IWAKI PUMPS PDS-105 RA User manual

©2011 IWAKI CO., LTD.
Thank you for choosing our product.
Please read through this instruction manual before use.
This instruction manual describes important precautions and instruc-
tions for the product. Always keep it on hand for quick reference.
Instruction manual
PDS-105 RA/RB
Iwaki
Photoresist Dispensing Pump
Safety instructions Overview Installation Operation Maintenance
( )Country codes
IWAKI CO.,LTD. 6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo 101-8558 Japan
TEL:[phone] FAX:[phone]
T787 '11/09
Australia IWAKI Pumps Australia Pty. Ltd. TEL : [phone] FAX : [phone] Italy IWAKI Italia S.R.L. TEL : [phone] FAX : [phone]
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Belgium IWAKI Belgium n.v. TEL : [phone] FAX : 1367 2030 Malaysia IWAKIm Sdn. Bhd. TEL : [phone] FAX : [phone]
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China IWAKI Pumps (Guandong) Co., Ltd. TEL : [phone] FAX : [phone] Singapore IWAKI Singapore Pte. Ltd. TEL : [phone] FAX : [phone]
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Specication

2
Order conrmation
Open the package and check that the product conforms to your order. If any problem or
inconsistency is found, immediately contact your distributor.
a. Check if the delivery is correct.
Check the nameplate to see if the information such as model codes and production number are as or-
dered.
b. Check if the delivery is damaged or deformed.
Check for transit damage and loose bolts.
Order conrmation
1P417431
MODEL
Model code
Production number

3
Contents
Contents
Order conrmation ..........................................................................................................................................2
Safety instructions.................................................................... 5
Warnings........................................................................................................................................................ 6
Cautions......................................................................................................................................................... 7
Precautions for use ......................................................................................................................................8
Overview.................................................................................... 9
Introduction ...................................................................................................................................................9
Pump structure & Operating principle ........................................................................................................ 9
Discharge process ................................................................................................................................9
Suction process .................................................................................................................................. 10
Identication codes .................................................................................................................................... 11
Installation ...............................................................................12
Before installation....................................................................................................................................... 12
Installation/Piping/Wiring .......................................................................................................................... 13
Installation ................................................................................................................................................ 13
Piping ....................................................................................................................................................... 13
Wiring ....................................................................................................................................................... 14
A connector (signal) ............................................................................................................................ 14
B connector (motor)............................................................................................................................. 14
Operation..................................................................................15
Pump setting ............................................................................................................................................... 15
Pulse input direction & Motor rotation ...................................................................................................... 15
Number of pulses & Discharge capacity (RV).......................................................................................... 15
The lower limit of the motor-driven cylinder ............................................................................................. 15
Motor waiting time .................................................................................................................................... 16
Pump operation........................................................................................................................................... 16

4Contents
Maintenance.............................................................................17
Troubleshooting.......................................................................................................................................... 17
Inspection .................................................................................................................................................... 18
Daily inspection ........................................................................................................................................ 18
Wear part list ............................................................................................................................................ 18
Specication/Outer dimension.................................................................................................................. 19
Specication............................................................................................................................................. 19
Pump................................................................................................................................................... 19
Stepping motor.................................................................................................................................... 20
Encoder (RB type)............................................................................................................................... 20
Home sensor.......................................................................................................................................20
Pressure sensor ..................................................................................................................................20
Outer dimension....................................................................................................................................... 21
PDS-105R A/B .................................................................................................................................... 21
Part names...............................................................................................................................................22
PDS-105R A/B ....................................................................................................................................22

5
Safety instructions
Safety instructions
Read through this section before use. This section describes important
information for you to prevent personal injury or property damage.
■ Symbols
In this instruction manual, the degree of risk caused by incorrect use is noted with the follow-
ing symbols. Please pay attention to the information associated with the symbols.
Indicates mishandling could lead to a fatal or serious
accident.
WARNING
A symbol accompanies each precaution, suggesting the use of "Caution", "Prohibited actions"
or specic "Requirement".
Indicates mishandling could lead to personal injury or prop-
erty damage.
CAUTION
Caution marks Prohibited marks Requirement marks
Safety instructions
Prohibited
Electrical
shock
Caution
Do not rework
or alter
Requirement
Wear
protection
Export restrictions
Information contained within this instruction manual may be considered controlled technology
as set by the Japanese Ministry of Economy, Trade and Industry (METI). An export license
issued by METI may be required when exporting or providing the manual to a 3rd party.
Grounding

