
Table of contents Spectron Gas Control Systems GmbH
ii GES_BE55+56-SP_0520
Table of contents
1 Introduction.................................................................................................................................................. 3
2 Description................................................................................................................................................... 4
2.1 Intended use ......................................................................................................................................... 4
2.2 Misuse .................................................................................................................................................. 4
2.3 Identification / label ............................................................................................................................... 4
2.4 Environment.......................................................................................................................................... 5
2.4.1 Temperatures............................................................................................................................. 5
2.4.2 Degree of cleanliness ................................................................................................................ 5
2.4.3 Emissions................................................................................................................................... 5
2.5 Standards and laws .............................................................................................................................. 5
3 Safety............................................................................................................................................................ 7
3.1 Basic information on the safety instructions ......................................................................................... 7
3.2 Safety instructions ................................................................................................................................ 8
3.3 Emergencies and safety devices .......................................................................................................... 10
3.4 Qualification of the operating and maintenance personnel................................................................... 10
4 Design and function .................................................................................................................................... 11
4.1 Design................................................................................................................................................... 11
4.2 Functional description........................................................................................................................... 12
4.3 Technical data ...................................................................................................................................... 12
4.4 Boundaries and interfaces .................................................................................................................... 13
5 Installation.................................................................................................................................................... 14
5.1 General information .............................................................................................................................. 14
5.2 Installation work .................................................................................................................................... 14
5.2.1 Installation.................................................................................................................................. 14
5.2.2 Connecting the incoming and outgoing lines ............................................................................. 16
6 Commissioning............................................................................................................................................ 17
6.1 Preparations for commissioning ........................................................................................................... 17
7 Maintenance, cleaning and repairs............................................................................................................ 18
7.1 General information on maintenance.................................................................................................... 18
7.2 Flushing the process gas into the pressure control panel .................................................................... 19
7.3 Regular maintenance work and cleaning.............................................................................................. 20
8 Repair ........................................................................................................................................................... 21
8.1 General information on repair work ...................................................................................................... 21
8.2 Troubleshooting and fault rectification .................................................................................................. 22
9 Decommissioning and recommissioning ................................................................................................. 23
9.1 Decommissioning ................................................................................................................................. 23
9.2 Recommissioning ................................................................................................................................. 23
10 Dismantling and disposal ........................................................................................................................... 24
10.1 General information on dismantling ...................................................................................................... 24
10.2 Returns ................................................................................................................................................. 25
10.3 Disposal ................................................................................................................................................ 25