Spectra MKS Cirrus LM99 User manual

Cirrus (LM99)
User Manual
SP101013.111
October 2012

Cirrus SP101013.111 –10 October 2012
MKS Instruments UK Ltd., Spectra Products
2
As part of our continuous product improvement policy, we are always pleased to receive your
comments and suggestions about how we should develop our product range. We believe that the
manual is an important part of the product and would welcome your feedback, particularly relating to
any omissions or inaccuracies you may discover.
You can send your comments to:-
MKS Instruments, Spectra Products
Cowley Way
Weston Road
Crewe
Cheshire
CW1 6AG
United Kingdom
[phone] Tel. International
[phone] Fax. International
Or email
[e-mail]
MKS Products provided subject to the US Export Regulations. Diversion or transfer
contrary to U.S. law is prohibited.
Cirrus is a registered trademark of MKS Instruments, Spectra Products.
Conflat® is a registered trademark of Varian Associates.
Viton® is a registered trademark of E.I. DuPont de Nemours & Co., Inc.
Windows® is a trademark of the Microsoft Corporation.
All other brand or product names are trademarks or registered trademarks of their respective companies and as
such are fully recognised.

Cirrus SP101013.111 –10 October 2012
MKS Instruments UK Ltd., Spectra Products
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MKS Instruments UK Ltd
3 –4 Cowley Way
Crewe
Cheshire
CW16AG
United Kingdom
EC Declaration of Conformity
MKS Instruments UK Ltd declares that the:
Cirrus
Is in accordance with the following directives:
I hereby declare that the equipment named above has been designed to comply with the relevant
sections of the above referenced specifications. The unit complies with all essential requirements
of the Directives.
Signed:
J.M.Higgins
General Manager
10th October 2009
2004/108/EEC Electromagnetic Compatibility Directive
EN 61326-1:2006 Electrical equipment for measurement, control & laboratory use.
2006/95/EC Low Voltage Directive
EN 61010-1:2006 Safety requirements for electrical equipment for measurement, control &
laboratory use.

Cirrus SP101013.111 –10 October 2012
MKS Instruments UK Ltd., Spectra Products
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Additional Installation Maintenance and Operating Instructions
In order to comply with European regulations, the following procedures must be followed:
A) INSTALLATION
1. The installation procedures given in the operating and technical manuals must be followed in
addition to these instructions.
2. The mains power cable must conform to local regulations and must have a protective earth (PE)
conductor securely connected to the power plug protective earth contact.
3. Only cables supplied with the equipment may be used for interconnections. If extension cables are
required, they must be supplied by MKS Instruments Ltd.
4. Cables attached to the analog and digital IO ports must have a maximum length of 3 meters.
The Ethernet cable has a maximum length of 30 meters before a network hub or switch is required.
If greater lengths are required, MKS Instruments Ltd. must be contacted for technical guidance on
possible EMC and safety issues.
B) OPERATION
1. The equipment is not authorised for use as a critical component in a life support or safety critical
system without the express written approval of MKS Instruments Ltd.
2. All instructions given in the operating manual must be followed.
3. Adjustments are strictly limited to those accessible from the control panel and computer keyboard
and only when running software supplied by MKS Instruments Ltd.

Cirrus SP101013.111 –10 October 2012
MKS Instruments UK Ltd., Spectra Products
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C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra
Products Ltd., unless special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and
safety critical and must not be substituted. Replacement parts are available from MKS Instruments,
Spectra Products Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices that affect EMC and
safety performance. These must be correctly re-fitted after servicing.
5. It is important that a yearly service schedule be maintained on both the diaphragm and turbo
molecular pumps. This period should be reduced for corrosive applications.
The pump components such as the diaphragms and lubricant reservoirs can contain
toxic substances from the media pumped.
Dispose of in accordance with local regulations.

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Contents
1. Specification..........................................................................................9
1.1 Mechanical ................................................................................... 9
1.2 Electrical ...................................................................................... 9
1.3 Fuses ........................................................................................... 9
1.4 Environmental............................................................................... 9
1.5 Safety .......................................................................................... 9
1.6 Connectors ................................................................................. 10
1.7 Warning labels ............................................................................ 11
1.8 Ventilation .................................................................................. 12
2. Introduction ........................................................................................13
3. Unpacking............................................................................................14
4. Connections and Indicators ................................................................15
4.1 The front panel ........................................................................... 15
Power ................................................................................... 16
Turbo at Speed ...................................................................... 16
Capillary Heater...................................................................... 16
System Heater ....................................................................... 16
Emission................................................................................ 16
Comms.................................................................................. 16
Capillary Inlet......................................................................... 16
4.2 The rear panel ............................................................................ 17
RGA Comms .......................................................................... 18
Power ................................................................................... 18
Analog I/O............................................................................. 18
Digital I/O ............................................................................. 19
Exhaust Purge IN/OUT............................................................ 20
5. Installation ..........................................................................................21
5.1 Default IP Address....................................................................... 21
5.2 Changing the IP Address.............................................................. 21
5.3 Re-setting the IP Address............................................................. 22
6. Operation.............................................................................................23
6.1 Connections................................................................................ 23
6.2 Powering up ............................................................................... 23
6.3 Starting the Quad........................................................................ 25
6.4 Baking........................................................................................ 25
6.5 Temperature Settings .................................................................. 26
6.6 Capillary Heater .......................................................................... 26
6.7 Shutting Down............................................................................ 26
6.7 Shutting Down............................................................................ 27
7. Maintenance ........................................................................................28
Note: These are not operator functions, only competent persons may carry out these
operations ........................................................................................ 28

