Siargo FS6122 User manual

FS6122 User Manual
Integrated flow, pressure & temperature sensors
©2021 Siargo Ltd.
VB.0.1
Sold in North America by:
Servoflo Corporation
75 Allen Street
Lexington, MA 02472
www.servoflo.com/info@servoflo.com
781-862-9572

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www.Siargo.com FS6122 User Manual
MEMS Flow, Pressure and Temperature Sensors
with thermal and piezo sensing technology
FS6122 Series
User Manual
Document No. 06-2021-FS6 EN
Issue date: 2021.06
Revision: VB.0.1
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, California 95054
USA
Tel: [phone]
Email: [email protected]
© Copyright 2021 and Liability Disclaimer
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions
without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this
manual. For further information and updates, please visit www.Siargo.com.

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Attention !
Use with caution !
•Please carefully read this manual prior to operating this product.
•Do not open or modify any hardware which may lead to irrecoverable
damage.
•Do not use this product if you suspect any malfunctions or defection.
•Do not use this product for corrosive media or in a strong vibration
environment.
•Use this product according to the specified parameters.
•Only the trained or qualified personnel shall be allowed to perform
product services.
•Be cautious for electrical safety, and even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.
•The gas to be measured should be clean and free of particles, as
even light particles may be accumulated inside the tiny pressure port
that may result in inaccuracy in metrology, clogging, or other
irrecoverable damage.
•Do not apply for any unknown or non-specified gases that may
damage the product.

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Table of Contents
1. Overview ......................................................................................................................................................5
2. Receipt / unpack of the products ...............................................................................................................6
3. Knowing the products.................................................................................................................................7
3.1 Product description.............................................................................................................................7
3.2 Power and data pinout description....................................................................................................7
3.3 Mechanical dimensions.......................................................................................................................8
4. Installation.......................................................................................................................................................8
5. Basic operation ................................................................................................................................................9
5.1 I2C interface connection diagram.............................................................................................................9
5.2 I2C interface command description..........................................................................................................9
6. Product selection and order information....................................................................................................11
6.1. Product selection ...................................................................................................................................11
6.2. Order contact and customer support ..................................................................................................11
7. Product performance ....................................................................................................................................12
7.1. Technical specifications .........................................................................................................................12
7.2. Pressure loss ...........................................................................................................................................13
7.3. Typical (analog) output..........................................................................................................................13
8. Technical notes for the product performance ............................................................................................14
8.1. Measurement principles ........................................................................................................................14
8.2. Precautions for the best performance of the product .......................................................................14
8.2.1. Contamination and sterilization....................................................................................................14
8.2.2. Altitude changes .............................................................................................................................14
8.2.3. Excessive humidity or condensation.............................................................................................14
8.2.4. Metrology verification....................................................................................................................15
9. Warranty and Liability ..................................................................................................................................16
10. Service contact and information................................................................................................................18
Appendix I: Sensor evaluation kit....................................................................................................................19
Appendix II: Document history ........................................................................................................................20

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1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the FS6122 series of combo sensors for a medical
ventilator or CPAP (Continuous Positive Airway Pressure) equipment applications. The product
performance, maintenance, and troubleshooting, as well as the information for product order,
technical support, and repair, are also included.
The FS6122 sensors are manufactured with the company’s proprietary MEMS (micro-electro-
mechanical systems) sensing and package technology that offers primarily the mass flow and gauge
pressure with optional temperature and humidity sensing in a compact design without the needs for
additional calibrations, which significantly reduces cost for the equipment manufacturers.
While the current packages are best for medical applications, the manufacturer also offers
alternative customized packages with customized adapters. Please contact the manufacturer for
additional information.

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2. Receipt / unpack of the products
Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormality is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer; otherwise, the manufacturer should be informed.
For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the sensor formality per the actual order), together with the power and data cable if the order is
included as shown below.
Please check immediately for the integrity of the product and the power and data cable; if any
abnormality is identified, please notify the distributor/sales representative or manufacturer as soon
as you can. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. This user manual shall also be included in the packing box or via an online link for an
electronic version which should be sent by your sales agent. In most cases, this manual shall be made
available to the customer before the actual order.
Please note that the sensor has a pinout that is designed to be directly placed onto a printed circuitry
board. Therefore, the power and data cable is an option that will not come with the order
automatically.
FS6122 Power and data cable

