
HRX-OM-X084
Contents
HRR Series
6.2 Option M【DI water (Pure water) piping】............................................................. 6-2
6.2.1 Option M【DI water (Pure water) piping】..............................................................................6-2
6.3 Option T1【Inverter pump】................................................................................... 6-2
6.3.1 Option T1【Inverter pump】....................................................................................................6-2
6.4 Option Y【With feet and no Rack Mounting bracket】......................................... 6-3
6.4.1 Option Y【With feet and no Rack Mounting bracket】...........................................................6-3
6.4.2 Anti-quake bracket (Optional Accessories)..........................................................................6-4
6.5 Option Z ................................................................................................................... 6-5
6.5.1 Option Z................................................................................................................................6-5
6.5.2 Option Z1..............................................................................................................................6-5
Chapter 7 Alarm Notification and Troubleshooting ........................7-1
7.1 Alarm Notification ................................................................................................... 7-1
7.2 Alarm Buzzer Stop .................................................................................................. 7-3
7.3 Trouble shooting..................................................................................................... 7-4
7.3.1 Alarm contents, causes, and troubleshooting......................................................................7-4
7.4 Other Errors............................................................................................................. 7-6
Chapter 8 Control, Inspection, Exchange and Cleaning.................8-1
8.1 Quality Control of Circulating Fluid and Facility Water ........................................ 8-1
8.2 Inspection, exchange, cleaning.............................................................................. 8-2
8.2.1 Daily check...........................................................................................................................8-2
8.2.2 Monthly check ......................................................................................................................8-4
8.2.3 Inspection every 3 months...................................................................................................8-5
8.3 Stop for a Long Time............................................................................................... 8-8
8.3.1 Discharge of the circulating fluid..........................................................................................8-8
8.3.2 Discharge of the facility water (Water-cooled type) ...........................................................8-11
8.4 Replacement of consumables.............................................................................. 8-13
8.4.1Replacing Particle Filters ...................................................................................................8-13
8.4.2 Replacing the DI filter (Option DM)....................................................................................8-13
8.5 Electrical schematic diagram............................................................................... 8-16
8.5.1 HRR010-A/W-10-.............................................................................................................8-16
8.5.2 HRR010-A/W-20-.............................................................................................................8-18
Chapter 9 Documents........................................................................9-1
9.1 Specifications.......................................................................................................... 9-1
9.1.1 HRR010-A-10/20-...............................................................................................................9-1
9.1.2 HRR010-W-10/20-..............................................................................................................9-3
9.1.3 Refrigerant with GWP reference..........................................................................................9-5
9.1.4 Communication specification ...............................................................................................9-5
9.2 Outline dimensions................................................................................................. 9-6
9.2.1 HRR010-A-10/20-...............................................................................................................9-6
9.2.2 HRR010-W-10/20-..............................................................................................................9-7
9.3 Flow Chart................................................................................................................ 9-8
9.3.1 HRR010-A-10/20-...............................................................................................................9-8
9.3.2 HRR010-W-10/20-..............................................................................................................9-8