Omron CK5M-CPU1 1 Series User guide

CK5M-CPU11
CK3M-CPU11
CK3W-AX2323
CK3W-GC2200
Programmable Multi-Axis Controller
Application Guide
Laser Application
O052-E1-02

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any form, or by any means, mechanical, electronic, photocopying, recording, or otherwise, without the prior
written permission of OMRON.
2. No patent liability is assumed with respect to the use of the information contained herein.
Moreover, because OMRON is constantly striving to improve its high-quality products, the information contained
in this manual is subject to change without notice.
3. Every precaution has been taken in the preparation of this manual. Nevertheless, OMRON assumes no responsi-
bility for errors or omissions.
Neither is any liability assumed for damages resulting from the use of the information contained in this publication.
• Microsoft, Windows, Excel, Visual Basic, and Microsoft Edge are either registered trademarks or trademarks of
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• EtherCAT®is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
Other company names and product names in this document are the trademarks or registered trademarks of their
respective companies.
Trademarks
Copyrights
NOTE
• Microsoft product screen shots used with permission from Microsoft.
• This product incorporates certain third party software. The license and copyright information associated with this
software is available at http://www.fa.omron.co.jp/nj_info_e/.

Sections in this Manual
Sections in this Manual
3
Application Guide Laser Application (O052)
1
2
3
About This Guide
Connection Procedures
1
2
3
4
4How to Customize Various Settings
Target Device and Device Configuration

CONTENTS
Sections in this Manual ........................................................................................... 3
Precautions .............................................................................................................. 6
Symbols ...........................................................................................................................................................6
Related Manuals....................................................................................................... 7
Terms and Definitions.............................................................................................. 8
Revision History....................................................................................................... 9
Section 1 About This Guide
1-1 Introduction ............................................................................................................................1-2
Section 2 Target Device and Device Configuration
2-1 Device Configuration.............................................................................................................2-2
Section 3 Connection Procedures
3-1 Work Flow...............................................................................................................................3-2
3-2 Controller Setting Preparations............................................................................................3-4
3-2-1 Creation of a New Project ...........................................................................................................3-4
3-2-2 Controller Initial Setting ...............................................................................................................3-5
3-3 Setup of the MOTF .................................................................................................................3-7
3-3-1 Programming...............................................................................................................................3-7
3-3-2 Determination of Filter’s Coefficients ........................................................................................3-13
3-4 Setup of the Motors and Encoder ......................................................................................3-21
3-4-1 Wiring Devices ..........................................................................................................................3-21
3-4-2 Programming.............................................................................................................................3-22
3-4-3 Tuning of the Current Loop .......................................................................................................3-26
3-4-4 Establishment of the Phase Reference.....................................................................................3-28
3-4-5 Open-loop Testing .....................................................................................................................3-29
3-4-6 Position Loop Auto-tuning .........................................................................................................3-30
3-4-7 Position Loop Interactive Tuning ...............................................................................................3-31
3-4-8 Tuning of the Y Axis ..................................................................................................................3-35
3-4-9 Confirmation of the Tuning Results ...........................................................................................3-36
3-5 Setup of Overtravel Limit Switches and Home Positions ................................................3-39
3-5-1 Wiring of Devices ......................................................................................................................3-39
3-5-2 Programming.............................................................................................................................3-39
3-5-3 Confirmation of the Settings (Overtravel Limit Switches)..........................................................3-41
3-5-4 Setup of Home Positions...........................................................................................................3-42
3-6 Setup of the Galvo Scanner ................................................................................................3-44
3-6-1 Wiring of Devices ......................................................................................................................3-44
3-6-2 Programming.............................................................................................................................3-45
3-6-3 Setup of Control Commands.....................................................................................................3-47
3-6-4 Confirmation of the Settings......................................................................................................3-49
3-6-5 Verification of the MOTF on the Actual Machine.......................................................................3-50
3-7 Setup of the Laser Oscillator ..............................................................................................3-51
CONTENTS
4Application Guide Laser Application (O052)

