Keithley 4200-SCS User manual

Reference Manual
4200-901-01 Rev. S/ May 2017
*P4200-901-01S*
4200-901-01S
www.tek.com/keithley
Model 4200-SCS
Semiconductor Characterization System

© 2017, Keithley Instruments
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in
part, without the prior written approval of Keithley Instruments. is strictly prohibited.
TSP®, TSP-Link®, and TSP-NetTM are trademarks of Keithley Instruments. All Keithley
Instruments product names are trademarks or registered trademarks of Keithley Instruments.
Other brand names are trademarks or registered trademarks of their respective holders.
4200-901-01 Rev. S / May 2017
Model 4200-SCS
Semiconductor Characterization System
Reference Manual
KTE Interactive Version 9.1SP2
Document Number:

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Safety Precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although some
instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous conditions may
be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer
to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.
They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or
replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service
personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are measurement, control, and data I/O connections, with
low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
Measurement Category II (as referenced in IEC 60664) connections require protection for high transient overvoltages often associated
with local AC mains connections. Certain Keithley Instruments measuring instruments may be connected to mains. These instruments will
be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30 V RMS, 42.4 V peak,
or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are
prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of
operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER
connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current
and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power
disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.
For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or accessories are
used in a manner not specified in the operating instructions, the protection provided by the equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the specifications and
operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground) connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid
interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of danger. The user must refer to the operating instructions located in the user
documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means caution, risk of electric shock. Use standard safety precautions to avoid personal contact with
these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly
disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the
associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the
warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power transformer, test
leads, and input jacks — must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be
used if the rating and type are the same. The detachable mains power cord provided with the instrument may only be replaced with a
similarly rated power cord. Other components that are not safety-related may be purchased from other suppliers as long as they are
equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy
and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office
for information.
Unless otherwise noted in product-specific literature, Keithley Instruments instruments are designed to operate indoors only, in the
following environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner
directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis
(e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the
board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of March 2016.
!

Model 4200-SCS Reference Manual Table of Contents
4200-901-01 Rev. S / May 2017 i
Section Topic Page
1 Introduction ................................................................................................... 1-1
Introduction ....................................................................................................... 1-2
Embedded PC policy......................................................................................... 1-2
Model 4200-SCS system overview ................................................................... 1-2
Software features........................................................................................ 1-4
Hardware features and capabilities ............................................................ 1-4
Model 4200-SCS documentation overview ....................................................... 1-8
Surveying the documentation ..................................................................... 1-8
Distinguishing special text items in the manuals ...................................... 1-11
2 Installation ..................................................................................................... 2-1
Introduction ....................................................................................................... 2-2
Unpacking and inspection ................................................................................. 2-2
Inspection for damage ................................................................................ 2-2
Shipment contents ...................................................................................... 2-2
Manual package ......................................................................................... 2-3
Repacking for shipment.............................................................................. 2-3
System connections .......................................................................................... 2-4
Connecting the keyboard and mouse (optional)......................................... 2-4
Connecting GPIB instruments .................................................................... 2-5
Connecting a probe station......................................................................... 2-6
Connecting a printer ................................................................................... 2-6
Connecting a LAN....................................................................................... 2-7
SMU connections.............................................................................................. 2-7
Triax cables ................................................................................................ 2-8
Basic connections....................................................................................... 2-8
Test fixtures............................................................................................... 2-11
Mounting PreAmps in a probe station....................................................... 2-12
Pulsing: Source and measure hardware ......................................................... 2-13
Environmental requirements ........................................................................... 2-14
Shipping and storage environment........................................................... 2-14
Operating environment ............................................................................. 2-14
Powering the Model 4200-SCS....................................................................... 2-15
Line power ................................................................................................ 2-15
Power-up sequence.................................................................................. 2-17
Warm-up period ........................................................................................ 2-17
3 Source-Measure Hardware ........................................................................ 3-1
Introduction ....................................................................................................... 3-3
Models 4200-SMU and 4210-SMU overview.................................................... 3-3
Basic SMU circuit configuration .................................................................. 3-3
Compliance limit ......................................................................................... 3-5
Operating boundaries ................................................................................. 3-5
SMU terminals and connectors................................................................. 3-11
Source measure unit (SMU) with Model 4200-PA overview............................ 3-12
Basic SMU/PreAmp circuit configuration .................................................. 3-13
Compliance limit ....................................................................................... 3-13
Operating boundaries ............................................................................... 3-14
PreAmp terminals and connectors............................................................ 3-15
PreAmp mounting ..................................................................................... 3-17
Ground unit (GNDU) overview ........................................................................ 3-19
Basic characteristics................................................................................. 3-19
Basic circuit configurations ....................................................................... 3-20
Ground unit terminals and connectors...................................................... 3-21
Table of Contents

