Siargo FS1015CL Series User manual
FS1015CL User Manual
MEMSmassflowsensors
©2022 SiargoLtd.
VB.2
Sold in North America by:
Servoflo Corporation
75 Allen Street
Lexington, MA 02472
www.servoflo.com/info@servoflo.com
781-862-9572
2
www.Siargo.comFS1015CLUserManual
MEMS Mass Flow Sensors
withthermalcalorimetricsensingtechnology
FS1015CLSeries
User Manual
DocumentNo. 03‐2022‐FS8EN
Issuedate: 2022.03
Revision: VB.2
SiargoLtd.
3100DeLaCruzBoulevard,Suite210
SantaClara,California95054
USA
Tel:+1(408)969.0368
Email:[email protected]
©Copyright2022andLiabilityDisclaimer
SiargoLtd.anditssubsidiariesreservetherighttochangethespecificationsand/ordescriptions
withoutpriornotice.Siargoanditssubsidiariesshallnotassumeanyinaccuracyorerrorsinthis
manual.Forfurtherinformationandupdates,pleasevisitwww.Siargo.com.
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Attention!
Usewithcaution!
Pleasecarefullyreadthismanualpriortooperatingthisproduct.
Donotopenormodifyanyhardwarewhichmayleadtoirrecoverable
damage.
Donotusethisproductifyoususpectanymalfunctionsordefection.
Donotusethisproductforcorrosivemediaorinastrongvibration
environment.
Usethisproductaccordingtothespecifiedparameters.
Onlythetrainedorqualifiedpersonnelshallbeallowedtoperform
productservices.
Becautiousforelectricalsafety,andevenitoperatesatalowvoltage,
anyelectricalshockmightleadtosomeunexpecteddamages.
Thegastobemeasuredshouldbecleanandfreeofparticles,as
evenlightparticlesmaybeaccumulatedinsidethetinypressureport
thatmayresultininaccuracyinmetrology,clogging,orother
irrecoverabledamage.
Donotapplyforanyunknownornon‐specifiedgasesthatmay
damagetheproduct.
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TableofContents
1.Overview..................................................................................................5
2.Receipt/unpackoftheproducts................................................................6
3.Knowingtheproducts...............................................................................7
3.1Productdescription...............................................................................................7
3.2Poweranddatapinoutdescription.........................................................................7
3.3Mechanicaldimensions..........................................................................................8
4.Wettedmaterialsandcompatibility...........................................................9
5.Installation...............................................................................................9
6.Productselectionandorderinformation....................................................10
6.1Productselection................................................................................................10
6.2Ordercontactandcustomersupport.....................................................................10
7.Productperformance...............................................................................11
7.1Technicalspecifications.......................................................................................11
7.2Analogoutput.....................................................................................................12
7.3PressurelosswithISO15mmconnector................................................................12
8.Technicalnotesfortheproductperformance.............................................13
8.1Measurementprinciples.......................................................................................13
8.2Precautionsforthebestperformanceoftheproduct..............................................13
8.2.1Altitudechanges...........................................................................................................13
8.2.2Excessivehumidityorcondensation..............................................................................13
8.2.3Metrologyverification...................................................................................................14
8.2.4Cleaningandsterilization..............................................................................................14
9.WarrantyandLiability..............................................................................15
10.Servicecontactandinformation...............................................................17
Appendix:Documenthistory........................................................................18
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1. Overview
Allcontactinformationcanbefoundattheendofthismanual.
ThismanualprovidesessentialinformationfortheFS1015CLseriesofmassflowsensorsthatare
designedprimarilyformedicalapplicationssuchasventilators,anesthesiaequipment,and
endoscopewiththeISO15mmadapterswithafastresponsetimeandaverylow‐pressureloss.The
sensorcanalsobeusedforothergasflowmeasurementsanddifferentthreadedconnectorscanbe
madeavailableviaanadaptor.Theproductperformance,maintenance,andtroubleshooting,aswell
astheinformationforproductorder,technicalsupport,andrepair,arealsoincluded.
