Inficon Modul1000 User manual

OPERATING INSTRUCTIONS
jinb80en1-12 (2301) Translation of the original
Catalog no
550-300A
550-310A
550-330A
From software version V1.78
Modul1000
Modular leak detector

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jinb80en1-12 Operating Instructions(2301)
Imprint
INFICON GmbH
Bonner Straße 498
50968 Köln
Germany
Copyright©2022 INFICON GmbH, Köln. This document may only be reproduced
with the permission of INFICON GmbH, Köln.

Content 0-3
jinb80en1-12 Operating Instructions(2301)
Content
1 User guidelines ..................................................... 1-1
1.1 Application of this manual ............................................................... 1-1
1.2 Warning and danger symbols ......................................................... 1-1
1.3 Representation conventions ........................................................... 1-2
1.4 Explanation of terms ....................................................................... 1-2
2 Important safety instructions ................................. 2-1
2.1 Intended use ................................................................................... 2-1
2.2 Operator requirements ................................................................... 2-1
2.3 Restrictions of use .......................................................................... 2-2
2.4 Hazards under normal use ............................................................. 2-2
3 Description of equipment ...................................... 3-1
3.1 The housing .................................................................................... 3-1
3.2 Interfaces ........................................................................................ 3-3
3.3 Operating options ........................................................................... 3-3
3.3.1 Desktop operation .......................................................................... 3-4
3.3.2 Installation in switch cabinet ........................................................... 3-4
3.3.3 Remote control RC1000 ................................................................. 3-5
3.4 Scope of delivery ............................................................................ 3-6
3.5 Accessories .................................................................................... 3-6
3.5.1 Sniffer line SL200 ........................................................................... 3-6
3.5.2 Test chamber TC1000 .................................................................... 3-6
3.5.3 Set of male connectors for Interfaces ............................................. 3-7
4 Installation ............................................................. 4-1
4.1 Mechanical installation ................................................................... 4-1
4.2 Electrical installation ....................................................................... 4-2
4.2.1 Power supply .................................................................................. 4-2
4.2.2 Electrical interfaces ........................................................................ 4-3
4.2.3 Vacuum equipment connections .................................................... 4-7
5 Operation modes .................................................. 5-1
5.1 Vacuum .......................................................................................... 5-1
5.2 Partial flow mode ............................................................................ 5-2
5.3 Auto Leak Test ............................................................................... 5-3
5.3.1 Auto leak test settings .................................................................... 5-3
5.4 Commander Operation ................................................................... 5-4
5.4.1 Construction of a leak detection system ......................................... 5-5
5.4.2 Test procedure .............................................................................. 5-6
5.5 Sniffer mode ................................................................................... 5-8

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jinb80en1-12 Operating Instructions(2301)
6 Operation .............................................................. 6-1
6.1 Switching ON or OFF ...................................................................... 6-1
6.2 Status LED ...................................................................................... 6-1
6.3 Controller ........................................................................................ 6-2
6.4 Control commands .......................................................................... 6-3
6.5 Display ............................................................................................ 6-6
6.6 Calibration ....................................................................................... 6-8
6.6.1 Calibration in vacuum mode ........................................................... 6-9
6.6.2 Calibrating in sniffer mode ............................................................ 6-10
6.6.3 Calibration in Auto Leak Test ........................................................ 6-10
6.6.4 Calibrate in commander mode ...................................................... 6-11
6.7 Machine factor .............................................................................. 6-12
6.8 Menu structure .............................................................................. 6-13
6.9 Description of the menu items ...................................................... 6-15
6.9.1 Main menu back ....................................................................... 6-15
6.9.2 Main menu display ................................................................... 6-15
6.9.3 Main menu operating mode ..................................................... 6-16
6.9.4 Main menu Trigger & Alarms ................................................... 6-16
6.9.5 Main menu Calibration (CAL) Vacuum operating mode ........... 6-18
6.9.6 Main menu Settings ................................................................. 6-20
6.9.6.1 Main menu Settings Vacuum settings ................................. 6-20
6.9.6.2 Main menu Settings Zero & Background ............................ 6-23
6.9.6.3 Main menu Settings Mass ................................................... 6-23
6.9.6.4 Main menu Settings Interfaces ............................................ 6-23
6.9.6.5 Main menu Settings Miscellaneous ..................................... 6-26
6.9.6.6 Main menu Settings Loading / Saving parameters ............. 6-27
6.9.6.7 Main menu Settings Monitoring ......................................... 6-28
6.9.7 Main menu Info ....................................................................... 6-30
6.9.8 Main menu User authorization ................................................. 6-31
7 Maintenance work ................................................. 7-1
7.1 Maintenance and service at INFICON ............................................ 7-1
7.2 General notes on maintenance ....................................................... 7-1
7.3 Maintenance plan ........................................................................... 7-3
7.4 Maintenance intervals ..................................................................... 7-3
7.5 Description of the maintenance operations .................................... 7-6
7.5.1 Opening the device ......................................................................... 7-6
7.6 Replace oil wick cartridge ............................................................... 7-7
7.7 Changing the fuses ....................................................................... 7-10
7.7.1 Summary of the electrical fuses .................................................... 7-10
7.7.2 Replace mains fuse ...................................................................... 7-11
7.7.3 Replacing Interface Board Fuses ................................................. 7-12
7.8 Parameter storage (I•STICK) replacement ................................... 7-13
7.9 Flood filter replacement ................................................................ 7-14
8 Transport and disposal ......................................... 8-1
8.1 Sending in the device ..................................................................... 8-1

