SUSS MJB4 Setup guide

SAFETY AND
INSTALLATION
Mask Aligners
MJB4
Laboratory Mask Aligner
Rev09/17-03
www.suss.com
D40 10300511

PREFACE AND PUBLISHING DETAILS
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Preface and Publishing Details
Information provided in this document is subject to change without notice.
Although believed to be accurate, SUSS MicroTec assumes no responsibility for any errors, omissions, or
inaccuracies.
SUSS MicroTec also reserves the right to modify the product, substitute components by equivalent or sim-
ilar parts or change functions or controls without notification in the manual or elsewhere.
The product must be installed properly, used as directed and operated by trained and authorized personnel
only. Any use or application deviating from the designated and intended use can cause hazards.
For a description of the designated use see also the section “Intended Use of the Product”
The contents of this product documentation shall not become part of or modify any existing legal agreement
or commitment. All warranty stipulations and obligation by SUSS are contained in the sales contract. Con-
tractual stipulations are neither extended nor limited by this product documentation.
The information included in this manual is SUSS MicroTec Proprietary Information. It is provided for the use
by SUSS MicroTec’s customers only and shall not be altered.
Use of the documentation is permitted only for purchasers, authorized users or prospective purchasers of
SUSS MicroTec products. Further distribution, reproduction, sale of this material or disclosing its contents
without the expressed written permission of SUSS MicroTec is prohibited.
©Suss MicroTec Lithography GmbH, All Rights Reserved.
If you have any questions or remarks about this manual, please contact:
SUSS MicroTec Lithography GmbH
Schleißheimer Str. 90
D 85748 Garching
Tel.:[phone]
Fax: [phone]
www.suss.com
This manual is available in the following formats:
Cleanroom printed and electronic .pdf-format (CD-ROM).

PREFACE AND PUBLISHING DETAILS
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C O N T E N T S
SAFETY-INST MJB4 Rev09 17-03 CONTENTS - Original Documentation - I
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CONTENTS
1. WARNINGS and SAFETY PRECAUTIONS .........................................................1
1.1. Guidelines on Safety at Work .........................................................................1
1.2. Intended Use of the Machine ..........................................................................1
1.3. Definition of Danger Advice and Warnings .....................................................1
1.4. Main Switch with Emergency Off Function ......................................................2
1.5. Dangers ..........................................................................................................2
1.5.1. Physical Dangers ...................................................................................2
1.5.2. Thermal Dangers ...................................................................................2
1.5.3. Electrical Dangers ..................................................................................2
1.5.4. Radiation Danger ...................................................................................3
1.5.5. Danger of Poisoning...............................................................................3
1.6. Working with the MJB4 Mask Aligner ..............................................................4
1.6.1. Fitting, Changing and Cooling the Exposure Lamp................................4
1.6.2. Preparing the Machine for Working........................................................5
1.6.3. Safety Checks ........................................................................................6
2. INSTALLATION AND TRANSPORT .....................................................................7
2.1. Prerequisites for Installation ............................................................................7
2.1.1. Ambient Requirements...........................................................................7
2.2. Transporting the Mask Aligner .......................................................................15
2.2.1. Warranty and Restrictions....................................................................15
2.2.2. Receiving and Unloading the Machine.................................................15
2.2.3. Opening the Shipping Containers ........................................................15
2.2.4. Transport without a Pallet ....................................................................15
2.2.5. Transportation Locks............................................................................17
2.2.6. Taking the Machine out of Service.......................................................18

