LEYBOLD TurboDrive TD20 classic User manual

Part Nos.
800075V0001 to
800075V0008
Turbo.Drive TD20 classic
Frequency Converter for Turbomolecular Pumps
Operating Instructions GA05228_002_C0

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Important Safety Information 3
1 Description 4
1.1 Design and function 4
1.2 Supplied equipment 4
1.3 Technical data 6
1.4 Ordering information 7
1.5 Accessories 7
2 Installation 8
2.1 Placement 8
2.2 Conforming utilisation 8
2.3 Providing the connections 9
2.4 Replacing the NT 20 10
2.5 Replacing the NT 151/361 or NT 361 13
3 Operation 14
3.1 Start-up 14
3.2 Interfaces 15
3.2.1 9-way PLC interface 16
3.2.2 RS 232 interface 17
3.2.3 Profibus interface 18
3.2.4 RS 485 interface 18
3.2.5 25-way PLC interface 20
3.2.6 DeviceNet interface 22
3.2.7 Ethernet/IP interface 22
3.2.8 Parameter list 23
3.2.9 Specific parameter data for the pumps 27
3.2.10 Error messages 28
3.3 Start-up of the TURBOVAC 29
3.4 Operation 29
3.4.1 Status table at default settings 29
3.5 Shut-down of the TURBOVAC 30
3.6 Shut-down of the Turbo.Drive TD20 classic 30
4 Maintenance 30
5 Troubleshooting 31
EC Conformance Declaration 33
Certificates 34
Contents
2
Page

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Important Safety Information
Indicates procedures that must be strictly observed to prevent hazards to
persons.
Indicates procedures that must be strictly observed to prevent damage to, or
destruction of the product.
The Leybold Turbo.Drive TD20 classic frequency converter has been desi-
gned for safe and efficient operation when used properly and in accor-
dance with these Operating Instructions. It is the responsibility of the user
to carefully read and strictly observe all safety precautions described in
this section and throughout the Operating Instructions. The Turbo.Drive
must only be operated in the proper condition and under the condi-
tions described in the Operating Instructions. It must be operated and
maintained by trained personnel only. Consult local, state, and national
agencies regarding specific requirements and regulations. Address any
further safety, operation and/or maintenance questions to our nearest
office.
Only qualified personnel or the Leybold Service Department may carry out
work on the frequency converter.
Potentially fatal voltages are present inside the frequency converter.
Open the frequency converter only after it has been isolated from the
mains power supply.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
3
Safety Information
Warning
Caution
Warning

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Description
4
1 Description
1.1 Design and function
The electronic frequency converter Turbo.Drive TD20 classic is used to drive the
following turbo molecular pumps:
nTURBOVAC 151, 151 C, 361, 361 C
nTURBOVAC 600, 600 C,
nTURBOVAC 1000, 1000 C, 1100 C
These pumps each comprise a three-phase asynchronous motor with the
appropriate rating to drive the rotor.
The Turbo.Drive TD20 classic converts the single-phase mains voltage into a
three-phase AC voltage with regulated frequency and amplitude.
Each installed TURBOVAC has been individually coded. The acceleration
sequence, the regulation during operation, and the output speed will vary
depending on the installed pump model.
The Turbo.Drive TD20 classic has a 9-way PLC interface as standard and addi-
tional interfaces as option. It can be connected directly to mains voltage.
The Turbo.Drive TD20 classic can be connected directly to mains voltage.
1.2 Supplied equipment
Turbo.Drive TD20 classic table-top electronic frequency converter with housing,
Operating Instructions.
Coding

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Description
5
Turbo.Drive TD20 classic
Fig. 1.1 Front panel of the Turbo.Drive TD20 classic
green LED STATUS
off: Pump at standstill or decelerating
flashes 250 ms on,
750 ms off Start delay time
flashes slowly 1/s: Start command is present (for about 10 s after start)
flashes fast 3/s: Running up or running down
on: Normal operation
yellow LED POWER
off: No supply voltage
flashes: Supply voltage too low
on: Supply voltage is present
red LED ERROR
off: No error, no warning
flashes: Warning is present, pump can be operated
possibly with some restrictions
on: Fault is present, pump stopped and can not be operated
LED chain LOAD
after POST indicates the recognized pump
LED STATUS flashes (Run-up) indicates the TURBOVAC’s speed
LED STATUS on (Normal operation) indicates the motor current
LED ERROR on (Error) indicates the error code
SERVICE interface RS 232 interface
Key START Starting the TURBOVAC’s run-up
Key STOP Switching the TURBOVAC off
Resetting a failure report

