
8-l.
Hardware-related Error Codes . . 8-6
8-2.
SMU Status Codes . . . . . . . . . . . . . . 8-6
8-3. Jumper Settings . . . . . . . . . . . . . . . 8-19
8-4.
List of Digital Section
4-15
4-l 8
Troubleshooting Flow Diagrams 8-22
Program Locations . . . . . . . . . . . . . 8-76
Relationship between Current
and Range Resistors . . . . . . . . 8-103
V Monitor Amplifier Ranging . . . 8-104
4-8.
4-9. 4-18
4-10.
4-21 8-5.
8-6.
4-11. 4-24 8-7.
iv
Model 4145A List of Illustrations
LIST OF ILLUSTRATIONS
L
Number Title Page
l-l. Model 4145A and Accessories .... l-l
3-38.
l-2. Serial Number Plate ............ l-3
3-39.
2-l. Voltage and Fuse Selection .....
2-2
2-2.
Power Cable Supplied
...........
2-3
2-3.
Rack Mount Kit ................. 2-5
3-l.
3-2.
3-3.
3-4.
3-5.
3-6.
3-7.
3-8.
3-9.
3-10.
3-11.
L- I 3-12.
3-13.
3-14.
3-15.
3-16.
3-17.
3-18.
3-19.
3-20.
3-21 .
3-22.
3-23.
3-24.
3-25.
3-26.
3-27.
3-28.
3-29.
3-30.
3-31.
3-32.
3-33;
3-34.
3-35.
b’ +” 3-36.
3-37.
Contents of Section
III ........ 3-l
Front Panel Features ........... 3-2
Rear Panel Features ............ 3-8
Disc Installation
and Removal . . 3-10
Useable Display Area ........... 3-11
Operator Adjustment ............ 3-11
Byte Size of Arithmetic
Expressions .................
3-20
Source and Measurement Channels
of the 4145A ................ 3-21
Simplified Circuit Diagram of
One of the Four SMUs ........ 3-21
Specifiable Voltage/Current
output ......................
3-22
Simplified Circuit Diagram of Vs 3-23
Simplified Circuit Diagram of Ym 3-23
Voltage/Current Output
Specified by the
COMPLIANCE . 3-23
Staircase Sweep Output .........
3-24
Relationship Between VARl and
VAR2 ........................ 3-25
Relationship Between VARl and
VARl' ....................... 3-26
Time Domain Measurement ........ 3-27
Page Control Keys ..............
3-28
Page Flow and the Relationship . 3-29
MENU Page
...................... 3-32
CHANNEL
DEFINITION Page ........ 3-34
SOURCESETUP Page ..............
3-38
MEAS
& DISP
MODESETUP Page .... 3-42
GRAPHICS
PLOT Page .............
3-48
LIST DISPLAY
Page ..............
3-54
MATRIX DISPLAY
Page ............
3-57
SCHMOOPLOT Page
............... 3-59
AUTO SEQUENCESETUP Page .......
3-62
OUTPUT SEQUENCESETUP Page .....
3-66
4145A FILE
CATALOGPage ........
3-67
OPERATION GUIDE Page ........... 3-70
DIAGNOSTICS Page ............... 3-71
Time Domain Measurement Setup . . 3-74
DUT Connection Using the 1605811. 3-76
DUT Connection Using the
Connector Plate ............. 3-80
Example of Guarding ............ 3-82
Connection Examples for
Application Package ......... 3-85
Number Title Page
3-40.
3-41.
3-42.
3-43.
3-44.
3-45.
3-46.
3-47.
3-48.
3-49.
3-50.
3-51.
4-l.
4-2.
4-3.
4-4.
4-5.
4-6.
4-7.
4-8.
4-9.
4-l 0.
4-l 1.
4-12.
4-l 3.
4-14.
4-15.
4-l 6.
4-17.
5-l .
5-2.
5-3.
5-4.
5-5.
5-6.
5-7.
5-8.
5-9.
