Inficon Sion User manual

OPERATING MANUAL
Sion
™
RF Detector
IPN 074-462-P1C

OPERATING MANUAL
Sion
™
RF Detector
IPN 074-462-P1C
www.inficon.com [email protected]
©2007 INFICON
®

Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
Sion™ is a trademark and INFICON® and FabGuard® are registered trademarks of INFICON.
Teflon® is a registered trademark of DuPont Co.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Patent
Craig Garvin et al., "High Performance Miniature RF Sensor For Use In Microelectronics Plasma Processing
Tools," U.S. Patent 7 538 562 B2, May 26, 2009
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2007 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

DECLARATION
OF
CONFORMITY
This is to certify that this equipment, designed and manufactured by:
INFICON Inc.
Two Technology Place
East Syracuse, NY 13057
USA
meets the essential safety requirements of the European Union and is placed on the market accordingly. It
has been constructed in accordance with good engineering practice in safety matters in force in the
Community and does not endanger the safety of persons, domestic animals or property when properly
installed and maintained and used in applications for which it was made.
Equipment Description: Sion RF Detector (including converter unit and breakout box)
Applicable Directives: 89/336/EEC as amended by 93/68/EEC (General EMC)
2002/95/EC (RoHS)
Applicable Standards:
Safety: EN 50178:1998 (Safety standard for “Electronic Equipment for use in Power
Installations”) for dielectric breakdown only. Note: This instrument is exempt
from the Low Voltage Directive (73/23/EEC as amended by 93/68/EEC),
since no voltage within the unit excess the limits set forth in Article 1 of this
directive.
EMC: EN 61326-1:1997/A1: 1998/A2: 2001
Emissions per Table 3 (Class A Equipment)
Immunity per Table A.1 (Industrial Locations)
(EMC standard for “Measurement, Control & Laboratory Equipment”)
RoHS: Due to the classification of this product it is currently exempt from the RoHS
directive.
CE Implementation Date: February 12, 2007
Revised due to product name change – May 22, 2007
Authorized Representative: Duane H. Wright
Quality Assurance Manager, ISS
INFICON Inc.
ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE DIRECTED,
IN WRITING, TO THE QUALITY ASSURANCE DEPARTMENT AT THE ABOVE ADDRESS.
06/22/07

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
one (1) year from the date of shipment thereof by Seller. Seller's liability under this
warranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found by
Seller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse and
is limited to, at Seller's election, either (a) repairing and returning the product or
part thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller in
writing of such non-conformity, specifying in reasonable detail the nature of such
non-conformity. If Seller is not provided with such written notification, Seller shall
not be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
Warranty
www.inficon.com [email protected]

074-462-P1C
Sion Operating Manual
Definition of
Note, Hint, Danger, Warning and Caution Paragraphs
NOTE: This is a note paragraph. Notes provide additional information about the
current topic.
HINT: This is a hint paragraph. Hints provide insight into product usage
DANGER
This is a Danger paragraph. Failure to heed these
messages has a high likelihood of resulting in serious
personal injury or even death!
WARNING
This is a Warning paragraph. It warns of actions that may
cause physical injury.
WARNING - Risk Of Electric Shock
This Warning paragraph warns of the presence of
electrical voltages which may cause physical injury.
CAUTION
This is a Caution paragraph. It cautions against actions
which may damage the instrument or lead to the loss of
data.

074-462-P1C
Sion Operating Manual
How To Contact Customer Support
Worldwide support information regarding:
Technical Support, to contact an applications engineer with questions
regarding INFICON products and applications, or
Sales and Customer Service, to contact the INFICON Sales office nearest you,
or
Repair Service, to contact the INFICON Service Center nearest you,
is available at www.inficon.com.
If you are experiencing a problem with your instrument, please have the following
information readily available:
the serial number for your instrument,
a description of your problem,
an explanation of any corrective action that you may have already attempted,
and the exact wording of any error messages that you may have received.
To contact Customer Support, see Support at www.inficon.com.
Returning Your Instrument to INFICON
Do not return any component of your instrument to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will be
held and you will be contacted. This will result in delays in servicing your
instrument.
Prior to being given an RMA number, you may be required to complete a
Declaration Of Contamination (DOC) form if your instrument has been exposed to
process materials. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the instrument be sent to a
designated decontamination facility, not to the factory. Failure to follow these
procedures will delay the repair of your instrument.