6
WARNING
WARNING
Turn off power before work
Risk of electrical shock. Be sure to turn off power to stop the pump and
related devices before service is performed. Let other people know about
the situation by displaying a notice such as "POWER OFF (Maintenance)"
near the power switch.
Stop operation
If you notice any abnormal or dangerous conditions, suspend operation
immediately and inspect/solve problems.
Do not use the pump in any condition other than its intended purpose
The use of the pump in any conditions other than those clearly specied
may result in failure or injury. Use this product in specied conditions only.
Do not modify the pump
Alterations to the pump carries a high degree of risk. It is not the manufac-
turer's responsibility for any failure or injury resulting from alterations to the
pump.
Wear protective clothing
Always wear protective clothing such as an eye protection, chemical re-
sistant gloves, a mask and a face shield during disassembly, assembly or
maintenance work. The specic solution will dictate the degree of protec-
tion. Refer to MSDS precautions from the solution supplier.
Spill precautions
Ensure protection and containment of solution in the event of plumbing or
pump damage (secondary containment).
Do not remodel
Wear
protectors
Requirement
Requirement
Requirement
Prohibited

7
Safety instructions
CAUTION
Qualied personnel only
The pump should be handled or operated by qualied personnel with a
full understanding of the pump. Any person not familiar with the product
should not take part in the operation or maintenance of the pump.
Use specied power only
Do not apply any power other than that specied on the nameplate. Other-
wise, failure or re may result. Ensure the pump is properly grounded.
Ventilation
Fumes or vapours can be hazardous with certain solutions. Ensure proper
ventilation at the operation site.
Do not install or store the pump:
• In a ammable atmosphere.
• In a dusty/humid environment.
• In a corrosive atmosphere.
Flushing before operation
Flush the inside of the pump and piping with pure water or the liquid to be
delivered before the start of operation.
Static electricity
When low electric conductivity liquids such as ultra-pure water and fluor
inactive liquid (e.g. FluorinertTM) are handled, the static electricity may be
generated in the pump and may cause static discharge. Take counter-
measures to remove the static electricity.
Wear part replacement
Follow instructions in this manual for wear part replacement. Do not dis-
mantle the pump beyond the extent of the instructions.
Before returning product
Be sure to drain chemicals and clean the inside of the pump before return
so that a harmful chemical does not spill out in transit.
Disposal of a used pump
Dispose of any used or damaged pump in accordance with relevant regu-
lations. Consult a licensed industrial waste products disposing company.
Prohibition
Requirement
Prohibition
CAUTION
Requirement
Requirement
Requirement
Requirement
Requirement
Requirement

8
• Electrical work should be performed by a qualied electrician. Otherwise,
personal injury or property damage could result.
• Do not install the pump:
–In a ammable atmosphere.
–In a dusty/humid place.
– In a corrosive atmosphere.
• Allow sufficient space around the pump for easy access and maintenance.
• Use care handling the pump. Do not drop. An impact may affect pump
performance. Do not use a pump that has been damaged to avoid the risk
of electrical damage or shock.
• The pump is not waterproof. Do not operate the pump while wet with solu-
tion or water. Failure or injury may result. Immediately dry off the pump if it
gets wet.
• Do not close discharge line during operation. Solution may leak or piping
may break.
• Solution in the discharge line may be under pressure. Release the pres-
sure from the discharge line before disconnecting plumbing or disassembly
of the pump to avoid solution spray.
• Wear protective clothing when handling or working with pumps. Consult
solution MSDS for appropriate precautions. Do not come into contact with
residual solution.
Precautions for use
Precautions for use
Caution
Caution
Caution
Caution
Caution
Caution
Requirement