HP-IB
Control Switch .......... 3-86
Remote Program Codes and
Parameter Setting ..........
3-88
Data Output Format ............ 3-l 00
Status Byte for the 4145A ..... 3-102
Sample Program 1 .............. 3-105
Sample Program 2 .............. 3-107
Plot Function ................. 3-108
Print Function ................ 3-110
External Display .............. 3-111
Disc Copy
.....................
3-112
Head Cleaning ................. 3-l-13
Programs for
HP-IB
controlled
PLOT Operations ............ 3-115
Measurement Ranges and
Resolution ................. 3-116
Display/Output Format ......... 3-119
Test Pattern for GDU .......... 4-2
GDU Connector Location ........ 4-3
Display for Key Function Check. 4-4
Voltage Control Accuracy Test
Setup ......................
4-5
Measurement Setup .............
4-6
Voltage Measurement Accuracy
Test Setup ................. 4-9
Measurement Setup ............. 4-10
Measurement Setup ............. 4-13
Measurement Setup .............
4-l 6
SU Accuracy Test Setup ........ 4-19
Measurement Setup ............. 4-21
MU Accuracy Test Setup ........
4-22
Measurement Setup .............
4-23
External CRT X-Y-Z Output
Check Setup ................
4-25
Scope Displays of X-Y-Z
Output (Example) ...........
4-26
HP-IB Interface Test
Setup .... 4-27
Program Listing
of HP-IB
Interface Test .............. 4-30
Test
Pattern for GDU .......... 5-6
INTENSITY
and FOCUS Locations . 5-6
Connector Location ............ 5-7
DC Power Supply Adjustment
Setup ......................
5-8
AllR17 Adjustment ............. 5-9
A5Jl Check .................... 5-10
Check Point Locations ......... 5-10
Sample Hold Switch AC Offset
Adjustment Setup ........... 5-11
AC Offset Adjustment .......... 5-12
5-l 0.
Check/Adjustment Point
Locations . . . . . . . . . . . . . . . . . . 5-12 __
V
~ -_ -- - _---
List of Illustrations Model 4145A
LIST OF ILLUSTRATIONS
Number
5-14.
5-15.
5-16.
5-17.
5-18.
5-19.
5-20.
5-21.
5-22.
5-23.
5-24.
5-25.
5-26.
5-27.
5-28.
5-29.
5-30.
5-31.
5-32.
5-33.
5-34.
5-35.
5-36.
5-37.
5-38.
5-39.
5-40.
6-l.
Title Page Number
D-A Converter Gain Adjustment
Setup . . . . . . . . . . . . . . . . . . . . . . . 5-16
Check/Adjustment Point
Locations . . . . . . . . . . . . . . . . . . . 5-17
Results from LED Annunciators . . 5-18
Check/Adjustment Point
Locations
l
. . . . . . . . . . . . . . . . . . 5-19
Vm Range Adjustment Setup . . . . . . 5-20
Test Point Locations . . . . . . . . . . . 5-22
Flexible-disc Drive Access .,... 5-23
Component Locations for MSU
DIAGNOSTICS Mode Setting . . . . 5-25
CRT Display of MSU DIAGNOSTICS
Page . . . . . . . . . . . . . . . . . . . . . . . . 5-25
CRT Display of MSU Read Test . . . 5-26
CRT Display of MSU Write Test . . 5-28
CRT Display fo MSU EXERCISER
Page . . . . . . . . . . . . . . . . . . . . . . . . 5-30
Drive Belt Tension Check and
Adjustment Setup . . . . . . . . . . . . 5-32
Index Timing Checks and
Adjustment . . . . . . . . . . . . . . . . . . 5-33
R47 Location . . . . . . . . . . . . . . . . . . . 5-33
Track Alignment Check and
Adjustment . . . . . . . . . . . . . . . . . . 5-34
Scope Display of Bursts ^l....... 5-35
Check/Adjustment Point Locations 5-37
Track Zero Switch and Adjustment
Setup . . . . . . . . . . . . . . . . . . . . . . . 5-38
Scope Display of Track Zero
Switch Switching . . . . . . . . . . . . 5-39
Check/Adjustment Point Locations 5-40
Jitter Check and Adjustment
Setup . . . . . . . . . . . . . . . . . . . . . . . 5-41
Scope Display of Jitter . . . . . . . . 5-42
Check/Adjustment Point Locations 5-42
Index Detector Alignment Check
and Adjustment Setup . . . . . . . . 5-43
Index Detector Alignment Gap . . . 5-44
Check/Adjustment Point Locations 5-45
Major Mechanical Parts
(Exploded View) ..,...,,...., 6-29
8-l.