3-7-1 Wiring of Devices ......................................................................................................................3-51
3-7-2 Guide Laser Output...................................................................................................................3-51
3-7-3 Programming.............................................................................................................................3-53
3-7-4 Setup of the Laser Oscillator.....................................................................................................3-56
3-7-5 Confirmation of the Settings......................................................................................................3-58
Section 4 How to Customize Various Settings
4-1 globaldefinitions.pmh............................................................................................................4-2
4-2 MotionOnTheFly.pmh ............................................................................................................4-3
4-3 MotorControl.pmh..................................................................................................................4-4
4-4 SensorControl.pmh ...............................................................................................................4-7
4-5 Galvano.pmh ..........................................................................................................................4-8
4-6 LaserControl.pmh ................................................................................................................4-10
4-7 TCRConfigurations.pmh ..................................................................................................... 4-11
CONTENTS
5
Application Guide Laser Application (O052)

Precautions
• For actual system construction, check the specifications for devices and equipment that make up
the system, use a method with sufficient margin for ratings and performance, and adopt safety cir-
cuits and other safety measures to minimize risks even if a breakdown occurs.
• To safely use the system, obtain manuals or user’s guides for devices and equipment that make up
the system, and confirm and understand the precautions related to safety such as “Safety Precau-
tions” and “Precautions for Safe Use”, and other contents of the manuals or user’s guides, including
“Precautions for Correct Use”, before use.
• The customer themselves must check all regulations, laws, and rules that are applicable to the sys-
tem.
• No part or the whole of this document may be copied, duplicated, or redistributed without the per-
mission of OMRON Corporation.
• The contents of this document may be subject to change without notice for the purpose of improve-
ment.
Special information in this document is classified as follows:
Precautions for Correct Use
Precautions on what to do and what not to do to ensure correct operation and performance.
Additional Information
Additional information to read as required.
This information is provided to increase understanding and make operation easier.
Symbols
The filled circle symbol indicates operations that you must do.
The specific operation is shown in the circle and explained in text.
This example shows a general precaution for something that you must do.
Precautions
6Application Guide Laser Application (O052)

Related Manuals
To safely use the system, obtain manuals or user’s guides for devices and equipment that make up
the system, and confirm and understand the precautions related to safety such as “Safety Precau-
tions” and “Precautions for Safe Use”, and other contents of the manuals or user’s guides, including
“Precautions for Correct Use”, before use.
The manuals provided by OMRON Corporation (hereinafter, “OMRON”) and Delta Tau Data Systems
Inc. (hereinafter “DT”) are as shown below.
Manufac-
turer Cat. No. Model Manual name
OMRON O036 CK5M-CPU£££
CK3M-CPU£££
CK3W-AX2323£
CK3W-GC2200
Programmable Multi-Axis Controller Hardware User’s Man-
ual
DT O014 --- Power PMAC User’s Manual
DT O015 --- Power PMAC Software Reference Manual
DT O016 --- Power PMAC IDE User’s Manual (V4)
Related Manuals
7
Application Guide Laser Application (O052)

