R&S ZNA67EXT User manual

R&S®ZNA67EXT
Vector Network Analyzer
System 110 GHz
Getting Started
1179629502
Version 02
(;ÝÌí2)

This manual describes the R&S®ZNA67EXT family of 110 GHz VNA systems,
order nos. 1352.1888Kxx, xx = 02, ..., 07. These systems are based on:
●A vector network analyzer R&S®ZNA67, order no. 1332.4500Kyy, either with
two ports (yy=62) or with four ports (yy=64).
●Two or four external test sets, each consisting of:
–A frequency converter R&S®ZVA-Z110, WM-2540 (WR10), order no.
1352.1642.yy, either standard power (yy=40) or high power (yy=50)
–A diplexer R&S®ZVA-ZD110, order no. 1314.4002.zz, either with connec-
tors on the left side (zz=12) or on the right side (zz=18)
The following systems are available:
●Variant 02, order no. 1352.1888K02
2-port VNA, 2 standard power converters and 2 diplexers (1 x left, 1 x right)
●Variant 03, order no. 1352.1888K03
4-port VNA, 2 standard power converters and 2 diplexers (1 x left, 1 x right)
●Variant 04, order no. 1352.1888K04
4-port VNA, 4 standard power converters and 4 diplexers (2 x left, 2 x right)
●Variant 05, order no. 1352.1888K05
2-port VNA, 2 high power converters and 2 diplexers (1 x left, 1 x right)
●Variant 06, order no. 1352.1888K06
4-port VNA, 2 high power converters and 2 diplexers (1 x left, 1 x right)
●Variant 07, order no. 1352.1888K07
4-port VNA, 4 high power converters and 4 diplexers (2 x left, 2 x right)
© 2023 Rohde & Schwarz GmbH & Co. KG
Muehldorfstr. 15, 81671 Muenchen, Germany
Phone: [phone] - 0
Email: [email protected]
Internet: www.rohde-schwarz.com
Subject to change – data without tolerance limits is not binding.
R&S® is a registered trademark of Rohde & Schwarz GmbH & Co. KG.
All other trademarks are the properties of their respective owners.
1179.6295.02 | Version 02 | R&S®ZNA67EXT
Throughout this manual, products from Rohde & Schwarz are indicated without the ® symbol, e.g.
R&S®ZNA67EXT is indicated as R&S ZNA67EXT.

Safety information (multilingual)
R&S®ZNA67EXT
3Getting Started 1179.6295.02 ─ 02
1 Safety information (multilingual)
This option or accessory is designed for a specific Rohde & Schwarz prod-
uct. Multilingual safety information is delivered with the product. Follow the provi-
ded installation instructions.
Esta opción o este accesorio están diseñados para un producto
Rohde & Schwarz concreto. El producto va acompañado de información de
seguridad en varios idiomas. Siga las instrucciones de instalación puestas a dis-
posición.
Diese Option oder dieses Zubehör ist für ein bestimmtes Rohde & Schwarz Pro-
dukt vorgesehen. Mit dem Produkt werden mehrsprachige Sicherheitsinformatio-
nen geliefert. Befolgen Sie die mitgelieferten Installationsanweisungen.
Cette option ou cet accessoire est conçu pour un produit Rohde & Schwarz spéc-
ifique. Des informations de sécurité multilingues sont fournies avec le produit.
Suivez les instructions d'installation fournies.
Questa funzione opzionale o accessoria è progettata per un prodotto
Rohde & Schwarz specifico. Con il prodotto sono fornite informazioni sulla sicur-
ezza in formato multilingue. Seguire le istruzioni di installazione allegate.
Esta(e) opção ou acessório foi concebida(o) para um produto específico da
Rohde & Schwarz. Serão fornecidas informações de segurança multilingues com
o produto. Siga as instruções de instalação fornecidas.
Αυτή η προαιρετική επιλογή ή εξάρτημα έχει σχεδιαστεί για συγκεκριμένο προϊόν
Rohde & Schwarz. Μαζί με το προϊόν παρέχονται πληροφορίες ασφαλείας σε
πολλές γλώσσες. Ακολουθήστε τις παρεχόμενες οδηγίες εγκατάστασης.
Din l-għażla jew aċċessorju huma mfassla għal prodott Rohde & Schwarz speċi-
fiku. L-informazzjoni multilingwi dwar is-sikurezza hija pprovduta mal-prodott.
Segwi l-istruzzjonijiet ipprovduti għall-installazzjoni.
Deze optie of dit accessoire is ontwikkeld voor een specifiek product van
Rohde & Schwarz. Het product wordt geleverd met veiligheidsinformatie in meer-
dere talen. Volg de meegeleverde installatie-instructies.
Denne mulighed eller tilbehørsdel er designet til et specifikt Rohde & Schwarz
produkt. En flersproget sikkerhedsanvisning leveres sammen med produktet.
Følg de medfølgende installationsanvisninger.

