SMC Networks MXQ6 Series User manual

Doc. no.MX*-OMP0038-Ｄ
PRODUCT NAME
AIR SLIDE TABLE
MODEL / Series / Product Number
ＭＸＱ６（Ａ，Ｂ）－＊＊Ｚ＊
ＭＸＱ８（Ａ，Ｂ，Ｃ）－＊＊Ｚ＊
ＭＸＱ１２（Ａ，Ｂ，Ｃ）－＊＊Ｚ＊
ＭＸＱ１６（Ａ，Ｂ）－＊＊Ｚ＊
ＭＸＱ２０（Ａ，Ｂ）－＊＊Ｚ＊
ＭＸＱ２５（Ａ）－＊＊Ｚ＊

2
Contents
1. Product Specifications
1-1 Specifications
2. How to use
2-1 Mounting
2-2 Air supply
2-3 Piping
2-4 Operating environment
2-5 Lubricating
2-6 Speed adjustment
2-7 Handling of optional adjuster
2-8 Handling of optional function
2-9 Handling of symmetrical type
2-10 Mounting of auto switch
3. Maintenance
3-1 Precautions for maintenance
3-2 Replenishment of grease
3-3 Construction/Parts list

3
Safety Instructions
These safety instructions are intended to prevent hazardous situations and/or equipment damage.
These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.”
They are all important notes for safety and must be followed in addition to International Standards
(ISO/IEC)*1) , and other safety regulations.
*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems.
ISO 4413: Hydraulic fluid power -- General rules relating to systems.
IEC 60204-1: Safety of machinery -- Electrical equipment of machines .(Part 1: General requirements)
ISO 10218-1992: Manipulating industrial robots -Safety.
etc.
Caution
Caution indicates a hazard with a low level of risk which, if not avoided, could result
in minor or moderate injury.
Warning
Warning indicates a hazard with a medium level of risk which, if not avoided, could
result in death or serious injury.
Danger
Danger indicates a hazard with a high level of risk which, if not avoided, will result
in death or serious injury.
Warning
1. The compatibility of the product is the responsibility of the person who designs the
equipment or decides its specifications.
Since the product specified here is used under various operating conditions, its compatibility with specific
equipment must be decided by the person who designs the equipment or decides its specifications based on
necessary analysis and test results.
The expected performance and safety assurance of the equipment will be the responsibility of the person who
has determined its compatibility with the product.
This person should also continuously review all specifications of the product referring to its latest catalog
information, with a view to giving due consideration to any possibility of equipment failure when configuring the
equipment.
2. Only personnel with appropriate training should operate machinery and equipment.
The product specified here may become unsafe if handled incorrectly.
The assembly, operation and maintenance of machines or equipment including our products must be
performed by an operator who is appropriately trained and experienced.
3. Do not service or attempt to remove product and machinery/equipment until safety is
confirmed.
1.The inspection and maintenance of machinery/equipment should only be performed after measures to
prevent falling or runaway of the driven objects have been confirmed.
2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented
and the power from any appropriate source is cut, and read and understand the specific product precautions
of all relevant products carefully.
3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.
4. Contact SMC beforehand and take special consideration of safety measures if the product is
to be used in any of the following conditions.
1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to
direct sunlight.
2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,
vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and
beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or
other applications unsuitable for the standard specifications described in the product catalog.
3. An application which could have negative effects on people, property, or animals requiring special safety
analysis.
4.Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a
mechanical protective function, and periodical checks to confirm proper operation.