Terms and Definitions
Term Description and definition
PMAC An acronym for Programmable Multi-Axis Controller.
Power PMAC IDE Computer software that is used to configure the Controller, create user programs,
and perform monitoring.
AC servo motor A servo motor that is driven by AC signal input. A rotating magnetic field is formed
in the motor by the input of an AC signal in order to rotate the rotor of the motor.
Servo amplifier A control device that controls a servo motor. Upon receipt of a command from the
Controller, it switches the power by means of a power device in order to output a
power signal to drive the motor.
Direct PWM OMRON’s unique communications method for communications between the Power
PMAC and the servo amplifier. The Power PMAC directly sends an ON/OFF signal
from the power device of the servo amplifier, while the servo amplifier sends a cur-
rent feedback value to the Power PMAC. This allows the Power PMAC to form a
current loop.
Electrical angle The angle of the rotating magnetic field used to rotate an AC servo motor.
Commutation control Control for creating a rotating magnetic field with the required electrical angle in or-
der to rotate the motor.
Phase reference The home of the electrical angle. To perform commutation control, it is necessary to
establish a phase reference at first (i.e., phase reference search).
Sinusoidal Encoder A type of encoder that outputs SIN/COS waveforms at 1 Vpp.
Galvo Scanner A control device for controlling the angle of rotation of the mirror that reflects laser
light for scanning the position where the laser light is irradiated. It utilizes the high
response performance of the mirror to ensure high-speed trajectory control.
SL2-100 A type of protocol for communications with digital Galvo Scanners.
Control command A command that sets the type of data to be sent from the Galvo Scanner to the
Controller.
XY stage A positioning stage that moves in the X-axis and Y-axis directions. Although the re-
sponse speed is slower than that of a Galvo Scanner, it can scan a larger area due
to its wide range of movement.
MOTF An acronym for Motion On The Fly. It is an algorithm that divides a position com-
mand into high frequency components and low frequency components, and distrib-
utes them to actuators with different response speeds. In this manual, the high fre-
quency components are commanded to the Galvo Scanner and the low frequency
components are commanded to the XY stage.
Pulsed laser A laser that blinks repeatedly at a specific time interval. In contrast, a device that
constantly outputs laser light is called a continuous oscillation laser.
Q-switching An oscillation method for pulsed lasers. It uses external oscillation pulse input to
obtain pulsed laser output.
TCR An acronym for Trigger Output by Commanded distance for Rapid Processing. It
provides the function to trigger a laser output according to the distance set in the
CK3W-GC£2££.
Terms and Definitions
8Application Guide Laser Application (O052)

Revision History
A manual revision code appears as a suffix to the catalog number on the front and back covers of the
manual.
O052-E1-02Cat. No.
Revision code
Revision
code Date Revised content
01 May 2021 Original production
02 January 2023 •Revision due to change of applicable Servo Drives
•Corrected mistakes.
Revision History
9
Application Guide Laser Application (O052)

Revision History
10 Application Guide Laser Application (O052)

1
About This Guide
This section provides an introduction of this document.
1-1 Introduction .................................................................................................... 1-2
1-1
Application Guide Laser Application (O052)
1

1-1 Introduction
This document describes the procedure for assembling a laser processing system using the OMRON
Programmable Multi-Axis Controller CK£M-££££ (hereafter referred to as “Controller”).
CAUTION
The scope of this document is to confirm the connection of devices listed as the con-
nection targets. To configure a system using instructions that are not described in this
document, obtain manuals or user’s guides for devices and equipment that make up
the system, and confirm their contents including the precautions related to safety such
as “Safety Precautions” and “Precautions for Safe Use” before use.
1 About This Guide
1-2 Application Guide Laser Application (O052)

2
Target Device and Device Config-
uration
This section lists the target equipment and system configurations for connections in
these materials.
2-1 Device Configuration ..................................................................................... 2-2
2-1
Application Guide Laser Application (O052)
2