Table of Contents Model 4200-SCS Reference Manual
ii 4200-901-01 Rev. S / May 2017
4 Connections and Configuration ............................................................... 4-1
Introduction ....................................................................................................... 4-3
Basic source-measure connections .................................................................. 4-3
Connection considerations ......................................................................... 4-4
SMU connections ....................................................................................... 4-7
PreAmp connections .................................................................................. 4-8
Using the ground unit ............................................................................... 4-10
SMU circuit COMMON connections ......................................................... 4-14
Test equipment connections............................................................................ 4-15
Recommended connecting cables ........................................................... 4-15
Switch matrix connections ........................................................................ 4-15
Test fixture connections ............................................................................ 4-19
Prober connections................................................................................... 4-19
Control and data connections ......................................................................... 4-20
Safety interlock connections..................................................................... 4-20
IEEE-488 connections .............................................................................. 4-22
RS-232 connections ................................................................................. 4-24
LAN connections ...................................................................................... 4-25
USB connections ...................................................................................... 4-26
5 Source-Measure Concepts ........................................................................ 5-1
Introduction ....................................................................................................... 5-3
Guarding ........................................................................................................... 5-3
Guarding overview...................................................................................... 5-3
Guard connections ..................................................................................... 5-4
Guarding concepts...................................................................................... 5-5
Test fixture guarding ................................................................................... 5-6
Remote sensing ................................................................................................ 5-7
Sensing overview ....................................................................................... 5-7
Sense selection .......................................................................................... 5-8
Sensing concepts ....................................................................................... 5-9
Sensing considerations ............................................................................ 5-10
Sink operation ................................................................................................. 5-11
Sink overview ........................................................................................... 5-11
Sink operating boundaries........................................................................ 5-11
Source-measure configurations ...................................................................... 5-12
Source I, measure V or I........................................................................... 5-12
Source V, measure I or V.......................................................................... 5-13
Measure only (V or I) ................................................................................ 5-14
Sweep concepts.............................................................................................. 5-15
Source-delay-measure cycle .................................................................... 5-15
Sweep waveforms .................................................................................... 5-15
Making stable measurements ......................................................................... 5-16
Single SMU stability considerations.......................................................... 5-16
Multiple SMU stability considerations ....................................................... 5-17
Eliminating oscillations ............................................................................. 5-17
Low current measurements............................................................................. 5-19
Leakage currents ...................................................................................... 5-19
Generated currents................................................................................... 5-20
Voltage burden.......................................................................................... 5-23
Noise and source impedance ................................................................... 5-24
Cable capacitance .................................................................................... 5-24
Performance of an integrated semiconductor test system........................ 5-25
Interference..................................................................................................... 5-25
Electrostatic interference .......................................................................... 5-25
Radio frequency interference ................................................................... 5-26
Ground loops and other SMU grounding considerations.......................... 5-26
6 Keithley Interactive Test Environment (KITE) ....................................... 6-1
Introduction ....................................................................................................... 6-5
KITE projects .............................................................................................. 6-5
Overview of KITE ............................................................................................ 6-10
KITE interface........................................................................................... 6-10
Project Navigator ...................................................................................... 6-12

Model 4200-SCS Reference Manual Table of Contents
4200-901-01 Rev. S / May 2017 iii
Interactive Test Modules (ITMs) and User Test Modules (UTMs)............. 6-14
Developing and using user libraries for UTMs.......................................... 6-24
Basic test execution.................................................................................. 6-27
Multi-site Project Plan execution............................................................... 6-33
Understanding KITE........................................................................................ 6-37
Project defined.......................................................................................... 6-37
Project components .................................................................................. 6-37
Project structure........................................................................................ 6-39
Building, modifying, and deleting a Project Plan............................................. 6-48
Building a completely new Project Plan.................................................... 6-48
Modifying an existing Project Plan............................................................ 6-71
Deleting a Project Plan ............................................................................. 6-84
Configuring the Project Plan ITMs .................................................................. 6-86
Opening an ITM window........................................................................... 6-87
Becoming acquainted with the ITM Definition tab..................................... 6-88
ITM Status tab........................................................................................... 6-90
Matching Definition tab terminal connections to physical connections ..... 6-91
Selecting the ITM test mode..................................................................... 6-92
Assigning/reassigning forcing functions to the device terminals............... 6-93
Configuring SMU Forcing Functions/Measure Options window ............... 6-98
Configuring the Speed and Timing settings in the ITM Definition tab ..... 6-130
Configuring Formulator calculations ....................................................... 6-140
Saving the ITM configuration .................................................................. 6-140
ITM compliance exit conditions............................................................... 6-141
ITM Output Values .................................................................................. 6-142
Configuring the UTMs ................................................................................... 6-142
Opening a UTM window ......................................................................... 6-144
Connecting/reconnecting the UTM to a user library and module............ 6-146
Inputting the UTM parameters................................................................6-147
Configuring Formulator calculations ....................................................... 6-147
Saving the UTM configuration ................................................................6-148
UTM Output Values ................................................................................ 6-148
Submitting devices, ITMs, and UTMs to libraries.......................................... 6-148
Submitting devices to a library................................................................6
-149
Submitting tests to a library .................................................................... 6-151
Copying tests from a library.................................................................... 6-154
Executing Project Plans, Subsite Plans, Device Plans, and tests................. 6-157
Enabling tests (Project Navigator Checkboxes) ..................................... 6-157
‘Run’ execution of Project Plans ............................................................. 6-157
Run execution of individual tests and test sequences ............................ 6-162
Append execution of tests, test sequences, and Project Plans .............. 6-168
Repeating a test...................................................................................... 6-172
Displaying and analyzing test results............................................................ 6-173
Displaying and analyzing data using the Sheet tab................................ 6-174
Viewing data using the Graph tab........................................................... 6-204
Analyzing test data using the Formulator ............................................... 6-287
Formulator function reference................................................................. 6-292
Subsite cycling .............................................................................................. 6-317
Overview................................................................................................. 6-317
Stress/Measure Mode............................................................................. 6-321
Storing test results in exportable Keithley Data File (KDF) format ................ 6-326
Customizing KITE ......................................................................................... 6-336
Customizing workspace options ............................................................. 6-336
Customizing directory options................................................................. 6-340
Customizing graph defaults .................................................................... 6-345
Custom GPIB Abort Options................................................................... 6-346
Customizing the view.............................................................................. 6-347
Calibrating the system................................................................................... 6-349
7 Keithley CONfiguration Utility (KCON) ................................................... 7-1
Introduction ....................................................................................................... 7-3
KCON main window .......................................................................................... 7-3
Configuration Navigator.............................................................................. 7-4
KCON main menu............................................................................................. 7-5

