MKS Spectra 138A User manual

Instruction Manual
MKS Spectra Type 138A
Portable Analytical System
LP101017 Rev 1.02
April 2002

As part of our continuous product improvement policy, we are always pleased to
receive your comments and suggestions about how we should develop our product
range. We believe that the manual is an important part of the product and would
welcome your feedback particularly relating to any omissions or inaccuracies you
may discover.
You can send your comments to:-
MKS Instruments, Spectra Products
Cowley Way
Crewe
Cheshire
CW1 6AG
U.K.
[phone] Tel.
[phone] Fax.
In North America you can send your comments to:-
MKS Instruments Spectra Products.
380 Woodview Ave.
Morgan Hill
CA 95037
USA
[phone] Office
[phone] Fax
1-800-VAC CHECK
http://www.spectra-rga.com
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Baratron®is a registered trademark of MKS Instruments, Inc., Andover, MA.
Cajon®, VCR®and VCO®are registered trademarks of Cajon Company, Macedonia, OH.
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All other brand or product names are trademarks or registered trademarks of their respective companies.
Copyright ©1999 MKS Instruments Spectra Products.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information storage
or retrieval system, except as may be expressly permitted in writing by MKS Instruments Spectra
Products.

EC DECLARATION OF CONFORMITY
Spectra SensorTech Ltd.
Cowley Way
Crewe
Cheshire
CW1 6AG
United Kingdom
DECLARES THAT THE FOLLOWING PRODUCTS:
LM62, LM10 VACSCAN 100
LM63, LM10, LM4 VACSCAN PLUS 100, 200
LM61, LM10, LM4, LM9 SATELLITE 100, 200, 300
LM56 MICROVISION
LM70, LM76 MICROVISION PLUS
LM77 VISION 1000P
LM79 VISION 1000I
LM89 VISION 1000B
LM90 VISION 1000 C / E
LM78 VAC CHECK
LM80 MINILAB
ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN
DIRECTIVES:
89/336/EEC ELECTROMAGNETIC COMPATIBILITY DIRECTIVE
73/23/EEC LOW VOLTAGE DIRECTIVE AS AMMENDED 93/68 EEC
THE APPLICABLE STANDARDS ARE:
EN 61326:1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT,
CONTROL & LABORATORY USE
EN 61010-1:1993 SAFETY REQUIREMENTS FOR ELECTRICAL
EQUIPMENT FOR MEASUREMENT,
CONTROL & LABORATRY USE.
SIGNED:
T.R.ROBINSON
EUROPEAN OPERATIONS MANAGER
DATE: 1ST JULY 2001

Additional Installation Maintenance and Operating Instructions
In order to comply with European regulations, the following procedures must be followed :-
A) INSTALLATION
1) The installation procedures given in the operating and technical manuals must be
followed, in addition to these instructions.
2) The mains power cable must conform to local regulations and must have a protective
earth (PE) conductor securely connected to the power plug protective earth contact.
3) The short earthing braid supplied with some products must be fitted between the
terminal on the RF head and one of the CF40 vacuum flange bolts.
4) Only cables supplied with the equipment may be used for interconnections. If extension
cables are required to obtain a greater separation between control unit and RF head, or if
longer serial communications cables are required, they must be supplied by Spectra
SensorTech Ltd.
5) Cables attached to all other ancillary signal and control ports must have a length of less
than 3 metres. If greater length is required, Spectra SensorTech Ltd must be contacted
for technical guidance on possible EMC and safety issues.
6) The vacuum system on which the analyser/RF head is mounted must be earthed, to a
protective earth, preferably to the same protective earth as the control unit.
B) OPERATION
1) The equipment is not authorised for use as a critical component in a life support or safety
critical system without the express written approval of Spectra SensorTech Ltd.
2) All instructions given in the operating manual must be followed.
3) Adjustments are strictly limited to those accessible from the control panel and computer
keyboard and only when running software supplied by Spectra SensorTech Ltd.
C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE
EQUIPMENT
1) Maintenance functions must only be carried out by competent persons.
2) During the warranty period, faulty equipment must be returned to Spectra SensorTech
Ltd., unless special arrangements are made.
3) There are no user replaceable parts in the electronic equipment. Certain components are
EMC and safety critical and must not be substituted. Replacement parts are available
from Spectra SensorTech Ltd.
4) Equipment enclosures embody certain special fastening and bonding devices that affect
EMC and safety performance. These must be correctly re-fitted after servicing.

