Siargo FS8000 User manual
FS8000 User Manual
MEMS mass flow sensors
©2021 Siargo Ltd.
VC.0.1
Sold in North America by:
Servoflo Corporation
75 Allen Street
Lexington, MA 02472
www.servoflo.com/info@servoflo.com
781-862-9572
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www.Siargo.com FS800o User Manual
MEMS Mass Flow Sensors
with thermal calorimetric sensing technology
FS8000 Series
User Manual
Document No. 07-2021-FS10 EN
Issue date: 2021.07
Revision: VC.0.1
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, California 95054
USA
Tel: +1(408)969.0368
© Copyright 2021 and Liability Disclaimer
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions
without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this
manual. For further information and updates, please visit www.Siargo.com.
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www.Siargo.com FS800o User Manual
Attention !
Use with caution !
•Please carefully read this manual prior to operating this product.
•Do not open or modify any hardware which may lead to irrecoverable
damage.
•Do not use this product if you suspect any malfunctions or defection.
•Do not use this product for corrosive media or in a strong vibration
environment.
•Use this product according to the specified parameters.
•Only the trained or qualified personnel shall be allowed to perform
product services.
•Be cautious for electrical safety, and even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
•The gas to be measured should be clean and free of particles, as
even light particles may be accumulated inside the tiny pressure port
that may result in inaccuracy in metrology, clogging, or other
irrecoverable damage.
•Do not apply for any unknown or non-specified gases that may
damage the product.
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www.Siargo.com FS800o User Manual
Table of Contents
1. Overview.................................................................................................. 5
2. Receipt / unpack of the products ................................................................ 6
3. Knowing the products ............................................................................... 7
3.1 Product description .................................................................................................7
3.2 Power and data pinout description ...........................................................................8
3.3 Mechanical dimensions............................................................................................9
4. Installation..............................................................................................10
5. I2C digital communication descriptions......................................................11
5.1 I2C interface connection diagram............................................................................ 11
5.2 I2C interface command description ......................................................................... 11
5.3 I2C interface read/write sequences.......................................................................... 12
6. Product selection and order information ...................................................13
6.1 Product selection .................................................................................................. 13
6.2 Order contact and customer support ...................................................................... 13
7. Product performance ...............................................................................14
7.1 Technical specifications ......................................................................................... 14
7.2 Analog 0utput....................................................................................................... 15
8. Technical notes for the product performance.............................................16
8.1 Measurement principles.........................................................................................16
8.2 Precautions for the best performance of the product ...............................................16
8.2.1 Altitude changes.........................................................................................................16
8.2.2 Excessive humidity or condensation .............................................................................16
8.2.3 Metrology verification .................................................................................................17
9. Warranty and Liability............................................................................. 18
10. Service contact and information ...............................................................20
Appendix I: Sensor evaluation kit ...................................................................21
Appendix II: Document history.......................................................................22
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www.Siargo.com FS800o User Manual
1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the FS8000 series of mass flow sensors. The products
are designed for applications in automation, testing, leakage detection, instrumentation, and
medical applications. The FS8001 has a pure analog version with a fast response time of 1 msec which
is particularly applicable for semiconductor equipment, such as die attachment and wire binder. The
product performance, maintenance, and troubleshooting, as well as the information for product
order, technical support, and repair, are also included.
The FS8000 sensors are manufactured with the company’s proprietary MEMS (micro-electro-
mechanical systems) sensing and package technology that offers primarily the mass flow rate
measurements of a full scale from 30 to 500 sccm with a dynamic range of 100:1 for FS8001 and up
to 6 SLPM for FS8003P. Both have a maximum pressure rating of 5 bar (75 psi).
This manual suits for next models
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Table of contents
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