Table of Contents Model 4200-SCS Reference Manual
iv 4200-901-01 Rev. S / May 2017
File menu.................................................................................................... 7-5
Tools Men u ................................................................................................. 7-6
Help menu ................................................................................................ 7-11
System Configuration properties .............................................................. 7-12
8 Keithley User Library Tool (KULT) ........................................................... 8-1
Keithley User Library Tool (KULT)..................................................................... 8-4
KULT window.............................................................................................. 8-5
Understanding the module identification area ............................................ 8-6
Understanding the module parameter display area.................................... 8-6
Understanding the module code entry area................................................ 8-7
Understanding the terminating brace area ................................................. 8-7
Understanding the tab areas ...................................................................... 8-7
Parameters tab area................................................................................... 8-7
Includes tab area ........................................................................................ 8-9
Description tab area.................................................................................. 8-10
Build tab area............................................................................................ 8-11
Understanding the status bar.................................................................... 8-11
Understanding the menus......................................................................... 8-12
File menu.................................................................................................. 8-12
Edit menu ................................................................................................. 8-14
Options menu ........................................................................................... 8-15
Help menu ................................................................................................ 8-15
KULT Tutorials................................................................................................. 8-16
Tutorial 1: Creating a new user library and user module .......................... 8-16
Tutorial 2: Creating a user module that returns data arrays ..................... 8-29
Tutorial 3: Calling one user module from within another .......................... 8-35
Advanced KULT features ................................................................................ 8-39
Managing user libraries ............................................................................ 8-39
Working with interdependent user modules and user libraries................. 8-51
Understanding user module locking ......................................................... 8-56
Debugging user modules using Microsoft Visual C++ .............................. 8-58
UTM GUI view................................................................................................. 8-59
Creating a UTM GUI definition using the UTM GUI editor........................ 8-61
Enabling access to the UTM GUI Editor................................................... 8-62
Using the UTM GUI Editor........................................................................ 8-63
Groups...................................................................................................... 8-66
Selecting a GUI image.............................................................................. 8-68
Editing the attributes for a test parameter................................................. 8-69
Control types ............................................................................................ 8-70
UTM GUI definition file information........................................................... 8-89
Reset defaults........................................................................................... 8-89
Copy or move UTM GUI definitions.......................................................... 8-90
LPT Library Function Reference ..................................................................... 8-90
Using source compliance limits ................................................................8-91
LPT functions............................................................................................ 8-91
LPT functions for SMUs and general operations...................................... 8-96
LPT functions for the Model 4205-PG2 .................................................. 8-155
LPT functions for the Models 4220-PGU and 4225-PMU....................... 8-177
LPT Library Status and Error codes........................................................ 8-213
LPTLib and KITE interaction via UTMs ......................................................... 8-220
Cross-platform LPTLib compatibility.............................................................. 8-220
S400/S600 functions not supported by the Model 4200-SCS ................ 8-226
Moving user libraries: 4200-SCS to S400............................................... 8-227
Moving user libraries: Model 4200-SCS to a Model S600/S630............. 8-230
9 Keithley External Control Interface (KXCI) ............................................ 9-1
Introduction ....................................................................................................... 9-3
Remote control overview (GPIB, Ethernet) ....................................................... 9-3
GPIB standards .......................................................................................... 9-3
Communication connections ...................................................................... 9-4
Setting remote control mode (GPIB versus Ethernet) ................................ 9-5
KXCI control interface ....................................................................................... 9-6
Starting KXCI and the GPIB command interpreter ..................................... 9-6
Understanding the KXCI user interface ...................................................... 9-7