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jinb80en1-12 Operating Instructions(2301)
8.2 Disposal .......................................................................................... 8-2
9 Technical data ....................................................... 9-1
9.1 Device data ..................................................................................... 9-1
9.1.1 Power supply .................................................................................. 9-1
9.1.2 Weight / dimensions ....................................................................... 9-1
9.1.3 Characteristics ................................................................................ 9-1
9.1.4 Ambient conditions ......................................................................... 9-2
9.2 Control via the PLC inputs and outputs .......................................... 9-3
9.2.1 PLC inputs ...................................................................................... 9-3
9.2.2 PLC outputs .................................................................................... 9-5
9.3 The digital valve outputs ................................................................. 9-8
9.4 Analog output ................................................................................. 9-9
9.4.1 Configuration of the analog output ................................................. 9-9
9.5 Connection assignment ................................................................ 9-12
9.5.1 PLC IN / AUDIO ............................................................................ 9-12
9.5.2 PLC OUT ...................................................................................... 9-14
9.5.3 Pressure Gage ............................................................................. 9-15
9.5.4 Valves ........................................................................................... 9-18
9.5.5 Recorder ....................................................................................... 9-20
9.6 Installation drawing of the control unit for rack installation ........... 9-21
9.7 Commander Operation ................................................................. 9-22
10 Warnings and malfunction messages ................. 10-1
11 Ordering Information ........................................... 11-1
12 Appendix ............................................................. 12-1
12.1 EU Declaration of Conformity ....................................................... 12-1
12.2 Declaration of Incorporation ......................................................... 12-2
Index ..................................................................... 1-1

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jinb80en1-12 Operating Instructions(2301)

User guidelines 1-1
jinb80en1-12 Operating Instructions(2301)
1 User guidelines
1.1 Application of this manual
• Please read this manual before using the Modul1000.
• Save the manual so that you have it at hand at all times.
• If the device is passed on to a third party, this manual must be attached.
1.2 Warning and danger symbols
Imminent threat resulting in death or serious injuries
Hazardous situation resulting in potential death or serious injuries
Hazardous situation resulting in minor injuries
Hazardous situation resulting in damage to property or the environment

1-2 User guidelines
jinb80en1-12 Operating Instructions(2301)
1.3 Representation conventions
Notice Refers to very important information.
1Refers to an operation that has to be performed.
Refers to a result of a completed operation.
Refers to a button to be pressed.
• A list is displayed.
1.4 Explanation of terms
Automatic tuning / Mass setting
This function adjusts the mass spectrometer so that a maximum sensitivity is
achieved. The control computer changes the voltage that accelerates the ions within
the selected mass range so that a maximum ion current is detected by the ion detec-
tor. During each calibration, the mass is adjusted automatically.
Automatic Measurement range
selection
The amplification range of the preamplifier is automatically selected. The automatic
measuring range selection of the Modul1000 overlaps the entire leak rate range as
a function of the selected operating mode: Vacuum node or sniffing mode. Not only
the leak rate signal but also the pressure in the DUT (inlet pressure PE) and the fore-
line pressure (PV) are used for control purposes.
Automatic zeroing
Measurement and automatic adaptation to the helium background in vacuum oper-
ating mode. This function determines the internal device zero, which is then
deducted from the currently measured leak rate signal. This function is activated
during the calibration process or when the start button is pressed, if the Modul1000
has previously run for at least 20 seconds in "Standby" or "Ventilation" operating
mode. If the previously suppressed helium background continues to fall, the zero
point is automatically adjusted.
Internal helium background
The existing helium partial pressure in the measurement system. The size of the
internal helium background is measured in Standby operating mode and subtracted
from the measured signal. (See above: Automatic zeroing)

