IWAKI PUMPS PDS-H115 User manual

©2012 IWAKI CO., LTD.
Thank you for choosing our product.
Please read through this instruction manual before use.
This instruction manual describes important precautions and instruc-
tions for the product. Always keep it on hand for quick reference.
Instruction manual
PDS-H115
Iwaki
Photoresist Dispensing Pump
Safety instructions Overview Installation Operation Maintenance
( )Country codes
IWAKI CO.,LTD. 6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo 101-8558 Japan
TEL:[phone] FAX:[phone]
T822 '13/01
Australia IWAKI Pumps Australia Pty. Ltd.
TEL : [phone] FAX : [phone]
Italy IWAKI Italia S.R.L.
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Austria IWAKI EUROPE GmbH
TEL : [phone] FAX : [phone]
Korea IWAKI Korea Co.,Ltd.
TEL : [phone] FAX : [phone]
Belgium IWAKI Belgium n.v.
TEL : [phone] FAX : 1367 2030
Malaysia IWAKIm Sdn. Bhd.
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China IWAKI Pumps (Shanghai) Co., Ltd.
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Norway IWAKI Norge AS
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China IWAKI Pumps (Guandong) Co., Ltd.
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Singapore IWAKI Singapore Pte. Ltd.
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China GFTZ IWAKI Engineering & Trading (Guangzhou)
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Germany IWAKI EUROPE GmbH
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U.S.A. IWAKI AMERICA Inc.
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Vietnam IWAKI pumps Vietnam Co.,Ltd.
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Specication

2
Order conrmation
Open the package and check that the product conforms to your order. If any problem or
inconsistency is found, immediately contact your distributor.
a. Check if the delivery is correct.
Check the nameplate to see if the information such as model codes and production number are as or-
dered.
b. Check if the required number of accessories is provided.
<Attached accessories>
• 2-1473562-3 home sensor line connector (one each)
• 2-1473562-4 pressure sensor line connector (one each)
• 1473562-6 motor line connector (one each)
• 3-1473562-8 encoder line connector (one each)
• 5-1473571-3 gender changer for the home sensor line connector (one each)
• 5-1473571-4 gender changer for the pressure sensor line connector (one each)
• 5-1473571-6 gender changer for the motor line connector (one each)
• 5-1473571-8 gender changer for the encoder line connector (one each)
c. Check if the delivery is damaged or deformed.
Check for transit damage and loose bolts.
Order conrmation
1P417431
MODEL
Model code
Production number

3
Contents
Contents
Order conrmation ..........................................................................................................................................2
Safety instructions.................................................................... 5
Warnings........................................................................................................................................................ 6
Cautions......................................................................................................................................................... 7
Precautions for use ......................................................................................................................................8
Overview.................................................................................... 9
Introduction ...................................................................................................................................................9
Pump structure & Operating principle ........................................................................................................9
Discharge process ................................................................................................................................9
Suction process .................................................................................................................................. 10
Part names................................................................................................................................................... 11
Identication codes.................................................................................................................................... 12
Installation ...............................................................................13
Before installation....................................................................................................................................... 13
Installation/Piping/Wiring .......................................................................................................................... 14
Installation ................................................................................................................................................ 14
Piping ....................................................................................................................................................... 14
Wiring ....................................................................................................................................................... 15
Line connectors........................................................................................................................................ 16
Applicable motor drivers .......................................................................................................................... 17
Operation..................................................................................18
Pump setting ............................................................................................................................................... 18
Pulse input & Motor rotation..................................................................................................................... 18
Number of pulses & Flow volume ....................................................................................................... 18
Number of pulses & Flow rate............................................................................................................. 18
Return to origin......................................................................................................................................... 19
Home sensor output is "OFF" ............................................................................................................. 19
Home sensor output is "ON" ............................................................................................................... 19
Operation programming ........................................................................................................................... 19
Time based control (when using an Oriental Motor SG9200-2 pulse controller)................................ 20
Flow based control (when using a pulse signal as a start signal)....................................................... 21
Pump operation...........................................................................................................................................22

4Contents
Maintenance............................................................................ 23
Troubleshooting.......................................................................................................................................... 23
Inspection ....................................................................................................................................................24
Daily inspection ........................................................................................................................................ 24
Specication/Outer dimension.................................................................................................................. 25
Specication.............................................................................................................................................25
Pump................................................................................................................................................... 25
Stepping motor.................................................................................................................................... 26
Encoder...............................................................................................................................................26
Home sensor.......................................................................................................................................26
Pressure sensor ..................................................................................................................................26
Outer dimension.......................................................................................................................................27
PDS - H115 ........................................................................................................................................... 27

