OPTO-EDU A63.7015 User manual

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A63.7015
Tungsten Filament Scanning Electron
Microscope, SE, 20x~150000x
Instruction Manual
To ensure the safety and obtain satisfactory performance, please study this instruction manual thoroughly before start to use the instrument.

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(1) Sample preparation & installation (sample height adjustment)
1. Open the door with the vacuum completely released.
2. Turn the bracket fixed on the control shaft counterclockwise.
3.4. Unscrew the sample stage fixed on the bracket and install the prepared sample.
5. Fix the height of the sample and adjust the height by W/D JIG. (W/D refers to working
distance)
- Rotate the upper and lower parts of the two nuts mounted on the bracket, the height of
the upper edge of the sample and the lower part of the limit arm of the clamp. After
completion, tighten the fixing nuts in opposite directions without changing the height of the
sample.
※ If the sample is relatively high, a nut can be removed to adjust the height.
Fix the stage on the bracket and turn it clockwise to fix it in place.
6. Slowly close the cabin door, press the vacuum button at the same time to vacuum, wait
until the cabin door is sucked and let go.

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(2) Equipment preparation, start, end
1. Press the power switch (POWER).
2. Open the hatch and replace the sample stage. 【Reference Manual (1)】
3. Close the hatch.
4. Press and hold the vacuum button EXCHANGE (three seconds). (vacuum time 2.5
minutes)
- Make sure you are vacuuming and try to open the hatch.
- After the vacuum is completed, the signal tone (2 beeps) and the LED signal light are
solid and do not flash.
※If the signal tone continues to call, you need to push the door again and press it again
Exchange key.
5. Select the SENSE-SEM icon on the computer desktop, double-click to start the
software, and acquire images according to the sequence of operations.
6. Click the "stop" button on the software after the image is taken to close the software.
7. Press and hold EXCHANGE to release the vacuum. (Complete in 40 seconds)
8. Turn off the power switch.
Note: A63.7006 chassis No
diaphragm rod on outer surface,
soft. There is no difference in the
software interface, no [Manual
(6)] Steps

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(3) SEM S/W startup, parameter setting
2 3 4 5
1. Double-click the SENSE-SEM icon on the desktop and wait for the software to run.
2. Select the appropriate acceleration voltage in the upper left of the software.
(5/10/15/20/30KV)
-Accelerating voltage should be selected according to the properties of the sample, image
requirements and observation magnification, etc.
-Usually the higher the acceleration voltage, the higher the resolution of the SEM, and
different objects to be observed may need to change the acceleration
voltage for best results.
3. Select the detector type SE/BSE used for this observation and analysis. (Secondary
Electrons/Backscattered Electrons)
4. Select High Vacuum mode. (High Vacuum/Low Vacuum means high vacuum/low
vacuum)
5. Click the "Start" button, and the electron gun emits an electron beam to form an image.
Note: 1) The software cannot be run when the SEM power is turned off or the SEM-PC
Cable is not connected properly.
2). The first time it starts, it starts in high vacuum mode, and it can be switched to low
vacuum during use.
(Only BSE Mode)
3). Confirm whether the electron beam current value in the upper left corner of the image
display window has risen to (above 100uA).
-The tungsten filament needs to be replaced when the current value is 40~60uA (no
picture)

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(4) Turn on the real-time image and move the observation area
1 2
1. Click on the software (320x240) function, high-speed real-time image scanning
starts.
Use this mode when adjusting focus
- When the image is dark, you need to adjust the value of "Spot Size (Electron Amount)"
(The lower the parameter the brighter / 5~30% - SE image)
- If the graphics are unstable or relatively bright and white, adjust the parameters to the
right as above
(20~70% - BSE image)
※The image cannot be seen at all
1). Confirm the filament value (beam current value in the upper left corner of the image
display window)
2. Use when looking for sample observation points (640x480) full screen mode,
wider field of view.