TheFS1015CLsensorsaremanufacturedwiththecompany’sproprietaryMEMS(micro‐electro‐
mechanicalsystems)sensingandpackagetechnologythatoffersprimarilythemassflowrate
measurementsofafullscaleupto150SLPMwithadynamicrangeof100:1,andthemaximum
pressureratingof2bar(30psi).
Thesensorcanbesterilizedviaamedicalcleanseagentthatiscompatiblewiththewettedmaterials
ofpolycarbonate,siliconnitride,andmedical‐gradeepoxyLOCTITE84‐3J.Somealcoholmayreact
withpolycarbonateandisnotrecommendedforuse.AnalternativestandarddryEtOsterilization
processwouldbehighlyrecommended.
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2. Receipt/unpackoftheproducts
Uponreceiptoftheproducts,pleasecheckthepackingboxbeforethedismantlementofthepacking
materials.Ensurenodamagesduringshipping.Ifanyabnormalityisobserved,pleasecontactand
notifythecarrierwhoshippedtheproductandinformthedistributorsorsalesrepresentativesifthe
orderisnotplaceddirectlywiththemanufacturer;otherwise,themanufacturershouldbeinformed.
Foranyfurtheractions,pleaserefertothereturnandrepairsectioninthismanual.
Ifthepackingboxisintact,proceedtoopenthepackingbox,andyoushallfindtheproduct(either
thesensorformalitypertheactualorder),togetherwiththepoweranddatacableiftheorderis
includedasshownbelow.
Pleasecheckimmediatelyfortheintegrityoftheproductandthepoweranddatacable;ifany
abnormalityisidentified,pleasenotifythedistributor/salesrepresentativeormanufacturerassoon
asyoucan.Ifanydefectsareconfirmed,anexchangeshallbearrangedimmediatelyviatheoriginal
saleschannel.Thisusermanualshallalsobeincludedinthepackingboxorviaanonlinelinkforan
electronicversionwhichshouldbesentbyyoursalesagent.Inmostcases,thismanualshallbemade
availabletothecustomerbeforetheactualorder.
Pleasenotethatoneendofthedatacableistobepluggedintothesensorandanotherendiscolored
wireterminals.PleasereadSec.3carefullybeforeconnectingtothepowerandyourdataterminals.
Figure2.1:FS1015CLFigure2.2:Optionalpoweranddata
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3. Knowingtheproducts
3.1 Productdescription
Note:ThestandardproductscomewithISO‐15mmconnectors.Forothertypesofconnectors,a
metaladaptercanbeaddeduponrequest.
Figure3.1:FS1015CLpartsdescription
3.2 Poweranddatapinoutdescription
Table3.1:FS1015CLpinassignment.
Figure3.2:FS1015CLpinoutandcable
Connector:AMPMODUMTE5position;cablelength:50cm.
Note:Theproductrequiresapowersupplyof5±5%Vdc.Thisvoltageisinternallyfilteredandregulated.
However,theanalogoutputmightbeinfluencedifthesupplyvoltagewouldhavelargedeviations.
Itisadvisedthatthepowershouldbeoffwhenplugginginoroutthecabletoavoidanydamages.
PIN
COLOR
DEFINITION
1BlueSDA,I
2
Cdata
2GreenAnalogoutput,0.5~4.5Vdc
3RedVCC,power8~24Vdc
4BlackGND,ground
5YellowSCL,I
2
Cclock
Installationholes
ISO15mm,maleinlet
Power&data
Cablesocket
ISO15mm,
femaleoutlet
½”MNPT.
Othersbyrequests
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3.3 Mechanicaldimensions
Figure3.3:FS1015CLmechanicaldimensionswithISO15mmconnectors.
