Siargo FSP2000 Series User manual
FSP2000 User Manual
MEMSdualpressuresensors
©2021SiargoLtd.
VA.1
Sold in North America by:
Servoflo Corporation
75 Allen Street
Lexington, MA 02472
www.servoflo.com/info@servoflo.com
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www.Siargo.comFSP2000UserManual
MEMS Dual Pressure Sensors
withthermalandpiezosensingtechnology
FSP2000Series
User Manual
DocumentNo. 07‐2021‐FP2EN
Issuedate: 2021.07
Revision: VA.1
SiargoLtd.
3100DeLaCruzBoulevard,Suite210
SantaClara,California95054
USA
Tel:+1(408)969.0368
Email:[email protected]
©Copyright2021andLiabilityDisclaimer
SiargoLtd.anditssubsidiariesreservetherighttochangethespecificationsand/ordescriptions
withoutpriornotice.Siargoanditssubsidiariesshallnotassumeanyinaccuracyorerrorsinthis
manual.Forfurtherinformationandupdates,pleasevisitwww.Siargo.com.
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Attention!
Usewithcaution!
Pleasecarefullyreadthismanualpriortooperatingthisproduct.
Donotopenormodifyanyhardwarewhichmayleadtoirrecoverable
damage.
Donotusethisproductifyoususpectanymalfunctionsordefection.
Donotusethisproductforcorrosivemediaorinastrongvibration
environment.
Usethisproductaccordingtothespecifiedparameters.
Onlythetrainedorqualifiedpersonnelshallbeallowedtoperform
productservices.
Becautiousforelectricalsafety,andevenitoperatesatalowvoltage,
anyelectricalshockmightleadtosomeunexpecteddamages.
Thegastobemeasuredshouldbecleanandfreeofparticles,as
evenlightparticlesmaybeaccumulatedinsidethetinypressureport
thatmayresultininaccuracyinmetrology,clogging,orother
irrecoverabledamage.
Donotapplyforanyunknownornon‐specifiedgasesthatmay
damagetheproduct.
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TableofContents
1.Overview..................................................................................................5
2.Receipt/unpackoftheproducts................................................................6
3.Knowingtheproducts...............................................................................7
3.1Productdescription.................................................................................................7
3.2Poweranddatapinoutdescription...........................................................................7
3.3Mechanicaldimensions............................................................................................8
4.Installation...............................................................................................8
5.Basicoperation.........................................................................................9
5.1I2Cinterfaceconnectiondiagram..............................................................................9
5.2I2Cinterfaceread/writesequences............................................................................9
5.3I2Cinterfacecommanddescription.........................................................................10
5.4CRCchecksumcalculation......................................................................................10
6.Productselectionandorderinformation....................................................11
6.1Productselection..................................................................................................11
6.2Ordercontactandcustomersupport.......................................................................11
7.Technicalspecifications............................................................................12
8.Technicalnotesfortheproductperformance.............................................13
8.1Measurementprinciple..........................................................................................13
8.2Precautionsforthebestperformanceoftheproduct................................................13
8.2.1Particlecontamination...................................................................................................13
8.2.2Altitudechanges............................................................................................................13
8.2.3Excessivehumidityorcondensation................................................................................13
9.WarrantyandLiability..............................................................................14
10.Servicecontactandinformation...............................................................16
AppendixI:Sensorevaluationkit...................................................................17
AppendixII:Documenthistory......................................................................18
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1. Overview
Allcontactinformationcanbefoundattheendofthismanual.
ThismanualprovidesessentialinformationfortheFSP2000seriesofdualpressuresensorsfor
variousapplications.Theproductperformance,maintenance,andtroubleshooting,aswellasthe
informationforproductorder,technicalsupport,andrepair,arealsoincluded.
TheFSP2000dualpressuresensorsaremanufacturedwiththecompany’sproprietaryMEMS(micro‐
electro‐mechanicalsystems)sensingandpackagetechnologythatoffersauniquecombinationof
thedifferentialpressureandgaugepressurecapability.