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Description
6
1.3 Technical data
Mains connection 100 to 240 V AC -15%/+10%,
50/60 Hz
Power consumption tolerance including options < 500 VA
Power consumption of the TURBOVAC < 400 VA
Power output (motor)
Nominal voltage 47 V
Motor current limitation
Acceleration (max. 10 min.) 5 A
Continuous operation 3.5 A
Frequency 0 to 835 Hz
TURBOVAC speed ratings
TURBOVAC 151 49,980 min-1
TURBOVAC 361 45,000 min-1
TURBOVAC 600 36,000 min-1
TURBOVAC 1000 36,000 min-1
TURBOVAC 1100 30,000 min-1
Ambient temperature 0-45 °C
Storage temperature -25 °C...+70 °C
Relative air humidity 5 to 85 % (non-condensing)
Type of protection to EN 6059 IP 20
Electrical safety to EN 61010-1
Interference radiation to 61326-1 Class A
EMC to IEC 801-2 Severity 2
Dimensions 1/2 19“, 3HU
Weight 4 kg
Fig. 1.2 Dimensional drawing for the Turbo.Drive TD20 classic, dimensions in mm
107
315
196
198
213
128
122,4
135
Turbo.Drive TD20
classic

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Description
7
1.4 Ordering information
Part No.
Frequency converter Turbo.Drive TD20 classic
with 9-way PLC interface 800075V0001
with additional RS 232 interface 800075V0002
with additional Profibus interface 800075V0003
with additional RS 485 interface 800075V0004
with additional 25-way PLC interface 800075V0005
with additional DeviceNet interface 800075V0006
with additional Ethernet/IP interface 800075V0007
with 9-way PLC interface and adapter for
pump connection with DIN plug; see Fig. 2.6
(in case of replacement of NT 151/361 or NT 361 800075V0008
1.5 Accessories
Connection line to the TURBOVAC
3 m long 857 65
5 m long 857 66
10 m long 857 67
20 m long 857 68
Power line cord
3 m long, Euro plug 800102V0002
3 m long, US plug 6-15 P 800102V1002
Mounting frame 19“, 3HU 161 00
Adapter cable, 0.2 m long, 25-way PLC interface –
2x Phoenix connector of the NT 20 800152V0020
Adapter cable, DRIVE connector of the
Turbo.Drive TD20 classic – TURBOVAC connection cable
of the NT 151/361 or NT 361 800 000 006
Accessories for serial interfaces
PC software „Turbo.Drive Server“ for Windows 95 and higher,
CD-ROM
nDisplay, change, save and compare parameter lists
nIntegration of customer’s software
nRecord parameter data 800110V0102
(Software supports only RS 232, RS 485 and Profibus)
The software can also be downloaded from
www.leybold.com in the menu
Documentation →Download Software

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Installation
8
2 Installation
Only qualified personnel or the Leybold Service Department may carry out
work on the frequency converter.
Potentially fatal voltages are present inside the frequency converter.
Open the frequency converter only after it has been isolated from the
mains power supply.
2.1 Placement
Place the Turbo.Drive TD20 classic on a flat, smooth surface.
For installation in a rack use the mounting frame 19“, 3 HU.
The heat dissipation of the Turbo.Drive TD20 classic must not be obstruct-
ed. Insure a sufficient ventilation - the ambient temperature during opera-
tion must not exceed 45 °C (113 °F).
If the Turbo.Drive TD20 classic is built into a rack the mains plug is not within
easy reach. Therefore install a separation between the Turbo.Drive TD20
classic and the mains when you build it into a rack.
Do not operate the Turbo.Drive TD20 classic with the standard mains lead in
chemically aggressive surroundings. If you operate the Turbo.Drive TD20
classic in chemically aggressive surroundings replace the mains lead by a
resistant one.
2.2 Conforming utilisation
The electronic frequency converter Turbo.Drive TD20 classic is used to drive the
following turbo molecular pumps:
TURBOVAC 151, 151 C, 361, 361 C,
TURBOVAC 600, 600 C,
TURBOVAC 1000, 1000 C, 1100 C.
Other turbomolecular pumps must not be connected.
Warning
Warning
Warning
Warning

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Installation
9
2.3 Providing the connections
Insert and fasten the connection line to the motor of the TURBOVAC.
Connect the interface, see Section 3.2.
Connect the instrument using the ground bolt to the protective ground
system.
Connect the power line cord.
POWER
DRIVE
REMOTE
X1
X22
INTER-
FACE
Fig. 2.1 Turbo.Drive TD20 classic, rear panel
Connection of the
TURBOVAC
Optional interface
9-way PLC interface
Ground bolt
Power switch
Connection for
power line cord
Warning