4
Safety Instructions
Caution
1.The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange specifications
or a contract if necessary.
If anything is unclear, contact your nearest sales branch.
Limited warranty and Disclaimer/Compliance Requirements
The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance
Requirements”.
Read and accept them before using the product.
Limited warranty and Disclaimer
1.The warranty period of the product is 1 year in service or 1.5 years after the product
isdelivered.2)
Also, the product may have specified durability, running distance or replacement parts. Please
consult your nearest sales branch.
2. For any failure or damage reported within the warranty period which is clearly our responsibility,
a replacement product or necessary parts will be provided.
This limited warranty applies only to our product independently, and not to any other damage
incurred due to the failure of the product.
3. Prior to using SMC products, please read and understand the warranty terms and disclaimers
noted in the specified catalog for the particular products.
2) Vacuum pads are excluded from this 1 year warranty.
A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
Also, even within the warranty period, the wear of a product due to the use of the vacuum
pad or failure due to the deterioration of rubber material are not covered by the limited
warranty.
Compliance Requirements
1. The use of SMC products with production equipment for the manufacture of weapons of mass
destruction(WMD) or any other weapon is strictly prohibited.
2. The exports of SMC products or technology from one country to another are govemed by the
relevant security laws and regulation of the countries involved in the transaction. Prior to the
shipment of a SMC product to another country, assure that all local rules goveming that export
are known and followed.
The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange specifications
or a contract if necessary.
契約などを行ってください｡
The product is provided for use in manufacturing industries.
The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange specifications
or a contract if necessary.
契約などを行ってください｡

5
1. Product Specifications
1-1 Specifications
Model
MXQ6
MXQ8
MXQ12
MXQ16
MXQ20
MXQ25
Bore size (mm)
Φ6
Φ8
Φ12
Φ16
Φ20
Φ25
Port size
M5×0.8
Ｒｃ１／８
Fluid
Air
Action
Double acting
Operating pressure
0.15 to 0.7MPa Note 1) Note 2)
0.35 to 0.7MPa (with Endlock)
Proof pressure
1. 05 MPa
Ambient and fluid temperature
-10 to 60oC(No freezing)
Operating speed range
50 to 500mm/s Note 3)
50 to 300mm/s (Metal stopper with damper) Note 4)
Cushion
Without stroke
adjuster
Rubber bumper at both ends
With stroke
adjuster
Metal stopper with bumper / Rubber stopper
/ Shock absorber
Lubrication
Lubrication not required.
Auto switch
Solid state auto switch (2-wire and 3-wire)
2-color display solid state auto switch (2-wire and 3-wire)
Stroke length tolerance
+2
0
ｍｍ
Note1) Please refer to the table for the Lowest Operating Pressure for a metal stopper with bumper
If the operating pressure is lower than this, repeatability becomes worse.
Lowest Operating Pressure for metal stopper with damper:
The lowest required pressure to fully compress the protruding portion of the damper and have
metal to metal contact.
Note2) Operating pressure for the cylinder with shock absorber which I.D. is φ20 is 0.15 to 0.6MPa.
Note3) Maximum operating speed range of MXQ25(A)-150,MXQ6B-50 and 75, MXQ8B-75 and 100,
MXQ16B-100 and 150, MXQ20B-125,150 without stroke adjuster is 300mm/s.
Note4) Specification speed range of MXQ**B metal stopper with bumper is 50 to 200mm/s.
Table 1
Lowest Operating pressure for a metal stopper with bumper (MPa)
Model
Minimum
operating
pressure
Model
Minimum
operating
pressure
MXQ8(A,C)
0.3
MXQ8B
0.3
MXQ12(A,C)
0.3
MXQ12B
0.3
MXQ16(A)
0.2
MXQ16B
0.2
MXQ20(A)
0.2
MXQ20B
0.2
MXQ25(A)
0.2

6
2. How to use
2-1 Mounting
(1) Mounting of body
Three types of installation are available according to the machine or work piece.
１．Side mounting （Body tapped）
！Caution
Types other than MXQ20(A) and MXQ25(A) have through tapped hole
Use the bolt shorter than max. screw depth (L2) by 0.5mm or more.
Longer bolts can hit the moving part, which causes operation failure.
Model
Bolt
Maximum
tightening
torque
Thread depth:
L1(mm)
Max. thread depth:
L2(mm)
MXQ6
M4×0.7
2.1
5
8
MXQ8
M4×0.7
2.1
8
11
MXQ12
M5×0.8
4.4
11
15
MXQ16
M6×1
7.4
14
19
MXQ20
M6×1
7.4
9
MXQ25
M8×1.25
18
12
MXQ6A
M4×0.7
2.1
8
11
MXQ8A
M4×0.7
2.1
8
11
MXQ12A
M5×0.8
4.4
8
12
MXQ16A
M6×1
7.4
12
17
MXQ20A
M6×1
7.4
9
MXQ25A
M8×1.25
18
12
MXQ6B
M4×0.7
2.1
5
8
MXQ8B
M5×0.8
4.4
4
9
MXQ12B
M6×1
7.4
7
12
MXQ16B
M6×1
7.4
10
15
MXQ20B
M8×1.25
18
14
20
MXQ8C
M4×0.7
2.1
6
9
MXQ12C
M5×0.8
4.4
8
12