Thedesignedcombinationofthedifferentialandgaugepressuresensingcapabilityinasmall
footprintisforthesensingandcontrolinaCPAP(continuouspositiveairwaypressure)equipment
thatistrendingfortheminiaturization,wherethedifferentialpressuresensingisusedfortheflow
measurementwhilethegaugepressureprovidesthenecessaryfeedbackforthesystem.This
packageallowstheCPAPmakertosavethespaceandcostfortherequiredsensingdata.
Whilethecurrentpackagesarebestformedicalandconsumerapplications,themanufactureralso
offersalternativecustomizedpackages.Pleasecontactthemanufacturerforadditionalinformation.
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2. Receipt/unpackoftheproducts
Uponreceiptoftheproducts,pleasecheckthepackingboxbeforethedismantlementofthepacking
materials.Ensurenodamagesduringshipping.Ifanyabnormalityisobserved,pleasecontactand
notifythecarrierwhoshippedtheproductandinformthedistributorsorsalesrepresentativesifthe
orderisnotplaceddirectlywiththemanufacturer;otherwise,themanufacturershouldbeinformed.
Foranyfurtheractions,pleaserefertothereturnandrepairsectioninthismanual.
Ifthepackingboxisintact,proceedtoopenthepackingbox,andyoushallfindtheproduct(either
thesensorformalitypertheactualorder),togetherwiththepoweranddatacableiftheorderis
includedasshownbelow.
Pleasecheckimmediatelyfortheintegrityoftheproductandthepoweranddatacable;ifany
abnormalityisidentified,pleasenotifythedistributor/salesrepresentativeormanufacturerassoon
asyoucan.Ifanydefectsareconfirmed,anexchangeshallbearrangedimmediatelyviatheoriginal
saleschannel.Thisusermanualshallalsobeincludedinthepackingboxorviaanonlinelinkforan
electronicversionwhichshouldbesentbyyoursalesagent.Inmostcases,thismanualshallbemade
availabletothecustomerbeforetheactualorder.
Pleasenotethatthesensorhasapinoutthatisdesignedtobedirectlyplacedontoaprintedcircuitry
board.Therefore,thepoweranddatacableisanoptionthatwillnotcomewiththeorder
automatically.
FSP2000Poweranddatacable
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3. Knowingtheproducts
3.1 Productdescription
3.2 Poweranddatapinoutdescription
Table3.2:FSP6000pinassignment.
FSP2000electricalinterfacehas4pinsprovidingI2Cdigitaldatawitha3.0~5.5Vdcpowersupply.
Thepinscanbedirectlysolderedontoacontrolprintedcircuitryboard(PCB)orviaadatacable,
whichcanbeorderedfromthemanufacturerormadebytheuser.
Thesensorrunswithaminimalcurrentsourceof10mA.Aslightlyhighercurrentwillensurethe
properoperation.
PIN DEFINITION
1SDA,I2Cdata
2GND,ground
3VCC,powersupply(3.0~5.5Vdc)
4
SCL,
I2Cclock
Directionfor
differentialpressure
(flow)measurement.
Installation
fixture
Installation
fixture
Powerand
datapins
Pressure
portP2
Pressure
portP1
Note:fordifferentiapressure(flow)
measurement,PortP1shouldbeplaced
upstream,unlessabi‐directionalmodel
isordered.
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3.3 Mechanicaldimensions
Figure3.3.1.FSP2000mechanicaldimensions.
4. Installation
Donotopenoralteranypartoftheproduct,whichwouldleadtomalfunctionandirrecoverable
damage.
Therearenootherspecialrequirementsfortheinstallation.Butitisrecommendedthattheuser
shouldmakesurenoleakageoftheconnectionsandallelectricalpinsareproperlyengaged.
Note:fordifferentiapressure(flow)
measurement,PortP1shouldbeplaced
upstream,unlessabi‐directionalmodel
isordered.