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Table Of Contents
Definition of Note, Hint, Danger, Warning and Caution Paragraphs
How To Contact Customer Support
Returning Your Instrument to INFICON
Chapter 1
Introduction, Specifications,
Installation and Operation
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.2 Purpose of the Sion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.3 Unpacking, Inspection, and Inventory of Supplied Items . . . . . . . . . . . . . . . 1-2
1.4 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.5 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5.1 Detector Voltage Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5.2 Detector RF Input Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5.3 Detector RF Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5.4 Converter Signal Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5.5 Converter Power Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5.6 Converter Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5.7 Breakout Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.5.8 NiDAQ PCI Board. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.6 Physical Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.6.1 Detector Head Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.6.2 Converter Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.6.3 Breakout Box Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.6.4 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.7 Electrical Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.8 Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.8.1 Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.8.2 Altitude Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.8.3 Humidity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.8.3.1 Sion Detector Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.8.3.2 Sion Converter, Cables and Breakout Box. . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.8.4 Pollution Degree . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

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1.8.5 Temperature Ranges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.8.5.1 Sion Detector Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.8.5.2 Sion Converter, Cables and Breakout Box. . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.9 Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.10 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.10.1 Required Tools. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.10.2 Detector Assembly To RF Strap Installation . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.10.3 Converter Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.10.4 Detector Assembly To Converter Installation . . . . . . . . . . . . . . . . . . . . . . . 1-13
1.10.5 NiDAQ PCI Board Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
1.10.6 Cable Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-26
1.11 FabGuard Installation and Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-26
1.12 Converter Factory Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
1.13 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
1.13.1 Application Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
1.13.1.1 Arc Detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-27
1.13.1.2 Endpoint Detection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28
1.13.2 Example of Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-28
Chapter 2
How The Sion Works
2.1 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.2 Instrument Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.1 Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.2 Converter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.3 Breakout Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.4 Data Acquisition Board in PC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.2.5 System Block Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Chapter 3
Maintenance and Diagnosing Problems
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Disconnecting One Detector While
Other Detectors Are Running . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Symptom - Cause - Remedy Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Chapter 4
Spare Parts List
4.1 Sion Spare Parts List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Index

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IPN 074-462-P1C
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Chapter 1
Introduction, Specifications,
Installation and Operation
1.1 Introduction
The INFICON® Sion™ RF detector is an ultra fast, ultra small, non intrusive RF
detector capable of measuring both voltage and current signals from a
Semiconductor Process tool. The Sion1has been designed with tool connectivity
in mind, being the first high speed clamp-on detector providing an extremely
compact, non-intrusive connection directly to the process chamber's high-power
RF delivery system. The Sion collects voltage and current signals at speeds up to
20 KHz, feeding the data directly into a high-speed signal converter connected to
the FabGuard® data collection and analysis system.
1.2 Purpose of the Sion
The Sion provides real-time, high-power analyses of plasma micro-arcing which
can cause damage to the target, the film being deposited, and even the wafer
surface in chemical vapor deposition (CVD) and ETCH processes. Additionally, the
Sion can detect plasma clean endpoint with superior accuracy allowing tighter
control of process parameters, reducing yield loss and the unnecessary use of high
cost gases during the chamber cleaning processes.
WARNING
Failure to operate the Sion in the manner intended by
INFICON can circumvent the safety protection provided
by the instrument and may result in personal injury.
1.Craig Garvin et al., "High Performance Miniature RF Sensor For Use In Microelectronics Plasma
Processing Tools," U.S. Patent 7 538 562 B2, May 26, 2009