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Installation
10
2.4 Replacing the NT 20
The Turbo.Drive TD20 classic is capable of replacing the NT 20.
The connection for the power line cord is identical, an adjustment to the
mains voltage is no longer required.
The connection for the TURBOVAC is identical. You can use the old connec-
tion cable.
The connections FOREPUMP, VALVE, HEATER and FAN are no longer
present on the Turbo.Drive TD20 classic. Connect corresponding equipment
directly to the system controller.
The DIP switches (INTERFACE) need no longer to be set up, the Turbo.Drive
TD20 classic is capable of detecting the pumps automatically, see Section 3.1
Start up.
The PLC interface REMOTE has been replaced
nfor some functions by the standard 9-way PLC interface REMOTE X1.
nfor all functions by the optional 25-way PLC interface. When wanting to
continue to use the old cable with the Phoenix contact strips, we are offe-
ring for this purpose an adapter, see Section 1.5 and Fig. 2.3.
The pin assignments of both interfaces are detailed in Section 3.2.1 and
3.2.5.
Fig. 2.2 TURBOTRONIK NT 20, rear panel
Connection for TURBOVAC
PLC interface
Connection for power line cord
Power switch

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Installation
11
Fig. 2.3 NT 20 adapter
0,2 m
25-way
Sub-D
2x 10-way Phoenix
0 to 10
Coding at
pins 4 and 7
11 to 20
Coding at pins
11 and 20
Turbo.Drive TD20 classic NT 20
Pin Designation Pin Designation
1 Remote (Input) 2 Remote +
2 Start[H] (Input) 6 Start +
3 Stop[L] (Input) 4 Stop +
4 Control GND 1,3,5 Remote -, Start -, Stop -
5 Supply GND 9 GND
6 24 V DC, max. 80 mA 10 + 15 V (Voltage changed
to + 24 V DC)
7 Analog output (not implemented) not connected
8 Error (Relay) (n.o.) 13 Error (Relay) (n.o.)
9 Error (Relay) com. 14 Error (Relay) com.
10 Normal (Relay) (n.o.) 11 Normal (Relay) (n.o.)
11 Normal (Relay) com. 12 Normal (Relay) com.
12 Pump rotates (Relay) (n.o.) not connected
13 Pump rotates (Relay) com. not connected
14 Option1 (Input) (not implemented) not connected
15 Option 2 (Input) (not implemented)not connected
16 Acceleration (Relay) com. 16 Run-up (Relay) com.
17 Analog GND (not implemented) not connected
18 Option relay 3 (n.o.) 18 Option (Relay) (n.o.)
19 Option relay 3 com. 19 Option (Relay) com.
20 Option relay 3 (n.c.). 20 Option (Relay) (n.c.).
21 Error (Relay) (n.c.) 15 Error (Relay) (n.c.)
22 Option 3 (Input) not connected
23 Acceleration (Relay) (n.o.) 17 Run-up (Relay) (n.o.)
24 Speed (Analog input) not connected
(not implemented)
Housing Connected with Cable shielding
Housing ground (PE)
Pins 7 and 8 Heating
not connected
0.2 m
Note
If optional relay 3 shall operate in the
same way as for the NT 20, then set
parameter 318 to 5 (default).

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Installation
12
POWER
DRIVE
REMOTE
X1
X22
Power line cord
Turbo.Drive TD20 classic
TURBOVAC
POWER
DRIVE
REMOTE
X1
X22
Power line cord
TURBOVAC
Adapter cable
Old interface cable for the
TURBOTRONIK NT 20
9-way or 25-way interface connection cable
Fig. 2.4 Connections for the Turbo.Drive TD20 classic, schematic representation
Fig. 2.5 Connections for the Turbo.Drive TD20 classic, with adapter cable, schematic representation
Turbo.Drive TD20 classic

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Installation
13
2.5 Replacing the NT 151/361 or NT 361
The Turbo.Drive TD20 classic is capable of replacing the NT 151/361 and the
NT 361.
The connection for the power line cord is identical, an adjustment to the
mains voltage is no longer required. You can use the old power line cord.
The connection for the TURBOVAC is different. We recommend using a new
connection cable. If you want to use the old connection cable you need the
adapter cable 800 000 006.
Alternatively you may use the Turbo.Drive TD20 classic version for pump con-
nection with DIN plug (compatible with the NT 361 pump connector).
POWER
DRIVE
REMOTE
X1
Fig. 2.6 Turbo.Drive TD20 classic, version for version for pump connection with DIN plug