8-2.
8-3.
8-4.
8-5.
8-6.
8-7.
8-8.
8-9.
8-10.
8-11.
8-12.
8-13.
8-14.
8-15.
8-16.
8-17.
8-18.
8-19.
8-20.
8-21.
8-22.
8-23.
8-24.
8-25.
8-26.
8-27.
8-28.
8-29.
8-30.
8-31.
8-32.
8-33.
8-34.
8-35.
Title
-- .&
Page
Four Major Sections of the 4145A 8-3
Overall Block Diagram .......... 8-5
Assembly Level Trouble Isolation
Flow Diagram ................ 8-7
Assembly Locations ............. 8-8
Front Panel Removal ............ 8-9
1345A Removal .................. 8-10
Rear Assembly A Removal ........ 8-11
All and A12 Board Removal ...... 8-12
Rear Assembly B Removal ........ 8-12
A19 Board Assembly ............. 8-13
FDD and A9 Board Removal ....... 8-13
Flow Diagram Notes ............. 8-14
Signature Analysis ............. 8-21
Al Board Troubleshooting
Flow Diagram ................ 8-25
A2 Board Troubleshooting
Folw Diagram ................ 8-31
A3 Board Troubleshooting
Flow Diagram ................ 8-43
A4 Board Troubleshooting
Folw Diagram ................ 8-53
A9 Board Troubleshooting
Flow Diagram ................ 8-59
A10 Board Troubleshooting
Flow Diagram ................ 8-65
Schematic Diagram Note ......... 8-68
Block Diagram of Al Board ...... 8-69
Al Graphic Display Control Board
Assembly Component Locations. 8-70
Al Graphic Display Control Board
Assembly Schematic Diagram . . 8-71
Block Diagram of the A2 Board . . 8-72
A2 Microprocessor Digital
Control Board Assembly
Component Locations ......... 8-74
A2 Microprocessor Digital
Control Board Assembly
Schematic Diagram ........... 8-75
Block Diagram of the.A3 Board . . 8-78
A3 SMU Control and A-D Converter
Board Assembly Component
Locations ................... 8-80
A3 SMU Control and A-D Converter
.Board Assembly Schematic
Diagram ..................... 8-81
Block Diagram of A4 Board ...... 8-84
I-V Converter Output ........... 8-85
Analog Switch .................. 8-85
A4 D-A Converter Board Assembly
Component Locations ......... 8-86
A4 D-A Converter Board Assembly
Schematic Diagram ........... 8-87
A5 Board Troubleshooting
Flow Diagram ................ 8-88
vi
List of Illustrations Model 4145A
LIST OF ILLUSTRATIONS
Number
8-36.
8-37.
8-38.
8-39.
8-40.
8-41.
8-42.
8-43.
8-44.
8-45.
8-46.
8-47.
8-48.
8-49.
8-50.
8-51.
8-52.
8-53.
~, -- 8-54.
8-55.
8-56.
8-57.
8-58.
8-59.
8-60.
8-61.
8-62.
8-63.
8-64.
8-65.
8-66.
8-67.
8-68.