1 - 2
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1.3 Unpacking, Inspection, and Inventory of Supplied Items
1Carefully remove all pieces the Sion from the shipping container. Some items
may be in anti-static packaging and care should be taken during installation to
not damage these sensitive components.
CAUTION - Static Sensitive Device
Use ESD precautions when components are removed
from anti-static packaging.
2Verify that there is no obvious damage to any components that may have
occurred during shipping. Contact the shipper if damage due to shipping is
found.
3Check that component quantities are correct for the system configuration listed
on the purchase order. (See Table 1-1.) Contact your INFICON representative
if any components are missing.
4Save the shipping container until the equipment is installed and performance is
verified. If there is a problem, refer to How To Contact Customer Support.
Table 1-1 Sion System Components and Quantities
Component and Part Number
Sion System Configuration
927-600-G1 927-600-G2 927-600-G3 927-600-G4 927-600-G5 927-600-G6
Converter(IPN927-201-G1) 123456
BreakoutBox(IPN927-202-G1) 111122
DetectorAssembly(IPN600-1318-G1)123456
National Instruments NiDAQ PCI 6220M
Data Acquisition board (IPN 035-0056) 1111N/AN/A
National Instruments NiDAQ PCI 6224M
Data Acquisition board (IPN 035-0057) N/A N/A N/A N/A 1 1
SignalCable(IPN068-0451) 123456
National Instruments NiDAQ 68pin Cable
(IPN 068-0447) 111122
CautionLabel 123456

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1.4 Safety
DANGER
RISK OF DEATH OR BODILY INJURY. Disconnect all
sources of RF and cables connected to the Converter
before working on this instrument or anything connected
to it.
WARNING - Risk Of Electric Shock
High voltage is present at the Detector when instrument
is operating. BE CAREFUL AROUND THIS INSTRUMENT.
WARNING - Risk Of Electric Shock
Do not open the instrument case! There are no
user-serviceable components within the instrument
case.
Refer all maintenance to INFICON service or technically
qualified personnel.
WARNING
Do not attempt to operate this instrument without proper
training.
WARNING
Ensure that this instrument is properly grounded.
WARNING
Ensure that all cables are properly connected.

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1.5 Specifications
1.5.1 Detector Voltage Rating
The Detector clamps to a tool RF delivery strap carrying up to 5000 V(dc) and up
to 5000 VRMS.
1.5.2 Detector RF Input Range
The Detector voltage input signal is 1 VRMS to 5000 VRMS strap voltage.
The Detector current input signal is 10 mARMS to 70 ARMS strap current.
The Detector input frequency range is 350 kHz to 41 MHz.
1.5.3 Detector RF Output
The Detector output signals are voltages in the range of 0 to 2 V(ac) (p-p), one for
voltage sense and one for current sense.
1.5.4 Converter Signal Input
The Converter signal input is less than 2 V(ac) (p-p) on two channels at 350 kHz to
41 MHz.
1.5.5 Converter Power Input
The Converter circuit requires +5 V(dc) at less than 100 mA. This power is supplied
by the National Instrument NiDAQ 6220M or 6224M computer interface board
through the Breakout box.
1.5.6 Converter Output
The current channel output range is 0 to 5 V(dc) and is proportional to the log of
the sensed current. The gain and offset adjustments are factory set.
The voltage channel output range is 0 to 5 V(dc) and is proportional to the log of
the sensed voltage. The gain and offset adjustments are factory set.
1.5.7 Breakout Box
The Breakout box is a routing circuit that gathers the voltage and current channel
signals from up to four Detector/Converter pairs and routes them into the proper
pinout to interface with a National Instruments NiDAQ 6220M or 6224M board. It
also supplies +5 V(dc) at up to 100 mA from the computer to each converter
connected to it. The 5 V(dc) line is fused at 1 A in the Breakout box.