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(5) Adjust magnification and focus
2
1
3
1. Using the mechanical handle of the SEM,
X axis (transverse), Y Axis (vertical)
adjustment, move the sample to be observed
position to Center of field of view.
*When adjusting the sample position, use
low magnification appropriately
rate, it is easier to observe the shape of
the sample, easy to Determine the
location.
-Z axis (vertical) adjustment
1). When the SE detector is selected, due
to the excitation
The characteristics of SE, adjust the Z-
axis height properly, which is convenient
for collection Board attracts more SE.
2). Z-axis adjustment directly affects WD
(working distance),
And the appropriate WD and sample
surface flatness, magnetic physical
properties such as sex. uneven surface
For magnetic samples, WD is generally
5~10mm; for magnetic samples, WD is
one Generally 25~35mm.
-T axis (tilt angle)
The size of the inclination angle depends
on the magnification and the sample table
The nature of the face varies. The lower
the multiple, the smaller the inclination
angle; the higher the multiple,
The angle of inclination is large. The
sample has obvious convex and concave,
and the inclination angle is small;
The product is relatively flat and the
inclination angle is large.
2. Use the mouse cursor to adjust the magnification, zoom
to the left zooms out, and to the right the magnification
increases. (mouse cursor on High-speed real-time image
position, scroll wheel can also zoom in or out
magnification. )
3. Adjust the focus with the mouse cursor in the "Focus"
area, Coarse adjustment on the left, fine adjustment on
the right
※Focus adjustment method
- 1). Decrease the magnification, such as 300 times or
other magnifications.
- 2). Use the mouse to adjust the focus coarse adjustment
slider left and right to make the image the clearest.
- 3). Use the mouse to adjust the focus fine-tuning slider
left and right to make the image the clearest.
- 4). Change the magnification to your desired
magnification, and repeat steps 2) and 3) above.
※If you choose a magnification of 3,000 times or more,
you need to adjust it in conjunction with "Stigmation".

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(6) Aperture rod adjustment (For A63.7015 Only)
1
X
Y
2
2. Image swing lever
1) Left-click the Focus wobble function in the software, the field of view is a high-speed
real-time image, and it can be adjusted repeatedly. The XY position is controlled by
electronic control until the image does not move.
- Adjust the swing function after making the image clear, it is beneficial to watch the image
swing direction, you can call the "cross"
shelf" function, easy to see the shaking direction; if the image is not clear, press
[Manual (5)] to operate.
- Shake and adjust the X-axis knob in the left and right directions of the image.
- Shake and adjust the Y-axis knob in the up and down direction of the image, from the
bottom left to the top right.
2) . Right click on the wobble, when the field of view is a high-speed real-time image, the
image sways so much that it is impossible to distinguish the shaking direction.
Reduce the shaking frequency A, and repeat the above 1) steps.
Note: 1). The swing function needs to be adjusted when changing the voltage or changing
the aperture size.
2). After adjusting the swing, it is necessary to fine-tune the focus to achieve the clearest
state.
1. Aperture adjustment
The diaphragm is divided into four gears (30, 50,
50, 100um),
The size is in order from the inside to the outside
according to the red circle in the picture.
- should be selected according to the nature of
the sample, observation magnification, etc.
Choose the aperture size, generally choose
50um. (100um for EDS)
- Adjustment method: turn left, inward or outward
Pull, rotate right to lock.

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(7) Spot size adjustment
4. Adjust the "beam" with the spot size progress bar
Amount-Size"
※ During SE image operation
1) 5~30% : The brightest image can be obtained
image, high magnification image (more than 5 thousand
times),
Because the great energy is concentrated in the focal
point, the conditioning aspect
Limited. (Expanded edge)
2) 30~60% : form a more suitable figure
Image (5K~20K times image)
※ When adjusting the spot size, according to the sample
The characteristics and equipment conditions are the
same as the above.
Difference, according to the actual observation condition
setter Combined spot pattern.
※ During BSE image operation
1) 50% before/after : you can get the best
combined image effect.
※ When changing the detector, click the
detector selection area on the software
(red box in the picture above), switch detector
(SE ↔ BSE mode)
When SE -> BSE is changed, because of the
spot size,
An unstable image like the one on the right
may appear, While adjusting the spot size
5. Stigmation
Adjust the resolution. (Click the 50% button)

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5. Stigmation
Function: Using the electron beam correction function, by moving X, Y
axis to make the image sharper and clearer.
Principle: Use an external magnetic field to convert the inherent elliptical magnetic field
The field is corrected to a nearly rotationally symmetric magnetic field.
Operation essentials:
1). Can not be used when shooting images below 3,000 times (no big difference)
2) The image is not clearly clear after high magnification adjustment and focus.
When the clearest position
Note: The adjustment range of X and Y is plus or minus 20%, and the astigmatism is
positive
In the range of minus 20%, a clear image cannot be obtained and the edge value is
A clear image is obtained indicating that the diaphragm is contaminated.

