Inficon LDS3000 AQ Quick guide

Translation of the original operating instructions
LDS3000, LDS3000 AQ
Mass spectrometer module
jiqa54en1-13-(2211)
Catalog No.
560-300, 560-600
From software version
MS-Modul 3.14

INFICON GmbH
Bonner Straße 498
50968 Cologne, Germany

INFICON Table of contents
LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-13-(2211) iii
Table of contents
1 About this manual .......................................................................................................................................... 8
1.1 Other associated documents ................................................................................................................... 8
1.2 Warnings .................................................................................................................................................. 8
1.3 Target groups........................................................................................................................................... 9
1.4 Definition of terms .................................................................................................................................... 9
2 Safety............................................................................................................................................................. 12
2.1 Intended use .......................................................................................................................................... 12
2.2 Duties of the operator............................................................................................................................. 13
2.3 Owner requirements............................................................................................................................... 13
2.4 Dangers.................................................................................................................................................. 13
3 Scope of delivery, transport, storage......................................................................................................... 16
4 Description.................................................................................................................................................... 17
4.1 Function ................................................................................................................................................. 17
4.2 Design of device..................................................................................................................................... 18
4.2.1 Entire device (LDS3000)............................................................................................................. 18
4.2.2 Entire device (LDS3000 AQ)....................................................................................................... 19
4.2.3 Connection block ........................................................................................................................23
4.2.4 MSB box .....................................................................................................................................23
4.2.5 Markings on the device ............................................................................................................... 26
4.3 Technical data........................................................................................................................................ 26
4.4 Factory settings...................................................................................................................................... 27
5 Mounting LDS3000 ....................................................................................................................................... 31
5.1 Adjust the position of the connections to the installation dimensions .................................................... 31
5.2 Installing the mass spectrometer module on the test system ................................................................ 32
5.3 Select connection ULTRA, FINE, or GROSS......................................................................................... 33
5.4 Establish component connection ........................................................................................................... 34
5.5 Establish electrical connections ............................................................................................................. 35
6 Mounting LDS3000 AQ (Accumulation) .....................................................................................................36
6.1 Adjust the position of the connections to the installation dimensions .................................................... 36
6.2 Installing the mass spectrometer module on the test system ................................................................ 37
6.3 Select components and connect ............................................................................................................ 39
6.3.1 Variant 1...................................................................................................................................... 39
6.3.2 Variant 2...................................................................................................................................... 42

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iv LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-13-(2211)
6.4 Establish electrical connections ............................................................................................................. 44
7 Operation LDS3000 ...................................................................................................................................... 45
7.1 Switching the device on ......................................................................................................................... 45
7.2 Default settings ...................................................................................................................................... 46
7.3 Selecting a unit for the leak rate............................................................................................................. 47
7.4 Select device for pressure...................................................................................................................... 48
7.5 Select Compatibility Mode...................................................................................................................... 48
7.6 Select operation mode ........................................................................................................................... 50
7.7 Select gas type (mass)........................................................................................................................... 51
7.8 Calibrate device ..................................................................................................................................... 52
7.8.1 Time and general preferences .................................................................................................... 52
7.8.2 Internal Calibration Configuration and Start................................................................................ 54
7.8.3 External Calibration Configuration and Start............................................................................... 55
7.8.4 Start external dynamic calibration............................................................................................... 57
7.8.5 External calibration with sniffer line SL3000XL........................................................................... 59
7.8.6 Check the calibration ..................................................................................................................60
7.8.6.1 Calibration using the internal calibration leak test .............................................................60
7.8.6.2 Calibration using the external calibration leak test ............................................................60
7.8.7 Entering the calibration factor ..................................................................................................... 61
7.8.7.1 Calibration factor sniffing ................................................................................................... 61
7.8.7.2 Calibration factor vacuum .................................................................................................. 61
7.8.8 Setting machine and sniff factor.................................................................................................. 62
7.8.8.1 Setting machine and sniff factor manually ......................................................................... 62
7.8.8.2 Setting machine and sniff factor using machine calibration............................................... 63
7.9 Starting and stopping the measurement ................................................................................................ 63
7.10 Loading and saving parameters............................................................................................................. 64
7.11 Copying measurement data, deleting measurement data .....................................................................64
7.12 Suppressing gas backgrounds with "ZERO" functions .......................................................................... 65
7.13 Suppressing decreasing gas backgrounds with I·ZERO 3.0 Beta ......................................................... 66
7.14 Measurement result display with signal filters........................................................................................ 68
7.15 Control of the Gas Ballast Valve of the Backing Pump .......................................................................... 69
7.16 Selecting display limits ........................................................................................................................... 70
7.17 Setting trigger values .............................................................................................................................70
7.18 Setting capillary surveillance.................................................................................................................. 71
7.19 Set the rotation speed of the turbo molecular pump .............................................................................. 71
7.20 Cathode Selection.................................................................................................................................. 72