7
２．Side mounting (Body through hole)
Model
Bolt
Maximum
tightening
torque
Thread depth:
L1(mm)
MXQ6
M3×0.5
1.1
5.3
MXQ8
M3×0.5
1.1
8.3
MXQ12
M4×0.7
2.7
11.5
MXQ16
M5×0.8
5.4
14.4
MXQ20
M5×0.8
5.4
19.3
MXQ25
M6×1
9.2
23.5
MXQ6A
M3×0.5
1.1
8.3
MXQ8A
M3×0.5
1.1
8.3
MXQ12A
M4×0.7
2.7
8.5
MXQ16A
M5×0.8
5.4
12.4
MXQ20A
M5×0.8
5.4
16.3
MXQ25A
M6×1
9.2
20.5
MXQ6B
M3×0.5
1.1
5.3
MXQ8B
M4×0.7
2.7
4.5
MXQ12B
M5×0.8
5.4
7.4
MXQ16B
M5×0.8
5.4
10.3
MXQ20B
M6×1
9.2
14.5
MXQ8C
M3×0.5
1.1
6.3
MXQ12C
M4×0.7
2.7
8.5

8
(2) How to mount the workpiece
1. Front mounting
2. Top mounting
！Caution
Use bolt which is shorter than max. thread depth (Max.) by 0.5mm so that the holding bolt for the
workpiece does not hit the guide block. Longer bolts can hit the guide block, which causes operation
failure.
Model
Bolt
Maximum
tightening
torque
Max. thread depth: L
(mm)
MXQ6(A)
-
M3×0.5
0.9
5
MXQ8(A,C)
MXQ6B
M3×0.5
0.9
5
MXQ12(A,C)
MXQ8B
M3×0.5
0.9
5
MXQ16(A)
MXQ12B
M4×0.7
2.1
6
MXQ20(A)
MXQ16B
M5×0.8
4.4
7
MXQ25(A)
MXQ20B
M6×1
7.4
9
Model
Bolt
Maximum
tightening
torque
(N・m)
Thread depth(mm)
Max
Min
MXQ6(A)
-
M3×0.5
1.1
4.1
2.1
MXQ8(A,C)
MXQ6B
M3×0.5
1.1
4.1
2.1
MXQ12(A,C)
MXQ8B
M4×0.7
2.7
5.7
2.7
MXQ16(A)
MXQ12B
M5×0.8
5.4
7.3
3.3
MXQ20(A)
MXQ16B
M5×0.8
5.4
7.3
3.3
MXQ25(A)
MXQ20B
M6×1
9.2
9
4