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5. Basicoperation
5.1 I2Cinterfaceconnectiondiagram
5.2 I2Cinterfaceread/writesequences
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5.3 I2Cinterfacecommanddescription
CommandByte
Length
(int16)
CommandNameRead/Write
Notes
0x00A41I2CaddressRead/Write
Int16.
bit15~bit8=0;
bit7~bit1areavailable;
bit0isR/Wflagbit.
0x00306Sensorserialnumber
ReadASCII
0x00432DifferentialpressureReadInt32/1000Pa
0x00452GaugepressureReadInt32/1000cmH2O
0x00F01Resettheoffsetof
differentialpressureWriteFixedvalue,0xAA55
0x00F11Resettheoffsetof
gaugepressureWriteFixedvalue,oxAA55
Note:TheI2Caddressissettobit7~bit1.E.g.iftheI2Caddressis1(0000001x),thewriteaddresswillbe
0x02(00000010)andthereadaddresswillbe0x03(00000011).
5.4 CRCchecksumcalculation
The8‐bitCRCchecksumtransmittedaftereachtwodatabytes(int16)isgeneratedbyaCRC
algorithm.Itspropertiesarelistedinthetablebelow.Tocalculatethechecksum,onlythesetwo
previouslytransmitteddatabytesareused.
PropertyValue
NameCRC‐8
ProtecteddataI2Creadandwrite
Width8bits
Polynomial0x07(x8+x2+x+1)
Initialization0x00
ReflectinputFalse
ReflectoutputFalse
FinalXOR0x00
ExampleCRC(0x4E20)=0x6D
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6. Productselectionandorderinformation
6.1 Productselection
Theproductpartnumberiscomposedoftheproductmodelnumberandsuffixes,indicatingeach
oftheselectableparameters.Refertothefollowingfordetails.
Note:
1. Example:FSP2000‐500D‐500‐5G100‐E:thedifferentialpressurerangewillbe±500Pa,andgauge
pressurerange‐5to100cmH2O.
2. Gaugepressurefullscaleatthecurrentofferis100cmH2O,reservedforfutureupgrade.
6.2 Ordercontactandcustomersupport
Thesalesofficesandthesalesdistributors/representativesarelistedattheendofthisdocument.For
smallquantities,theordercanbeplacedeitherthroughtheSiargowebsite:www.siargo.comorthe
salesoffice.Forlargequantities,pleasecontactthesalesoffice,distributors,orsalesrepresentatives.
Siargoismakingeveryefforttoensurethequalityoftheproducts.Incaseofquestionsand/or
productsupports,pleasecontactthecustomerservicelistedattheendofthedocument.
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7. Technicalspecifications
Allspecificationslistedinthefollowingtable,unlessotherwisenoted,applyforcalibrationconditions
at20°Cand101.325kPaabsolutepressurewithair.
ValueUnit
Differentialpressure250/500/±250/±500Pa
Gaugepressure ‐5‐100/±100cmH2O
Accuracy,differentialpressure*±(2.0+0.5FS)%
Accuracy,gaugepressure±1.0FS%
Responsetime1.8msec
Repeatability±0.5%
Spantemperaturecoefficient<±0.12%/°C
Compensatedtemperaterange ‐5~+65°C
Pressurerating 50kPa
AltitudecorrectionFullycompensated
Warm‐uptime(max)10sec
Humidity0~100(nocondensation)%RH
Powersupply,voltage3.0~5.5Vdc
Powersupply,minimalcurrent10 mA
Pneumaticflowresistance<95sccm@500Pa
OutputLinear,I2C
Storagetemperature‐20~70°C
Vibration20g;MIL‐STD‐883E,Method2002.4.
ComplianceRoHS;REACH
Note:*FS=fullscaleatonedirection.Customizeddifferentialpressurerangeisavailableuponrequest.