Figure3.4:FS1015CLmechanicaldimensionswith½”NPTconnectors.
Note:Othertypesofconnectorscouldbepossibleuponrequest.
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4. Wettedmaterialsandcompatibility
Theproductbodyismadeofmedicalcompatibleplastics(polycarbonate).Thesensingelement
comprisessilicon,siliconnitride,andsilicondioxide.Thesensorchipsurfacesarepassivatedwith
siliconnitrideandsilicondioxide.TheelectronicsealingisprovidedbyLOCTITEAblestik84‐3J.
AnotherwettedmaterialthatmaybeexposedisFR‐4.
5. Installation
Theproductatthetimeofshipmentisfullyinspectedforproductqualityandmeetsallsafety
requirements.Additionalsafetymeasuresduringhandlingandinstallationshouldbeapplied.To
preventESD(electrostaticdischarge)damageand/ordegradation,takecustomaryandstatutory
ESDprecautionswhenhandling.Donotopenoralteranypartoftheproduct,whichwouldleadto
malfunctionandirrecoverabledamage.
Fortheinstallation,theproductcomeswithstandardISO15mmconnectors,wherethegasinletis
themaleandtheoutletisthefemaleconnector.Thedataandpowercableisnormallyshippedwith
theproduct,otherwise,itcanbeobtainedfromthemanufacturer.Oneendofthecablecanbe
directlypluggedintothesensorsocketwhileanotherendisthecoloredwireterminalswhichneed
tobeconnectedcorrespondinglytothepowersupplyanddatareceivingterminals.Makesureto
refertoSec3.2anddouble‐checktheconnectionbeforepoweron.Beforesupplyingthegastothe
sensor,makesuretothemechanicalleakageproofoftheconnectionsandallelectricalprecautions
areapplied.Itshouldbenotedthatthesensorisdesignedformediumtolowpressureperthe
applications,therefore,thesystemdesignwouldbeimportantfortheflowstabilityandrelatedflow
noises.
Itisadvisedthattheproductsarebestusedfornon‐explosiveandnon‐corrosivecleangases.The
sensorscannotbeusedforgasmetrologyoffluorideorfluoride‐containinggases.Theuseofthese
gasesmaycausetheproducttomalfunctionorevenseveredamages.
Don'texposetheproduct'selectronicsotherthantheinnerflowchanneltoanyliquids,theunitdoes
nothavewaterproofelectronics.Don'tflowgasinconditionsthatcancausecondensingwatervapor
tobetrappedinsidetheunitduringoperationastheaccuracycouldbesignificantlyinfluenced.
Itissuggestedtodesignyourapplicationsothatthenominalflowrateisapproximately70%ofthe
full‐scaleflowratingofthesensor.Don'tuseasensorwithaflowrangeinextremecases,forinstance,
don'tusea150SLPMsensorfora1.5SLPMapplication.
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6. Productselectionandorderinformation
6.1 Productselection
Theproductpartnumberiscomposedoftheproductmodelnumberandsuffixes,indicatingeach
oftheselectableparameters.Refertothefollowingfordetails.
FS1015CL‐‐‐
Note:ForCO2,themaximumflowrateis100SLPM.
6.2 Ordercontactandcustomersupport
Thesalesofficesandthesalesdistributors/representativesarelistedattheendofthisdocument.For
smallquantities,theordercanbeplacedeitherthroughtheSiargowebsite:www.siargo.comorthe
salesoffice.Forlargequantities,pleasecontactthesalesoffice,distributors,orsalesrepresentatives.
Siargoismakingeveryefforttoensurethequalityoftheproducts.Incaseofquestionsand/or
productsupports,pleasecontactthecustomerservicelistedattheendofthedocument.
Gas:A–air;C–CO2;N–N2;O–O2;R–Ar;forothergases,
pleasecontactthemanufacturer.