CONTENTS
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WARNINGS AND SAFETY PRECAUTIONS
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1. WARNINGS AND SAFETY PRECAUTIONS
1.1. Guidelines on Safety at
Work
This machine has been developed and manufac-
tured in compliance with the current safety regula-
tions and standards.
This operating manual shall be read before using the
mask aligner. It contains all the information required
for the safe and correct use of the machine. Other
operating manuals included with this manual must
also be read, for power supplies CIC1200, CPC200
and CPC350.
As a further precaution against accidents, the oper-
ating and service personnel should be trained and
instructed on delivery and at regular intervals, other-
wise communication problems and misunderstand-
ing of the operating manual can lead to injury to the
operator.
SUSS MicroTec cannot accept any responsibility for
physical injury or damage to the machine which re-
sults from incorrect use of this machine and failure
to follow these safety instructions.
Attention!
The instructions in this operating manu-
al are only intended for qualified per-
sonnel. The machine may only be
operated by persons who are authorized
and trained to do so!
1.2. Intended Use of the
Machine
The machine is exclusively intended for use as an
alignment and/or UV-photolithographic exposure
device for wafers from 3 mm to 100 mm in diameter
or substrates 3 mm x 3 mm to 100 mm x 100 mm in
rectangular shape used in semiconductor and micro
system technology.
Any other form of use must be agreed on with SUSS
MicroTec Lithography's Engineering Product Sup-
port department. In the event of contravention,
SUSS MicroTec accepts no liability either for mal-
function or for personal injury.
1.3. Definition of Danger
Advice and Warnings
The dangers which can possibly arise during opera-
tion of this machine as well as appropriate precau-
tionary measures and recommended procedures
are described in this section of the manual - as well
as in warnings which are applied to the machine or
its assemblies or in some cases to the packaging.
Both types of warning must be understood and ob-
served by the MJB4 operator of the machine. Warn-
ings are normally divided into
• a description of the possible hazard
• directions on avoidance of the danger or on the
correct procedure to be followed in the event of
danger.
A warning or instruction symbol appears next to the
warning.
Warnings on the machine also include the key words
Danger or Warning:
Danger!
indicates an imminently hazardous situation
which, if not avoided, will result in death or se-
vere injury as well as substantial damage to
property or the environment;
Warning!
indicates a potentially hazardous situation
which, if not avoided, could result in death or se-
vere injury as well as substantial damage to
property or the environment.
Caution!
Indicates a potentially hazardous situation
which, if not avoided, could result in minor inju-
ry, moderate injury or product or property dam-
age.
Note!
draws attention to special technical information
which may not be immediately obvious.

WARNINGS AND SAFETY PRECAUTIONS
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1.4. Main Switch with
Emergency Off Function
The machine has a main switched combined with an
emergency off function. If the switch is turned to
OFF, the machine is immediately cut off from the
power supply network, the exposure lamp goes off,
and the upper microscope pivots upwards. The
switch is signal red and is located on the left front
plate.
Attention!I
In case of danger, turn the main switch
to OFF!
Warning!
The upper microscope pivots upwards.
To begin operating the machine again, the main
switch must be turned to ON and the machine must
be restarted.
1.5. Dangers
1.5.1. Physical Dangers
Moving machine parts such as the alignment station,
microscopes and their manipulators, the mirror
housing and others can cause injury to the operator.
You should take particular care of the movements of
the microscope if your machine is equipped with the
direct microscope view finder.
Warning!
Moving machine parts can injure the fin-
gers or face.
Do not remove any materials from the
machine until all machine movements
have stopped!
Warning!
With a machine equipped with a vibra-
tion-damped table, the base plate can
sink without warning in the event of a
drop in pressure in the compressed air
supply.
Never place the hands between the base
plate and the vibration-damped table of
the machine!
Warning!
The movement of a direct viewfinder
can cause injury to the eyes or face.
Stop looking into the microscope view-
finder before you start the microscope
movement!
Danger!
A particular danger results from the
fragments thrown out in the event of a
lamp explosion!
Situations which can lead to a lamp ex-
plosion are described in a separate sec-
tion.
You should also be aware of the risk of
poisoning with Hg following a lamp ex-
plosion; this is also described in a sep-
arate section.
1.5.2. Thermal Dangers
The upper side of the lamp house gets very hot dur-
ing operation.
Operating temperatures of several hundred °C occur
on the lamp itself.
The lamp cooling must be correctly adjusted accord-
ing to the lamp type!
Warning!
There is a risk of lamp explosion if the
lamp house is opened prematurely
while the lamp is hot.
The exposure lamp has to cool down for
at least 20 minutes before the lamp
house door is opened!
The controlled cooling required for
more powerful lamp types must also be
left in operation during the cooling
phase!
1.5.3. Electrical Dangers
Live parts may be exposed when the machine cover
is removed.
High wattages and currents of up to 50 A can occur
in the lamp and lamp power supply.
The lamp starting voltage can be up to 30 kV.