2-1 Device Configuration
The configuration devices for reproducing the connection procedures in this document are shown be-
low.
Manufacturer Name Model Version
OMRON Programmable Multi-Axis Controller
CPU Unit
CK£M-CPU1£1Ver. 2.6.1 or lat-
er
OMRON Programmable Multi-Axis Controller
Axis Interface Unit
CK3W-AX2323N*1 ---
OMRON Programmable Multi-Axis Controller
Galvano Interface Unit
CK3W-GC2200 ---
OMRON Programmable Multi-Axis Controller
Power Supply Unit
CK3W-PD048 ---
OMRON Programmable Multi-Axis Controller
End Cover
CK3W-TER11 ---
OMRON Programmable Multi-Axis Controller
Direct PWM Cable
CK3W-CAAD036A ---
OMRON Programmable Multi-Axis Controller
Serial Encoder Cable
CK3W-CAES03A ---
OMRON Programmable Multi-Axis Controller
Laser Interface Unit Cable
CK3W-CAG03A ---
OMRON Switch Mode Power Supply (24
VDC)
S8VK-S12024 ---
OMRON Switch Mode Power Supply (5
VDC)
S8VK-G03005 ---
OMRON Switch Mode Power Supply (15
VDC)
S8FS-G10015CD ---
OMRON Solid State Relay G3RV-SR500-D DC24 ---
OMRON Photomicro Sensor EE-SX674 ---
OMRON Direct PWM Amplifier CK3A-G310L*1 ---
Maxphotonics Laser Oscillator MFP ---
INNO6 Linear Motor (Y Axis) INC-5716-D0-0S ---
INNO6 Linear Motor (X Axis) INC-5723-D0-0S ---
HEIDENHEIN Linear Encoder LIDA48*1 ---
SCANLAB Galvo Scanner intelliSCAN ---
SCANLAB fθ Lens --- ---
SCANLAB Dynamic Focusing Unit varioSCAN ---
--- Windows PC --- ---
DT Power PMAC Setting Tool Power PMAC IDE Ver. 4.5 or later
*1. This document assumes that the XY stage is controlled by the Direct PWM or Sinusoidal Encoder method.
To use other control methods, change the settings in 3-4 Setup of the Motors and Encoder on page 3-21
according to the corresponding Startup Guide.
2 Target Device and Device Configuration
2-2 Application Guide Laser Application (O052)

S8VK-S12024
Direct PWM Amplifier
CK3A-G310L
G3RV-SR500-D
DC24
S8VK-G03005
EE-SX674
INC-5723-D0-0S IINC-5716-D0-0S
intelli
SCAN
varioSCAN
DSCB
DSIB-SL
MFP
A22£
2 Target Device and Device Configuration
2-3
Application Guide Laser Application (O052)
2-1 Device Configuration
2

2 Target Device and Device Configuration
2-4 Application Guide Laser Application (O052)

3
Connection Procedures
This section describes the procedures to connect the Controller and the devices that
make up the laser application. The description assumes that the Controller is set to
factory default.
3-1 Work Flow ....................................................................................................... 3-2
3-2 Controller Setting Preparations.................................................................... 3-4
3-2-1 Creation of a New Project ............................................................................... 3-4
3-2-2 Controller Initial Setting ................................................................................... 3-5
3-3 Setup of the MOTF ......................................................................................... 3-7
3-3-1 Programming................................................................................................... 3-7
3-3-2 Determination of Filter’s Coefficients............................................................. 3-13
3-4 Setup of the Motors and Encoder............................................................... 3-21
3-4-1 Wiring Devices .............................................................................................. 3-21
3-4-2 Programming................................................................................................. 3-22
3-4-3 Tuning of the Current Loop............................................................................ 3-26
3-4-4 Establishment of the Phase Reference ......................................................... 3-28
3-4-5 Open-loop Testing ......................................................................................... 3-29
3-4-6 Position Loop Auto-tuning ............................................................................. 3-30
3-4-7 Position Loop Interactive Tuning ................................................................... 3-31
3-4-8 Tuning of the Y Axis ...................................................................................... 3-35
3-4-9 Confirmation of the Tuning Results ............................................................... 3-36
3-5 Setup of Overtravel Limit Switches and Home Positions ........................ 3-39
3-5-1 Wiring of Devices .......................................................................................... 3-39
3-5-2 Programming................................................................................................. 3-39
3-5-3 Confirmation of the Settings (Overtravel Limit Switches) .............................. 3-41
3-5-4 Setup of Home Positions............................................................................... 3-42
3-6 Setup of the Galvo Scanner ........................................................................ 3-44
3-6-1 Wiring of Devices .......................................................................................... 3-44
3-6-2 Programming................................................................................................. 3-45
3-6-3 Setup of Control Commands ......................................................................... 3-47
3-6-4 Confirmation of the Settings .......................................................................... 3-49
3-6-5 Verification of the MOTF on the Actual Machine ........................................... 3-50
3-7 Setup of the Laser Oscillator ...................................................................... 3-51
3-7-1 Wiring of Devices .......................................................................................... 3-51
3-7-2 Guide Laser Output ....................................................................................... 3-51
3-7-3 Programming................................................................................................. 3-53
3-7-4 Setup of the Laser Oscillator ......................................................................... 3-56
3-7-5 Confirmation of the Settings .......................................................................... 3-58
3-1
Application Guide Laser Application (O052)
3