Model 4200-SCS Reference Manual Table of Contents
4200-901-01 Rev. S / May 2017 v
Understanding the log file........................................................................... 9-8
Using KXCI ................................................................................................. 9-9
GPIB command set ......................................................................................... 9-11
GPIB command reference............................................................................... 9-21
System mode commands ......................................................................... 9-21
User mode commands (US) ..................................................................... 9-40
Commands common to system and user modes ..................................... 9-44
4200 extended mode-only commands...................................................... 9-48
Ethernet command reference.......................................................................... 9-48
SMU default settings ....................................................................................... 9-48
System Mode SMU default Settings ......................................................... 9-49
Output data formats......................................................................................... 9-50
Data format for system mode readings..................................................... 9-50
Data format for user mode readings ......................................................... 9-50
Status byte and serial polling .......................................................................... 9-52
Status byte................................................................................................ 9-52
Serial polling ............................................................................................. 9-53
Waiting for SRQ........................................................................................ 9-53
Sample programs............................................................................................ 9-53
Program 1: VAR1 and VAR2 sweep (system mode) ................................ 9-53
Program 2: Basic source-measure (user mode)....................................... 9-55
Program 3: Retrieving saved data (system mode) ................................... 9-56
GPIB error messages...................................................................................... 9-57
Pulse generator and scope commands........................................................... 9-57
Keithley pulse card KXCI commands ....................................................... 9-57
KXCI commands to control scope card .................................................... 9-65
Scope error codes .................................................................................... 9-93
KXCI CVU commands..................................................................................... 9-96
Code examples....................................................................................... 9-102
Calling KULT user libraries remotely............................................................. 9-104
UL: usrlib................................................................................................. 9-104
EX: execute ............................................................................................ 9-104
GN: get parameter (by name)................................................................. 9-105
GP: get parameter (by number).............................................................. 9-106
GD – get description............................................................................... 9-106
SystemUtil User Library ................................................................................ 9-107
KXCI Ethernet client driver............................................................................ 9-108
Driver functions....................................................................................... 9-108
10 System Administration ............................................................................. 10-1
Introduction ..................................................................................................... 10-2
Embedded PC policy....................................................................................... 10-2
Default user accounts ..................................................................................... 10-3
Preconfigured user accounts .................................................................... 10-3
Creating new user accounts ..................................................................... 10-3
Managing multiple users and systems ............................................................ 10-4
Default user directory C:\S4200\kiuser..................................................... 10-5
System directory C:\S4200\sys................................................................. 10-5
Creating additional user or personal directories ....................................... 10-5
Sharing libraries and projects ................................................................... 10-7
BIOS settings .................................................................................................. 10-9
Default video settings...................................................................................... 10-9
Driving an external monitor from a 4200-SCS with an integrated FPD .... 10-9
Placing KITE or KXCI in the Windows startup menu .................................... 10-10
System-level backup and restore software ................................................... 10-10
Acronis True Image OEM ....................................................................... 10-10
Image restore to factory condition .......................................................... 10-12
Acronis True Image OEM ....................................................................... 10-12
Read and write permission access to USB ports .......................................... 10-12
11 Pulse Source-Measure Concepts........................................................... 11-1
Settings for pulse generator............................................................................ 11-4

Table of Contents Model 4200-SCS Reference Manual
vi 4200-901-01 Rev. S / May 2017
Complement mode ................................................................................... 11-5
Current limit .............................................................................................. 11-5
Full Arb waveform..................................................................................... 11-5
Segment ARB waveform ......................................................................... 11-11
kiscopeulib UTM descriptions................................................................. 11-21
Triggering ...................................................................................................... 11-30
Basic triggering....................................................................................... 11-30
Pulse-measure synchronization ............................................................. 11-31
Pulse output synchronization.................................................................. 11-33
Multi-channel synchronization with the Segment ARB Mode ................. 11-36
Pulse source-measure connections.............................................................. 11-38
Pulse generator connections .................................................................. 11-40
Scope connections ................................................................................. 11-40
Pulse generator and scope connections ................................................ 11-41
Multiple pulse generator and scope connections ................................... 11-42
Pulse parameter definitions........................................................................... 11-44
Pulse period............................................................................................ 11-45
Pulse width ............................................................................................. 11-45
Duty cycle ............................................................................................... 11-46
Pulse delay ............................................................................................. 11-46
Interchannel delay (skew)....................................................................... 11-47
Transition time ........................................................................................ 11-47
Linearity (deviation) ................................................................................ 11-48
Jitter........................................................................................................ 11-48
Pulse levels ............................................................................................ 11-48
Distortion (preshoot, overshoot, and ringing).......................................... 11-49
Settling time............................................................................................ 11-49
Repeatability........................................................................................... 11-50
PIV-Q user libraries....................................................................................... 11-50
DualPulseulib UTM descriptions............................................................. 11-50
Pulse adapters, cables, hardware and PCU ................................................. 11-92
12 Pulse Projects for Models 4200-PIV-A and 4200-PIV-Q .................... 12-1
Model 4205-RBT (Remote Bias Tee) and Power Divider................................ 12-2
RBT .......................................................................................................... 12-2
3-Port Power Divider ................................................................................ 12-2
Using an RBT and Power Divider............................................................. 12-3
PulseIV-Complete and Demo-PulseIV projects............................................... 12-4
Theory of operation for the 4200-PIV-A package ..................................... 12-6
PIV tests ................................................................................................... 12-8
QPulseIV-Complete project........................................................................... 12-18
Pulse IV UTM descriptions............................................................................ 12-18
cal_pulseiv.............................................................................................. 12-18
vdsid_pulseiv .......................................................................................... 12-20
VdId_Pulse_DC_Family_pulseiv ............................................................ 12-22
vgsid_pulseiv .......................................................................................... 12-26
VgId_DC_Pulse_pulseiv......................................................................... 12-28
scopeshot_cal_pulseiv ........................................................................... 12-31
scopeshot_pulseiv .................................................................................. 12-33
vdsid_pulseiv_demo ............................................................................... 12-35
vgsid_pulseiv_demo ............................................................................... 12-35
scopeshot_pulseiv_demo ....................................................................... 12-35
13 KPulse (for Keithley Pulse Generator Cards) ..................................... 13-1
14 KScope (for Models 4200-SCP2 and 4200-SCP2HR)......................... 14-1
KScope graphical user interface ..................................................................... 14-2
Configure Input settings............................................................................ 14-3
Configure Trigger settings ........................................................................ 14-4
Configure Arm settings ............................................................................. 14-5
Configure Calculate settings..................................................................... 14-6
Configure Measure settings...................................................................... 14-7
Configure the Hardware settings .............................................................. 14-8
Operate the scope .................................................................................... 14-9