9
(3) Precautions for mounting
！Caution
①Do not dent and scratch the mounting surface of the body, table and end plate.
Damage can cause reduction in flatness, play at the guide and increase in sliding resistance.
②Do not dent or scratch the rolling surface of the table.
Play or increased sliding resistance can result.
③When attaching the work piece, do not apply strong impact or
large moment.
If an external force more than the allowable moment is applied,
it may cause play at the guide part and an increase in
sliding resistance.
④Keep the flatness of the mounting surface 0.02mm or less.
Insufficient flatness of a work piece or base mounted on the product, the base and other parts can
cause play at the guide unit and an increase in the sliding resistance.
⑤When connecting a load with an external support or guide mechanism, be sure to select a suitable
connection method and perform careful alignment.
⑥Do not touch the product while in operation.
An operator’s finger may get caught between the optional adjuster and product.
Install a cover as a safety measure if an operator can get close to the slide table during operation.
⑦Keep away objects which are affected by magnets.
A magnet is built in the body or, in case of a type with auto switch,
on the side of the guide block. Keep away magnetic discs,
cards or tapes. Data may be erased.
⑧When mounting the air slide table, tighten it with the screws of
appropriate length at the appropriate torque less than
maximum tightening torque.
Tightening to a torque greater than the specified
range may cause malfunction, and insufficient tightening may cause displacement or dropping.
2-2 Air supply
！Warning
①Use clean air.
Do not use compressed air which contains chemicals, synthetic oils containing organic solvents,
salts or corrosive gases, etc., as this can cause damage or malfunction.
！Caution
①Install an air filter.
Install an air filter close to the upstream side of the valve. Choose the filter of 5μm of filtration.
②Install an aftercooler, air dryer or water droplet separator.
Do not use compressed air containing a lot of condensate, which can cause the operating failure
of the product and other pneumatic equipment. Install an aftercooler, air dryer or water droplet
separator.
③Use the product within the specified fluid and ambient temperature range.
When operating at temperatures below 5oC, water in the circuit may freeze and cause breakage of
seals or malfunction. Corrective measures should be taken to prevent freezing.
For compressed air quality, refer to SMC catalog "Compressed Air Purification System".

10
2-3 Piping
！Caution
①Before piping
Before piping, perform air blow (flushing) or cleaning to remove any cutting chips, cutting oil, dust,
etc. from the piping.
②Sealant tape
When installing piping or a fitting into a port,
prevent cutting chips and sealant material from
getting inside the piping.
When a pipe tape is used, leave 1.5 to 2 thread
ridges exposed at the end of the pipe.
2-4. Operating Environment
！Warning
①Do not use in environments where there is a danger of corrosion.
Refer to the construction drawings regarding cylinder materials.
②Install a cover over the rod if it is used in an area that is dusty, or in an environment in which water
or oil splashes on the cylinder.
③When using auto switches, do not operate in an environment with strong magnetic fields.
As this can cause the switch to malfunction.
！Caution
①Do not use in an environment where the product is directly exposed to liquid, such as cutting oils.
If cutting oil, coolant or oil mist splashes the product, play, increased sliding resistance and air
leakage can result.
②Do not use the product in an environment directly exposed to foreign matter such as dust, cutting
chips and spatter.
This can result in play, increased operating resistance, air leakage, etc.
If the product is used in such an environment, contact SMC.
③Shade the sunlight if the product is applied with direct sunshine.
④Shield the product from radiated heat generated by nearby heat sources.
When there is a heat source surrounding the product, the radiated heat from the heat source may
exceed the operating temperature range. Protect it with a cover, etc.
⑤Do not operate in a location subject to vibration or impact.
Contact SMC when using in this kind of location, as damage and operation failure to the fitting can
result.
⑥Do not use the product in applications where excessive external force or impact force is applied to
it.
Malfunction or the damage of the table can result.
Although the table has adequate strength, if it is damaged, protect your hands with gloves.
Hurts can result.
2-5 Lubricating
！Caution
Lubrication of non-lubricating cylinder
The product has been lubricated for life at manufacturer, and does not require lubrication in
service.
If a lubricant is used in the system, use turbine oil Class 1 (with no additive) ISO VG302. Stopping
lubrication later may lead to malfunction because the new lubricant will displace the original lubricant.
Therefore, lubrication must be continued once it has been started.
Wrap this
way.
Leave 2 thread
Sealant tape