5
Safety instructions
Safety instructions
Read through this section before use. This section describes important
information for you to prevent personal injury or property damage.
■ Symbols
In this instruction manual, the degree of risk caused by incorrect use is noted with the follow-
ing symbols. Please pay attention to the information associated with the symbols.
Indicates mishandling could lead to a fatal or serious
accident.
WARNING
A symbol accompanies each precaution, suggesting the use of "Caution", "Prohibited actions"
or specic "Requirement".
Indicates mishandling could lead to personal injury or prop-
erty damage.
CAUTION
Caution marks Prohibited marks Requirement marks
Safety instructions
Prohibited
Electrical
shock
Caution Do not rework
or alter
Requirement Wear
protection
Export Restrictions
Technical information contained in this instruction manual might be treated as controlled tech-
nology in your countries, due to agreements in international regime for export control.
Please be reminded that export license/permission could be required when this manual is
provided, due to export control regulations of your country.
Fire ban

6WARNING
WARNING
Turn off power before work
Risk of electrical shock. Be sure to turn off power to stop the pump and
related devices before service is performed. Let other people know about
the situation by displaying a notice such as "POWER OFF (Maintenance)"
near the power switch.
Stop operation
If you notice any abnormal or dangerous conditions, suspend operation
immediately and inspect/solve problems.
Do not use the pump in any condition other than its intended purpose
The use of the pump in any conditions other than those clearly specied
may result in failure or injury. Use this product in specied conditions only.
Do not modify the pump
Alterations to the pump carries a high degree of risk. It is not the manufac-
turer's responsibility for any failure or injury resulting from alterations to the
pump.
Wear protective clothing
Always wear protective clothing such as an eye protection, chemical re-
sistant gloves, a mask and a face shield during disassembly, assembly or
maintenance work. The specic solution will dictate the degree of protec-
tion. Refer to MSDS precautions from the solution supplier.
Spill precautions
Ensure protection and containment of solution in the event of plumbing or
pump damage (secondary containment).
Do not remodel
Wear
protectors
Requirement
Requirement
Requirement
Prohibited

7
Safety instructions
CAUTION
Qualied personnel only
The pump should be handled or operated by qualied personnel with a
full understanding of the pump. Any person not familiar with the product
should not take part in the operation or maintenance of the pump.
Use specied power only
Do not apply any power other than that specied on the nameplate. Other-
wise, failure or re may result. Ensure the pump is properly grounded.
Ventilation
Fumes or vapours can be hazardous with certain solutions. Ensure proper
ventilation at the operation site.
Do not install or store the pump:
• In a ammable atmosphere.
• In a dusty/humid environment.
• In a corrosive atmosphere.
Flushing before operation
Flush the inside of the pump and piping with pure water or the liquid to be
delivered before the start of operation.
Static electricity
When low electric conductivity liquids such as ultra-pure water and fluor
inactive liquid (e.g. FluorinertTM) are handled, the static electricity may be
generated in the pump and may cause static discharge. Take counter-
measures to remove the static electricity.
Before returning product
Be sure to drain chemicals and clean the inside of the pump before return
so that a harmful chemical does not spill out in transit.
Disposal of a used pump
Dispose of any used or damaged pump in accordance with relevant regu-
lations. Consult a licensed industrial waste products disposing company.
Prohibition
Requirement
Prohibition
CAUTION
Requirement
Requirement
Requirement
Requirement
Requirement

8
• Electrical work should be performed by a qualied electrician. Otherwise,
personal injury or property damage could result.
• Do not install the pump:
–In a ammable atmosphere.
–In a dusty/humid place.
– In a corrosive atmosphere.
• Allow sufficient space around the pump for easy access and maintenance.
• Use care handling the pump. Do not drop. An impact may affect pump
performance. Do not use a pump that has been damaged to avoid the risk
of electrical damage or shock.
• The pump is not waterproof. Do not operate the pump while wet with solu-
tion or water. Failure or injury may result. Immediately dry off the pump if it
gets wet.
• Do not close discharge line during operation. Solution may leak or piping
may break.
• Solution in the discharge line may be under pressure. Release the pres-
sure from the discharge line before disconnecting plumbing or disassembly
of the pump to avoid solution spray.
• Wear protective clothing when handling or working with pumps. Consult
solution MSDS for appropriate precautions. Do not come into contact with
residual solution.
Precautions for use
Precautions for use
Caution
Caution
Caution
Caution
Caution
Caution
Requirement