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7.1 Removing the Cover .................................................................... 28
7.2 Internal Components................................................................... 29
Turbo Molecular Pump............................................................ 30
Diaphragm Pump ................................................................... 30
RGA Electronics (Microvision IP) .............................................. 30
Capillary Inlet......................................................................... 30
7.3 Replacing the Orifice Disk ............................................................ 32
7.4 Orifice Disk Tools ........................................................................ 35
Tool Guide............................................................................. 35
Removal Tool......................................................................... 35
Insertion Tool ........................................................................ 35
7.5 Fitting the Tool Guide ................................................................... 36
7.6 Removing the Orifice Disk ............................................................ 36
7.7 Fitting a new Orifice Disk ............................................................. 37
7.8 Re-assembling the Inlet Flange..................................................... 39
8. Analyser Maintenance (PVD and Open Source) .................................41
8.1 Overview.................................................................................... 41
8.2 Removing the Analyser ................................................................ 42
8.3 Refitting the Analyser .................................................................. 44
8.4 Ohmmeter analyser checks .......................................................... 45
8.5 Checking filaments ...................................................................... 46
8.6 Changing filaments...................................................................... 47
8.6.1 Removing the filaments ............................................................ 47
8.6.2 Fitting new filaments ................................................................ 48
8.7 Ion Source cleaning..................................................................... 49
8.8 Cleaning or replacing the ion source.............................................. 50
8.8.1 Removing the ion source........................................................... 51
8.8.2 Dismantling the source assembly ............................................... 51
8.8.3 Source Re-assembly ................................................................. 52
9. Exploded Views ...................................................................................53
9.1 Analyser Flange pin-outs.............................................................. 53
9.2 Exploded view of the Analyser (Open ion-source shown)................. 54
9.3 Filament Plate (open ion-source) .................................................. 55
9.4 Source Assembly (open ion-source) .............................................. 56
9.5 Extract Plate (open ion-source)..................................................... 57
9.6 Filament Plate (PVD ion-source) ................................................... 58
9.7 Source Assembly (PVD ion-source) ............................................... 59
9.8 Source Alignment Jig (common) ................................................... 60
11. Communications Troubleshooting....................................................61
12. Returning Your Unit for Service .........................................................68
Support Contact Numbers.................................................................. 68
13. Optional Hardware ............................................................................71
13.1 Multi-stream Inlet...................................................................... 71
Connecting the sample lines .................................................... 71

Cirrus SP101013.111 –10 October 2012
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Software Operation........................................................................... 72
13.2 UDV ......................................................................................... 73
Location of key components ..................................................... 73
Before you begin.................................................................... 74
Connections........................................................................... 74
Check Baratron Zero............................................................... 75
Setting the UDV - Basics .......................................................... 76
Baking the UDV...................................................................... 78

Cirrus SP101013.111 –10 October 2012
MKS Instruments UK Ltd., Spectra Products
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1. Specification
1.1 Mechanical
Cirrus
Size: 430mm wide x 670mm deep (+100mm for connections) x 420mm tall.
Weight: 34.5 kg
Analyser
Triple mass filter, 1 -200amu or 1 –300amu, Faraday and SEM detector.
Maximum operating pressure Faraday 2x10-5 mBar.
1.2 Electrical
Power Inlet: 100 to 120 VAC rms, 47-63Hz, 6.3A rms.
200 to 240 VAC rms, 47- 63Hz, 3.15A rms
Installation category (over voltage category) II to IEC664
Insulation Class I to IEC536
1.3 Fuses
Located on rear panel.
All fuses are 20mm X 5mm H.R.C. ceramic, 250V AC, characteristic (T) and compliant with IEC 127.
110VAC operation 6.3A
240VAC operation 3.15A
1.4 Environmental
Ambient temperature range 0 to 400C, 80%RH non-condensing, operating and storage.
Pollution degree 2 to EN61010
Enclosure IP20 to EN60529
1.5 Safety
IP20 to EN60529