11
2-6 Speed adjustment
！Caution
Piston speed should be controlled gradually from low speed to the specified speed with a speed
controller.
2-7 Handling of optional adjuster
！Caution
①When replacing the bolt, do not replace it with a bolt other than the designated adjust bolt. Impact
force may cause play, damage, etc.
②When mounting the stroke adjuster at extended end, please refer the table below for the
tightening torque of the stroke adjuster mounting bolt. Insufficient tightening may reduce the
positioning accuracy.
③Tighten the lock nut according to the tightening torque shown in the table on the right. Insufficient
tightening may reduce the positioning accuracy.
The shock absorber uses different torques, which are shown on the next page.
④Be careful not to hit the table with the wrench when adjusting the stroke adjuster.
This may cause play.
Model
Thread size
Tightening torqueN･m
MXQ6(A)
-
M3×6
1.1
MXQ8(A,C)
MXQ6B
M3×6
1.1
MXQ12(A,C)
MXQ8B
M4×8
2.7
MXQ16(A)
MXQ12B
M5×10
5.4
MXQ20(A)
MXQ16B
M6×12
9.2
MXQ25(A)
MXQ20B
M8×16
22
Model
Thread size
Tightening torque N･m
MXQ6(A)
-
M6×0.75
5
MXQ8(A,C)
MXQ6B
M6×0.75
5
MXQ12(A,C)
MXQ8B
M8×1
12.5
MXQ16(A)
MXQ12B
M10×1
25
MXQ20(A)
MXQ16B
M12×1
43
MXQ25(A)
MXQ20B
M14×1.5
69
Lock nut
With stroke adjuster
mounting bolt.

12
●Metal stopper with bumper
①Please refer to the table for the Lowest Operating Pressure for a metal stopper with damper.
If the operating pressure is lower than this, repeatability becomes worse.
Lowest Operating Pressure for metal stopper with damper:
The lowest required pressure to fully compress the protruding portion of the damper and have
metal to metal contact.
Model
Minimum operating
pressure (MPa)
Model
Minimum operating
pressure (MPa)
MXQ8(A,C)
0.3
MXQ8B
0.3
MXQ12(A,C)
0.3
MXQ12B
0.3
MXQ16(A)
0.2
MXQ16B
0.2
MXQ20(A)
0.2
MXQ20B
0.2
MXQ25(A)
0.2
②Metal stopper with bumper is consumable Replace the shock absorber when the energy absorption
performance is reduced.
Model
Product number of
Metal stopper with
damper
Model
Product number of
Metal stopper with
damper
MXQ8(A,C)
MXQA-A887
MXQ8B
MXQB-A887
MXQ12(A,C)
MXQA-A1287
MXQ12B
MXQB-A1287
MXQ16(A)
MXQA-A1687
MXQ16B
MXQB-A1687
MXQ20(A)
MXQA-A2087
MXQ20B
MXQB-A2087
MXQ25(A)
MXQA-A2587
●Shock absorber
！Caution
①Do not turn the screws at the bottom of the shock absorber body.
Not a screw for adjustment.
Oil leakage can result.
②Do not damage the sliding surface of the piston rod
of the shock absorber.
Otherwise, impaired durability and return failure
can result.
③Shock absorber is a consumable. Replace the shock absorber when the energy absorption
performance is reduced. Tighten the lock nut according to the tightening torque shown in the
table on the right.
Model
Shock absorber model
Tightening torque Nm
MXQ6(A)
-
ＲＪ０６０３
0.85
MXQ8(A,C)
MXQ6B
ＲＪ０６０３
0.85
MXQ12(A,C)
MXQ8B
ＲＪ０８０５
1.67
MXQ16(A)
MXQ12B
ＲＪ１００６
3.14
MXQ20(A)
MXQ16B
ＲＪ１００７Ｈ
3.14
MXQ25(A)
MXQ20B
ＲＨ１４１０
10.8
Damage is
not allowed.
Piston rod
Do not turn the
screws at the bottom.

13
2-8 Handling of optional functions
●With end lock
！Caution
①The weight of the workpiece shall be maximum load mass or less.
Load exceeding the maximum load mass can cause locking failure or the damage of the end lock
mechanism.
Maximum load mass (kg)
Model
Without
adjuster
Optional adjuster
Internal rubber
cushion
Rubber stopper
With bumper
Metal stopper
Shock absorber
RJ
MXQ6(A)
0.6
0.6
-
0.6
MXQ8(A,C)
1
1
1
1
MXQ12(A,C)
2
2
2
1
MXQ16(A)
4
4
4
2.5
MXQ20(A)
6
6
6
5
MXQ25(A)
9
9
9
5.5
②Use 2 position 4/5 port solenoid valve.
Control circuit such as exhaust center 3 position valve in
which both ports exhaust, operation failure can result.
③Connect the meter-out speed controller to the cylinder.
Operation without meter-in control or speed controller
can cause operation failure.
④Release the pressure when performing manual release
of the end lock.If the pressure remains
when manual release is performed,
damage to the workpiece may occur due to sudden action.
How to release the end lock manual
※Confirm no pressure is applied before the work.
①Push down the lever
②Slide the table in the direction of the arrow.
Use
Recommended Air
Pressure Circuit.
Air Slide Table