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Danger!
Do not open the machine until the whole
machine has been isolated from the
power supply!
Pay attention to this warning symbol on
covers!
Where applicable, observe local "log
out - tag out" regulations!
The individual electrical assemblies, especially bal-
lasts CIC1200, CPC200 and CPC350, contain no
parts which the user could repair or adjust.
1.5.4. Radiation Danger
The high luminous density of the exposure lamp can
cause eye damage.
In particular, the invisible ultraviolet component of the
light can lead to permanent eye damage or skin
burns.
Warning!
UV light can permanently damage your
eyes.
Covers over the ray path may not be re-
moved while the UV lamp is switched
on!
Lamp adjustment work may only be car-
ried out with UV-protective goggles -
also with skin protection in the case of
intensive radiation!
Light measurements on the exposure
chuck also require the use of UV-protec-
tive goggles.
UV-protective goggles must carry a marking indicat-
ing the protection class. The color of the goggles
provides no indication of their protective effect!
1.5.5. Danger of Poisoning
1.5.5.1. Mercury Fumes following Lamp
Breakage
The biggest danger following a lamp explosion or
lamp breakage lies in the inhalation of the toxic mer-
cury fumes. Mercury can cause acute and chronic
poisoning.
Note:
The EU safety data sheets can be found in the
Appendix and must be read.
Advice on minimizing health risks following a lamp
explosion:
• Leave the lamp house exhaust switched on (with
powerful lamps)!
• Leave the contaminated room immediately!
• Ventilate the room well for at least 30 minutes!
• Do not open the lamp house for the time being.
Allow the interior of the lamp house to cool down
for at least 1 hour!
• Carry out lamp house decontamination using an
appropriate decontamination agent (see section
on changing the exposure lamp)!
• Follow the general and national safety regula-
tions relating to Hg!
• A doctor should be consulted immediately if there
is a possibility of mercury fumes having been in-
haled!
1.5.5.2. Generation of Ozone during the
Operation of the Lamp
Short-wavelength ultraviolet light can ionize the at-
mospheric oxygen.
An exposure lamp therefore generates ozone during
operation.
Long-term and intensive exposure to ozone can lead
to damage to the respiratory organs.
Warning!
Where powerful lamps or special lamps
for deep-UV are used, additional extrac-
tion and controlled cooling by means of
nitrogen flushing should be ensured
(see setting tables)!
If the stipulated settings are applied correctly, the
ozone concentration in the area surrounding the
lamp house should remain well below the permissi-
ble limit.

WARNINGS AND SAFETY PRECAUTIONS
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1.6. Working with the MJB4
Mask Aligner
Only SUSS MicroTec employees or qualified and
trained staff may service the machine.
Danger!
The operating and starting voltages in
high-pressure lamps are deadly danger-
ous!
The machine must be switched off be-
fore beginning servicing work on the
lamp house or other electrical compo-
nents!
1.6.1. Fitting, Changing and Cool-
ing the Exposure Lamp
When working with high-pressure lamps, the appro-
priate safety regulations and service life specifica-
tions of the lamp manufacturer must be observed.
Hg-filled UV high-pressure lamps must be changed
once the service life specified by the manufacturer
has expired. There is an increased risk of lamp ex-
plosion after this date!
Premature failure of a lamp can be the result of in-
correct lamp cooling (too powerful or too weak), in-
correct power setting, soiling of the lamp tube or
similar.
Exposure lamps should only be handled with gloves.
Clean any grease marks with alcohol!
1.6.1.1. Danger of Lamp Explosion
If the Hg high-pressure lamps are operated accord-
ing to their specification (type selection on CIC, cool-
ing, min/max power, service life), lamp explosions
during operation are extremely rare.
The exposure lamp should always be protected
against shock when handling - the lamps should al-
ways be stored and transported in their original
packaging!
Any other mechanical stress such as bending or
twisting during installation should also be carefully
avoided!
Warning!
The exposure lamp is under high pres-
sure.
Mechanical face and eye protection
should be worn when handling a high-
pressure lamp!
If the lamp breaks, do not touch the
components with the hand and do not
inhale the Hg fumes!
Use a breathing mask with gas absorp-
tion during decontamination!
In the event of a lamp explosion, after the immediate
measures described in section Danger of poisoning
an Hg decontamination kit (e.g Mercurisorb) should
be used to eliminate the mercury which is still pres-
ent. Such a kit should always be kept in store. These
can be obtained, for example, from:
Carl Roth GmbH & Co
P.O. Box 100121
D-76231 Karlsruhe
http://www.carl-roth.de
1.6.1.2. Changing the Lamp
Only use lamps of a type approved for use by SUSS
MicroTec Lithography!
Caution!
In almost all exposure lamps, the anode
(positive pole) is at the bottom.
Only the 500W DUV Hg/Xe lamp (Ushio)
position is reversed.
After changing the lamp type or replac-
ing a CIC1200, CPC200 or CPC350 it is
essential to check the correct polarity of
the lamp and correct type selection on
the CIC1200 before switching on the
lamp!
Always follow the lamp manufacturer's directions!
When fitting or removing the lamp, avoid any me-
chanical load acting on the glass tube! Only tighten
the lamp by hand!