Safety information (multilingual)
R&S®ZNA67EXT
4Getting Started 1179.6295.02 ─ 02
Detta tillval eller tillbehör är avsett för en särskild produkt från
Rohde & Schwarz. Säkerhetsinformation på flera språk medföljer produkten. Följ
de medföljande installationsanvisningarna.
Tämä vaihtoehto tai lisävaruste on suunniteltu tietylle Rohde & Schwarz -yrityk-
sen tuotteelle. Tuotteen mukana on toimitettu monikieliset turvallisuusohjeet.
Noudata annettuja asennusohjeita.
Dette alternativet eller ekstrautstyret er utformet for et spesifikt Rohde & Schwarz
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Эта опция или принадлежность предназначена для конкретного продукта
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Ta opcja lub akcesorium jest przeznaczone do określonego produktu
Rohde & Schwarz. Dostarczany produkt zawiera informacje w wielu językach
dotyczące bezpieczeństwa. Należy postępować zgodnie z dostarczonymi
instrukcjami instalacji.

Safety information (multilingual)
R&S®ZNA67EXT
5Getting Started 1179.6295.02 ─ 02
Tato varianta nebo příslušenství je určeno pro konkrétní produkt
Rohde & Schwarz. S produktem jsou dodávány vícejazyčné bezpečnostní infor-
mace. Řiďte se přiloženými pokyny k instalaci.
Táto verzia alebo príslušenstvo je navrhnutá pre špecifický výrobok
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Riaďte sa dodanými pokynmi na inštaláciu.
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ték. A termékhez többnyelvű biztonsági információt mellékelünk. Kövesse a mel-
lékelt szerelési utasításokat.
Тази опция или аксесоар са проектирани за специфичен продукт на
Rohde & Schwarz. Многоезикова информация за безопасност се доставя с
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Ova opcija ili oprema namijenjena je za određeni proizvod tvrtke
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dostavljena uputstva za instalaciju.
Această opțiune sau acest accesoriu a fost conceput pentru un produs specific
Rohde & Schwarz. Informațiile multilingve privind siguranța sunt livrate împreună
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упатства. Следете ги дадените упатства за инсталација.

Safety information (multilingual)
R&S®ZNA67EXT
6Getting Started 1179.6295.02 ─ 02
Bu opsiyon veya aksesuar, belirli bir Rohde & Schwarz ürünü için tasarlanmış-
tır. Çok dilli güvenlik uyarıları ürünle birlikte teslim edilir. Size sağlanan kurulum
talimatlarına uyun.
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däki howpsuzlyk barada maglumat önüm bilen bile üpjün edilýär. Üpjün edilen
gurnama ugrukdyrmalaryny ýerine ýetiriň.
本选件或附件专门设计用于特定的 Rohde & Schwarz 产品。产品随附多种语言版
本的安全资讯。谨遵文件中的安装说明。
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ます。多言語で記載された安全情報が製品に付属します。付属のインストール手
順に従ってください。
이 옵션 또는 액세서리는 특정 Rohde & Schwarz 제품용으로 설계되었습니다. 제
품과 함께 다국어로 작성된 안전 정보가 제공됩니다. 함께 제공된 설치 지침을 따
르십시오.
本選配或配件專門設計用於特定的 Rohde & Schwarz 產品。產品隨附多種語言版
本的安全資訊。遵守文件中的安裝說明。
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hiện theo hướng dẫn lắp đặt kèm theo.
ตัวเลือกหรืออุปกรณเสริมนีออกแบบมาสำหรับผลิตภัณฑ Rohde & Schwarz โดยเฉพาะ โดยจะมีการจัดสงขอมูลดานความ-
ปลอดภัยหลายภาษามาใหพรอมกับผลิตภัณฑ ปฏิบัติตามคำแนะนำในการติดตังทีใหไว
Pilihan atau aksesori ini direka bentuk untuk produk Rohde & Schwarz yang ter-
tentu. Maklumat keselamatan berbilang bahasa disertakan bersama produk. Ikut
arahan pemasangan yang diberikan.
Opsi atau aksesori ini dirancang untuk produk Rohde & Schwarz tertentu. Infor-
masi keamanan dalam beberapa bahasa juga disertakan bersama produk. Ikuti
petunjuk pemasangan yang disediakan.
Esta opción o este accesorio están diseñados para un producto
Rohde & Schwarz en concreto. El producto va acompañado de información de
seguridad en varios idiomas. Siga las instrucciones de instalación proporciona-
das con el producto.