1cmH2O(4°C)=98.06Pa=0.014PSI
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8. Technicalnotesfortheproductperformance
8.1 Measurementprinciple
TheproductsutilizetheCompany’sproprietarymicro‐machined(MEMS)sensingtechnology.The
gaugepressureisrealizedviathepiezoresistivesensing,whilethedifferentialpressureisviaapass‐
throughflowsensingattwoportswheretheflowchanneldefinesthedifferentialpressurefromthe
channeldesign.
8.2 Precautionsforthebestperformanceoftheproduct
8.2.1 Particlecontamination
Itiscriticaltohavethemeasuredgasfreeofparticlecontamination.Sincethedataportsforboth
thegaugepressureanddifferentialpressureissmall,anyparticle'spresencemaycreateadeformed
channelleadingtolargemeasurementerrors.Theparticledepositionmayalsoclogthechannel,
creatingunstabledataoutputandotherinstability,resultinginunpredictablemeasurement
circumstances.
8.2.2 Altitudechanges
Unlikesomeotherproductsonmarket,thedesignofthesensorhasabuilt‐inpressurebalancerthat
preventingmembranedeformationduetoaltitudechanges.Therefore,thesensorisintrinsically
insensitivetothealtitudechange‐inducederrors.
8.2.3 Excessivehumidityorcondensation
Thehumiditychangewillnotaltertheperformanceofthesensor.However,ifexcessivehumidityis
presentresultingincondensation,themeasurementportorchannelcouldbeblockedoraltered.
Thiswouldresultinaveryunreliabledataoutput.Pleasefilterorothertoolstopreventthissituation
tooccurwhenusingthisproduct.
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9. WarrantyandLiability
(EffectiveJanuary2018)
Siargowarrantstheproductssoldhereunder,properlyused,andproperlyinstalledundernormal
circumstancesandservice.Asdescribedinthisusermanual,itshallbefreefromfaultymaterialsor
workmanshipfor180daysforOEMproductsand365daysfornon‐OEMproductsfromthedateof
shipment.Thiswarrantyperiodisinclusiveofanystatutorywarranty.Anyrepairorreplacement
servicedproductshallbearthesametermsinthiswarranty.
Siargomakesnowarranty,representation,orguaranteeandshallnotassumeanyliabilityregarding
thesuitabilityoftheproductsdescribedinthismanualforanypurposesthatarenotspecifiedinthis
manual.Theusersshallbeheldforfullresponsibilityforvalidatingtheperformanceandsuitability
oftheproductsfortheirparticulardesignandapplications.Foranyofthemisusageoftheproducts
outofthescopedescribedherein,theusershallindemnifyandholdSiargoanditsofficers,
employees,subsidiaries,affiliates,andsaleschannelsharmlessagainstallclaims,costs,damages,
andexpenseorreasonableattorneyfeefromdirectorindirectsources.
Siargomakesnootherwarranty,expressorimplied,andassumesnoliabilityforanyspecialor
incidentaldamageorcharges,includingbutnotlimitedtoanydamagesorchargesduetoinstallation,
dismantling,reinstallation,etc.otherconsequentialorindirectdamagesofanykind.Totheextent
permittedbylaw,theexclusiveremedyoftheuserorpurchaser,andthelimitofSiargo'sliabilityfor
anyandalllosses,injuries,ordamagesconcerningtheproducts,includingclaimsbasedoncontract,
negligence,tort,strictliability,orotherwiseshallbethereturnofproductstoSiargo,andupon
verificationofSiargotoprovetobedefective,atitssoleoption,torefund,repairorreplacementof
theproducts.Regardlessofform,noactionmaybebroughtagainstSiargomorethan365daysafter
acauseofactionhasaccrued.TheproductsreturnedunderwarrantytoSiargoshallbeattheuseror
purchaser'sriskoflossandwillbereturned,ifatall,atSiargo'sriskofloss.Purchasersorusersare
deemedtohaveacceptedthislimitationofwarrantyandliability,whichcontainsthecompleteand
exclusivelimitedwarrantyofSiargo.Itshallnotbeamended,modified,oritstermswaivedexcept
bySiargo'ssoleaction.