Model 4200-SCS Reference Manual Table of Contents
4200-901-01 Rev. S / May 2017 vii
15 Multi-Frequency C-V measurements (Model 4210-CVU) .................. 15-1
Introduction ..................................................................................................... 15-5
4210-CVU card ............................................................................................... 15-5
Measurement overview............................................................................. 15-5
Measurement functions ............................................................................ 15-6
Test signal................................................................................................. 15-7
DC bias function and sweep characteristics............................................. 15-7
Force-measure timing............................................................................... 15-8
Connections .................................................................................................... 15-9
Cables and adapters................................................................................. 15-9
Test connections..................................................................................... 15-11
Confidence Check .................................................................................. 15-15
Connection compensation ...................................................................... 15-18
KCON system configuration.......................................................................... 15-22
Properties & Connections tab ................................................................. 15-22
Properties tab for the switching matrix.................................................... 15-23
Properties tab for the matrix card ........................................................... 15-25
Saving the configuration ......................................................................... 15-27
C-V project plans........................................................................................... 15-28
Project plans overview............................................................................ 15-28
CVU_BJT................................................................................................ 15-29
CVU_Capacitor....................................................................................... 15-40
CVU_InterconnectCap............................................................................ 15-48
CVU_ivcvswitch ...................................................................................... 15-53
CVU_lifetime........................................................................................... 15-64
CVU_MobileIon....................................................................................... 15-78
CVU_MOScap ........................................................................................ 15-91
CVU_MOSFET ..................................................................................... 15-114
CVU_nanowire...................................................................................... 15-122
CVU_PNjunction................................................................................... 15-128
CVU_PVcell.......................................................................................... 15-141
Default .................................................................................................. 15-158
Running project plan tests .................................................................... 15-159
CVU measurement status ........................................................................... 15-161
LPT library function reference ..................................................................... 15-163
asweepv................................................................................................ 15-164
devclr .................................................................................................... 15-165
devint .................................................................................................... 15-165
dsweepf ................................................................................................ 15-166
dsweepv................................................................................................ 15-167
forcev.................................................................................................... 15-168
getstatus ............................................................................................... 15-168
measf.................................................................................................... 15-169
meast.................................................................................................... 15-169
measv ................................................................................................... 15-170
measz ................................................................................................... 15-170
rangei.................................................................................................... 15-171
rtfary...................................................................................................... 15-171
setauto .................................................................................................. 15-172
setfreq................................................................................................... 15-172
setlevel.................................................................................................. 15-173
setmode................................................................................................ 15-173
smeasf .................................................................................................. 15-174
smeasfRT ............................................................................................. 15-175
smeast .................................................................................................. 15-175
smeastRT ............................................................................................. 15-176
smeasv ................................................................................................. 15-176
smeasvRT............................................................................................. 15-177
smeasz ................................................................................................. 15-177
smeaszRT............................................................................................. 15-178
sweepf .................................................................................................. 15-179
sweepv.................................................................................................. 15-180
Programming examples........................................................................ 15-181
Using the 4210-CVU card switch matrix ..................................................... 15-183