Safety information (multilingual)
R&S®ZNA67EXT
7Getting Started 1179.6295.02 ─ 02
Esta opção ou acessório foi desenvolvido para um produto Rohde & Schwarz
específico. Informações de segurança em vários idiomas acompanham o pro-
duto. Siga as instruções de instalação disponibilizadas.

Safety and regulatory information
R&S®ZNA67EXT
8Getting Started 1179.6295.02 ─ 02
2 Safety and regulatory information
The product documentation helps you use the product safely and efficiently. Fol-
low the instructions provided here and in the following chapters.
Intended use
Rohde & Schwarz vector network analyzers and millimeterwave converters
R&S ZNA67EXT are intended for the development, production and verification of
electronic components and devices in industrial, administrative, and laboratory
environments. Only use them for their designated purpose. Observe the operating
conditions and performance limits stated in the data sheet.
Where do I find safety information?
Safety information is part of the product documentation. It warns you of potential
dangers and gives instructions on how to prevent personal injury or damage
caused by dangerous situations. Safety information is provided as follows:
●Multilingual safety information is provided in Chapter 1, "Safety information
(multilingual)", on page 3, and delivered with the system's R&S ZNA67.
●Throughout the documentation, safety instructions are provided when you
need to take care during setup or operation.
2.1 Labels on the external test sets
Labels on the frequency converters and diplexers inform about:
●Product and environment safety
●Identification of the product
Table 2-1: Labels regarding product and environment safety
Labeling in line with EN 50419 for disposal of electrical and electronic equipment after
the product has come to the end of its service life. For more information, see "Dispos-
ing electrical and electronic equipment" on page 50.
Take care when handling electrostatic sensitive devices.
Labels on the external test sets

Safety and regulatory information
R&S®ZNA67EXT
9Getting Started 1179.6295.02 ─ 02
2.2 Warning messages in the documentation
A warning message points out a risk or danger that you need to be aware of. The
signal word indicates the severity of the safety hazard and how likely it will occur
if you do not follow the safety precautions.
NOTICE
Potential risks of damage. Could result in damage to the supported product or to
other property.
Warning messages in the documentation

Documentation overview
R&S®ZNA67EXT
10Getting Started 1179.6295.02 ─ 02
3 Documentation overview
This section provides an overview of the R&S ZNA user documentation. Unless
specified otherwise, you find the documents at:
https://www.rohde-schwarz.com/manual/ZNA
3.1 Getting started manual
The getting started manual of the R&S ZNA describes how to set up and start
working with the system's vector network analyzer R&S ZNA67. It includes basic
operations, typical measurement examples, and general information, e.g. safety
instructions. A printed version is delivered with the R&S ZNA67. A PDF version is
available for download on the Internet.
The getting started manual of the VNA system R&S ZNA67EXT (this document)
describes how to set up and start working with the R&S ZNA67EXT. It describes
the setup and basic operation of the VNA system as a system. A printed version
is delivered with the system. A PDF version is available for download on the Inter-
net.
3.2 User manual and help
The R&S ZNA user manual contains the description of the modes and functions
of the system's vector network analyzer R&S ZNA67. It also provides an introduc-
tion to remote control, a complete description of the remote control commands
with programming examples, and information on maintenance, instrument interfa-
ces and error messages. Includes the contents of the R&S ZNA getting started
manual.
The contents of the R&S ZNA user manual are available as help in the instru-
ment. The help offers quick, context-sensitive access to the complete information
for the instrument and its firmware.
The R&S ZNA user manual is also available for download or for immediate dis-
play on the Internet.
User manual and help