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Operation
14
3 Operation
Controlling the instrument through the keys START and STOP and the 9-way
PLC interface has equal priority. When controlling the instrument through
optional boards (Profibus or RS 485, for example), the keys and the 9-way
PLC interface are disabled.
3.1 Start-up
Switch the frequency converter on via the switch on the rear. After doing so,
the start-up self test begins.
The parameters stored in the EEPROM are read and the connected pump is
detected. After approximately 15 seconds the frequency converter is ready to
start.
If after this process the red LED ERROR is on, then the connected pump
was not detected. If, moreover, two of the LEDs LOAD flash alternatingly,
then a different pump was detected (long flashing intervals: detected pump;
short flashing intervals: stored pump; for pump assignments refer to Fig. 3.1).
In both cases a special acknowledgement will be necessary: while keeping
the STOP key depressed, press the START key and release it again, there-
after release the STOP key.
Through this special acknowledgement process the user acknowledges
the change of pump and the correctness of the pump which has been
detected.
Upon delivery, the Turbo.Drive TD20 classic has been preset to the
TURBOVAC 1100 so the special acknowledgement process will have to
be run when commissioning any other pump for the first time.
Turbo.Drive TD20 classic
TURBOVAC 1100 (C) TURBOVAC 1000 (C) TURBOVAC 600 (C) TURBOVAC 361 (C) TURBOVAC 151 (C)
Fig. 3.1 Pump identification at the LOAD LEDs
green yellow red
Caution
Note

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Operation
15
3.2 Interfaces
The Turbo.Drive TD20 classic is equipped as standard with a 9-way PLC inter-
face and optionally with one more:
nRS 232
nProfibus
nRS 485
n25-way PLC interface
nDeviceNet
nEthernet
The Turbo.Drive TD20 classic is configured through the parameters according
to the parameter list. Pxxx denotes parameter value xxx.
The PC software „TURBO.DRIVE Server“ allows convenient access by the
user to the parameters of the frequency converter.
For further information on the interfaces refer to the Operating Instructions
which are included with the respective device.

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Operation
16
3.2.1 9-way PLC interface
Controlling the instrument through the keys START and STOP and the 9-way
PLC interface has equal priority.
The control lines for the interface respond to the rising or falling flank of a
+24 V DC signal.
When the pump is started through X1 and then the STOP key is pressed,
the pump will be switched off, but 24 V is still present at X1. For starting the
pump through X1 give a stop signal at first and then a start signal.
The same applies vice versa: When a stop signal is present at X1 and the
pump is started with the START key, give a start signal at first and then a
stop signal for stopping the pump.
When switching on the Turbo.Drive TD20 classic the status at X1 will be uti-
lized.
The other (optional) interfaces behave differently. When controlling the instru-
ment through them, the keys are disabled (except from the start-up).
Fig. 3.2 9-way PLC interface X1
876
54321
LEYBOLD AG
WERK KÖLN
LEYBOLD
GA 06.215
21.11.94
Fa. ESCH
00.00.S.001
9er Buchsenbelegung
9
Pin assignment of the connector
24 V 5 V
5 kΩ
2 kΩ
Turbo.Drive TD20 classic
7
8
6
24 V
7
8
6
0 V = STOP
24 V = START
24 V
7
8
6
max. 80 mA
TD20 classic
TD20 classic
Pin assignment for the Start/Stop input
Switching threshold
for the Start/Stop
control input:
Low level: < 8 V
High level: > 10,5 V
Start/Stop operation
Example 1: Operation via a PLC
Contact open = STOP
Contact closed = START
Example 2: Operation via contacts
Relay functions
TURBO.DRIVE S
5
3
4
n. c.
n. o.
com.
2
9
1
n. c.
n. o.
com.
Relay - Normal operation
nWhile deceleration, acceleration, Stop:
4 connected to 5 (as shown; passive)
nDuring normal operation (f > 0.8·fnom.):
4 connected to 3 (active)
Relay - Error
nNo error: 1 connected to 2 (as shown; passive)
nError is present: 1 connected to 9 (active)
TD20 classic
Turbo.Drive TD20 classic
Contact rating: 2A / 50V DC max. (resistive load)