14
●With buffer mechanism
！Caution
①Use air slide table with buffer in positions below.
In horizontal operation, the buffer moves when operation starts depending on the load and the speed,
starting the auto switch.Adjust the speed per load.
Buffer auto switch: Please refer the table below for proper stroke end detecting position.
※Adjust the switch position depending on the load and the speed.
（Unit：mm)
Model
Ａ
Ｂ
MXQ6(A)
2.85
5.65
MXQ8(A,C)
2.4
5.6
MXQ12(A,C)
4
5.5
MXQ16(A)
5
5.5
MXQ20(A)
5.5
5
MXQ25(A)
10
8.5

15
2-9 Handling of symmetrical type
！Caution
Space 3mm or more when placing standard type and symmetrical type side by side.
If there is not sufficient space between the adjusters, the auto switch may malfunction.
2-10 Mounting of auto switch
Precautions for mounting
！Caution
①Auto switch mounting tool
For the tightening of the mounting screws (attached to the auto switch), use a watchmaker's
screwdriver with a handle diameter of about 5 to 6 mm.
②Mounting method of auto switch
If the lead wire is positioned like the drawing on the left, the auto switch may malfunction.
Mount the lead wire like the drawing on the right.
③Tightening torque
0.05 to 0.15N･m
As a guide, turn an additional 90 degrees from the position where it feels tight.

16
④Please refer the table below for proper mounting position of the auto switch
(when the stroke end is detected).
For the setting of the auto switch, make adjustment checking the actual operating condition.
Solid state switch
Solid state auto switch: D-M9□Ｖ／M9□ＷＶ
Model
A
Ｅ
Stroke
Stroke
10
20
30
40
50
75
100
125
150
10
20
30
40
50
75
100
125
150
MXQ6(A)
18
7.4
7.4
7.4
7.4
-
-
-
-
2
2.6
5.6
7.6
7.6
-
-
-
-
MXQ8(A,C)
13.9
13.9
13.9
13.9
13.9
13.9
-
-
-
7.1
7.1
7.1
13.1
30.1
7.1
-
-
-
MXQ12(A,C)
16.5
16.5
16.5
16.5
16.5
16.5
16.5
-
-
16.1
8.1
8.1
16.1
16.1
35.1
35.1
-
-
MXQ16(A)
20.6
20.6
20.6
20.6
20.6
20.6
20.6
20.6
-
22
16
16
23
23
29
48
48
-
MXQ20(A)
32.2
21.2
21.2
21.2
21.2
21.2
21.2
21.2
21.2
22.9
23.9
23.9
23.9
29.9
38.9
63.9
63.9
63.9
MXQ25(A)
34.4
25.4
25.4
25.4
25.4
25.4
25.4
25.4
25.4
30.7
29.7
29.7
29.7
42.7
42.7
28.7
67.7
67.7
Model
A
Ｅ
Stroke
Stroke
10
20
30
40
50
75
100
125
150
10
20
30
40
50
75
100
125
150
MXQ6B
18
7.4
7.4
7.4
7.4
7.4
-
-
-
3
13.6
13.6
19.6
36.6
13.6
-
-
-
MXQ8B
29
13.9
13.9
13.9
13.9
13.9
13.9
-
-
4
11.1
11.1
19.1
19.1
38.1
38.1
-
-
MXQ12B
16.5
16.5
16.5
16.5
16.5
16.5
16.5
16.5
-
26.1
20.1
20.1
27.1
27.1
33.1
52.1
52.1
-
MXQ16B
20.6
20.6
20.6
20.6
20.6
20.6
20.6
20.6
20.6
35
25
25
25
31
39
65
65
65
MXQ20B
32.2
21.2
21.2
21.2
21.2
21.2
21.2
21.2
21.2
32.9
33.9
33.9
33.9
46.9
46.9
32.9
71.9
71.9
Model
A
Ｅ
Stroke
Stroke
10
20
30
40
50
75
100
125
150
10
20
30
40
50
75
100
125
150
MXQ6(A)
18
7.4
7.4
7.4
7.4
-
-
-
-
0
0.6
3.6
5.6
5.6
-
-
-
-
MXQ8(A,C)
13.9
13.9
13.9
13.9
13.9
13.9
-
-
-
5.1
5.1
5.1
11.1
28.1
5.1
-
-
-
MXQ12(A,C)
16.5
16.5
16.5
16.5
16.5
16.5
16.5
-
-
14.1
6.1
6.1
14.1
14.1
33.1
33.1
-
-
MXQ16(A)
20.6
20.6
20.6
20.6
20.6
20.6
20.6
20.6
-
20
14
14
21
21
27
46
46
-
MXQ20(A)
32.2
21.2
21.2
21.2
21.2
21.2
21.2
21.2
21.2
20.9
21.9
21.9
21.9
27.9
36.9
61.9
61.9
61.9
MXQ25(A)
34.4
25.4
25.4
25.4
25.4
25.4
25.4
25.4
25.4
28.7
27.7
27.7
27.7
40.7
40.7
42.7
65.4
65.7
Model
A
Ｅ
Stroke
Stroke
10
20
30
40
50
75
100
125
150
10
20
30
40
50
75
100
125
150
MXQ6B
18
7.4
7.4
7.4
7.4
7.4
-
-
-
1
11.6
11.6
17.6
34.6
11.6
-
-
-
MXQ8B
29
13.9
13.9
13.9
13.9
13.9
13.9
-
-
2
9.1
9.1
17.1
17.1
36.1
36.1
-
-
MXQ12B
16.5
16.5
16.5
16.5
16.5
16.5
16.5
16.5
-
24.1
18.1
18.1
25.1
25.1
31.1
50.1
50.1
-
MXQ16B
20.6
20.6
20.6
20.6
20.6
20.6
20.6
20.6
20.6
33
23
23
23
29
38
63
63
63
MXQ20B
32.2
21.2
21.2
21.2
21.2
21.2
21.2
21.2
21.2
30.9
31.9
31.9
31.9
44.9
44.9
46.9
69.9
69.9