9
Overview
Pump working principle, part names and identication codes are de-
scribed in this section.
Introduction
Pump structure & Operating principle
The rotational motion of the stepping motor is changed to linear motion by the direct drive unit. Liquid is loaded
into the pump head and then delivered to a discharge line as the bellows reciprocates.
Principle of operation
● The bellows expands and contracts as the ball screw reciprocates to create volumetric change in the pump
chamber.
● Liquid is taken in as the bellows contracts and is pushed out as it expands in sync with the action of the
check valves (pump head valves).
■ Discharge process
Overview
Introduction
Check valve
BellowsStepping motor
OUT
Ball screw
Cylinder

10 Introduction
■ Suction process
IN

11
Overview
Part names
Part names
*Do not clean the pressure sensor, speed controller or nameplate with a solvent such as benzine or thinner.
Pressure sensor
Monitors internal pressure.
Base
Always anchor it with bolts.
Outlet
Inlet
Speed controller joint
Used for air purge.
Motor line connector
Used for connecting a motor driver.
Nameplate
Shows a model code and MFG number.
Encoder line connector
Used for connection with an
encoder.
Home sensor line connector
Used for connection with a
home sensor.

12
Identication codes
Each code represents the following information.
PDS - H 1 15 - 01
a b c d e
a. Series name
b. Product classication
H: High viscosity type
c. Product category
1: Pump
d. Bellows size
15: 15 type bellows
e. Special version
No code: Standard
01: Custom design (coded in ascending order)
Identication codes

13
Installation
Installation
This section describes the installation of the pump, piping and wiring.
Read through this section before work.
Points to be observed
Observe the following points when installing the pump:
• Be sure to turn off power to stop the pump and related devices before service is per-
formed.
• Be careful for the power not to be turned on while service is performed.
• If you notice any abnormal or dangerous conditions, suspend operation immediately and
inspect/solve problems.
• Do not install the pump in a ammable atmosphere.
Observe the following points during wiring work:
• Electrical work should be performed by a qualied electrician. Always observe applica-
ble codes or regulations.
• Do not perform wiring work while the power is on. Otherwise, an electrical shock or
short circuit may result. Be sure to turn off power before wiring work.
• Be careful for the power not to be turned on during work.
Before installation
A driver in a user's PLC and other related devices are necessary for operation. Purchase
these devices including a motor driver separately as needed. The following diagram is a gen-
eral system example. Congure your system in accordance with an actual service condition.
Before installation
User's PLC
Silicon wafer
Chemical liquid
Motor
driver
Nozzle
Solenoid
valve
Controller
Pump
Air-operated
valve
Filter
Trap
tank

14
Installation/Piping/Wiring
NOTE
Do not hold the pump head to lift the pump unit up, or the pump head may deform and a leak may result.
Installation
Observe the following points during installation.
● Installation location
Mount the pump indoors. Allow sufcient space around the pump for easy access and maintenance.
● Mounting position
• Install the pump as close to a supply tank as possible in a ooded suction system.
• Make sure the discharge-line end-nozzle is positioned higher than a chemical liquid level.
● Mounting direction
Always mount the pump with the outlet upward and the check valves upright. Otherwise, performance may
be reduced.
● Anchoring
Fix the pump with four M4 mounting screws (with PW and SW).
Piping
Observe the following points during pipework.
● Pipe connection
Both inlet and outlet of the pump are provided with Flowell tube ttings. Secure every joint properly to elimi-
nate any possibility of air ingress, or performance may be reduced.
● Fitting and Tube
Take account of corrosion and pressure resistance when selecting ttings and tubes.
● Pipe resistance
Keep a piping length shortest with the minimum number of bends.
Installation/Piping/Wiring
PumpChemical liquid