9
Overview
Overview
Introduction
Pump characteristics, features and part names are described in this sec-
tion.
Introduction
Pump structure & Operating principle
The rotational motion of the stepping motor is changed to linear motion by the direct drive unit. Liquid is loaded
into the pump head and then delivered to a discharge line as the bellows reciprocates.
Principle of operation
● The bellows expands and contracts as the ball screw reciprocates.
● The reciprocating motion of the bellows compresses or expands the shape of the tubephragm via hydraulic
uid.
● Volumetric change is created in the tubephragm as it is compressed or expanded.
● Liquid is taken in as the tubephragm expands and is pushed out as it contracts in sync with the action of the
check valves (pump head valves).
■ Discharge process
Check valve
Bellows
Stepping motor
(Motor cylinder)
Hydraulic fluid
OUT
Tubephragm
Ball screw

10
Introduction
■ Suction process
IN

11
Overview
Identication codes
Each code represents the following information.
PDS - 1 05 RA - K P W2
a b c d e f g
a. Series name
b. Product classication
1: Pump
c. Flow rate
05: 5.0ml/shot (max discharge capacity)
d. Drive unit
RA: Compact type
RB: With an encoder (line driver)
e. Wet end O ring
K : Kalrez®
f. Pressure sensor
P : Positive pressure sensor (0-1000kPa)
T : Compound pressure sensor (-100 - 300kPa)
g. Inlet/outlet I.D.
W2: 1/4" (ø6.35×ø4.35mm) PFA tube connection
M6: ø6×ø4 [mm] PFA tube connection
Identication codes

12
Installation
This section describes the installation of the pump, piping and wiring. Read through
this section before work.
Points to be observed
Observe the following points when installing the pump.
• Be sure to turn off power to stop the pump and related devices before service is per-
formed.
• Be careful for the power not to be turned on during work.
• If you notice any abnormal or dangerous conditions, suspend operation immediately and
inspect/solve problems.
• Do not install the pump in a ammable atmosphere.
Before installation
A driver in a user's PLC and other related devices are necessary for operation. Purchase
these devices separately as needed. The following diagram is a general system example.
Congure your system in accordance with an actual service condition.
Before installation
Pump with a Stepping
motor
User's PLC
Motor driver
Home sensor signal
Power-supply voltage to the motor
Pressure sensor signal
Encoder signal (B type)

13
Installation
Installation/Piping/Wiring
Points to be observed
Observe the following points during wiring work.
• Electrical work should be performed by a qualied electrician. Always observe applica-
ble codes or regulations.
• Do not perform wiring work while the power is on. Otherwise, an electrical shock or
short circuit may result. Be sure to turn off power before wiring work.
• Be careful for the power not to be turned on during work.
NOTE
Do not hold the pump head to lift the pump unit up, or the pump head may deform and a leak may result.
Installation
Observe the following points during installation.
● Installation location
Mount the pump indoors. Allow sufcient space around the pump for easy access and maintenance.
● Mounting position
Install the pump as close to a supply tank as possible in a ooded suction system.
● Mounting direction
Always direct the outlet upward. Keep the pump head in a vertical position with the check valves upright.
Otherwise, performance may be reduced.
● Anchoring
Fix the pump with four M4 mounting screws (with PW and SW).
Piping
Observe the following points during pipework.
● Pipe connection
Both inlet and outlet of the pump have PFA tube joints. Secure every joint properly to eliminate any possibility
of air ingress, or performance may be reduced.
● Fitting and tube
Take account of corrosion and pressure resistance when selecting ttings and tubes.
● Pipe resistance
Keep a piping length shortest with the minimum number of bends.
Installation/Piping/Wiring

14 Installation/Piping/Wiring
Wiring
See the table below for wiring with each device.
■ A connector (signal)
Pin number Terminal assignment
A* Encoder A phase + Line driver output
B* Encoder A phase - Line driver output
C* Encoder B phase + Line driver output
D* Encoder B phase - Line driver output
EGND (common)
F Sensor output (open collector)
G 5-24VDC (home sensor power)
H5VDC (encoder power)
*The RA type does not equipped with the encoder.
■ B connector (motor)
Pin number Terminal assignment
ADriver connector PIN1 (Blue motor lead)
BDriver connector PIN2 (Red motor lead)
CDriver connector PIN3 (Orange motor lead)
DDriver connector PIN4 (Green motor lead)
EDriver connector PIN5 (Black motor lead)