17
Solid state switch
⑤Please refer to the figure below of the wiring and connection of the auto switch.
Model
A
Ｅ
Stroke
Stroke
10
20
30
40
50
75
100
125
150
10
20
30
40
50
75
100
125
150
MXQ6(A)
16
5.4
5.4
5.4
5.4
-
-
-
-
14
14.6
17.6
19.6
19.6
-
-
-
-
MXQ8(A,C)
11.9
11.9
11.9
11.9
11.9
11.9
-
-
-
19.1
19.1
19.1
25.1
42.1
19.1
-
-
-
MXQ12(A,C)
14.5
14.5
14.5
14.5
14.5
14.5
14.5
-
-
28.1
20.1
20.1
28.1
28.1
47.1
47.1
-
-
MXQ16(A,C)
18.6
18.6
18.6
18.6
18.6
18.6
18.6
18.6
-
34
28
28
35
35
41
60
60
-
MXQ20(A,C)
30.2
19.2
19.2
19.2
19.2
19.2
19.2
19.2
19.2
34.9
35.9
35.9
35.9
41.9
50.9
75.9
75.9
75.9
MXQ25(A,C)
32.4
23.4
23.4
23.4
23.4
23.4
23.4
23.4
23.4
42.7
41.7
41.7
41.7
54.7
54.7
40.7
79.7
77.7
Model
A
Ｅ
Stroke
Stroke
10
20
30
40
50
75
100
125
150
10
20
30
40
50
75
100
125
150
MXQ6B
16
5.4
5.4
5.4
5.4
5.4
-
-
-
15
25.6
25.6
31.6
48.6
25.6
-
-
-
MXQ8B
27
11.9
11.9
11.9
11.9
11.9
11.9
-
-
16
23.1
23.1
31.1
31.1
50.1
50.1
-
-
MXQ12B
14.5
14.5
14.5
14.5
14.5
14.5
14.5
14.5
-
38.1
32.1
32.1
39.1
39.1
45.1
64.1
64.1
-
MXQ16B
18.6
18.6
18.6
18.6
18.6
18.6
18.6
18.6
18.6
47
37
37
37
43
52
77
77
77
MXQ20B
30.2
19.2
19.2
19.2
19.2
19.2
19.2
19.2
19.2
44.9
45.9
45.9
45.9
58.9
58.9
44.9
83.9
83.9