WARRANTY
Type 138A Portable Analytical System
MKS Instruments Spectra Products (MKS Spectra) warrants that the
equipment described in the face of this warranty (the “equipment”)
manufactured by MKS Spectra shall be free from defects in materials and
workmanship for a period of one year from shipment. For the period
commencing with the date of shipment of this equipment and ending one
year later, MKS Spectra will, at its option, either repair or replace any part
which is defective in materials or workmanship without charge to the
purchaser. The foregoing shall constitute the exclusive and sole remedy of
the purchaser for any breach by MKS spectra of this warranty.
The purchaser, before returning any equipment covered by this warranty,
which is asserted to be defective by the purchaser, shall make specific
written arrangements with respect to the responsibility for shipping and
handling the equipment and any other incidental charges with MKS
Spectra UK Global Product Support department.
This warranty does not apply to any equipment that has not been used in
accordance with the specifications recommended by MKS Spectra for the
proper and normal use of the equipment. MKS Spectra will not be liable
under any circumstances for consequential or incidental damages in
connection with or arising out of the sale performance or use of the
equipment covered by this warranty.
INDEMNITY
Where the customer uses the goods or the services supplied by MKS
Instruments Spectra Products either in (MKS Spectra) the
manufacture, supply or distribution of any other goods; or in the
provision of a service; (including without limitation, where the
customer uses the goods or the services supplied by MKS Spectra in
the manufacture and distribution of chemicals or as part of a
manufacturing facility for chemicals) then the customer shall
indemnify and hold harmless MKS Spectra from and against all loss,
damages, costs and expenses awarded against or incurred by MKS
Spectra in respect of such use by the customer or arising out of the
manufacture, supply or distribution of those goods or the provision of
that service (or without limitation arising out of the manufacture and

distribution of those chemicals or the use of the goods or services as
part of that manufacturing facility).
Document Control
Revision 1.00
Date 20 Feb 2001
Change New document based on MKS Instruments UK document
1380004D

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LP101017 Rev 1.02 Page i
Contents
Errata and addenda ...............................................................i
Section 1. Safety ..........................................................3
1.1. Symbols used in this manual .................................................................. 3
1.2. Warning symbols.................................................................................... 4
1.2.1. General.........................................................................................4
1.2.2. Other symbols .............................................................................4
1.3. Safety procedures and precautions ......................................................... 5
Section 2. Overview...............................................10
Section 3. Installation...........................................15
3.1. Environmental Requirements ............................................................... 15
3.2. Electrical Connections.......................................................................... 16
3.3. Testing.................................................................................................. 16
Section 4. Setup and operation..........................................19
4.1. Setup..................................................................................................... 19
4.2. Operation .............................................................................................. 19
4.3. Switching on......................................................................................... 20
4.4. Cold Cathode Gauge............................................................................. 20
4.5. Switching Off ....................................................................................... 21
4.6. Bakeout Heater ..................................................................................... 21

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4.7. Inlet System...........................................................................................22
4.8. Operation via flexible connection .........................................................22
4.9. Operation with remote mounted analyser..............................................23
4.10. Operation with atmospheric inlet ........................................................24
Section 5. Troubleshooting ............................27
Section 6. Troubleshooting ............................31
6.1. General ..................................................................................................31
6.2. Primary Pump........................................................................................31
6.3. Turbo Pump...........................................................................................31
6.4. Cold Cathode Gauge .............................................................................31
6.5. RGA Head.............................................................................................32
6.6. Service/Repair .......................................................................................32
Appendix 1. Related documents..................35
Appendix 2. Returns form..................................37

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Errata and addenda
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PAS Trolley Manual
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Section 1.
Safety
WARNING Please read this section of the
manual. It contains important
safety information.
1.1. Symbols used in this manual
Definitions of WARNING, CAUTION and NOTE messages used in this manual.
WARNING The WARNING sign denotes a
hazard to personnel.
WARNING boxes are used where
failure to observe the instructions
could result in personal injury or
death.
CAUTION The CAUTION sign denotes a
hazard to equipment.
CAUTION boxes are used where
failure to observe the instructions
could result in damage to the
equipment or associated
equipment.
NOTE The NOTE sign denotes important
information. It calls attention to a
procedure, practice, condition, or
the like, which is essential to
highlight.

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CAUTION and WARNING instructions MUST be observed. MKS Spectra accepts
no liability for any injury or damage resulting from a failure to observe CAUTION
or WARNING instructions.
1.2. Warning symbols
1.2.1.General
Various warning labels and symbols may be attached to the instrument their
general use is explained below.
The Exclamation Mark (ISO 3864, No.B.3.1) label.
Caution refer to the accompanying documents.
General caution.
Refer to the manual for detailed instructions.
The Electric Shock (ISO 3864, No.B.3.6) symbol.
Caution, risk of electric shock.
This is generally used on the instruments to warn of the
presence of hazardous voltages.
Hot Surface (IEC 417, No.5041) symbol.
Caution risk of burns injury.
Generally used to indicate that the surface may become very
hot during normal operation.
1.2.2. Other symbols
|
On (Supply) Off (Supply) Earth (ground) Protective earth