15
Installation
Wiring
Observe the following diagram.
Installation/Piping/Wiring
1 2 3 4 5 6 7 8 9
10 11 12
CN2
CN3
1
2
3
CN1
24VDC
GND
1 2 3 4 5
No.
1 2 3 4 5 6
1 2
No.
3
1 2
No.
3
12
-AMP
3
78 12346 5
-AMP
-AMP
4 3 2 16 5
-AMP
34 12
Input of a pulse signal rotates the motor clockwise (seen from the motor output shaft).
1 3 5
10
11
● Photocoupler ON: HALF Step ● Photocoupler OFF: FULL Step ● A signal is output whenever the motor excitation sequence returns to step “0” in synchronization with the input pulse signal (output transistor is ON). ● A signal is output every 10 pulses in full step mode and every 20 pulses in half step mode. Input of a pulse signal rotates the motor counterclockwise (seen from the motor output shaft).
CW pulse input
CCW pulse input
All Windings
Off Signal
Step Angle
Signal
Excitation Timing
Signal
When at “photocoupler is ON”, the current to the motor stops, allowing the motor shaft to be rotated by hand.
Motor driver CN2 terminal assignment
Automatic Current
Cutback Release Signal
12
2 4 6 7 8 9
+ − + − + − + − + − + −
Wiring Diagram
● Photocoupler ON: Automatic Current Cutback Release
No. Terminal assignment
1 2 3 4 5
Driver connector PIN1 (blue motor lead) Driver connector PIN2 (red motor lead) Driver connector PIN3 (orange motor lead) Driver connector PIN4 (green motor lead) Driver connector PIN5 (black motor lead)
Motor line connectors
ORIENTAL MOTOR
CSD5807N2-P driver
SG9200-2 Pulse Controller
24VDC
GND
PLC
Terminal assignment GND (common) Sensor output (open collector) 5-24VDC (home sensor power)
Terminal assignment Encoder A phase + Line driver output Encoder A phase - Line driver output GND (common) 5VDC (encoder power) Encoder B phase + Line driver output Encoder B phase - Line driver output
8-pin encoder line connector
3-pin home sensor line connector
Terminal assignment GND (common) Analogue output 12-26VDC (pressure sensor power)
4-pin pressure sensor line connector
*When using an Oriental motor SG9200-2 Pulse Controller, consult its instruction manual as well.

16
Line connectors
See the table below for wiring with each device.
■ 3-pin home sensor line connector
Pin number Terminal assignment
1 (brown) 5-24VDC (home sensor power)
2 (blue) GND (common)
3 (black) Sensor output (open collector)
■ 4-pin pressure sensor line connector
Pin number Terminal assignment
1 (red) 12-26VDC (pressure sensor power)
2 (black) GND (common)
3 (green) Analogue output
4N/A
■ 6-pin motor line connector
Pin number Terminal assignment
1 (blue) Motor lead
2 (red) Motor lead
3 (orange) Motor lead
4 (green) Motor lead
5 (black) Motor lead
6N/A
■ 8-pin encoder line connector
Pin number Terminal assignment
1 (white) Encoder A phase + Line driver output
2 (white/black) Encoder A phase - Line driver output
3 (green) Encoder B phase + Line driver output
4 (green/black) Encoder B phase - Line driver output
5 (red) 5VDC (encoder power)
6 (black) GND (common)
7N/A
8N/A
Installation/Piping/Wiring

17
Installation
Installation/Piping/Wiring
Applicable motor drivers
See the table below for applicable ORIENTAL MOTOR's motor drivers.
Product name
Rated power
voltage Driver type Pulse input type Driver type Cable Attached connector
CRD5107PB 24VDC Pulse-train
input
1 pulse/
2 pulse PCB
• Cable set
LCS04SD5 (0.6m)
• Motor lead connector
LCS5N06B (0.6m)
LCS5N10B (1m)
• MOREX 51103-0200
• MOREX 51103-1200
• MOREX 51103-0500
• MOREX 50351-8100 (contact)
CRD507-KD 24VDC Built in (I/O,
RS485) BOX
<Accessories>
• In/out cable connector
• Motor lead connector
• PHOENIX CONTACT MC1,5/3-
STF-3,5 power line connector
CSD5807N-P 24VDC Pulse-train
input 2 pulse PCB • Driver cable set
LCS01CSK5 (0.6m)
• AMP 171822-3
• AMP 1-171822-2
• AMP 171822-5
SD5107P3 24VDC Pulse-train
input 2 pulse PCB
• Driver cable set
LCS04SD5 (0.6m)
• Motor lead connector
LC5N06B (0.6m)
LC5N10B (1m)
• MOREX 51103-0200
• MOREX 51103-1200
• MOREX 51103-0500
• MOREX 50351-8100 (contact)
RKD507-A 100VAC Pulse-train
input
1 pulse/
2 pulse BOX
CC05PK5 5m motor cable
CC10PK5 10m motor cable
CC20PK5 20m motor cable
• Control signal in/out connector
Case: MOREX 54311-1201
Connector: MOREX 54306-2019