Mechanicalconnector:ISO–ISO15mm;N–½”MNPT
Fullscaleflowrate:100or150;defaultunitisSLPM.Forother
ranges,pleasecontactthemanufacturer.
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7. Productperformance
7.1 Technicalspecifications
Allspecificationslistedinthefollowingtable,unlessotherwisenoted,applyforcalibrationconditions
at20°Cand101.325kPaabsolutepressurewithair.
ValueUnit
Flowrange0~100,0~150SLPM
Accuracy(totalerrorband)±(2.0+0.5FS)%
Repeatability0.5%
Turn‐downratio100:1
Responsetime8msec
Workingtemperature‐10~55°C
Temperaturecoefficient±0.12%/°C
Maximalpressure 0.2MPa
Pressuredropatfullscale 1300(150SLPM)Pa
Humidity<95(nocondensation)%RH
Analognullshift±30mVdc
Powersupply5±5%Vdc
Workingcurrent~10(nooutputload)mA
OutputLinear,I2CAnalog:0.5~4.5Vdc
AnalogoutputloadSourcing:25;Sinking:15mA
Maximumoverflow300SLPM
Maximumflowchange40SLPM/sec
Storagetemperature‐20~70°C
Weight21.5withISOconnectorg
CalibrationAir@20°C,101.325kPa
ComplianceRoHS;REACH
CEIEC61000‐4‐2;4;8
Note: 1.Calibrationwithrealgasisoptional.Pleasecontactthemanufacturerforfurtherinformation.
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7.2 Analogoutput
Figure7.1.Typicalanalogoutput.
7.3 PressurelosswithISO15mmconnector
Figure7.2.Typicalpressureloss
Flowrate
(SLPM)
Analogoutput
(Vdc)
00.500
201.300
402.100
602.900
803.700
1004.500
1104.900
1204.900
Flowrate
(SLPM)
Pressureloss
(Pa)
00
2055
40170
60250
80400
100600
120840
1501300
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8. Technicalnotesfortheproductperformance
8.1 Measurementprinciples
TheproductsutilizetheCompany’sproprietarymicro‐machined
(MEMS)calorimetricsensinganddataprocesstechnology.Athermal
signalgeneratorwithapairofsensingelementsattheupand
downstreamofthemicroheaterispreciselymanufacturedand
separatedatpredefinedmicrometerdistancesonachipsurfacewith
excellentthermalisolation.Whenafluidisflowingthroughthesensing
chip,thefluidcarriesthethermalsignaldownstream.Thesensing
elementsregisterthetemperaturedifferences,furthercorrelatedto
thefluidmassflowrateviathecalibrationprocess.
Thecalorimetricsensingapproachoffersalargedynamicrangewitha
betterperformanceagainsttheenvironmentalparameteralternations.
Pleaserefertothecompany'sUSpatentsandotherpublicationsmadeavailabletothepublicfor
additionalinformation.
8.2 Precautionsforthebestperformanceoftheproduct
8.2.1 Altitudechanges
Unlikesomeotherproductsonmarket,thedesignofthesensorhasabuilt‐inpressurebalancerthat
preventsmembranedeformationduetoaltitudechanges.Therefore,thesensorisintrinsically
insensitivetothealtitudechange‐inducederrors.ThespecifiedaltitudeinSec7.1hasbeenfully
tested.
8.2.2 Excessivehumidityorcondensation
Thehumiditychangewillnotaltertheperformanceofthesensor.However,ifexcessivehumidityis
presentresultingincondensation,themeasurementportorchannelcouldbeblockedoraltered.
Thiswouldresultinaveryunreliabledataoutput.Pleasefilterorothertoolstopreventthissituation
tooccurwhenusingthisproduct.
Figure8.1:Measurement
approachillustration.
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8.2.3 Metrologyverification
Testingtheproductswithlocalmetrologytoolswillbeperformedinalmostallcases.Itshouldbe
notedthatforthisparticularsensor,specialcareshouldbeappliedwhileperformingsuchatask.