18
3. Maintenance
3-1 Precautions for maintenance
！Warning
(1) Maintenance should be performed according to the procedure indicated in the Operation Manual.
Improper handling can cause damage and malfunction of equipment and machinery.
(2) Removal of equipment, and supply/exhaust of compressed air
When components are removed, first confirm that measures are in place to prevent workpieces from
dropping and/or equipment running away, etc. Cut the supply pressure and electric power and exhaust all
compressed air from the system. Before restarting the equipment, confirm that measures are taken to
prevent sudden movement.
3-2 Replenishment of grease
！Caution
(1) Applying additional grease on the guide
This product has been lubricated for life by the manufacturer, and it is not necessary to apply further
grease. If grease is replenished, use lithium grease.

19
3-3 Construction/Parts list
Component parts
No.
Description
Material
Note
1
Body
Aluminum alloy
Hard anodized
2
Table
Stainless steel
Heat treatment
3
End plate
Aluminum alloy
Hard anodized
4
Guide block
Stainless steel
Heat treatment
5
Cover
Synthetic resin
6
Cover support
Stainless steel
7
Return guide
Synthetic resin
8
Rod
Stainless steel
9
Piston assembly
MXQ6(B),8(B,C),12(B,C) had a magnet on one side.
MXQ6A,8A,12A,
MXQ16(A,B),20(A,B),25(A) has magnets on both sides.
10
Rod cover
Aluminum alloy
Anodized
11
Seal support
Stainless steel (MXQ6(A,B))
Brass (MXQ8(A,B,C),12(A,B,C))
Aluminum alloy (MXQ16(A,B),20(A,B),25(A))
Electroless nickel plating (MXQ8(A,B,C),12(A,B,C))
Chromate treatment(MXQ16(A,B),20(A,B),25(A))
12
Head cap
Aluminum alloy
Anodized
13
Floating bushing
Stainless steel
14
Floating bushing
Stainless steel
15
Rod bumper
Polyurethane
16
End bumper
Polyurethane
17
Steel ball
Stainless steel
18
Orifice
Polyacetal
19
plug
Brass
Electroless nickel plating
(Plug is used for MXQ6A,8A,12A,
MXQ16(A,B),20(A,B),25(A))
20
Piston seal
NBR
21
Rod seal
NBR
22
O-ring
NBR

20
Buffer type / Component
No.
Description
Material
Note
23
End plate
Aluminum alloy
Hard anodized
24
Collar spring
Stainless steel
25
Head cap
Stainless steel
26
Spring
Stainless steel
27
Magnet
Rare earth
28
Washer
Stainless steel
End lock type/ Component
No.
Description
Material
Note
29
ロック用ボディ
Aluminum alloy
Hard anodized
30
Spacer
Aluminum alloy
Hard anodized
31
Lever
Carbon steel
Rust proof treatment
32
Piston
Stainless steel
33
Bushing
Stainless steel
34
Return spring
Stainless steel
35
Wear ring
Polyurethane
36
Piston seal
NBR
37
O-ring
NBR
38
O-ring
NBR
39
plug
Brass
Electroless nickel plating
(Plug is used for MXQ6,8(C),12(C))
Axial piping type / Component
No.
Description
Material
Note
40
Bushing
Aluminum alloy
Chromate treatment
(MXQ6,MXQ8(C),MXQ12(C) only)
41
O-ring
NBR
(MXQ6,MXQ8(C),MXQ12(C) only)
42
Parallel pin
Stainless steel
(MXQ6,MXQ8(C),MXQ12(C) only)
43
Steel ball
High carbon chromium
bearing steel
With buffer With end lock Axial piping type