18
This section describes pump operation. Observe instructions in this manu-
al. See manufacturer's instruction manual for the motor driver.
Pump setting
First, program operation of the pump.
Pulse input & Motor rotation
The pump lets out liquid at the input of the CCW direction command pulse and takes in liquid at the input of the
CW direction command pulse.
At factory default setting, the motor-driven cylinder (sensor dog) is at the origin where a home sensor output
turns ON. Be sure the cylinder returns to the origin before operation. See the next page for detail.
■ Number of pulses & Flow volume
Number of input pulses Calculated ow volume
1600 1.0ml/shot
4800 3.0ml/shot
8000 5.0ml/shot
12800 8.0ml/shot
19200 12.0ml/shot
■ Number of pulses & Flow rate
Number of input pulses per sec Calculated ow rate
480 pps 0.3ml/sec
800 pps 0.5ml/sec
1600 pps 1.0ml/sec
3200 pps 2.0ml/sec
Operation
Pump setting

19
Operation
Pump setting
Return to origin
Program the origin return behaviour to ensure the motor-driven cylinder to come back to origin before opera-
tion every day. The behaviour should be different depending on whether the home sensor output is ON or OFF
at an input of an origin return signal. See the programming chart below for detail.
■ Home sensor output is "OFF"
■ Home sensor output is "ON"
Operation programming
Operational behaviour can be programmed into two different control modes; Time-based control (via a pulse
controller) and Flow-based control (via a pulse controller or user's PLC). In either mode, the pump runs through
the routine of a discharge process, pause state, suction process and waiting state. See the following charts to
program operation in individual modes.
NOTE
• The cylinder can contract beyond the origin for the offset interval (400 pulses below the origin). Do not ex-
ceed the limit.
• The motor may step out if the waiting time is too short. "Step out" means the motor rotates out of a specified
step angle and number of pulses.
• The maximum discharge flow rate is 2ml/sec, however, discharge pressure may rise sharply depending on liquid
viscosity and piping layout, and may overload the bellows. Observe the maximum discharge pressure.
• The maximum suction flow rate is 2ml/sec, however, suction pressure may fall sharply depending on liquid vis-
cosity and piping layout, and may trigger cavitation. Observe the maximum suction pressure.
Discharge
process
Suction
process
Offset interval (max 400 pulses from origin)
Origin
Input of an origin return
signal (from PLC)
Home sensor output
signal (from pump)
Pump behaviour
Offset interval (max 400 pulses from origin)
Origin
Discharge
process
Suction
process
Input of an origin return
signal (from PLC)
Home sensor output
signal (from pump)
Pump behaviour

20
■ Time based control (when using an Oriental Motor SG9200-2 pulse controller)
An ORIENTAL MOTOR SG9200-2 pulse controller is needed for discharge-time control and an OMROM H3RN-
1 Off-delay timer for suction-time control. A discharge process is made for a discharge time; a time period when
the pump is receiving the discharge signal from the pulse controller, and a suction process starts as receiving
a suction signal from the Off-delay timer. Provide with the pulse controller a pause time [T1] of 0.5 sec or more
between the end of a discharge process and the start of a suction process and a waiting time (at least 1/2 of a
set suction time) [T2] between the end of the suction process and the start of the next discharge process.
NOTE
Observe the formula below when determining a discharge ow rate and a discharge time. Or the pump may break:
Discharge ow rate (see page 25) × Discharge time = 12.0ml (max disch. capacity per shot: see page 25) or less
<When a discharge ow rate × a discharge time = 12.0ml>
<When the same discharge ow rate × a discharge time < 12.0ml>
A discharge process will becomes shorter.
Discharge
process
Suction
process
Valve delay (user-selectable)
Pause time [T1] : 0.5 sec or more
Waiting time [T2] : 1/2 of suction time or more
Pump behaviour
Suction signal
(from Off delay timer)
Discharge signal
(from pulse controller)
Home sensor output signal
(from pump)
Control signal of discharge-
line air-operated valve
(valve ON during signal input)
Pump setting
Discharge
process
Suction
process
Valve delay (user-selectable)
Pause time [T1] : 0.5 sec or more
Waiting time [T2] : 1/2 of suction time or more
Discharge time
Pump behaviour
Suction signal
(from Off delay timer)
Home sensor output signal
(from pump)
Discharge signal
(from pulse controller)
Control signal of discharge-
line air-operated valve
(valve ON during signal input)