Title Page
Self-Test Waveform . . . . . . . . . . . . . 8-97
SMU Board Block Diagram . . . . . . . . 8-98
SMU V Mode Operation . . . . . . . . . . . 8-99
SMU I Mode Operation . . . . . . . . . . . 8-99
Current Compliance in V Mode . . 8-100
V Error Amplifier . . . . . . . . . . . . . 8-100
Three Control Modes . . . . . . . . . . . 8-101
Example of Diode Feedback . . . . . 8-102
Power Amplifier Output Stage . . 8-102
Range Resistors . . . . . . . . . . . . . . . 8-103
Range Resistor Circuit . . . . . . . . 8-104
A5 SMU Board Assembly
Component Locations . . . . . . . . 8-106
A5 SMU Board Assembly
Schematic Diagram . . . . . . . . . . 8-107
A9
HP-IB and MSU
Control Board
Assembly Component Locations 8-112
A9 HP-IB and MSU Control Board
Assembly Schematic Diagram . 8-113
Block Diagram of Key Control . . 8-115
A10 Keyboard and Display Board
Assembly Component Locations 8-116
A10 Keyboard and Display Board
Assembly Component Locations 8-117
All Board Troubleshooting
Flow Diagram ..T............ 8-118
Rectifier Circuit . . . . . . . . . . . . . 8-120
Switching Circuit . . . . . . . . . . . . . 8-120
Power Loss Detection Circuit . . 8-121
All Switching Power Supply
Board Assembly
Component Locations " . . . . . . . 8-122
All Switching Power Supply
Board Assembly
Schematic Diagram . . . . . . . . . . 8-123
Al2 Board Troubleshooting
Flow Diagram . . . . . . . . . . . . . . . 8-124
Al2 DC Power Supply Board
Assembly Component Locations 8-126
Al2 DC Power Supply Board
Assembly Schematic Diagram . 8-127
Al3 Board Troubleshooting
Folw Diagram . . . . . . . . . . . . . . . 8-128
Voltage Change Sequence . . . . . ...8-129
Al3 SMU Power Source'Board
Assembly Component Locations.8-130
Al3 SMU Power Source Board
Assembly Schematic Diagram . 8-131
Al5 Board Troubleshooting
Flow Diagram . . . . . . . . . . . . . . . 8-132
Al5 Floating Power Supply Board
Assembly Component Locations 8-68
Number Title Page
8-69. Al5 Floating Power Supply Board
Assembly Schematic Diagram . 8-69
8-70. Al6 Board Troubleshooting
Flow Diagram . . . . . . . . . . . . . . . 8-136
8-71. Vs Block Diagram . . . . . . . . . . . . . . 8-138
8-72. Vm Block Diagram . . . . . . . . . . . . . . 8-138
8-73. Al6 Vs/Vm Board Assembly
Component Locations . . . . . . . . 8-140
8-74. Al6 Vs/Vm Board Assembly
Schematic Diagram . . . . . . . . . . 8-141
vii
Model 4145A SECTION I
SECTION I
GENERAL INFORMATION
l-l. INTRODUCTION
l-2. This operation and service manual
contains the information required to install,
operate, test, adjust, and service the
Hewlett-Packard Model 4145A Semiconductor
Parameter Analyzer. Figure l-l shows the
instrument and supplied accessories. This
section covers specifications, instrument
l-3. Listed on the title page of this manual is
a microfiche part number that can be used to
order 4 x 6 inch microfilm transparencies of the
manual. Each microfiche contains up to 60
photo-duplicates of the manual pages. The
microfiche package also includes the latest
manual changes supplement as well as all
pertinent service notes. To order an additional
manual, use the part number listed on the title
page of this manual.identification, description, options, accessories,
and other basic information.
4145A
04145-61622
-p&+-/y,,
G
04145-61623
04145-61,630
e7
required)
i P-L==-?lm?-&oC3
Figure l-l. Model 4145A and Accessories.