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3. Knowing the products
3.1Product description
3.2Power and data pinout description
Table 3.2: FS6122 pin assignment.
Note: 1. Power supply: The FS6122 requires a power supply of 5±5% Vdc. The sensor consumes less than
20 mA normally and the minimum supply current must be larger than 15 mA.
2. The pressure analog output can be optional. The pin provides 0.5 ~ 4.5 Vdc corresponding with the
specified pressure full-scale range. If the pressure option is not selected, this pin output is NULL.
3. The flow rate analog outputs 0.5 ~ 4.5 Vdc corresponding with the specified flow full-scale range.
4. SDA and SCL are the I2C serial data line and serial clock line.
PIN
COLOR
DEFINITION
1
White
Analog, pressure data
2
Green
Analog, Flow data
3
Black
GND, ground
4
Red
VCC, power supply
5
Yellow
SCL, I2C clock
6
Blue
SDA, I2C data
Direction for flow
measurement. For dual
directional model, the
arrow does not apply.
ISO22mm
ISO22mm
Power and data
connector.
Note: Analog outputs only apply for flow
and gauge pressure.

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3.3 Mechanical dimensions
Figure 3.3.1. FS6122 mechanical dimensions.
4. Installation
Do not open or alter any part of the product, which would lead to malfunction and irrecoverable
damage.
For the installation, make sure to the leakage proof of the connections and all electrical precautions
are applied. Please make sure the electrical pins are properly engaged. It should be noted that the
sensor is designed for extremely low pressure per the applications, therefore, the system design
would be important for the flow stability and related flow noises.

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5. Basic operation
5.1 I2C interface connection diagram
5.2 I2C interface command description
Command
Byte
(Hex)
Length
(int 16)
Command Name
Read/Write
Notes
05H
1
I2C address
Write
Bit 0 is R/W flag bit; Bit 1~ Bit 7 are
available.
oBH
1
Filter depth
Write
Int 8, 0~254
1CH
1
Flowrate offset
reset
Write
1 byte, ensure no-flow conditions
24H
1
Pressure offset
reset
Write
1 byte, ensure no-flow conditions
9DH
4
Write protection
Write
4 bytes, 0x53, 0x49, 0x41, 0x52. One-
time effective.
82H
12
Serial number
Read
ASCII
83H
5
Flow rate
Read
Int32(/1000 SLPM)+CRC
CRC=(Byte1)xOR(Byte2)x(OR(Byte3)XOR(byte4)
84H
9
Flow rate &
Pressure
Read
Int32(/1000 SLPM), INT32(/1000
cmH2O)+CRC
CRC=(Byte1)xOR(Byte2)x…xOR(Byte8)
85H
1
I2C address
Read
Bit 7 ~ Bit 1
8BH
1
Filter depth
Read
Int 8, 0~254
A3H
5
Pressure
Read
Int32(/1000 cmH2O)+CRC
CRC=(Byte1)xOR(Byte2)x(OR(Byte3)XOR(byte4)
B2H
3
Temperature
Read
Int16(/100 °C) + CRC
CRC=(Byte1)xOR(Byte2)
B3H
3
Humidity
Read
Int16(/100 %RH) + CRC
CRC=(Byte1)xOR(Byte2)

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Note: 1. Before writing to the register, please ensure the write protection is disabled.
2. The I2C address is set to Bit 7~Bit 1. E.g. if the I2C address is 1 (0000 001x), the write address will be
0x02 (0000 0010) and the read address will be 0x03 (0000 0011).
3. The write protection is a one-time effective function.
5.3 I2C interface read/write sequences

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6. Product selection and order information
6.1. Product selection
The product part number is composed of the product model number and suffixes, indicating each
of the selectable parameters. Refer to the following for details.
FS6122 - F - P - TH
Note:
1. Except for the temperature/humidity option, the numbers are designated for full-scale value.
2. Except for flowrate, o stands for null or without the corresponding sensing option.
3. Example: FS6122-50-F200-5P40-TH1 is a sensor that measures mass flow rate from reverse 50 to
forward 200SLPM; gauge pressure from -5 to 40 cmH2O, temperature, and relative humidity.
4. The current configuration would not guarantee the response time for humidity, the humidity value
could take additional and unspecific time to reach the real value.
6.2. Order contact and customer support
The sales offices and the sales distributors/representatives are listed at the end of this document. For
small quantities, the order can be placed either through the Siargo website: www.siargo.com or the
sales office. For large quantities, please contact the sales office, distributors, or sales representatives.
Siargo is making every effort to ensure the quality of the products. In case of questions and/or
product supports, please contact the customer service listed at the end of the document.
Temperature & Humidity (1 or 0 for null)
Forward pressure (40 or 100 (110) cmH2O; 0 for null)
Reverse pressure (0, 5, 40, 100 (110) cmH2O)
Forward flowrate (100, 150, 200, 250 SLPM)
Reverse flowrate (0, 50, 100, 150, 200, 250 SLPM)