Cirrus SP101013.111 –10 October 2012
MKS Instruments UK Ltd., Spectra Products
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The protective earth conductor of the power cord must be connected to the power source protective
earth terminal.
There are no operator replaceable parts within the Cirrus unit.
This equipment must only be used in the manner specified in these instructions.
1.6 Connectors
The connectors for external circuits are for use only with MKS Spectra equipment, or equipment which
has no accessible hazardous live parts.
The external circuits must comply with the requirements of EN61010-1 section 6.6.1.
Ports for connection of accessories do not carry hazardous potentials.
Installation Category II comprises mains powered, local level appliances.
Do not position the Cirrus unit so it becomes difficult to remove the mains power cord.

Cirrus SP101013.111 –10 October 2012
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1.7 Warning labels
Caution –Risk of electric shock
On the connections panel refers to:
Accessible hazardous voltages on the internal printed circuit boards and connectors, which may result
in electric shock if touched.
Caution –Risk of danger
On the connections panel refers to:
a. Read all instructions carefully before use.
b. The control unit and signal ports are designed for connection to MKS Spectra accessories via MKS
Spectra supplied cables.
There are no accessible hazardous voltages or currents on these ports.
MKS Spectra must be consulted before any non-MKS Spectra supplied cables or accessories are
connected to these ports.
Caution –Hot surface
On the internal oven refers to:
Hot surfaces inside the oven.

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Caution –Heavy object
On the connections panel.
Refers to the this equipment weighing in excess of 18kg and should therefore be moved by at least
two people.
To avoid muscle strain and or back injury, movers should employ lifting aids and the correct lifting
techniques.
1.8 Ventilation
Openings in the front, top and bottom panels must not be obstructed.
Allow a minimum clearance of 50mm all round. Do not exceed the maximum operating ambient
temperature.

Cirrus SP101013.111 –10 October 2012
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2. Introduction
The Cirrus is a bench top, on-line gas analysis system designed specifically to analyze gases at
atmospheric pressure.
Key to its analytical performance, the Cirrus is built around a Microvision plus IP Residual Gas Analyzer.
This RGA is housed in a small stainless steel chamber which is pumped by a turbo molecular pump,
which is in turn backed by a dry diaphragm pump.
The vacuum chamber is housed in an oven to assist with pumping when required.
A capillary inlet is used in order to achieve a suitable pressure differential between the atmospheric
sample and the RGA itself. This flexible inlet can be seen to protrude from the Cirrus cabinet. The
same diaphragm pump that backs the turbo pump also serves as a by-pass pump for the capillary inlet.
Because the Cirrus is based around the Microvision IP RGA, the unit operates with the same ‘Process
Eye’ software as the Microvision (with some minor additions). As such either a PC or laptop running
Windows 2000, XP or Vista is required for operation. Connection to the PC is via a Cat5 Ethernet
screened (STP) cable. This computer and interfacing requirement must be considered when specifying
your system.
This manual is written to accompany the Cirrus system. If you have any doubts as to whether this is
the correct manual for your system, please examine the serial number of your system, it should begin
with LM99-xxxxx. You should refer to the ‘Process Eye Professional’ manual for a detailed description
of the software.
Please ensure you read the Maintenance sections of this manual, they contain important
information on the service schedules required for this type of instrument.

Cirrus SP101013.111 –10 October 2012
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3. Unpacking
When you receive the equipment, carefully check each item before removing the packaging to ensure
that no physical damage has occurred during shipment. Also check that all boxes have been received
by checking against the packing slip.
The Cirrus will be shipped in one box or crate, if you have also ordered a PC this will be shipped in a
separate box.
If there has been obvious damage during shipment, or if there are items listed on the packing slip
which have not arrived, immediately contact your local MKS sales/service representative.
Carefully unpack the various parts of your Cirrus system. Again, check for any signs of damage.
Find the shipment report and check for any missing items. Keep the shipment report safe, this is an
important document and you may need to refer to it later.
We suggest you keep the packaging material in the unlikely event you need to return the equipment
for servicing.

Cirrus SP101013.111 –10 October 2012
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4. Connections and Indicators
4.1 The front panel
Along with the
capillary inlet, the
front panel
incorporates a
bank of six status
indicators to
assist in the
operation of the
Cirrus.
The colour and
function of each
of these
indicators is
described below,
as is the inlet.