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LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-13-(2211) v
7.21 Settings for the XL sniffer adapter.......................................................................................................... 72
7.22 Display equivalence leak rate ................................................................................................................75
7.22.1 Calculate equivalence factor....................................................................................................... 75
7.22.2 Set equivalence factor and molar mass...................................................................................... 76
7.23 Reset settings ........................................................................................................................................77
8 Operation LDS3000 AQ (Accumulation)..................................................................................................... 78
8.1 Switching the device on ......................................................................................................................... 78
8.2 Default settings ...................................................................................................................................... 78
8.3 Selecting a unit for the leak rate............................................................................................................. 79
8.4 Select device for pressure...................................................................................................................... 80
8.5 Select Compatibility Mode...................................................................................................................... 80
8.6 Making basic settings via the wizard...................................................................................................... 83
8.7 Determine peak...................................................................................................................................... 84
8.8 Store leak rate of calibration leaks ......................................................................................................... 84
8.9 Calibrate device ..................................................................................................................................... 85
8.9.1 Time and general preferences .................................................................................................... 85
8.9.2 Entering the calibration factor ..................................................................................................... 87
8.9.3 Calibration factor vacuum ........................................................................................................... 87
8.9.4 Calibrate...................................................................................................................................... 87
8.10 Start and stop measurement (AQ Mode 2) ............................................................................................ 89
8.11 Perform ZERO .......................................................................................................................................90
8.12 Setting machine and sniff factor............................................................................................................. 90
8.12.1 Setting machine and sniff factor manually .................................................................................. 91
8.13 Carrying out a measurement.................................................................................................................. 92
8.14 Loading and saving parameters............................................................................................................. 93
8.15 Copying measurement data, deleting measurement data .....................................................................93
8.16 Adjust ”Zero time factor AQ” ..................................................................................................................93
8.17 Selecting display limits ........................................................................................................................... 94
8.18 Set pressure monitoring ......................................................................................................................... 94
8.19 Set the rotation speed of the turbo molecular pump .............................................................................. 95
8.20 Cathode Selection.................................................................................................................................. 95
8.21 Reset settings ........................................................................................................................................96
9 Using the expansion module (LDS3000, LDS3000 AQ) ............................................................................ 97
9.1 Selecting the type of expansion module ................................................................................................ 97
9.2 Settings for I/O module IO1000.............................................................................................................. 97