Thegaugepressuretestsarerelativelysimple,aslongasthepressureistestedunderastablemedia
condition,themetrologydatashouldbewellreproduced.
Forthemassflowratecomparison,however,inadditiontotheflowsystemsetupconditions
recommendedbyOIMLR137,astableflowsystemmustbeensured.Thisisbecausethecurrent
productisdesignedforasmallpressureloss,thereforethesensordoesnothaveastrongflow
restrictororconditionerstohandletheflowinstabilitythatmayexistinthesystem.Thereforeto
comparethemetrologydata,theusershouldensurethesystemisstable,otherwise,theoutput
couldbenoisyandmetrologydeviationswouldbeinevitable.Ifsuchcasesarepresent,please
contactthemanufacturerforfurthersolutions.
Fortemperatureandhumiditymeasurement,becauseofthesmallpackagespace,theresponseof
thehumiditycouldbeslowerthanthespecified.Foradditionalinformation,pleasecontactthe
manufacturer.
8.2.4 Cleaningandsterilization
Incasethattheproductisrequiredtobesterilized,itisrecommendedwiththestandarddryEtO
sterilizationprocess.
Alternatively,theproductcanbesterilizedwithmedical‐gradecleanseliquid.Forexample,first,
makesurethesensorisnotpoweredon,andthenprepareacleanmedicalliquidcarriedandimmerse
onlytheFLOWCHANNELofthesensorintothesterilizingsolution.Makesuretheentiresensor
bodyiswithinthesolutionbutnottheelectroniccoverfor30min.Thenrinsethesensorbyimmersing
itintheDIwaterfor30min.RepeatthisprocesswithcleanDIwaterforanother30min.Then,dry
thesensorinanovenat65°Cfor120min,preferablywithcleanairornitrogen.
Avoidapplyinganyalcoholthatmayinteractwiththepolycarbonateasthereactioncoulddamage
thesensor.
Becarefulthatthisproductdoesnothavealiquid‐proofdesign.Avoidtheliquidattackofthe
electroniccompartment.
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9. WarrantyandLiability
(EffectiveJanuary2018)
Siargowarrantstheproductssoldhereunder,properlyused,andproperlyinstalledundernormal
circumstancesandservice.Asdescribedinthisusermanual,itshallbefreefromfaultymaterialsor
workmanshipfor180daysforOEMproductsand365daysfornon‐OEMproductsfromthedateof
shipment.Thiswarrantyperiodisinclusiveofanystatutorywarranty.Anyrepairorreplacement
servicedproductshallbearthesametermsinthiswarranty.
Siargomakesnowarranty,representation,orguaranteeandshallnotassumeanyliabilityregarding
thesuitabilityoftheproductsdescribedinthismanualforanypurposesthatarenotspecifiedinthis
manual.Theusersshallbeheldforfullresponsibilityforvalidatingtheperformanceandsuitability
oftheproductsfortheirparticulardesignandapplications.Foranyofthemisusageoftheproducts
outofthescopedescribedherein,theusershallindemnifyandholdSiargoanditsofficers,
employees,subsidiaries,affiliates,andsaleschannelsharmlessagainstallclaims,costs,damages,
andexpenseorreasonableattorneyfeefromdirectorindirectsources.