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6
7
8
9
7. Collector-CLT (collector), generally adjusted to the maximum, benefit
The excited SE/BSE is most attracted by high pressure; Amplifier-PMT (amplifier),
generally adjusted to the maximum, good for signal conversion.
8. Contrast (contrast), Brightness (brightness) is Adjust the color effect function of the
image, move the image to the right getting brighter, moving the image to the left gets
darker
9. There are 5 types of image observation modes (scanning).
1).Fast Scan-Used when real-time scanning (320x240:0 sec) to focus and adjust image
position
2). Slow Scan (640x480 : 3 seconds) Confirm and correct the picture before saving
3).Photo Mode1 (1280x960 : 30 seconds) high resolution image storage
4).Photo Mode2 (2560x1920 : 60 seconds) higher resolution image storage
5).Photo Mode3 (5120x3840 : 90 seconds) highest resolution image storage
*5 Mode software main interface can be switched at will.
10. Image Storage
- Click the save icon , after the image acquisition is completed, you will be
prompted to set the storage path. After selecting the path, the software automatically
names and saves the file.
6. The beam shift function is to slightly
move the x,y axis position of the
electron beam. When observing at
high magnification, it is difficult to
move the image through the
mechanical knob. This function can be
used to partially move the image
position for easy observation.
*Max ±150um
※Reset button makes the image
quickly return to the middle position

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(8) The image scanning is completed (the device is turned off)
10
10. Click the “stop” button of the software after the image analysis is completed. When
start is displayed, the software stops the image acquisition operation and turns off the
high voltage.
- Click the "stop" button when you want to change the acceleration voltage during the
image analysis process. When start is displayed, stop collecting images, then change
the voltage, and then click "start" to restart the operation.
12
11
11. When changing samples, click the “stop” button on the software. When start is
displayed, press the “EXCHANGE” button 11 on the device to release the vacuum,
and then you can replace the sample and observe again.
12. If testing is not required, press button 12 on the device to power off the SEM.

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(9) The method of using the measuring tool
1. The Measuring Tools function can measure and store parameters such as length, angle,
area, etc.
- Click the "Pause" button after finishing (Photo mode 1, 2 or 3)
Measure the bar and store the picture, select the measurement tool
※ Click Can delete, and edit mark data.

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(10) Attachment: Equipment Inspection and Troubleshooting
(1) Inspection of Vacuum system
1). O-ring inspection and replacement
Due to frequent sample change or filament replacement, the O-ring vacuum seal at the
door of the vacuum chamber or the O-ring of the electron gun
The frequency of wear of the type vacuum seal is higher. Due to dust adhesion, pollution
and other reasons, the phenomenon of vacuum leakage will be caused.
Regular cleaning management is required.
Remove the O-ring vacuum seal from the groove. Do not operate with metal tools. If in the
groove or seal ring
Defects or deformations in the surface can prevent complete vacuum extraction.
Use a non-woven cloth dipped in a small amount of ethanol to wipe the removed sealing
ring to remove dust and contamination on it. Wiped
Please ensure that the sealing ring does not directly contact other pollution sources such
as skin or clothes to avoid secondary pollution.
Carefully inspect the seals for dirt or blemishes. If defects or deformation are found, the
sealing ring needs to be replaced.
Dip a small amount of vacuum grease and spread it evenly on the surface of the sealing
ring.
Use ethanol to clean the grooves that hold the sealing ring.
Put the sealing ring evenly coated with vacuum sealing oil into the slot in its original
position.
2). Rotary pump oil inspection and replacement
If the vacuum pump oil is insufficient or discolored or deteriorated, it will affect the
performance of the vacuum pump. Therefore, it is necessary to periodically check the
Check and replace the empty pump oil.
Replenish
The replenishment of vacuum pump oil means that when the vacuum pump oil is not
deteriorated or polluted, the oil volume is lower than the standard position and the