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vi LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-13-(2211)
9.2.1 General interface settings ........................................................................................................... 97
9.2.2 Assigning inputs and outputs ...................................................................................................... 97
9.2.2.1 Assigning the digital inputs of the I/O module.................................................................. 106
9.2.2.2 Assigning the digital outputs of the I/O module ...............................................................108
9.3 Settings for bus module BM1000 ......................................................................................................... 110
10 Warning and error messages (LDS3000, LDS3000 AQ).......................................................................... 111
10.1 Illustration of error codes with the help of the status LEDs .................................................................. 120
10.2 Display warnings as errors................................................................................................................... 120
11 Operating CU1000 (optional)..................................................................................................................... 122
11.1 Touchscreen elements......................................................................................................................... 122
11.1.1 Measurement display elements ................................................................................................ 122
11.2 Elements of the error and warning display........................................................................................... 125
11.3 Settings and functions.......................................................................................................................... 125
11.3.1 Touch screen settings............................................................................................................... 125
11.3.2 Operator types and authorizations............................................................................................ 129
11.3.2.1 Logging out the operator.................................................................................................. 130
11.3.3 Reset settings ........................................................................................................................... 130
11.3.4 Recording data.......................................................................................................................... 131
11.3.5 Calling up information ............................................................................................................... 132
11.3.6 Display equivalence leak rate for other gas .............................................................................. 134
11.3.6.1 Gas equivalent selection.................................................................................................. 135
11.3.6.2 Configure gas list ............................................................................................................. 136
11.3.6.3 Calculate equivalence factor............................................................................................ 137
11.3.6.4 Set equivalence factor and molar mass........................................................................... 138
11.3.7 Gas library................................................................................................................................. 139
11.3.8 Updating the software ............................................................................................................... 146
11.3.8.1 Updating the software of the control unit ......................................................................... 147
11.3.8.2 Checking and updating the software version of the MSB box ......................................... 147
11.3.8.3 Updating the software of the I/O module ......................................................................... 148
12 Maintenance................................................................................................................................................ 150
12.1 Maintenance at INFICON..................................................................................................................... 150
12.2 General maintenance information ........................................................................................................ 150
12.3 Change oil reservoir of turbo molecular pump ..................................................................................... 152
12.3.1 Introduction ............................................................................................................................... 152
12.3.2 Flood the turbo molecular pump ............................................................................................... 152
12.3.3 Removing old oil wick cartridge ................................................................................................ 153

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LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-13-(2211) vii
12.3.4 Exchange Porex rods................................................................................................................ 155
12.3.5 Inserting a new oil reservoir ...................................................................................................... 156
12.3.6 Confirm maintenance work ....................................................................................................... 159
12.4 LDS3000 AQ - maintenance relevant components.............................................................................. 160
12.5 Maintenance plan................................................................................................................................. 160
13 Decommissioning ...................................................................................................................................... 163
13.1 Shutting down the leak detector........................................................................................................... 163
13.2 Disposing of the mass spectrometer module ....................................................................................... 163
13.3 Send in mass spectrometer module for maintenance, repair or disposal ............................................ 163
14 Appendix ..................................................................................................................................................... 164
14.1 CE Declaration of Conformity............................................................................................................... 164
14.2 Declaration of Incorporation ................................................................................................................. 165
14.3 Declaration of Contamination............................................................................................................... 166
14.4 RoHS.................................................................................................................................................... 167
Index ............................................................................................................................................................ 168

1 | About this manual INFICON
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1 About this manual
This document applies to the software version stated on the title page.
Product names may occur in the document, which are added for identification
purposes only and belong to the respective owner of the rights.
This operating manual describes the installation and operation of the LDS3000 mass
spectrometer module. It is available in two variants:
• LDS3000
• LDS3000 AQ (accumulation), switchable to all other operating modes.
1.1 Other associated documents
Operating Manual Control Unit CU1000 jina54
Operating instructions bus module jiqb10
Operating instructions I/O module jiqc10
Operating instructions XL sniffer adapter jinxa54
Interface protocols jira54
1.2 Warnings
DANGER
Imminent hazard resulting in death or serious injuries
WARNING
Hazardous situation resulting in potential death or serious injuries
CAUTION
Hazardous situation resulting in minor injuries
NOTICE
Hazardous situation resulting in damage to property or the environment