Thismanual'sproductinformationisbelievedtobeaccurateandreliableatthetimeofreleasetoor
madeavailabletotheusers.However,Siargoshallassumenoresponsibilityforanyinaccuracies
and/orerrorsandreservestherighttomakechangeswithoutfurthernoticefortherelevant
informationherein.
Thiswarrantyissubjecttothefollowingexclusions:
(1) Productsthathavebeenaltered,modified,orhavebeensubjecttounusualphysicalor
electricalcircumstancesindicatedbutnotlimitedtothosestatedinthisdocumentorany
otheractionswhichcannotbedeemedasproperuseoftheproducts;
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(2) Productsthathavebeensubjecttochemicalattacks,includingexposuretocorrosive
substancesorcontaminants.Inthecaseofbatteryusage,longtermdischargeorleakage
induceddamages;
(3) Productsthathavebeenopenedordismantledforwhateverreasons;
(4) Productsthathavebeensubjecttoworkingconditionsbeyondthetechnicalspecificationas
describedbythismanualorrelateddatasheetpublishedbythemanufacturer;
(5) Anydamagesincurredbytheincorrectusageoftheproducts;
(6) Siargodoesnotprovideanywarrantyonfinishedgoodsmanufacturedbyothers.Onlythe
originalmanufacturer'swarrantyapplies;
(7) Productsthatarere‐soldbyunauthorizeddealersoranythirdparties.
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10. Servicecontactandinformation
SiargoLtd.ismakingeveryefforttoensurethequalityoftheproducts.Incaseofquestionsandor
productsupports,pleasecontactcustomerserviceattheaddresslistedbelow.Wewillrespondto
yourrequestinatimelyfashionandworkwithyoutowardyourcompletesatisfaction.
Customerserviceandallordersshouldbeaddressedto
SiargoLtd.
3100DeLaCruzBoulevard,Suite210,
SantaClara,California95054,USA
Phone:+01(408)969‐0368
Email:[email protected]
Fororders,pleaseprovideanaccurateandfullpostaladdress.SiargowillnotshiptoP.O.Boxesor
viaathirdparty.
Pleasecontact[email protected]toobtainaReturnMaterialsAuthorization(RMA)beforeshipping
theproductbacktothefactoryforreturnsorfactoryservicessuchascalibration.Pleasespecifyas
clearanddetailedaspossibleinyouremailmessagetheproduct'sstatusthatyouintendtoshipback
tothefactory.BesuretowritetheRMAonthereturnedpackageorincludealetterwiththeRMA
information.
Forfurtherinformationandupdates,pleasevisitwww.Siargo.com.
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AppendixI:Sensorevaluationkit
Siargooffersasensorevaluationkit,includingadigitaldataconverter,USBdatacable,andaUser
Applicationsoftware,thatallowstheusertoevaluatetheproductperformanceonaMicrosoft
Windows‐basedcomputer.Theusercanreadandvisualizetheflowrateoftheproduct,obtainthe
totalizedvalues,andsavethedataforfurtheranalysis.Itcanreadfromupto128sensorswiththe
I
2
Cinterfaceinserial.
Forfurtherinformationandpurchaseoftheevaluationkit,pleasecontactthemanufacturerorthe
salesrepresentative.
Eachconverterhasafixedcablethatcanbe
directlyconnectedtotheproduct.TheUSB
cableconnectedtothePCisalsoincluded.
Formostoftheproduct,thepowerfromthePC
viatheUSBcablewillbesufficienttopowerthe
sensorproduct,noexternalpowerwillbe
required.However,formultiplesensorsinserial,
thepowerviatheUSBcablemaynotbeenough,
anexternalpoweradapterwith8~24Vdcwillbe
required.
Cabletoconnect
totheproduct
USBcableto
connecttoPC
Externalpower
adapter(optional)
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AppendixII:Documenthistory
07.2021 VA.1–ReformatedandI2Ccommunicationupdate.
02.2021 VA.0‐Firstrelease
Table of contents
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