User guidelines 1-3
jinb80en1-12 Operating Instructions(2301)
Minimum detectable leak rate
The minimum detectable leak rate that the Modul1000 can safely detect
(5x10-12 mbar l/s).
MEASURE
MEASURE is the measurement range with an inlet pressure of less than 0.4 mbar.
The minimum detectable leak rate is < 5 x 10-12 mbar l/s.
Menu
The menu allows the operator of the Modul1000 to program it according to his
wishes. The menu has a structure that branches out in a tree-like manner.
Standby
The Modul1000 is ready for operation.
Turbo molecular pump
The turbo molecular pump (hereinafter abbreviated as TMP) is a vacuum pump
which generates the necessary high vacuum for the mass spectrometer.
The turbo molecular pump has drive electronics, also known as TMP converter.
Foreline pressure
Pressure of the backing pressure between the turbo molecular pump and the backing
pump.
Factory delivery condition
State of the settings of the Modul1000 as supplied by the factory.

1-4 User guidelines
jinb80en1-12 Operating Instructions(2301)

Important safety instructions 2-1
jinb80en1-12 Operating Instructions(2301)
2 Important safety instructions
2.1 Intended use
The Modul1000 is designed for vacuum leak testing. With the sniffer version of the
Modul1000 (Catalog no. 550-310), leaks can also be found on the DUT.
The Modul1000 may only be used for leak testing with the gases helium and hydro-
gen. It may only be used in dry rooms and on a dry surface.
Only use accessories from INFICON.
The intended use also includes:
• compliance with the technical data and environmental conditions,
• the use of standard and original accessories,
• observance of this document and compliance with the instructions and
regulations contained therein.
2.2 Operator requirements
The Modul1000 may only be installed and operated by trained personnel.
• Familiarize yourself with the function of the device. You may only install and
operate the device after reading and understanding the manual.
• Check with the local, state or national authorities for special requirements and
regulations.
• If you have any further questions regarding safety, operation and / or
maintenance, please contact our nearest representative.

2-2 Important safety instructions
jinb80en1-12 Operating Instructions(2301)
2.3 Restrictions of use
2.4 Hazards under normal use
Before you install the Modul1000, read all safety instructions carefully and make sure
you understand them correctly.
Hazard
Lethal hazard due to explosion
• Use the Modul1000 only outside explosively hazardous areas.
Danger from hazardous gases
Device is not suitable for corrosive, toxic and explosive substances.
• Use the device only to detect harmless materials.
Lethal hazard due to explosion
If explosive gases are used as tracer gases, the gas container could explode.
• Avoid flames and sparks, keep ignition sources away, and smoke only far from
the device.
Life threatening hazard from electric shock
• Keep the sniffer tip away from live parts.
Life threatening hazard from electric shock
• Connect the Modul1000 to a 3-pin power cable and ground it using a PE
connector.

Important safety instructions 2-3
jinb80en1-12 Operating Instructions(2301)
Warning
Life threatening hazard from electric shock
• Unplug the power cord before opening the Modul1000.
Hazard of injury and contamination by toxic gases
Use the Modul1000 to detect only harmless substances.
The device is unsuitable for toxic, corrosive, microbiological, explosive, radioactive
or other harmful substances.
• Please contact the manufacturer if such an application is planned.
Lethal hazard due to implosion
Components which are not pressure-resistant can be destroyed by implosion.
• Only connect containers and components suitable for vacuum to the inlet flange
of the Modul1000.
Lethal hazard due to a strong permanent magnets
The function of a heart pacemaker can be influenced by the magnet.
• Keep your heart pacemaker as far away from the device as the manufacturer
says.
Risk of injury from rotating parts
• Allow the Modul1000 to rest for at least 20 minutes before transporting.

2-4 Important safety instructions
jinb80en1-12 Operating Instructions(2301)
Risk of injury due to the device falling
• Carry the Modul1000 with two persons or use some kind of lifting device.
Injury to back due to heavy weight
• Carry the Modul1000 with two persons or use some kind of lifting device.
Health damage caused by exhaust gases and vapors of oil-tight pumps
• If the oil-sealed backing pump is used, connect an exhaust gas line before
operation.
Life threatening hazard from electric shock
• Operate the Modul1000 only in buildings and on a dry surface.
Danger of injury by the sucking inlet flange
If the vacuum function of the Modul1000 is activated, body parts that close the inlet
flange can be sucked in.
• Keep body ´parts away from the inlet flange.
Supposed risk
• If it is to be assumed that safe operation is no longer possible, put the device out
of operation and secure it against unintentional start-up.
• Please contact the INFICON service.