Cirrus SP101013.111 –10 October 2012
MKS Instruments UK Ltd., Spectra Products
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Power
The indicator is green when power is supplied to the Cirrus unit.
Turbo at Speed
The indicator is amber while the turbo molecular pump accelerates, changing to green when
it has reached normal operating speed.
The filament protect trip is interlocked to this signal to prevent operation of the filament before a
suitable chamber pressure has been obtained.
Capillary Heater
The indicator is amber when the capillary heating element is on.
System Heater
The indicator is amber when the heater temperature is set to 80degC “Heat”, and red when
at the 180degC setting “Bake”.
Please see Section 6.4 for details on baking the chamber.
Emission
The indicator is green when a filament is active and operating correctly.
Comms
This indicator blinks green when communications have been established with the Cirrus
Capillary Inlet
The capillary terminates with a 1/4 inch (6.35mm) stainless steel pipe, ready to couple to a 1/4 inch
Swagelok fitting. You may wish to use a shut off valve to prevent the loss of gas if the capillary needs
to be removed for maintenance.

Cirrus SP101013.111 –10 October 2012
MKS Instruments UK Ltd., Spectra Products
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4.2 The rear panel
The rear panel
incorporates all of
the external
connections
required by the
Cirrus, as well as
exhaust purge
connections.
The diagram
above illustrates a
standard
configuration. On
externally backed
systems, ancillary
connections are
present.
A description of
each of the
connectors can
be found below.
The signal and data ports must not be connected to ports that could become hazardous
live.

Cirrus SP101013.111 –10 October 2012
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RGA Comms
An RJ-45 socket is used for connection to the host PC.
A Cat5 STP cable MUST be used for connection to this instrument in order to comply with the immunity
requirements of the EMC directive.
See Page 4 for maximum cable lengths.
Power
The mains power switch and fused IEC socket.
Analog I/O
The Analog I/O connector is a 15-way D-Type socket.
See Page 4 for maximum cable lengths.
The Analog I/O port provides:
One analog output 0 to +10V
Four, quasi-differential analog inputs, 0 to ±10V, with a maximum voltage on the return of
±0.5V
±15V power outputs both fused at 100mA, fuses are not self resetting.
Analog Connector pin assignment.
Pin
Function
1
-15V fused
2
Analog input 4 return
3
Analog input 3 return
4
Analog input 2 return
5*
Analog input 1 (Reserved)
6,7,14
Not Connected
8
0V analog
9
+15V fused
10
Analog input 4
11
Analog input 3
12
Analog input 2
13*
Analog input 1 return
15
Analog output
Note: The total power consumption on each rail (+5V and ±15V) for both the Analog and Digital I/O
ports must not exceed 100mA.
* Analog input 1 and Analog input 1 return are reserved for use with the internal cold cathode gauge.

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Digital I/O
The Digital I/O connector is a 25-way D-Type socket.
It is used to connect accessories such as a Remote Vacuum Controller.
The Digital I/O connector can also be used to provide alarm output signals and process trip signals.
See Page 4 for maximum cable lengths.
The Digital I/O port provides:
Two 8 bit bi-directional ports
One interrupt / strobe input
+5V fused at 100mA
±15V fused at 100mA
Pin
Description
Notes
1
H1 interrupt / strobe
2
PA1
3
PA3
4
PA5
5
PA7
6
PB1
7
PB3
8
PB5
9
PB7
10
0V Digital
11
0V Analogue
12
-15V fused
13
+15V fused
14
PA0
15
PA2
16
PA4
17
PA6
18
PB0
19
PB2
20
PB4
21
PB6
22
+5V fused
23
Not Connected
24
Not Connected
25
Not Connected
Note: The total power consumption on each rail (+5V and ±15V) for both the Analog and Digital I/O
ports must not exceed 100mA.

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Exhaust Purge IN/OUT
You may want to connect the Cirrus to a nitrogen purge system, or vent the exhaust gas to an
extractor system. You may have been advised whether we feel for your particular application nitrogen
purging is necessary, desirable or absolutely vital.
Optional: The Cirrus includes the facility to purge the turbo pump bearings and vent the vacuum
chamber with nitrogen. This feature is usually used when the unit is likely to be exposed to corrosive
and/or toxic gases.
Flushing the pump exhaust
Connect a dry nitrogen supply at a pressure of 1 - 2 p.s.i. above atmospheric pressure to the IN port to
improve detection levels.
Connect a second pipe to the port labeled OUT to exhaust the dry nitrogen safely. The exhaust
nitrogen may now contain corrosive/toxic gases.
Exhaust the pump only
Even if you are not using nitrogen purge you MUST connect the Cirrus to an exhaust system.
Blank off the port marked IN and use only the OUT to exhaust the pump.
The standard configuration of Cirrus does not use rotary pumps, so there will be no hydrocarbon
vapors emitted by the vacuum pumping.
However, options are available that may use external rotary pumps. These should always be vented
into an exhaust system.
It is important that the pumps exhaust gases are ALWAYS vented safely. Even if they are
not toxic or corrosive, they may cause asphyxiation.
Never block, or obstruct any pump exhaust, as this may cause dangerous internal
pressure buildup.