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7. Product performance
7.1. Technical specifications
All specifications listed in the following table, unless otherwise noted, apply for calibration
conditions at 20°C and 101.325 kPa absolute pressure with air.
Value
Unit
Flow range
-250 … +250
SLPM
Accuracy (total error band)
±(2.5+0.5FS)
%
Output
Linear, analog 0.5~4.5Vdc / I2C (14bit)
Response time
1.8
msec
Gauge pressure
-5, -40, -100, 0 … 40, 100 (110)
cmH2O
Accuracy (total error band)
±1.o
%FS
Output
Linear, analog 0.5~4.5Vdc / I2C (14bit)
Response time
1.8
msec
Temperature
-10~60
°C
Accuracy
±o.5
°C
Humidity
0~100(no condensation)
%RH
Accuracy
±2.0 (20~80%RH); ±5.0 (other ranges)
%
Resolution
0.7
%RH
Response time (63%)
5.0 (25~75%)
sec
Gas compatibility
Air, O2, N2
Supply voltage
5.0±5%
Vdc
Power consumption
<60
mA
Warm-up time
<50
msec
Temperature compensation
-5~+65
°C
Altitude compensation
-400~+3000 (700~1060)
m (hPa)
Storage temperature
-20 ~ +70
°C
Compliance
RoHS; REACH
CE
IEC 61000-4-2;4;8
Note: 1. The analog output is correlating to the full-scale whatever it is specified.
2. Burst pressure for pressure range: ±40kPa (-5~40 cmH2O) and ±100kPa (-5~100 cmH2O).
3. The data and power cable connector is supplied with the product. It is compatible with AMPMODU
MAT 6 positions. (e.g. TE 5-103956-5 https://www.te.com/usa-en/product-5-103956-5.html)

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7.2. Pressure loss
7.3. Typical (analog) output
The pressure loss shown in the
graph is one-directional. The
reverse direction will have an
identical loss value.
The temperature and humidity data
can only be accessed via the I2C
interface due to the limited analog
ports.

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8. Technical notes for the product performance
8.1. Measurement principles
The products utilize the Company’s proprietary micro-machined (MEMS) sensing technology. The
mass flow sensing is via calorimetry with temperature compensation. The gauge pressure is realized
via the piezoresistive sensing, while the temperature sensor is a micromachined platinum thermistor,
and the humidity sensor is again micromachined with the capacitive sensing principle. The MEMS
sensors allow the integration in a small footprint while offering multiparameter sensing.
8.2. Precautions for the best performance of the product
8.2.1. Contamination and sterilization
It is critical to have the measurements performed in a contamination-free environment for data
accuracy. Excessive contaminants such as vapors will lead to data deviation or even product
malfunctions in severe cases.
For the medical applications, it may be desired to have the product to be sterilized from time to time.
Standard EtO sterilization process is recommended. For the detailed procedure please consult your
local experts or contact the manufacturer.
8.2.2. Altitude changes
Unlike some other products on market, the design of the sensor has a built-in pressure balancer that
preventing membrane deformation due to altitude changes. Therefore, the sensor is intrinsically
insensitive to the altitude change-induced errors. The specified altitude in Sec 7.1 has been fully
tested.
8.2.3. Excessive humidity or condensation
The humidity change will not alter the performance of the sensor. However, if excessive humidity is
present resulting in condensation, the measurement port or channel could be blocked or altered.

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This would result in a very unreliable data output. Please filter or other tools to prevent this situation
to occur when using this product.
8.2.4. Metrology verification
Testing the products with local metrology tools will be performed in almost all cases. It should be
noted that for this particular sensor, special care should be applied while performing such a task.
The gauge pressure tests are relatively simple, as long as the pressure is tested under a stable media
condition, the metrology data should be well reproduced.
For the mass flowrate comparison, however, in addition to the flow system setup conditions
recommended by OIML R137, a stable flow system must be ensured. This is because the current
product is designed for a small pressure loss, therefore the sensor does not have a strong flow
restrictor or conditioners to handle the flow instability that may exist in the system. Therefore to
compare the metrology data, the user should ensure the system is stable, otherwise, the output
could be noisy and metrology deviations would be inevitable. If such cases present, please contact
the manufacturer for further solutions.
For temperature and humidity measurement, because of the small package space, the response of
the humidity could be slower than the specified. For additional information, please contact the
manufacturer.