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LP101017 Rev 1.02 Page 5
IEC 417,
No.5007
IEC 417, No.
5017
IEC 417,
No.5017
(ground)
IEC417, No.5019
Frame or chassis
IEC 417,
No.5020
Equipotentiality
IEC 417,
No.5021
Direct current
IEC417, No.5031
Alternating
current
IEC417, No.5032
Both direct and
alternating current
IEC 417, No.5033-a
Class II equipment
IEC 417, No. 5172-
a
Three phase
alternating current
IEC 617-2
No.020206
1.3. Safety procedures and precautions
Observe the following general safety precautions during all phases of
operation of this instrument. Failure to comply with these precautions or with
specific warnings elsewhere in this manual violates safety standards of
intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments assumes no liability for the customer’s failure
to comply with these requirements.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and
internal adjustments. Any service must be performed by qualified
service personnel only.
GROUNDING THE PRODUCT
This product is grounded through the grounding conductor of the
power cord. To avoid electrical shock, plug the power cord into a
properly wired receptacle before connecting it to the product input or
output terminals. A protective ground connection by way of the
grounding conductor in the power cord is essential for safe operation.
DANGER ARISING FROM LOSS OF GROUND

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Upon loss of the protective-ground connection, all accessible
conductive parts (including knobs and controls that may appear to be
insulating) can render an electrical shock.
GROUND AND USE PROPER ELECTRICAL FITTINGS
Dangerous voltages are contained within this instrument. All
electrical fittings and cables must be of the type specified, and in
good condition. All electrical fittings must be properly connected
and grounded.
USE THE PROPER POWER CORD
Use only a power cord that is in good condition and which meets the
input power requirements specified in the manual.
Use only a detachable cord set with conductors that have a cross-
sectional area equal to or greater than 1.5 mm2. The power cable
should be approved by a qualified agency such as VDE, Semko, or
SEV.
USE THE PROPER POWER SOURCE
This product is intended to operate from a power source that does not
apply more voltage between the supply conductors, or between either
of the supply conductors and ground, than that specified in the
manual.
USE THE PROPER FUSE
Use only a fuse of the correct type, voltage rating, and current rating,
as specified for your product.
KEEP AWAY FROM LIVE CIRCUITS
Do not replace components with power cable connected. Under
certain conditions, dangerous voltages may exist even with the power
cable removed. To avoid injuries, always disconnect power and
discharge circuits before touching them.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety
precautions, completely purge the instrument when necessary, and
ensure that the material used is compatible with the materials in this
product, including any sealing materials.

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DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive
environment unless it has been specifically certified for such
operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument
specifications, and compatible with the intended use of the
instrument. Assemble and tighten fittings according to
manufacturer’s directions.
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to the instrument
to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure
(refer to the product specifications for the maximum allowable
pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst
disc in the vacuum system to prevent system explosion should the
system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use.
Contamination such as dust, dirt, lint, glass chips, and metal chips
may permanently damage the unit or contaminate the process.
ALLOW THE UNIT TO WARM UP
If the unit is used to control dangerous gases, they should not be
applied before the unit has completely warmed up. Use a positive
shutoff valve to ensure that no erroneous flow can occur during
warm up.
AVOID EXPLOSIVE GAS MIXTURES

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Do not use this, or any other gauge with a hot filament, with
explosive gas mixtures or with flammable gases, which could form
explosive gas mixtures in air. If the filament or control circuit fails
the filament could ignite the mixture. With some gas mixtures, an
exothermic catalytic reaction could occur at the filament, causing
ignition of the gas.
TAKE PRECAUTIONS TO AVOID POTENTIAL EXPLOSIONS
Precautions must be taken to avoid explosion due to overpressure
during backfill operations. If any thermal conductivity gauge is
calibrated for air/nitrogen, the measured pressure may vary
considerably as a function of true pressure for other gases. Pressure
indications above 100 Torr should not be used when backfilling. In a
system, which is filled with a pressurized source, install a safety
relief valve or rupture disk to limit pressure to safe limits.
HIGH VOLTAGE DANGER
High voltage is present in the instrument when it is turned on.

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Section 2.
Overview
This document concerns the Portable Analytical System (MKS Type
138A) as supplied by MKS Instruments (UK) Ltd. It is intended to
be used in conjunction with the Spectra RGA manual ‘Vac Check
Manual ’ (LP101010 Rev 2.0 Aug 98).
The system is an analytical instrument based on a Residual Gas
Analyser (RGA) intended to be used for vacuum system background
gas identification and leak checking.
The important features of the instrument are as follows:
•Self contained (only requiring mains power connection).
•Mobile.
•Clean room compatible.
•Dry pumping system (no pump oils).
•Complete RGA control via external PC.
•Available with 100, 200 and 300 amu mass ranges.
•Available with faraday cup or electron multiplier detectors.
•Atmospheric inlet (optional).
•Bakeout heaters (optional).
•Windows software (optional).
Caution
The MKS Portable Analytical System is a precision
instrument. Whilst every effort has been made to
make it portable and robust it should still be handled
with care.
Caution
To ensure that the instrument performs reliably good
vacuum practice should be observed at all times.

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