15
Operation
This section describes pump operation. Observe instructions in this manu-
al. See manufacturer's instruction manual for the motor driver.
Pump setting
First, program operation of the pump.
Pulse input direction & Motor rotation
The pump lets out liquid at the input of the CCW direction command pulse and takes in liquid at the input of the
CW direction command pulse.
The motor-driven cylinder is at the origin at factory default setting. Before operation, use a tester to check an
output of the home sensor is at the “L (GND)” level.
Number of pulses & Discharge capacity (RV)
Calculated ow rate Number of input pulses
1ml 2400
2ml 4800
3ml 7200
4ml 9600
5ml 12000
*The above data is based on the assumption that the driver is set to half step with the motor-driven cylinder at the origin.
Actual discharge capacity varies with a piping condition or so.
The lower limit of the motor-driven cylinder
NOTE
Do not move the motor-driven cylinder over the lower limit.
Operation
Pump setting
The lower limit of sensor dog
ON position
: Suction process (CW rotation)
Home sensor
Observe the lower limit, which comes to a clock-
wise rotation for 600 pulses from the ON position
Sensor dog
: Discharge process (CCW rotation)

16
Motor waiting time
A discharge and a suction process are repeated in turn during operation, changing the rotational direction of
the motor. A motor waiting time until a shift of a rotational direction needs to be programmed before operation.
See the formula below for detail.
T >= t/2
T: Waiting time
t : Discharge time or suction time, whichever is longer.
NOTE
• The motor may step out if the waiting time is too short. "Step out" means the motor rotates out of a specified step angle
and number of pulses.
• The maximum discharge speed is 4ml/sec, however, hydraulic fluid pressure may rise sharply depending on liquid vis-
cosity and piping conditions, and may overload the bellows. Do not set a discharge speed too fast.
• Suction pressure may be too low (negative) and trigger cavitation depending on operating conditions such as liquid vis-
cosity, piping layouts and suction speed (max. 3ml/sec). Adjust the suction speed as necessary.
Pump operation
Filter ushing
Check that lter has been ushed in user's system.
NOTE
See manufacturer's manual for lter ushing.
Degassing
Eliminate air from the lter cartridge before operation. Air in a lter or a pipeline reduces a ow rate.
Open a suction and a discharge line fully.
NOTE
Do not close a valve on a suction line or a discharge line during operation. It may pose a leak or blow
out the pump or a pipe.
Operation
Start operation along with a program.
Pump operation
2
1
3
4

17
Maintenance
Troubleshooting
This section describes troubleshooting, inspection, specication and dimensions.
Points to be observed
Observe the following points during maintenance work.
• Follow instructions in this manual for replacement of wear parts. Do not disassemble the
pump beyond the extent of the instructions.
• Always wear protective clothing such as an eye protection, chemical resistant gloves, a
mask and a face shield during disassembly, assembly or maintenance work. The spe-
cific solution will dictate the degree of protection. Refer to MSDS precautions from the
solution supplier.
• Solution in the discharge line may be under pressure. Release the pressure from the
discharge line before disconnecting plumbing or disassembly of the pump to avoid solu-
tion spray.
• Risk of electrical shock. Be sure to turn off power to stop the pump and related devices
before service is performed.
Troubleshooting
First check the following points. If the following measures do not help remove problems, con-
tact your distributor.
States Possible causes Solutions
The pump does not
run.
Faulty wiring • Correct wiring and resume operation.
Power-supply voltage is too low. • Observe the rated voltage of the pump.
Motor failure • Check the motor. Replace as necessary.*
Liquid can not be
pumped up.
Air ingress through a suction line. • Reroute piping.
A failed O ring seal. • Check O rings. Replace as necessary.*
Foreign matters are stuck in the ow
path in the pump head or piping.
• Dismantle, inspect and clean the pump
head or piping. Replace as necessary.*
Malfunction of an air-operated valve. • Check the valve. Replace as necessary.
A check valve (pump head valve) is
stuck on a valve seat.
• Dismantle, inspect and clean the valve.
Replace as necessary.*
A ow rate uctuates. Foreign matters are stuck in a pipe
line.
• Dismantle, inspect and clean the line.
Replace as necessary.
Air stays in the pump head or in a pipe
line.
• Expel air.
A check valve (pump head valve) is
stuck on a valve seat.
• Dismantle, inspect and clean the valve.
Replace as necessary.*
A failed O ring seal. • Check O rings. Replace as necessary.*
A hydraulic uid leak • Check for a leak. Replace as necessary.*
Motor failure • Check the motor. Replace as necessary.*
Sensor signal is not
outputted.
Faulty wiring • Correct wiring and resume operation.
Sensor failure • Check a sensor. Replace as necessary.*
*Solutions marked with * are conducted by us.
Maintenance