Documentation overview
R&S®ZNA67EXT
11Getting Started 1179.6295.02 ─ 02
3.3 Service manual
Describes the performance test for checking the rated specifications, module
replacement and repair, firmware update, troubleshooting and fault elimination,
and contains mechanical drawings and spare part lists.
The service manual is available for registered users on the global
Rohde & Schwarz information system (GLORIS):
https://gloris.rohde-schwarz.com
3.4 Instrument security procedures
Deals with security issues when working with a R&S ZNA in secure areas. It is
available for download on the Internet.
3.5 Printed safety instructions
Provides safety information in many languages. The printed document is deliv-
ered with the system's R&S ZNA67.
3.6 Data sheets and brochures
The data sheet contains the technical specifications of the VNA system
R&S ZNA67EXT. It also lists the available hardware and software options, and
optional accessories.
The R&S ZNA67EXT brochure provides an overview and describes the features
and applications of the VNA system. The product brochure of the R&S ZNA pro-
vides an overview of the VNA functionality and deals with the specific characteris-
tics.
See https://www.rohde-schwarz.com/brochure-datasheet/ZNA
Data sheets and brochures

Documentation overview
R&S®ZNA67EXT
12Getting Started 1179.6295.02 ─ 02
3.7 Release notes and open source acknowledg-
ment (OSA)
The release notes list new features, improvements and known issues of the cur-
rent R&S ZNA firmware version, and describe the firmware installation.
The firmware makes use of several valuable open source software packages. An
open-source acknowledgment document provides verbatim license texts of the
used open source software.
See https://www.rohde-schwarz.com/firmware/ZNA
3.8 Application notes, application cards, white
papers, etc.
These documents deal with special applications or background information on
particular topics.
See https://www.rohde-schwarz.com/application/ZNA
Application notes, application cards, white papers, etc.

Key features
R&S®ZNA67EXT
13Getting Started 1179.6295.02 ─ 02
4 Key features
The 1.0 mm VNA system R&S ZNA67EXT can sweep through a frequency range
from 10 MHz to 110 GHz continuously. It.supports two different measurement
modes:
●Measurements with internal test sets cover a frequency range between
10 MHz and 67 GHz.
The R&S ZNA67EXT is based on a vector network analyzer R&S ZNA67.
Connect the DUT to any of the test ports of the R&S ZNA and measure its
properties as described in this user manual or help system.
●Measurements with external test sets cover an extended frequency range
between 10 MHz and 110 GHz. The DUT is connected to the 1 mm connec-
tors at the front of the diplexers R&S ZVA-ZD110. This measurement mode is
described in the present manual.
The following sections describe the external test sets and their connection to the
DUT and to the R&S ZNA. A typical measurement example is presented in Chap-
ter 9, "Basic operation", on page 40.
The measurement mode of each VNA port is selected in the "Converter
Configuration" dialog of the R&S ZNA GUI (System – [Setup] > "Frequency
Converter" > "Frequency Converter...").
●"Converter Type" > "None": internal test sets
●"Converter Type" > "ZNA67EXT-TS": external test sets
●Selecting another "Converter Type" allows you to measure within the
selected converter's frequency range.
Operation with external test sets
The external test sets enable a frequency range between 10 MHz and 110 GHz.
The analyzer combines two different measurement methods to achieve this
extended range.
●At frequencies below approx. 67 GHz (i.e. in "low frequency" mode), the fre-
quency converter in the external test set is bypassed. The source signal of the
respective analyzer port is directly fed to the 1 mm test port connector of the
diplexer. The network analyzer measures the a-waves and b-waves from the
Ref Out and Meas Out on the diplexer, respectively. The RF connectors LO