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1.3 Target groups
This instruction manual is intended for operators and technically qualified personnel
with experience in leak detection technology and the integration of leak detectors in
leak detection systems. In addition, the installation and use of the device require
knowledge of electronic interfaces.
1.4 Definition of terms
Mention of helium in the manual
The device is a helium leak detector. If you want to use a forming gas instead of
helium to detect the hydrogen contained therein, the information for helium also
applies to hydrogen.
Accumulation
In connection with leak testing, it is about the enrichment of tracer gas over a
definable period of time. This allows the detection of small leak rates without the use
of a vacuum chamber. Helium or forming gas can be used.
When you talk about "AQ” in this manual, it's about accumulation mode. It is only
available for devices in the AQ version.
Automatic tuning / mass setting
This function adjusts the mass spectrometer so that a maximum leak rate indicator is
achieved. In order to detect a maximum ion current with the ion detector, the control
computer adjusts the voltage for accelerating the ions within the selected mass range
accordingly.
During each calibration, there is an automatic adjusted.
Operation mode
The leak detector distinguishes between the "Vacuum" and "Sniffing" operation
modes. For the "Vacuum" operation mode, generally the tracer gas flows into the test
object. The pressure in the test object is less than the ambient pressure.
In the "Sniffing" operation mode, the tracer gas flows out from the test object and is
extracted with a sniffer probe. The pressure in the test object is greater than the
ambient pressure.
FINE
FINE denotes the connection to the turbo molecular pump for inlet pressures up to 0.4
mbar. This is also used for the "Sniffing" operation mode.

1 | About this manual INFICON
10 / 170 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-13-(2211)
Forming gas
Forming gas is a collective term for gas mixtures of nitrogen and hydrogen.
GROSS
GROSS donates the connection to the turbo molecular pump with the lowest
sensitivity. This allows high inlet pressures (up to 15 mbar).
Internal helium background
The measurement system of the leak detector also contains a residual amount of
helium. This creates an internal measurement signal component (background signal),
which overlaps the display of the leak right from the beginning and thus disturbs the
search for leaks.
So that this background signal can be suppressed, an internal "background
suppression" can be activated with the factory settings.
Minimum detectable leak rate
The minimum detectable leak rate which can be detected by the leak detector under
ideal conditions (< 5 x 10-12 mbar l/s).
ULTRA
ULTRA denotes the connection to the turbo molecular pump for the measurement
range with the highest sensitivity at inlet pressures below 0.4 mbar (adjustable).
Background signal
Helium or hydrogen (as part of water) are natural components of air.
Operation mode "Vacuum": Before any leak detection, a certain amount of the
adjusted tracer gas is already in the volume on the surfaces of the test chamber,
supply lines, and even in the leak detector itself. This certain amount of tracer gas
generates a measurement signal which is called the "Background signal". The
ongoing evacuation of the test chamber continuously reduces this background signal.
Operation mode "Sniffing": Ambient air is continuously fed into the leak detector via
the sniffer line. The amount of helium or hydrogen occurring naturally in air creates a
constant background signal.
Foreline pressure
Pressure of the backing pressure between the turbo molecular pump and the backing
pump.

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ZERO
There is helium that is weakly bound to the surfaces of a specimen as a natural part of
the ambient air and is pumped bit by bit into the measurement system of the leak
detector. It produces a slowly decreasing measurement signal.
If you want to hide this background signal or the display of existing leaks, then use the
ZERO function.

2 | Safety INFICON
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2 Safety
2.1 Intended use
The device is a modular leak detector for installation in industrial leak testing unit
systems. The tracer gases that can be measured with the device are helium and
hydrogen (forming gas).
The LDS3000 is suitable for overpressure and negative pressure testing, whereby in
addition to the test in vacuum, a local test with a sniffer line is also possible.
The LDS3000 AQ is intended for the measurement of test gases when enriched in an
external measuring chamber, but can also be rebuilt for all other purposes.
► You must install, operate and service the device only in compliance with these
operating instructions.
► Comply with application limits, see "Technical Data".
Incorrect usage Avoid the following unintended uses:
• Use in radioactive areas
• Pumping off aggressive, flammable, explosive, corrosive, microbiological, reactive
or toxic substances, creating a hazard
• Pumping down of condensible fluids and vapors
• Suctioning of liquids into the device
• Operation with excessive gas loads
• Operation with excessive foreline pressure
• Operation at too high ambient temperature
• Flushing with excessive flushing rate
• Usage of the pumps in plants where sudden loads and vibrations or periodic
forces act upon the pump