WARNINGS AND SAFETY PRECAUTIONS
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Pay attention to the correct handling of different
lamp mountings (depending on the lamp house
type) - see Servicing section in the manual!
Connect the connection contacts on the lamp in
such a way that electrical contact resistances are
minimized. Replace all components which show
traces of corrosion or overheating!
1.6.1.3. Setting Regulations for Lamp
Cooling
The UV-exposure lamps must be cooled in a con-
trolled way in order to maintain safe and optimum
operating conditions. The cooling should be set up
individually according to the lamp type.
Detailed values for the lamp cooling and the vol-
ume flow which needs to be extracted for differ-
ent lamps can be found in the table "Setting
values for lamp cooling and lamp house extrac-
tion" in section 2.1. "Prerequisites for Installa-
tion".
The basic components of the cooling are:
• Blowing of nitrogen onto the metallic lamp cap
(but never the glass tube),
• Blowing of compressed air into a heat sink (for ra-
diation of heat) in the lamp house.
The lamp-specific values both for the adjustment of
the blowing of nitrogen onto the upper and lower
lamp caps and also for the extraction should be ob-
served.
Significant deviations from the setting values endan-
ger your safety!
Minor deviations affect the operating safety of the
lamp and machine.
If a lamp frequently illuminates in an unstable man-
ner, or of the life of the lamp has systematically de-
teriorated, carefully check the settings for the lamp
cooling. Frequently, the cause of such problems lies
in incorrect setting of these data or in incorrect fixing
of the connections. If you are not sure, call in SUSS
MicroTec's service to carry out a check!
Note!
In addition, in order to achieve good exposure
results, the evenness of the light should be ad-
justed after fitting a new lamp.
1.6.1.4. Lamp Housing Extraction
As a rule, no suction is required for 200W and 350W
lamps.
Ozone extraction from the lamp housing must be en-
sured for the 500W DUV Hg/Xe lamp in the 350W
lamp housing to avoid health risk. Add-on kit item no.
189553 is required for this purpose.
Detailed values can be found in the table "Set-
ting values for lamp cooling and lamp house ex-
traction" in section 2.1. "Prerequisites for
Installation".
1.6.1.5. Disposal
Used lamps should also only be stored and trans-
ported in the original protective packaging!
UV high-pressure lamps contain up to 1g of highly-
toxic mercury.
These lamps should therefore be treated as special-
category waste.
Local regulations on disposal should be observed.
It is possible to return the lamps to the supplier or
manufacturer.
1.6.2. Preparing the Machine for
Working
Check that the vibration-insulated table (if present)
is working.
Caution!
In the event of a loss of pressure, the ta-
ble can drop and trap your fingers!
1.6.2.1. Preparing to Switch ON
The following instructions assume that the mask
aligner has been correctly installed and that the ma-
chine has been connected to the power supply net-
work by switching on the main power switch.
The following pressure values should be present on
the machine:
• Compressed air
5,5 - 7 bar (COMPRESSED AIR)

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• Nitrogen
2 - 3 bar (NITROGEN)
• Vacuum
-0.8 bar (means 0.2 bar absolute (VACUUM))
1.6.3. Safety Checks
The important safety functions of the machine
should be checked for safe functioning at regular in-
tervals - i.e at least every three months.
This applies as long as the check itself does not rep-
resent a hazard.
The following should be tested:
• that the machine stops immediately after the
Emergency Off switch is operated,
• acoustic warning signal by the power supply unit
in the event of a failure in the nitrogen supply -
only very brief for test purposes!