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Replenish pump oil.
When replenishing the pump oil, please refer to the vacuum pump oil gauge and pour the
vacuum pump oil from the oil filling port.
Replace
When the vacuum pump oil is discolored, it can be seen by the vacuum pump oil dipstick,
or it needs to be replaced regularly vacuum pump oil every 6 months to 1 year
Remove the air hose and oil mist connected to the main unit of the equipment.
Remove the screw at the drain port and drain the pump oil.
Reinstall the screw after the waste oil is completely drained, and inject new oil from the oil
filling port. Appropriate injection volume for vacuum pump oil dipstick 2/3 of the lower and
upper limits.
Reconnect the main unit of the equipment with the vacuum pump pipe (Air hose) and oil
mist.
(2) Troubleshooting
1) Troubleshooting
If the equipment is abnormal during use, please operate according to the tips in this
chapter. If a malfunction not mentioned in this chapter occurs
When you are born, please stop running the equipment and contact our company.
⚫The Troubleshooting Inspection System should only be operated by trained personnel
who understand the equipment.
⚫Failure to use the correct protective measures during troubleshooting may result in
casualties or serious injuries.
⚫Therefore, protection devices must be used during troubleshooting.
⚫Please turn off the power before troubleshooting.
⚫Please reconfirm the precautions before troubleshooting. If you are unable to
determine how to implement the fault maintenance, please immediately
⚫Stop working and contact our company.

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2) In case of equipment failure
2.1. System power failure
Phenomenon:
After pressing the power button on the front of the " A63.7015 (A63.7006)", the display
light does not light up, the power supply of the device does not supply power, and the
device does not work.
can start.
reason:
1) The 220V plug for power supply cannot supply power
2) " A63.7015 (A63.7006)" internal overload caused E.L.B (leakage protector) to turn off
the power
Solution:
Check if the 220V plug that supplies the power to the device is disconnected from the
power supply box
Check if the switch of E.L.B (leakage protector) on the back of " A63.7015 (A63.7006)" is
on
If it is confirmed that the switch on the back of the device was turned on before, and the
switch was not turned off manually, then
Do not open the switch, please contact the after-sales engineer
Note: If it is confirmed that the power plug is correctly inserted into the power supply box,
and the switch of the E.L.B (leakage protector) is on
When it is on, please pay special attention that even if you do not turn on the switch button
on the front of the device, the SMPS and other parts of the device will not work.
may be charged
2.2. PC Startup Failure
Problem
The computer does not turn on normally or nothing appears on the screen
Black screen in the middle of computer startup, stop starting
The software does not execute properly
Reason
Computer power supply is not supplying power
Computer not shutting down properly causing software problems
The cable between the computer and A63.7015/A63.7006 is not properly connected
Solution:
⚫Check whether the computer's power supply plug is properly inserted
⚫Check if your computer's battery is dead
⚫Check the connection status of the cable between the computer and
A63.7015/A63.7006

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⚫Check if the " A63.7015 (A63.7006)" device is turned on
⚫Check if necessary, programs are executing
⚫Check if your computer has virus.
2.3. Communication failure
Problem
The error message "Cannot find Active Scan facility" pops up
Reason
Poor USB cable connection between device and computer
Solution
Reconnect the USB cable
2.4, Vacuum Failure
Problem
A continuous beep of "BB" is emitted from the internal motherboard of the device during
the vacuuming process
Reason
⚫The vacuum pump tube between the mechanical vacuum pump and
A63.7015/A63.7006 is not properly connected
⚫Mechanical vacuum pump failure
⚫Molecular pump failure
⚫The sample compartment door is not fully closed
Solution
⚫Check the connection status of the vacuum pump between the mechanical vacuum
pump and A63.7015/A63.7006
⚫Close the sample compartment door tightly when vacuuming
⚫Replacing the vacuum pump oil in the mechanical vacuum pump