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viii 4200-901-01 Rev. S / May 2017
16 Models 4220-PGU, 4225-PMU, and 4225-RPM .................................... 16-1
Supplied accessories ...................................................................................... 16-4
Models 4220-PGU and 4225-PMU ................................................................. 16-4
Overview................................................................................................... 16-4
Pulse modes............................................................................................. 16-6
Standard pulse mode output and timing characteristics ........................... 16-7
Segment ARB characteristics................................................................... 16-8
Full-arb characteristics ............................................................................. 16-8
Current measurement ranges for the PMU............................................... 16-8
Pulse measurement timing (PMU)............................................................ 16-9
Pulse measurement types (PMU)........................................................... 16-10
PMU test modes, measure modes, and sample rate.............................. 16-10
Model 4225-RPM .......................................................................................... 16-13
RPM input, output, and top panels ......................................................... 16-14
RPM wiring diagram ............................................................................... 16-15
RPM diagrams for local and remote sensing.......................................... 16-15
Current measurement ranges for the PMU with RPM ............................ 16-16
Using the RPM as a switch..................................................................... 16-17
Connections .................................................................................................. 16-18
Connection guidelines ............................................................................ 16-19
Basic PMU connection schemes ............................................................ 16-21
Connections to prober or test fixture bulkhead connectors .................... 16-23
Using an SMA to SSMC adapter cable to connect pulse card to DUT... 16-24
Model 4225-RPM connections ............................................................... 16-25
Configuring the PGU, PMU, and RPM using UTMs and ITMs...................... 16-28
Configuring the PGU .............................................................................. 16-28
Configuring the PMU and RPM preamp ................................................. 16-28
Configuring an RPM switch .................................................................... 16-28
Procedure to configure a PMU (with or without RPM) from an ITM .............. 16-29
Step 1) Select the test and measure modes........................................... 16-29
Step 2) Select the forcing function.......................................................... 16-33
Step 3) Set the measure ranges............................................................. 16-34
Step 4) Configure the selected forcing function...................................... 16-35
Step 5) Configure measurements........................................................... 16-39
Step 6) Configure pulse timing ............................................................... 16-41
PMU pulse timing preview............................................................................. 16-44
PMU amplitude sweep example (one-channel)...................................... 16-45
PMU amplitude sweep and step example (two-channel)........................ 16-47
Higher channel count test example ........................................................ 16-51
PMU connection compensation .................................................................... 16-54
Performing connection compensation .................................................... 16-56
Enabling connection compensation........................................................ 16-58
Load line effect compensation (LLEC) for the PMU...................................... 16-59
Load line effect ....................................................................................... 16-59
Methods to compensate for load line effect ............................................ 16-59
How LLEC adjusts pulse output to the target levels ............................... 16-60
LLEC maintains even voltage spacing.................................................... 16-61
Test considerations................................................................................. 16-62
LPT functions used to configure LLEC ................................................... 16-62
Controlling LLEC from an ITM ................................................................ 16-63
Understanding pulse shape effects............................................................... 16-64
PMU minimum settling times versus current measure range ................. 16-64
PMU capacitive charging/discharging effects ......................................... 16-66
PMU and RPM measure ranges are not source ranges ............................... 16-68
PMU measurement status............................................................................. 16-69
Model 4220-PGU and Model 4225-PMU output limitations .......................... 16-72
Model 4200-SCS power supply limitations.................................................... 16-72
Basic troubleshooting procedure................................................................... 16-74
Pulse project plans summary ........................................................................ 16-84
chargepumping project.................................................................................. 16-87
Key concepts .......................................................................................... 16-87
Project summary..................................................................................... 16-88
Opening the project plan ........................................................................ 16-88

Model 4200-SCS Reference Manual Table of Contents
4200-901-01 Rev. S / May 2017 ix
Connections............................................................................................ 16-88
Renaming and running the project.......................................................... 16-90
Project plan tests .................................................................................... 16-91
Running project plan tests .................................................................... 16-108
Return values........................................................................................ 16-109
PMU-DUT-Examples project ....................................................................... 16-110
Using a SMU with PMUs ...................................................................... 16-110
Test setups............................................................................................ 16-110
Test descriptions................................................................................... 16-112
NVM_Examples project............................................................................... 16-117
PMU-Flash-NAND project ........................................................................... 16-118
PMU-MOSFET project ................................................................................ 16-118
PMU-Switch project..................................................................................... 16-122
chargepumping user library......................................................................... 16-124
Procedure to perform charge pumping measurements ........................ 16-126
Charge pumping user module descriptions .......................................... 16-128
AmplitudeSweep................................................................................... 16-128
AmplitudeSweep_2SMU....................................................................... 16-129
BaseSweep........................................................................................... 16-131
BaseSweep_2SMU............................................................................... 16-132
FallTimeLinearSweep ........................................................................... 16-134
FreqFactorSweep ................................................................................. 16-135
FreqLinearSweep ................................................................................. 16-137
RiseTimeLinearSweep.......................................................................... 16-138
A Creating Project Prompts........................................................................... A-1
Key concepts..................................................................................................... A-2
Project prompts overview ........................................................................... A-2
Using dialog windows ................................................................................. A-2
Dialog box test examples .................................................................................. A-4
Announce end of test.................................................................................. A-4
Parameter passing...................................................................................... A-5
Winulib user-library reference ........................................................................... A-7
AbortRetryIgnoreDialog user module ......................................................... A-7
InputOkCancelDialog user module............................................................. A-9
OkCancelDialog user module................................................................... A-10
OkDialog user module .............................................................................. A-11
RetryCancelDialog user module ............................................................... A-12
YesNoCancelDialog user module ............................................................. A-14
YesNoDialog user module ........................................................................ A-15
B Using Switch Matrices ................................................................................ B-1
Key concepts..................................................................................................... B-2
Typical test systems using a switch matrix ................................................. B-2
Switch matrix control................................................................................... B-7
Connection scheme settings....................................................................... B-8
Signal paths to a DUT................................................................................. B-9
Using KCON to add a switch matrix to the system ......................................... B-15
Switch matrix control example ........................................................................ B-21
Matrixulib user library reference...................................................................... B-22
ConnectPins user module......................................................................... B-22
C Using a Keithley Instruments Model 590 CV Analyzer ...................... C-1
Key concepts..................................................................................................... C-2
C-V measurement basics ........................................................................... C-2
Capacitance measurement tests ................................................................C-3
Connections................................................................................................ C-3
Cable compensation................................................................................... C-4
Using KCON to add Model 590 CV Analyzer to system ................................... C-5
Model 590 test examples .................................................................................. C-7
Example #1: Cable compensation............................................................. C-7
Example #2: C-V sweep ........................................................................... C-10
ki590ulib user library reference....................................................................... C-12
CableCompensate590 user module ......................................................... C-13