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3.2.2 RS 232 interface
Standards DIN 66020
Protocol acc. to VDI/VDE 3689
Transmission rate 19200 baud
Response delay default setting 10 ms
(parameter 180)
Address range non-addressable
Max. cable length 15 m
Interface connector 9 way Sub-D type,
socket on the instrument (female)
thread UNC4-40
Note: If on the controlling side an RS 232 interface in accordance with the
PC standard with a 9-pin Sub-D male connector is present, then a straight
through cable as shown in Fig. 3.4 may be used.
For further information please refer to the Operating Instructions 17200048.
Operation
17
8
7
6
5
4
3
2
1
9
Fig. 3.3 Pin assignment for the socket at the frequency converter (female)
TxD
RxD
GND
(3)
(5)
(2)
TURBO.DRIVE
TxD
RxD
GND
TxD
RxD
GND
(3)
(5)
(2)
Fig. 3.4 Providing a RS 232 connection
Shield
9-pin IBM PC
RS 232
interface

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3.2.3 Profibus interface
Please refer to the Operating Instructions 17200049.
3.2.4 RS 485 interface
Standards ISO/IEC 8482, EIA 485
Protocol acc. to VDI/VDE 3689
Transmission rate 19200 baud fixed
Response delay default setting 10 ms
(parameter 180)
Address range 0 ... 15
Max. cable length 50 m (with bus termination)
Type of cable 2 wire twisted pair
(twisted pair cable)
Differential voltage levels logic „0“:
(see also “Standards”) transmitter: 1.5 ... 5 V
receiver: > 0.3 V
logic „1“:
transmitter: - 1,5 ... - 5 V
 receiver:≤-0,3V
Interface connector 9 way Sub-D type,
socket on the instrument (male)
thread UNC4-40
Note: After having changed the bus address through the rotary switch, the
frequency converter must be switched off (yellow power LED off) and then on
again so as to enable the new address setting.
For further information please refer to the Operating Instructions 17200048.
Operation
18
7
8
9
1
2
3
4
5
6
TxD/RxD +
TxD/RxD –
0,5 A, 24 V DC
Fig. 3.5 Pin assignment for the socket at the frequency converter for RS 485 interface (male)
Links for activation of
the bus terminator

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Operation
19
+ 5 V
390 Ω
150 Ω
390 Ω
X 5
(8)
(7)
TURBO.
DRIVE
X5 (7) X5 (8) X5 (7) X5 (8) ...
120 Ω
Master
X 5
(6)
(9)
TxD/RxD –
TxD/RxD +
150
TURBO.
DRIVE
TURBO.DRIVE
Fig. 3.6 Connection of the RS 485 bus
For longer cable runs:
Links for activation of
the bus terminator Bus terminator
for longer cable runs

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3.2.5 25-way PLC interface
Observe the EMC requirements when connecting the control cables.
Operation
20
Pin assignment for the 25-way PLC interface
Pin Assignment Function Ref. potential
1 Remote[H] Activates by a H level the inputs Start[H], Stop[H],
(input) option 1 to 3 [H] Control GND
2 Start[H] PLC H pulse starts the pump, provided Remote[H] = H Control GND
(input) (duration > 99ms)
3 Stop[L] PLC L pulse stops the pump, provided Remote[H] = L Control GND
(input) (duration > 99ms)
4 Control GND Reference ground for floating PLC control inputs
5 Supply GND Reference ground of for auxiliary power supply pin 6
6 PLC-H signal and Auxiliary power supply for externally connected equipment. Supply GND
power supply The output voltage corresponds mainly to the input voltage
delivered by the host, output voltage 24 V DC
Current output 80 mA
Current limiting without foldback characteristic, no shutdownin case of
excessively high currents, however shutdown in case of overtemperatures.
7 reserved
8 Error (relay) Collective error message, active in case of a fault (n.o.) Pin 8
9 Error (relay) Collective error message, com.
10 Normal (relay) Final rotational frequency has almost been attained (n.o.). For function Pin 11
and threshold the parameters 25, 27 and 29 apply. See parameter 237
11 Normal (relay) Final rotational speed has almost been attained, com.
12 Option relay 2 Normally open contact (n.o.) enabled with valve and forevacuum;
see parameter 240 Pin 13
13 Option relay 2 com.
14 reserved
15 reserved
16 Option relay 1 Assigned to run-up, com.; see parameter 239
17 reserved
18 Option relay 3 Normally open contact (n.o.).assigned with function “motor current”;
see parameter 318 Pin 19
19 Option relay 3 com.
20 Option relay 3 n.c. Pin 19
21 Error (relay) Collective error message (active in case of a fault), (n.c.) Pin 8
22 reserved
23 Option relay 1 Is enabled in case of a speed increase, normally open (n.o.);
see parameter 239 Pin 16
24 reserved
Casing Frame GND Connected to frame ground (PE)
PLC = Programmable logic controller [H] = PLC high level > 11 V [L] = PLC low level < 8 V
   Inputresistance5…6kΩExternalvoltageresistance±40VDC
The reserved pins must not be used.