3-1 Work Flow
The procedures for building a laser application are shown below.
3-2 Controller Setting Preparations on page
3-4
Perform the Controller setting preparations.
q
3-2-1 Creation of a New Project on page 3-4
q
3-2-2 Controller Initial Setting on page 3-5
s
3-3 Setup of the MOTF on page 3-7 Set up the MOTF.
q
3-3-1 Programming on page 3-7
q
3-3-2 Determination of Filter’s Coefficients on page 3-13
s
3-4 Setup of the Motors and Encoder on page
3-21
Set up the motors and encoder.
q
3-4-1 Wiring Devices on page 3-21
q
3-4-2 Programming on page 3-22
q
3-4-3 Tuning of the Current Loop on page 3-26
q
3-4-4 Establishment of the Phase Reference on page 3-28
q
3-4-5 Open-loop Testing on page 3-29
q
3-4-6 Position Loop Auto-tuning on page 3-30
q
3-4-7 Position Loop Interactive Tuning on page 3-31
q
3-4-8 Tuning of the Y Axis on page 3-35
q
3-4-9 Confirmation of the Tuning Results on page 3-36
s
3-5 Setup of Overtravel Limit Switches and
Home Positions on page 3-39
Set up various sensors.
q
3-5-1 Wiring of Devices on page 3-39
q
3-5-2 Programming on page 3-39
q
3-5-3 Confirmation of the Settings (Overtravel Limit Switches) on
page 3-41
q
3 Connection Procedures
3-2 Application Guide Laser Application (O052)

3-5-4 Setup of Home Positions on page 3-42
s
3-6 Setup of the Galvo Scanner on page 3-44 Set up the Galvo Scanner.
q
3-6-1 Wiring of Devices on page 3-44
q
3-6-2 Programming on page 3-45
q
3-6-3 Setup of Control Commands on page 3-47
q
3-6-4 Confirmation of the Settings on page 3-49
q
3-6-5 Verification of the MOTF on the Actual Machine on page
3-50
s
3-7 Setup of the Laser Oscillator on page
3-51
Set up the laser oscillator.
q
3-7-1 Wiring of Devices on page 3-51
q
3-7-2 Guide Laser Output on page 3-51
q
3-7-3 Programming on page 3-53
q
3-7-4 Setup of the Laser Oscillator on page 3-56
q
3-7-5 Confirmation of the Settings on page 3-58
3 Connection Procedures
3-3
Application Guide Laser Application (O052)
3-1 Work Flow
3

3-2 Controller Setting Preparations
Perform the Controller setting preparations.
Install the Power PMAC IDE on the PC beforehand.
3-2-1 Creation of a New Project
Follow the procedure below to create a new project.
1Connect the Controller and computer
with an Ethernet cable.
2Turn ON the power supply to the Con-
troller.
3Start up Power PMAC IDE.
•If a dialog for checking access rights
is displayed at the time of startup, se-
lect the option for starting up.
4The Communication screen is dis-
played, so specify the IP address of the
Controller to be connected to, and click
the Connect button.
•The default IP address for the Con-
troller is "192.168.0.200".
•If necessary, change the Windows IP
address to "192.168.0.X".
5Power PMAC IDE starts up, and the
Controller will come online.
3 Connection Procedures
3-4 Application Guide Laser Application (O052)