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x4200-901-01 Rev. S / May 2017
Cmeas590 user module ........................................................................... C-15
CtSweep590 user module ........................................................................ C-18
CvPulseSweep590 user module .............................................................. C-21
CvSweep590 user module ....................................................................... C-26
DisplayCableCompCaps590 user module................................................ C-30
SaveCableCompCaps590 user module ................................................... C-32
D Using an HP 4284A/4980A LCR Meter .................................................... D-1
Key Concepts.................................................................................................... D-2
C-V measurement basics ........................................................................... D-2
Capacitance measurement tests ................................................................D-3
Connections................................................................................................ D-3
Using KCON to Add an Agilent (HP) LCR Meter to the System ....................... D-5
Model 4284A/4980A Test Example................................................................... D-7
C-V sweep .................................................................................................. D-7
hp4284ulib User Library Reference .................................................................. D-9
CvSweep4284 User Module....................................................................... D-9
Cmeas4284 User Module......................................................................... D-11
E Using a Keithley Model 82 C-V System .................................................. E-1
Key concepts..................................................................................................... E-3
Capacitance measurement tests ................................................................E-3
Cable compensation................................................................................... E-6
Connections ...................................................................................................... E-7
Using KCON to add Model 82 C-V System....................................................... E-9
Model 82 project plans .................................................................................... E-11
Cable compensation tests ........................................................................ E-13
Capacitance tests ..................................................................................... E-16
Formulas for capacitance tests................................................................. E-22
Choosing the right parameters........................................................................ E-27
Optimal C-V measurement parameters.................................................... E-27
Determining the optimal delay time .......................................................... E-28
Correcting residual errors ......................................................................... E-30
ki82ulib user library reference......................................................................... E-32
CableCompensate82 user module ........................................................... E-32
CtSweep82 user module .......................................................................... E-34
DisplayCableCompCaps82 user module.................................................. E-37
QTsweep82 user module.......................................................................... E-39
SaveCableCompCaps82 user module ..................................................... E-42
SIMCVsweep82 user module ................................................................... E-44
Simultaneous C-V analysis ............................................................................. E-48
Analysis methods ..................................................................................... E-48
Basic device parameters .......................................................................... E-49
Doping profile ........................................................................................... E-54
Interface trap density................................................................................ E-55
Mobile ion charge concentration............................................................... E-56
Generation velocity and generation lifetime (Zerbst plot) ......................... E-59
Constants, symbols, and equations used for analysis.............................. E-60
References and bibliography of C-V measurements................................ E-63
F Using an Agilent 8110A/81110A Pulse Generator ................................ F-1
Key concepts..................................................................................................... F-2
Pulse generator overview ........................................................................... F-2
Pulse generator tests.................................................................................. F-2
Connections................................................................................................ F-3
Using KCON to add an HP pulse generator to the system ............................... F-4
Pulse generator test example ........................................................................... F-6
Stress testing .............................................................................................. F-6
hp8110ulib user library reference...................................................................... F-7
PguInit8110 user module ............................................................................ F-7
PguSetup8110 user module ....................................................................... F-8
PguTrigger8110 user module ................................................................... F-10