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9. Warranty and Liability
(Effective January 2018)
Siargo warrants the products sold hereunder, properly used, and properly installed under normal
circumstances and service. As described in this user manual, it shall be free from faulty materials or
workmanship for 180 days for OEM products and 365 days for non-OEM products from the date of
shipment. This warranty period is inclusive of any statutory warranty. Any repair or replacement
serviced product shall bear the same terms in this warranty.
Siargo makes no warranty, representation, or guarantee and shall not assume any liability regarding
the suitability of the products described in this manual for any purposes that are not specified in this
manual. The users shall be held for full responsibility for validating the performance and suitability
of the products for their particular design and applications. For any of the misusage of the products
out of the scope described herein, the user shall indemnify and hold Siargo and its officers,
employees, subsidiaries, affiliates, and sales channels harmless against all claims, costs, damages,
and expense or reasonable attorney fee from direct or indirect sources.
Siargo makes no other warranty, express or implied, and assumes no liability for any special or
incidental damage or charges, including but not limited to any damages or charges due to installation,
dismantling, reinstallation, etc. other consequential or indirect damages of any kind. To the extent
permitted by law, the exclusive remedy of the user or purchaser, and the limit of Siargo's liability for
any and all losses, injuries, or damages concerning the products, including claims based on contract,
negligence, tort, strict liability, or otherwise shall be the return of products to Siargo, and upon
verification of Siargo to prove to be defective, at its sole option, to refund, repair or replacement of
the products. Regardless of form, no action may be brought against Siargo more than 365 days after
a cause of action has accrued. The products returned under warranty to Siargo shall be at the user or
purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are
deemed to have accepted this limitation of warranty and liability, which contains the complete and
exclusive limited warranty of Siargo. It shall not be amended, modified, or its terms waived except
by Siargo's sole action.
This manual's product information is believed to be accurate and reliable at the time of release or
made available to the users. However, Siargo shall assume no responsibility for any inaccuracies
and/or errors and reserves the right to make changes without further notice for the relevant
information herein.
This warranty is subject to the following exclusions:
(1) Products that have been altered, modified, or have been subject to unusual physical or
electrical circumstances indicated but not limited to those stated in this document or any
other actions which cannot be deemed as proper use of the products;

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(2) Products that have been subject to chemical attacks, including exposure to corrosive
substances or contaminants. In the case of battery usage, long term discharge or leakage
induced damages;
(3) Products that have been opened or dismantled for whatever reasons;
(4) Products that have been subject to working conditions beyond the technical specification as
described by this manual or related datasheet published by the manufacturer;
(5) Any damages incurred by the incorrect usage of the products;
(6) Siargo does not provide any warranty on finished goods manufactured by others. Only the
original manufacturer's warranty applies;
(7) Products that are re-sold by unauthorized dealers or any third parties.

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10. Service contact and information
Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions and or
product supports, please contact customer service at the address listed below. We will respond to
your request in a timely fashion and work with you toward your complete satisfaction.
Customer service and all orders should be addressed to
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210,
Santa Clara, California 95054, USA
Phone: [phone]
Email: [email protected]
For orders, please provide an accurate and full postal address. Siargo will not ship to P.O. Boxes or
via a third party.
Please contact [email protected] to obtain a Return Materials Authorization (RMA) before shipping
the product back to the factory for returns or factory services such as calibration. Please specify as
clear and detailed as possible in your email message the product's status that you intend to ship back
to the factory. Be sure to write the RMA on the returned package or include a letter with the RMA
information.
For further information and updates, please visit www.Siargo.com.

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Appendix I: Sensor evaluation kit
Siargo offers a sensor evaluation kit, including a digital data converter, USB data cable, and User
Application software, that allows the user to evaluate the product performance on a Microsoft
Windows-based computer. The user can read and visualize the flow rate of the product, obtain the
totalized values, and save the data for further analysis. It can read from up to 128 sensors with the
I2C interface in serial.
For further information and purchase of the evaluation kit, please contact the manufacturer or the
sales representative.
Each converter has a fixed cable that can be
directly connected to the product. The USB
cable connected to the PC is also included.
For most of the products, the power from the
PC via the USB cable will be sufficient to power
the sensor product, no external power will be
required. However, for multiple sensors in serial,
the power via the USB cable may not be enough,
an external power adapter with 8~24Vdc will be
required.
Cable to connect
to the product
USB cable to
connect to PC
External power
adapter (optional)

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Appendix II: Document history
06.2021 VB.0.1 –Reformated and updated.
10.2020 VA.14 –Revised ISO45001
07.2020 VA.13 –I2C communication protocol update
06.2020 VA.12 –I2C communication protocol update
10.2019 VA.11 –Output pin assignment update
10.2018 VA.10 –Add additional gauge pressure range
04.2018 VA.9 –I2C communication protocol update
07.2017 VA.8 –Response time update; build materials update; Application notes
update; Added document history tracking.