
HRX-OM-X037
Contents
HRL Series
Chapter 8 Control, Inspection and Cleaning................................... 8-1
8.1 Quality Control of Circulating Fluid and Facility Water.........................................8-1
8.2 Inspection and Cleaning..........................................................................................8-2
8.2.1 Daily check ..........................................................................................................................8-2
8.2.2 Monthly check......................................................................................................................8-3
8.2.3 Inspection every 3 months...................................................................................................8-4
8.2.4 Inspection every 6 months...................................................................................................8-5
8.3 Operation Stop for an Extended Period of Time....................................................8-6
8.3.1 Discharge of the circulating fluid .........................................................................................8-6
8.3.2 Discharge of the facility water (Water-cooled type).............................................................8-9
8.4 Replacement of consumables...............................................................................8-10
8.4.1 Replacing Particle Filters...................................................................................................8-10
8.4.2 Replacing the DI filter ........................................................................................................8-10
8.4.3 Consumables.....................................................................................................................8-13
Chapter 9 Documents ....................................................................... 9-1
9.1 Specifications ..........................................................................................................9-1
9.1.1 HRL100/200/300-A-40.......................................................................................................9-1
9.1.2 HRL100/200-W-40.............................................................................................................9-3
9.1.3 Refrigerant with GWP reference..........................................................................................9-5
9.1.4 Communication specifications.............................................................................................9-5
9.2 Dimensions ..............................................................................................................9-6
9.2.1 HRL100-A-40.....................................................................................................................9-6
9.2.2 HRL200-A-40.....................................................................................................................9-7
9.2.3 HRL300-A-40.....................................................................................................................9-8
9.2.4 HRL100/200-W-40.............................................................................................................9-9
9.3 Flow Diagram .........................................................................................................9-10
9.3.1 HRL-A-40-................................................................................................................9-10
9.3.1 HRL-W-40-............................................................................................................... 9-11
9.4 Cooling Capacity....................................................................................................9-12
9.4.1 HRL100‐A‐40 CH1........................................................................................................9-12
9.4.2 HRL200‐A‐40 CH1........................................................................................................9-12
9.4.3 HRL300-A-40 CH1........................................................................................................9-13
9.4.4 HRL100/200/300-A-40 CH2...........................................................................................9-13
9.4.5 HRL100-A-40-T2 CH1...................................................................................................9-14
9.4.6 HRL200-A-40-T2 CH2....................................................................................................9-14
9.4.7 HRL300-A-40-T2 CH1...................................................................................................9-15
9.4.8 HRL100/200/300-A-40-T2 CH2......................................................................................9-15
9.4.9 HRL300-A-40-T3 CH1...................................................................................................9-16
9.4.10 HRL300-A-40-T3 CH2....................................................................................................9-16
9.4.11 HRL100-W-40 CH1.......................................................................................................9-17
9.4.12 HRL200-W-40 CH1........................................................................................................9-17
9.4.13 HRL100/200-W-40 CH2.................................................................................................9-18
9.4.14 HRL100-W-40-T2 CH1..................................................................................................9-18