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2.2 Duties of the operator
• Read, observe, and follow the information in this manual and in the work
instructions provided by the owner. This concerns in particular the safety and
warning instructions.
• Always observe the complete operating instructions for all work.
• If you have any questions about operation or maintenance that are not answered
in this operating instructions, contact customer service.
2.3 Owner requirements
The following notes are for companies or any person who is responsible for the safety
and effective use of the product by the user, employees or third parties.
Safety-conscious operation
• Operate the device only if it is in perfect technical condition and has no damage.
• Only operate the device properly in accordance with this instruction manual, in a
safety and risk conscious manner.
• Adhere to the following regulations and observe their compliance:
– Intended use
– Universally valid safety and accident prevention regulations
– International, national and local standards and guidelines
– Additional device-related provisions and regulations
• Only use original parts or parts approved by the manufacturer.
• Keep this instruction manual available on site.
Personnel qualifications
• Only instructed personnel should be permitted to work with and on the device. The
instructed personnel must have received training on the device.
• Make sure that authorized personnel have read and understood the instruction
manual and all other applicable documents.
2.4 Dangers
The measuring instrument was built according to the state-of-the-art and the
recognized safety regulations. Nevertheless, improper use may result in risk to life and
limb on the part of the user or third parties, or damage to the unit or other property
may occur.
Hazards due to
liquids and chemicals
Liquids and chemical substances can damage the instrument.
• Comply with application limits, see "Technical Data".

2 | Safety INFICON
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• Do not suck up liquids with the instrument.
• Avoid sniffing gases, such as hydrogen, above the lower explosion limit. The
allowable composition of venal gas mixtures can be read in the safety data sheets
of the respective manufacturers.
• Only use the device away from areas with a risk of explosions.
Danger for wearers of
implants such as
pacemakers
There are magnets in the mass spectrometer module. The magnetic fields can
interfere with the function of the implant.
• Always keep at least 10 cm distance from the mass spectrometer module.
• In order not to fall below the minimum distance, avoid unpacking or mounting the
mass spectrometer module.
• Furthermore, take into account distances specified by the manufacturer of the
implant.
Dangers from electric
power
The device is operated with electrical voltages of up to 24V. Inside the device there
are voltages that are considerably higher. There is a danger to life from the contact of
conductive parts inside the device.
• Disconnect the device from the power supply prior to any installation and
maintenance work. Make sure that the electric power supply cannot reconnected
without authorization.
• Before starting the leak test, disconnect electrically operated test objects from the
power supply.
The device contains electric components that can be damaged from high electric
voltage.
• Make sure before connecting to the power supply that the supply voltage is 24 V
+/- 5%.
Kinetic energy If the rotating parts in the turbo molecular pump are blocked because of some
damage, high centrifugal forces must be absorbed. If this is not successful, the mass
spectrometer module will breakaway and possibly cause damage to property or
personal injury.
• Make sure the mount of the mass spectrometer module is able to absorb a braking
torque of 820Nm.
Injury from bursting
objects
There is risk of injury from bursting objects causes by a test object notwithstanding the
vacuum pressure when a test object is connected.
• Take appropriate precautions.
Danger due to
imploding measuring
chamber
An external measuring chamber connected to an LDS3000 AQ is pumped off at
approximately 60 sccm. Within normal measurement times (2 - 30 seconds) no
dangerous negative pressure is generated.
If the measuring chamber is leak-proof, but not vacuum resistant, and continues to
pump, it may implode. This can occur, for example, in a 1-liter measuring chamber
after about 10 minutes.

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• Do not continue pumping a measuring chamber after the measuring time has
expired.
• Consider suitable protective measures!