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4200-901-01 Rev. S / May 2017 xi
G Using a Probe Station ................................................................................ G-1
Prober control overview ................................................................................... G-2
Example test execution sequence: probesites project............................... G-4
Example test execution sequence: probesubsites project......................... G-5
Understanding site coordinate information....................................................... G-6
Reference site (die) ................................................................................... G-6
Probe sites (die)......................................................................................... G-6
Chuck movement....................................................................................... G-7
prbgen User Library Reference........................................................................ G-9
PrSSMovNxt .............................................................................................. G-9
PrMovNxt................................................................................................. G-10
PrInit ......................................................................................................... G-11
PrChuck................................................................................................... G-12
H Suss MicroTec PA-200 Prober................................................................... H-1
Required probe station software ....................................................................... H-2
Software versions ....................................................................................... H-2
Probe station configuration ............................................................................... H-3
Modifying the prober configuration file........................................................ H-3
probesites KITE project example .................................................................... H-22
KCON ....................................................................................................... H-24
KITE.......................................................................................................... H-25
probesubsites KITE project example .............................................................. H-26
KCON ....................................................................................................... H-29
KITE.......................................................................................................... H-30
Running projects ............................................................................................. H-31
Commands and error symbols ........................................................................ H-32
I Micromanipulator 8860 Prober .................................................................. I-1
Required probe station software ........................................................................ I-2
Software versions ........................................................................................ I-2
Probe station configuration ................................................................................ I-3
Modifying the prober configuration file......................................................... I-3
probesites KITE project example ..................................................................... I-18
KCON ........................................................................................................ I-22
KITE........................................................................................................... I-24
probesubsites KITE project example ............................................................... I-25
KCON ........................................................................................................ I-28
KITE........................................................................................................... I-29
Commands and error symbols ......................................................................... I-30
J Using a Manual or Fake Prober ................................................................J-1
Required probe station software ....................................................................... J-2
Probe station configuration ............................................................................... J-2
Manual prober overview ............................................................................. J-2
Fake prober overview ................................................................................. J-3
Modifying the prober configuration file........................................................ J-4
Probesites KITE project example...................................................................... J-6
Keithley CONfiguration (KCON) utility ........................................................ J-6
Keithley Interactive Test Environment (KITE) ............................................. J-7
Probesubsites KITE project example................................................................J-8
Keithley CONfiguration (KCON) utility ........................................................ J-8
Keithley Interactive Test Environment (KITE) ............................................. J-9
K Cascade Summit-12000 Prober ................................................................K-1
Required probe station software ....................................................................... K-2
Software versions ....................................................................................... K-2
Probe station configuration ............................................................................... K-2
Probesites KITE Project example ................................................................... K-23
Nucleus UI ................................................................................................ K-23
KCON ....................................................................................................... K-23
KITE.......................................................................................................... K-24
Probesubsites KITE Project example.............................................................. K-26

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xii 4200-901-01 Rev. S / May 2017
KCON ....................................................................................................... K-30
KITE.......................................................................................................... K-32
Commands and error symbols........................................................................ K-33
L Signatone CM500 Prober ........................................................................... L-1
Required probe station software ....................................................................... L-2
Software versions ....................................................................................... L-2
Probe station configuration ............................................................................... L-2
Modifying the prober configuration file........................................................ L-2
KITE project example for Probe Sites............................................................. L-16
CM500 ...................................................................................................... L-16
KCON ....................................................................................................... L-16
KITE project example...................................................................................... L-18
Probesites KITE project example.................................................................... L-24
KITE.......................................................................................................... L-24
Probesubsites KITE project example.............................................................. L-26
KITE.......................................................................................................... L-26
Commands and error symbols........................................................................ L-28
M WLR Testing ................................................................................................. M-1
Introduction ...................................................................................................... M-2
JEDEC standards............................................................................................. M-2
HCI degradation: Background information....................................................... M-3
HCI and WLR project plans.............................................................................. M-3
HCI_1_DUT and HCI_4_DUT project plans .............................................. M-3
NBTI_1_DUT project plan ......................................................................... M-5
EM_const_I project plan ............................................................................ M-6
Qbd project plan ........................................................................................ M-7
Configuration sequence for subsite cycling...................................................... M-7
V-ramp and J-ramp tests.................................................................................. M-9
V-ramp test: qbd_rmpv User Module......................................................... M-9
J-ramp test: qbd_rmpj User Module ........................................................ M-14
N Additional User Libraries ........................................................................... N-1
hp4294ulib user library reference...................................................................... N-3
CvSweep4294 user module ....................................................................... N-3
FiSweep4294 user module......................................................................... N-5
LoadCal4294 user module ......................................................................... N-7
OpenCal4294 user module......................................................................... N-8
PhaseCal4294 user module ....................................................................... N-9
ShortCal4294 user module....................................................................... N-10
wlrlib user library reference............................................................................. N-11
llsq1 user module ..................................................................................... N-11
qbd_rmpv and qbd_rmpj modules ............................................................ N-12
Hotchuck_Triotek user library reference ......................................................... N-12
SetChuckTemp user module .................................................................... N-12
parlib user library reference ............................................................................ N-15
O Advanced Applications ............................................................................. O-1
Advanced Applications..................................................................................... O-2
Controlling a switch matrix ............................................................................... O-2
KCON setup .............................................................................................. O-4
Open KITE and the “ivswitch” project ........................................................ O-6
Running test sequences ............................................................................ O-7
“connect” test description .......................................................................... O-9
Sequencing tests on multiple devices............................................................ O-10
Open “ivswitch” project............................................................................ O-10
Execute the test sequence (Subsite Plan)............................................... O-12
Customizing a user test module (UTM).......................................................... O-12
Open KULT.............................................................................................. O-13
Open the “ki42xxulib” user library............................................................ O-14
Open the “Rdson42XX” user module ...................................................... O-15
Copy “Rdson42XX” to “RdsonAvg”.......................................................... O-15

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Open and modify the “RdsonAvg” user module....................................... O-17
Save, compile, and build the modified library .......................................... O-19
Add a new UTM to the “ivswitch” project ................................................. O-20
Test desc ription ........................................................................................ O-22
Index .................................................................................................................................. I-1

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