Siargomakesnootherwarranty,expressorimplied,andassumesnoliabilityforanyspecialor
incidentaldamageorcharges,includingbutnotlimitedtoanydamagesorchargesduetoinstallation,
dismantling,reinstallation,etc.otherconsequentialorindirectdamagesofanykind.Totheextent
permittedbylaw,theexclusiveremedyoftheuserorpurchaser,andthelimitofSiargo'sliabilityfor
anyandalllosses,injuries,ordamagesconcerningtheproducts,includingclaimsbasedoncontract,
negligence,tort,strictliability,orotherwiseshallbethereturnofproductstoSiargo,andupon
verificationofSiargotoprovetobedefective,atitssoleoption,torefund,repairorreplacementof
theproducts.Regardlessofform,noactionmaybebroughtagainstSiargomorethan365daysafter
acauseofactionhasaccrued.TheproductsreturnedunderwarrantytoSiargoshallbeattheuseror
purchaser'sriskoflossandwillbereturned,ifatall,atSiargo'sriskofloss.Purchasersorusersare
deemedtohaveacceptedthislimitationofwarrantyandliability,whichcontainsthecompleteand
exclusivelimitedwarrantyofSiargo.Itshallnotbeamended,modified,oritstermswaivedexcept
bySiargo'ssoleaction.
Thismanual'sproductinformationisbelievedtobeaccurateandreliableatthetimeofreleaseor
madeavailabletotheusers.However,Siargoshallassumenoresponsibilityforanyinaccuracies
and/orerrorsandreservestherighttomakechangeswithoutfurthernoticefortherelevant
informationherein.
Thiswarrantyissubjecttothefollowingexclusions:
(1) Productsthathavebeenaltered,modified,orhavebeensubjecttounusualphysicalor
electricalcircumstancesindicatedbutnotlimitedtothosestatedinthisdocumentorany
otheractionswhichcannotbedeemedasproperuseoftheproducts;
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(2) Productsthathavebeensubjecttochemicalattacks,includingexposuretocorrosive
substancesorcontaminants.Inthecaseofbatteryusage,longtermdischargeorleakage
induceddamages;
(3) Productsthathavebeenopenedordismantledforwhateverreasons;
(4) Productsthathavebeensubjecttoworkingconditionsbeyondthetechnicalspecificationas
describedbythismanualorrelateddatasheetpublishedbythemanufacturer;
(5) Anydamagesincurredbytheincorrectusageoftheproducts;
(6) Siargodoesnotprovideanywarrantyonfinishedgoodsmanufacturedbyothers.Onlythe
originalmanufacturer'swarrantyapplies;
(7) Productsthatarere‐soldbyunauthorizeddealersoranythirdparties.
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10. Servicecontactandinformation
SiargoLtd.ismakingeveryefforttoensurethequalityoftheproducts.Incaseofquestionsandor
productsupports,pleasecontactcustomerserviceattheaddresslistedbelow.Wewillrespondto
yourrequestinatimelyfashionandworkwithyoutowardyourcompletesatisfaction.
Customerserviceandallordersshouldbeaddressedto
SiargoLtd.
3100DeLaCruzBoulevard,Suite210,
SantaClara,California95054,USA
Phone:+01(408)969‐0368
Email:[email protected]
Fororders,pleaseprovideanaccurateandfullpostaladdress.SiargowillnotshiptoP.O.Boxesor
viaathirdparty.
Pleasecontact[email protected]toobtainaReturnMaterialsAuthorization(RMA)beforeshipping
theproductbacktothefactoryforreturnsorfactoryservicessuchascalibration.Pleasespecifyas
clearanddetailedaspossibleinyouremailmessagetheproduct'sstatusthatyouintendtoshipback
tothefactory.BesuretowritetheRMAonthereturnedpackageorincludealetterwiththeRMA
information.
Forfurtherinformationandupdates,pleasevisitwww.Siargo.com.
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Appendix:Documenthistory
RevisionB.2(March2022)
o Corrections.
RevisionB.1(September2021)
o Thenewformat,additions.
RevisionA.13(October2020):
o RevisedISO45001.
RevisionA.12(December2017):
o AddmechanicaldimensionsfortheproductwithNPTadapters.
RevisionA.11(November2017):
o Updatewettedmaterialsinformation.
RevisionA.10(September2017):
o Addedmaximumoverflowandmaximumflowchange(AdditionalSpecifications).
o Addedtherevisionhistory(Appendix).
This manual suits for next models
1
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