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1.5.8 NiDAQ PCI Board
The computer interface board (NiDAQ PCI 6220M or 6224M) and the interface
cable (NiDAQ 68 pin Cable) are purchased parts from National Instruments. Their
specifications are included with the parts.
1.6 Physical Requirements
1.6.1 Detector Head Physical Dimensions
Figure 1-1 Detector Head Physical Dimensions (in. - mm)
1.6.2 Converter Physical Dimensions
Figure 1-2 Converter Physical Dimensions (in. - mm)

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1.6.3 Breakout Box Physical Dimensions
Figure 1-3 Breakout Box Physical Dimensions (in. - mm)
1.6.4 Weight
The Detector, Converter and Breakout box have a combined
weight of 5.5 lbs (2.5 Kg).
1.7 Electrical Power Requirements
5 V(dc) power is supplied by the NiDAQ PCI 6220M or 6224M Data Acquisition
board.
1.8 Environmental Requirements
1.8.1 Use
Indoor use only.
1.8.2 Altitude Range
Up to 2,000 meters.
1.8.3 Humidity
1.8.3.1 Sion Detector Assembly
Operating and Storage
humidity range . . . . . . . . . . . . . . . . . 10 to 90% RH non-condensing.
1.8.3.2 Sion Converter, Cables and Breakout Box
Operating and Storage
humidity range . . . . . . . . . . . . . . . . . 10 to 90% RH non-condensing.
1.8.4 Pollution Degree
Pollution Degree 2.

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1.8.5 Temperature Ranges
1.8.5.1 Sion Detector Assembly
Operating ambient temperature range . . . . . . . . 10 °C to 80 °C.
Storage temperature range . . . . . . . . . . . . . . . . -20 °C to 80 °C.
1.8.5.2 Sion Converter, Cables and Breakout Box
Operating ambient temperature range . . . . . . . . 10 °C to 50 °C.
Storage temperature range . . . . . . . . . . . . . . . . -20 °C to 50 °C.
1.9 Computer System Requirements
Refer to the FabGuard Operating Manual for information regarding
the Computer System.
1.10 Installation
1.10.1 Required Tools
Table 1-2 List Of Required Tools
Description IPN Quantity
27 mm Open-end Wrench or
Deep Socket and Ratchet
Wrench.
N/A 1
9/16 In. Open-end Wrench or
Socket and Ratchet Wrench
N/A 1
5/8 In. Open-end Wrench or
Socket and Ratchet Wrench
N/A 1
3 mm or 1/8 in. Drill Bit N/A 1
10 mm or 13/32 in. Drill Bit N/A 1
Hole Punch 927-403-P1 1
Power Drill N/A 1
Light Machine Oil N/A N/A
Isopropyl Alcohol N/A N/A

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1.10.2 Detector Assembly To RF Strap Installation
WARNING - Risk Of Electric Shock
Ensure all RF power has been disabled before any work
is carried out on the tool.
1Remove the tool panel cover to expose the RF transmission strap or rod.
2Determine where on the RF strap or rod the Detector will be located. Because
the tool panel cover will need to be opened approximately 76 mm (3 in.) to
access the Detector Assembly to Converter connection (see Figure 1-8 on
page 1-14), the interface between the Detector and RF strap/rod (see Figure
1-4 on page 1-8) must be within 203 mm (8 in.) of the Converter mounting hole
(see section 1.10.3 on page 1-9). If it is required that the tool panel cover be
opened more than 76 mm (3 in.), the distance between Detector and Converter
must be decreased accordingly.
3Determine the orientation of the clamp when connecting the Detector Assembly
to the RF strap or rod. (See Figure 1-4.)
4With the Detector and clamp surrounding the RF strap or rod, insert two thumb
screws through the Detector and then turn the screws into the clamp until finger
tight. (See Figure 1-4.)
Figure 1-4 Detector Head — Strap and Rod Sizes
5If the detector is to be installed on a strap that has a bend causing the strap to
run along the side of the detector, or if the cable must be routed close to high
voltage, the minimum distance between the sensor and cable and any point of
high voltage must be 1 in. (25.4 mm). See Figure 1-5.