SECTION I Model 4145A
l-4. DESCRIPTION
l-5. The Hewlet t-Packard Model 4145A
Semiconductor Parameter Analyzer is a fully
automatic, high performance, programmable test
instrument designed to measure, analyze, and
graphically display the DC characteristics of a
wide range of semiconductor devices, such as
diodes, bipolar transistors, field-effect
transistors, wafers, ICs, etc. Main applications
include computer-aided design (CAD) of ICs, new
device evaluation, materials evaluation,
component selection for circuit design,
incoming/outgoing inspection, semiconductor
process control, quality control, and quality
assurance. It is equipped with four
programmable stimulus/measurement units
@MU), two programmable voltage source units
(Vs), two voltage monitor units (Vm), a fully
interactive graphics display, removable
flexible-disc storage, softkeys, full arithmetic
keyboard, and HP-IB. And it can be used on the
bench or as part of a complete measurement
system in the laboratory or on the production
line.
l-6. For device stimulation and characteristics
measurement, the 4145A has eight channels.
Channels 1 through 4 are stimulus/measurement
units (SMU); channels 5 and 6 are voltage source
units (Vs); and channels 7 and 8 are voltage
monitor units (Vm). _..
Each SMU channel has three modes of operation:
voltage source/current monitor (V), current
source/voltage monitor (I), and common (COM).
Source voltage and source current can be held
constant or swept linearly or logarithmically.
When used as a voltage source/current monitor
(V mode), each SMU can be programmed to
output DC voltages from OV to +lOOV over three
ranges--OV to f 19.999V, *2OV to +39.998V, and
+4OV to +lOOV--with a resolution of lmV, 2mV,
and 5mV, respectively. When used as a current
source/voltage monitor (I mode), each SMU can
be programmed to output currents from *lpA to
+lOOmA over nine ranges, with a resolution of
1pA max. (current measurement resolution is
50fA max.), depending on the current range.
Current through the sample in V mode and
voltage across the sample in I mode can be
limited to prevent damage to the sample.
The two Vs channels are programmable voltage
source& Output voltage can be held constant or
linearly or logarithmically swept from OV to
f 20V with 1mV resolution. The voltage sources
are used when many bias and voltage sources are
required.
Of the six source channels (four SMUs, two Vs),
any combination of three can be automatically
swept in a linear or logarithmic staircase manner
within the range of each channel. Hold times
from 0 to 650 sec$ds and delay times from 0 to
6.5 seconds can be programmed. In a
multi-channel sweep setup, one channel
functions as the main sweep channel. One of the
other channels can be swept synchronously with
the main channel, while one other channel can be
swept subordinately to the main channel. SMUs
not swept can be used as constant current or
constant voltage sources.
The two Vm channels are used to measure
voltages up to +2OV.
1-7. Measurement results, measurement
setups, operator prompts, error messages, and
diagnostics are displayed on a fully interactive,
microprocessor based graphics display.
Measurement results can be displayed in one of
four modes : graphic, list, matrix, and schmoo.
Front Panel softkeys provide a wide range of
automatic display control functions, such as
AUTO SCALE, STORE, RECALL, CURSOR,
MARKER, vertical and horizontal ZOOM, LINE
(two), GRAD, l/GRAD, X intercept, Y intercept,
and INTERPOLATE. Softkeys are used in all
phases of instrument operation--from
measurement setup to measurement
analysis-and make overall instrument operation
quick and easy.
By pressing the PLOT key or PRINT key, the
presently displayed screen, whether a
measurement result or measurement setup, can
be dumped directly onto an HP-IB compatible
printer/plotter, providing clear, inexpensive hard
copies. The plot area is user selectable within
the limits of the printer/plotter, and if a
multi-pen plotter is used, multi-color plots can
be made automatically. All PLOT and PRINT
operations are done automatically, without a
controller. Also, the 4145A’s display is equipped
with X-Y-Z outputs to allow connection of a
large-screen graphics display.
The 4145A is fluent in HP-GL (Hewlett- Packard
Graphics Language), permitting external control
of its display via the HP-IB.
Cursor and marker positioning is user
controllable via the front panel, and X-Yl-Y2
coordinates are digitally displayed on the CRT.
l-2