Key features
R&S®ZNA67EXT
14Getting Started 1179.6295.02 ─ 02
IN, RF IN, REF OUT, and MEAS OUT on the connector panel of the converter
are not used.
●To achieve frequencies above approx. 67 GHz (i.e. to measure in "high fre-
quency" mode), the frequency converter in the external test set is used. The
source signal of the respective analyzer port is fed to the frequency converter,
and the converted signal is routed to the 1 mm test port connector of the
diplexer. The frequency converter uses frequency multipliers to transform the
source signal into a high-frequency stimulus signal. A local oscillator (LO) sig-
nal from the Converter LO output of the analyzer (R&S ZNA-B8) is used for
down-conversion of the reference and measurement channels. If more than
one converter is used, a power divider feeds the LO signal to the converters.
This test setup ensures a stable phase relationship between the LO IN signals
of the converters.
The analyzer measures the a-waves from REF OUT and the b-waves from
MEAS OUT on the converters. The RF connectors REF OUT, MEAS OUT on
the rear panel of the diplexers are not used.
The network analyzer automatically switches between low frequency and high fre-
quency mode, depending on the stimulus frequency; see Chapter 6.3.2, "H/L
SWITCH", on page 28. There is no need to change the test setup and cabling.

Preparing for use
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15Getting Started 1179.6295.02 ─ 02
5 Preparing for use
Here, you can find basic information about setting up the product for the first time.
5.1 Unpacking and checking
When you receive your VNA system, please take the following steps:
1. Unpack the contents from the cardboard shipping boxes.
2. Retain the original packing material. Use it when transporting or shipping the
product later.
3. Using the delivery notes, check the equipment for completeness.
The shipment must include the items listed in Table 5-1.
4. Follow the instructions given in the "Preparing for use" chapter of the
R&S ZNA's Getting Started guide.
5. Remove the protective caps from the 1 mm test ports at the front of the
diplexer elements. Carefully inspect the converters and diplexers. If you notice
any damage, immediately notify the shipping company.
Unpacking and checking

Preparing for use
R&S®ZNA67EXT
16Getting Started 1179.6295.02 ─ 02
Table 5-1: Shipment of VNA system R&S
ZNA67EXT, order no. 1352.1888Kxx (Variants xx = 02, ..., 07)
Variant 02 Variant 05 Variant 03 Variant 06 Variant 04 Variant 07 VNA R&S ZNA67, 1.85 mm order no. 1332.4500Kyy Shipment: see R&S ZNA Getting Started 1
2-port (variant 62) 4-port (variant 64)
Converter R&S ZVA-Z110,
WM-2540 (WR10) order no. 1352.1642.yy 2,3,4
2 x std. power (variant 40)
2 x high power (variant 50)
2 x std. power (variant 40)
2 x high power (variant 50)
4 x std. power (variant 40)
4 x high power (variant 50)
Diplexer R&S ZVA-ZD110 order no. 1314.4002.yy 2,4,5
1 x left (variant 12), 1 x right (variant 18) 2 x left (variant 12), 2 x right (variant 18)5
Torque wrench for diplexer test port 1 x R&S ZN-ZTW variant 12, 1 mm, 0.34 Nm, order no. 1328.8534.12
LO power divider SMA (f) 27 GHz + angled SMA adapters (m/f) R&S ZV-Z1218 (order
no. 1314.5380.00)
1 x 1:2 R&S ZV-Z1227 (order no. 1307.0886.02) + 2 adapters
1 x 1:4 R&S ZV-Z1228 (order no. 3626.4937.02) + 4 adapters
H/L SWITCH control cable 1 x for control of 2 diplexers, 2.5 m, order no.
1312.6643.00 1 x for control of 4 diplexers, 2.5 m, order no.
1352.1688.00
VNA R&S ZNA67EXT Getting Star- ted (this document) 1 x
1: For mandatory options, see Chapter 6.1, "Vector network analyzer R&S ZNA67", on page 19.
2: The converters are pre-mounted to the diplexers.
3: Each converter is delivered with an external 9 V DC power supply, and with IF cables R&S CABLE EXT REF and R&S CABLE EXT
MEAS.
4: The required RF and LO cables are not part of the standard delivery. They can be ordered separately, see "Cable sets (optional)"
on page 37.
5: With cable deflectors premounted to the "outer" diplexer
Unpacking and checking