Important safety instructions 2-5
jinb80en1-12 Operating Instructions(2301)
Notice This can be the case:
• if the device shows visible signs of damage,
• if a fluid has penetrated the device,
• if the device is no longer functions,
• after extended storage under unfavorable conditions,
• after being subjected to significant strain from transport.
Caution
Injuries and property damage due to high voltages
The electronics of the Modul1000 can be damaged by high voltage.
• Assign digital inputs with a maximum voltage of 30V.
Injuries and property damage due to high electrical load
The electronics of the Modul1000 can be damaged by an excessive electrical load.
• Load relay outputs with max. 60V DC or 25V AC / 1A with ohmic load.
• Load semiconductor outputs with max. 30V / 1A.
Injuries and property damage without safe mains disconnection
The electronics of the Modul1000 can be destroyed if devices are connected to the
Modul1000, the electronics of which do not have a safe separation from the mains.
• Only connect devices to the Modul1000 whose connections are also safely
disconnected from the mains.
Injuries and subsequent damage due to a damaged turbo molecular pump
The turbo molecular pump can be damaged by jerky movements.
• During operation, move the Modul1000 only slowly and at a constant speed.

2-6 Important safety instructions
jinb80en1-12 Operating Instructions(2301)
Note
Injuries and material damage due to liquid penetration
The Modul1000 can be destroyed if liquid is penetrated.
• If liquid has penetrated the Modul1000, do not turn on the Modul1000 and
contact the INFICON service.
Material damage due to aggressive substances
The Modul1000 will be destroyed by aggressive substances.
• Avoid contact with bases, acids, solvents and extreme temperatures.
Material damage by testing inappropriate materials
The Modul1000 can become unusable by inappropriate materials.
The filter at the inlet of the Modul1000 should prevent the penetration of dirt into the
vacuum system.
• Only use helium or hydrogen with the device.
Material damage due to incorrect mains voltage
The electronics of the Modul1000 can be damaged by incorrect mains voltage.
• Before switching on, check that the operating voltage of the device matches the
local mains voltage.

Important safety instructions 2-7
jinb80en1-12 Operating Instructions(2301)
Material damage due to overheating
The Modul1000 can be damaged by overheating, for example, by closing the
openings.
• Keep the openings for air inlet and air outlet free.
• Observe service messages and replace contaminated air filters.
Material damage due to incorrect storage
The Modul1000 can be destroyed if stored for months or years under unfavorable
conditions (wet, too cold, too high above sea level). (See technical data!)
• If the Modul1000 has been stored in these circumstances, leave it switched off.
• Contact the INFICON service.
Material damage due to improper transport
The Modul1000 can be damaged by improper transport.
• Only transport the Modul1000 in its original packaging.

2-8 Important safety instructions
jinb80en1-12 Operating Instructions(2301)

Description of equipment 3-1
jinb80en1-12 Operating Instructions(2301)
3 Description of equipment
The Modul1000 is a helium leak detector which has been designed to be installed in
leak test work stations or integrated machines.
The analysis system with turbo molecular pump and a complete control unit are inte-
grated in a compact housing. Depending on the set operating mode, the Modul1000
can execute overriding control functions in a leak test system.
Multiple signal and status outputs allow the universal integration in existing or new
system versions.
The operating parameters set by the user are stored in a separate memory module
(I•STICK) which can be withdrawn easily.
All device configurations and the necessary maintenance works can be performed
without opening the device.
To generate the fore-vacuum required for the operation of the turbo-molecular pump,
as well as for evacuation of the connected DUT, a backing pump with a pumping
speed of >2 m³/h has to be connected. It must be able to generate a final pressure
of <1x10-2 mbar.
3.1 The housing
Fig. 3-1 Left side view and front view
1
2
3
4
5
6
7
8

3-2 Description of equipment
jinb80en1-12 Operating Instructions(2301)
Fig. 3-2 Right side view and back view
Item Description Item Description
1 Inlet flange DN25 KF 8 Vent connection FESTO coupling
2 Loudspeaker / Air inlet Hose 8 mm
3 Openings for unlocking the
cover
9 Mains socket with main switch and
the cover Mains fuses
4 Recess handles 10 Connection DN25 KF for
5 Status LED Backing pump or sniffer line
6 Air filter 11 Electrical interfaces
7 Connection DN25 KF for
Backing pump
Fig. 3-3 Cut-out in the bottom side of Modul1000
Item Description
1 Connection for the backing pump (screwed flange)
9
10
11
6
5
4
3