18
Inspection
Perform daily inspection to keep pump performance and safety.
Daily inspection
Check for a leak or any other abnormality during operation. Upon sensing abnormality, stop operation immedi-
ately and remove problems according to "Troubleshooting".
Wear part list
To run the pump for a long period, wear parts need to be replaced periodically or when pump performance has
reduced. Contact your distributor for detail.
Part names Q’ty Estimated life Remarks
O ring 2Kalrez® AS568-129
Valve gasket 10 PTFE
Valve guide 4PTFE
Valve 4RUBY
Valve seat 4PCTFE
Valve case 2PCTFE
Inspection

19
Specication
Specication/Outer dimension
Specication/Outer dimension
Specication
Information in this section is subject to change without notice.
■ Pump
Item Spec
Max discharge capacity 5.0 [ml/shot]
Max discharge pressure*4&6 150 [kPa]
Pressure resistance 300 [kPa]
Discharge speed 0.1-4.0 [ml/sec]
Suction speed*10.1-3.0 [ml/sec]
Resolution 0.01 [ml]
Discharge accuracy ±0.3 [%]F.S
Linearity*5±0.5 [%]F.S
Allowable liquid viscosity Max.100 [mPa·s]
Allowable surface temperature*2Max.30 [ºC]
Number of pulses per discharge capacity*32400 [pulse/ml]
Ambient temperature 10-40 [ºC]
Ambient humidity 30-45 [%RH]
Allowable liquid temperature 15-25 [ºC]
Weight 3 [kg]
*1 Suction pressure may be too low (negative) and trigger cavitation depending on operating conditions such as liquid
viscosity, piping layouts and suction speed (max. 3ml/sec). Adjust the suction speed as necessary.
*2 The allowable surface temperature is based on operation at ambient of 22±1ºC, with full stroke length and 1 shot/min.
*3 The number of pulses per discharge capacity is a reference value.
*4 Set the discharge speed not to exceed the max discharge pressure.
*5 When handling viscous liquid, linearity may reduce depending on piping layout. In this case linearity can be maintained
by closing a discharge-side air operated valve after the discharge action of the pump. Determine a delay time in accord-
ance with operating conditions.
*6 Do not close a valve on a suction line or a discharge line during operation. It may pose a leak or blow out the pump or a
pipe.

20
Specication/Outer dimension
■ Stepping motor
Items Spec
Manufacturer ORIENTAL MOTOR Co, Ltd.
Model PK545-NB or equivalent
Maximum holding torque 0.23 N·m
Rated current 0.75A/Phase
Step angle 0.72°
Insulation resistance B class (130ºC)
The above date is based on use of an ORIENTAL MOTOR CSD5807N2-P driver.
■ Encoder (RB type)
Items Spec
Manufacturer Microtech Laboratory Inc.
Model MGH-20-500-E
Supply voltage 5VDC±0.5%
Consumption current 60mA or below
Detection Incremental
Number of output pulses 500
Output phase 2-phase (A and B)
Output type Line driver
■ Home sensor
Items Spec
Manufacturer OMRON
Model EE-SX670A
Supply voltage 5-24VDC±10%
Sensor logic Normally open
Output type Open collector
Output operation Dark-ON
■ Pressure sensor
Items Spec
Manufacturer Nidec Copal Corporation
Model PPA-850-103G-NGF
TPA-850-302R-NGF
Rated pressure P103G: 0-1000
T302R: -100 - 300
Supply voltage 10.8-30VDC
Consumption current 20mA or below
Output type Analogue
Output voltage 1-5VDC
Lead colour
Brown Input 10.8-30VDC
Blue Input 0VDC (GND)
White Output Analogue