3 | Scope of delivery, transport, storage INFICON
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3 Scope of delivery, transport, storage
Scope of delivery Item Quantity
Mass spectrometer module1) 1
Plug for 24V connection 1
Pressure sensor PSG500 1
Self-locking nuts 4
Plug for Output 1
Plug for Gauges Exit 1
Inlet module (LDS3000 AQ version only) 1
Adapter DN16 with throttle2) (LDS3000 AQ version only) 1
Short instruction 1
USB flash drive with instructions, 3D drawings and videos 1
1.) Includes either 560-300 LDS3000 or 560-600 LDS3000 AQ (accumulation).
2.) See "Select components and connect [}39]".
►Please check the delivery for completeness after receiving the device.
Transport
NOTICE
Damage due to unsuitable packaging material
Transport in unsuitable packaging material can damage the device.
► Transport the unit only in the original packaging material.
► Keep original packaging material.
NOTICE
Damage to property due to missing attachment of the vibration damper
► Secure the vibration damper with the transport screws to prevent damage due to
vibration.
Storage ► Always store the device in compliance with the technical data, see "Technical data
[}26]".

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4 Description
4.1 Function
Objective The mass spectrometer module is a detection device for the test gases helium and
hydrogen. Integrated in test systems, the device is used to detect gas being emitted
from a test object in order to indicate leaks.
The device can be used both as a vacuum leak detector and a sniffer leak detector.
Sniffer lines with different lengths are available for the sniffer mode.
Mode AQ
(Accumulation)
In order to be able to detect small leak rates without the use of a vacuum chamber,
devices for the AQ mode are connected to an external measuring chamber. In the
external measuring chamber, the tracer gas is enriched (accumulation).
The test object filled with helium or forming gas under pressure is brought into the
measuring chamber or pressurized in the measuring chamber. If there is a leak in the
test object, the concentration of helium or forming gas in the measuring chamber will
increase. This increase is measured and output as a leak rate.
Device Interfaces The mass spectrometer module is part of the leak detection system LDS3000 and
LDS3000 AQ. Es can be operated in a test system together with a bus module or I/O
module and a data cable without additional INFICON accessories.
The MSB box outputs data on digital interfaces to the control unit CU1000, I/O module
IO1000 or bus module BM1000.
Other accessories With the available accessories XL sniffer adapter and sniffer line SL3000XL, it is
possible to capture leaks at a larger distance from the expected leak if the detection
limit is deteriorated (operation in "high flow" mode).

4 | Description INFICON
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4.2 Design of device
4.2.1 Entire device (LDS3000)
Fig.1: Mass spectrometer module LDS3000
1 Connection block. Connections for test system, backing pump, pressure
sensor PSG500, internal calibration leak and sniffer line, see also "Connection
block [}23]".
2 Pressure sensor PSG500 for measuring the pressure of the backing pump
3 Preamplifier of the mass spectrometer module
4 Turbo molecular pump with cooling unit
5 MSB box. Interfaces to the mass spectrometer module (see "MSB box
[}23]")
6 Inverter for turbo-molecular pump
7 Fasteners for installing the mass spectrometer module in a test system
8 Rating plate containing mass spectrometer module specifications

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4.2.2 Entire device (LDS3000 AQ)
In the accumulation version, the mass spectrometer module is integrated into a
special measurement setup by hardware and software.
1
2
3
4
5
6
7
Fig.2: LDS3000 AQ (schematic view)
1 Fan system
2 Test chamber at atmospheric pressure
3 Component to be tested
4 Connection
5 Sample gas flow (≈ 50 sccm)
6 LDS3000 AQ
7 Fore pump
For details of the measurement setup, see “Select components and connect [}39]“.

4 | Description INFICON
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1
2
3
4
5
Fig.3: Mass spectrometer module (execution accumulation)
1 Pressure sensor PSG500 for measuring the inlet pressure
2 GROSS throttle flange with connecting hose to backing pump
3 Hose to the measuring chamber
4 Inlet module
5 ULTRA connections blind flanged