Preparing for use
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17Getting Started 1179.6295.02 ─ 02
RF and LO cables between VNA test ports and diplexers are not part of the
standard delivery. See "Cable sets (optional)" on page 37.
5.2 Choosing the operating site
Specific operating conditions ensure proper operation and avoid damage to the
product and connected devices. For information on environmental conditions
such as ambient temperature and humidity, see data sheet.
5.3 Adjusting the feet of the test set
The frequency converter can be used with three or four feet attached to the bot-
tom side. If possible, use three feet: two in front and one in the middle of the rear.
Figure 5-1: Setup with one rear foot (left) and two rear feet (right)
Two additional feet support the diplexer. Typically, the external test set can be
aligned as follows:
1. Screw the diplexer feet and the front feet into the instrument as far as possi-
ble.
Adjusting the feet of the test set

Preparing for use
R&S®ZNA67EXT
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2. Use the rear foot to align the entire test set parallel to the surface of the bench
top.
3. When you connect a DUT in-between two test sets (see Chapter 9.6, "Mount-
ing a DUT", on page 47), use the diplexer feet for further alignment.
5.4 Considerations for test setup
Cable selection and electromagnetic interference (EMI)
Electromagnetic interference (EMI) can affect the measurement results.
To suppress electromagnetic radiation during operation:
●Use high-quality shielded RF cables.
●Always terminate open cable ends.
Signal input and output levels
Information on signal levels is provided in the data sheet. Keep the signal levels
within the specified ranges to avoid damage to the product and connected devi-
ces.
Preventing electrostatic discharge (ESD)
Electrostatic discharge is most likely to occur when you connect or disconnect a
DUT.
►NOTICE! Electrostatic discharge can damage the electronic components of
the product and the device under test (DUT).
Ground yourself to prevent electrostatic discharge damage:
a) Use a wrist strap and cord to connect yourself to ground.
b) Use a conductive floor mat and heel strap combination.
Considerations for test setup

System tour
R&S®ZNA67EXT
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6 System tour
6.1 Vector network analyzer R&S ZNA67
The VNA system R&S ZNA67EXT is based on a two- or four-port vector network
analyzer R&S ZNA67, order no. 1332.4500Kyy, either with two ports (yy=62) or
with four ports (yy=64), and equipped with:
●Dedicated LO output connector (HW option R&S ZNA-B8)
●Direct generator/receiver access (HW option R&S ZNA67-B16)
●Direct IF access (HW option R&S ZNA-B26)
●Receiver step attenuators R&S ZNA67-B3y at all test ports
●SW option R&S ZNA-K8 "Frequency converter control"
●SW option R&S ZNA67-K110 "Continuous Sweep up to 110 GHz for
R&S ZNA67"
For details on its functionality and other HW and SW options, see R&S ZNA user
manual or instrument help.
SW option R&S ZNA67-K110 is only available with the R&S ZNA67EXT. It
cannot be installed on a regular R&S ZNA67.
1
3
4
5
2
Figure 6-1: R&S ZNA67 front and rear panel
Vector network analyzer R&S ZNA67

System tour
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1 = RF port
2 = Direct source/recveiver access (R&S ZNA67-B16)
3 = Converter LO output (R&S ZNA-B8)
4 = Direct IF access (R&S ZNA-B26)
5 = User Port (Aux)
The front and rear panel controls and the connectors of the analyzer are descri-
bed in the getting started guide, user manual and in the help system of the
R&S ZNA. The following sections describe special aspects for measurements
with external test sets.
6.1.1 Test ports
The R&S ZNA67 of a R&S ZNA67EXT is equipped with two or four test ports with
direct generator/receiver access (R&S ZNA67-B16). Each port consists of a bidir-
ectional, ruggedized 1.85 mm (m) connector and 3 pairs of 1.85 mm (f) connec-
tors for direct access.
The connectors are used alternatively:
●The ruggedized 1.85 mm connector serves as a test port connector for mea-
surements with internal test set. The three 1.85 mm connector pairs allow for
extended measurement functionality (see R&S ZNA user manual or help sys-
tem). Out/In loops that are not connected to external devices must be jum-
pered as shown in the figure above.
●The Source Out connector provides the RF source signal for the external test
set. Source Out is connected to the rear panel of the diplexer. In the low fre-
quency range below approx. 67 GHz, Ref In and Meas In receive the refer-
ence waves and measured waves from the diplexer, respectively. The 1 mm
connector of the diplexer serves as a test port connector; the ruggedized
1.85 mm connector of the VNA test port is not used.
Vector network analyzer R&S ZNA67