INSTALLATION AND TRANSPORT
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2. INSTALLATION AND TRANSPORT
Containers must be opened and the machine must
be transported and installed by a SUSS MicroTec
service technician or person authorized by SUSS
MicroTec.
Users who open containers with system compo-
nents or install or transport the machine without a
SUSS MicroTec technician or a person authorized
by SUSS MicroTec do so at their own risk.
Power connections and supply connections (com-
pressed air, nitrogen, etc.) at the installation site
must be completely installed by the customer before
installation so the machine can be connected.
2.1. Prerequisites for 
Installation
The following installation prerequisites must be met
before the machine can be operated optimally:
2.1.1. Ambient Requirements
• The machine must be installed on a vibration-free
surface since vibrations can negatively influence
the machine’s function. This surface must be
able to carry a load of 160 kg.
--> We recommend setting up the machine on a
SUSS MicroTec vibration-insulated base
frame intended for this purpose. 
(PN: G178845; please contact SUSS
MicroTec for detailed information)
• The machine must be installed in a clean room.
Impurities in the air have negative effect on the
machine’s function.
--> We recommend clean room class 6 acc. to
ISO 14644 equivalent to former class 1000
US FED STD 209E, or better.
• The room temperature and relative humidity
should be controlled at the setup site.
--> We recommend a room temperature
between 20°C (68°F) and 22°C (72°F) and a
relative humidity between 45 and 55% (not
condensing).
• The back of the machine must be at least 10 cm
(4 in) away from the room wall. 
See the figure „TOP VIEW with recommended
Maintenance Area“ for correct positioning.

FRONT VIEW
INSTALLATION AND TRANSPORT
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Dimensions of the MJB4 Mask Aligner

TOP VIEW with recommended Maintenance Area
INSTALLATION AND TRANSPORT
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Weight of the MJB4 Mask Aligner:
Weight: approx. 150 kg MJB4
200 kg base
Power Data:
Standard with
CPC200:
800 VA ; 230 V AC ±10% ; 
50/60 Hz
Standard with
CPC350:
1000 VA ; 230 V AC ±10% ; 
50/60 Hz
Standard with
CIC1200:
1300 VA ; 230 V AC ±10% ; 
50/60 Hz

Power overview:
(max power:)
CPC200 = 300 VA
CPC350 = 500 VA
CIC1200 = 800 VA
Machine = 250 VA
Ext. power =250 VA (standard)
Max. connected load = 16 A
Power cord: grounded 3-wire cable; 
3.0 m
INSTALLATION AND TRANSPORT
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Specifications for Automatic Circuit Breakers:
Suppl.SN <1792Suppl.SN >1792
V(AC) input 1
1. The CIC1200 only works with 230 V (AC) current
2. The new values (printed bold) are valid as of Supplier
Serial Number 179 (not to be confused with the MJB4
equipment serial number).
To find out to which group your MJB4 belongs take a look
at the name plate located on the inside of the rear panel of
the machine (see below)
Location of Supplier Serial Number
100-240 100-240
F1(A) 
Main Power
16 16
F2(A) Ext. Power 7,5 6
F3(A) Lamp
Power Supply 7,5 10
F4(A) Electronics 42
Supply Media:
Nitrogen: ca. 0,15 MPa, 
30 - 45 psi;
Consumption: Depends on lamp model; 
see table 1.
Vacuum: -0.08 MPa manometer reading 
(equals 0.02 MPa absolute)
Clean Dry Air (CDA):0,5 MPa 
acc. ISO 8573.1/12500
SEMI F28/F59/F101/S12
Consumption: ca. 1.0 m3/h, 35 scf/h
The machine has connections for pneumatic hoses
with a 6mm outer diameter or connections for pneu-
matic hoses with a 1/4 inch outer diameter. Hose
couplings for supply media connections are not in-
cluded.

INSTALLATION AND TRANSPORT
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Table 1: Settings for Lamp Cooling and Lamp Housing Extraction
Notes
Exposure lamp [W] 200
Osram
350
Osram
350
Ushio
500
Ushio
Nitrogen 
Main pressure
[bar] 1.5 1.5 1.5 1.5 ± 0,5 bar
Nitrogen lower
lamp base
[l/min] 2.0 3.0 3.0 4.7
(distributed
to both,
upper and
lower lamp
base)
Must be set by
service technician.
Adjustment by 1/
FM1-B10
Nitrogen upper
lamp base
[l/min] ---
Nitrogen 
Shutter
[l/h] 260 260 260 260 Must be set by
service technician
Diameter of
exhaust on
bottom
[mm] closed closed closed 100 required needs adapter tube
outlet temp.< 60°C
Notes reduced
DUV+Ozone
for DUV appl.
REVERSED
polarity!
Lamps that can be used:
• HBO 200 W/DC - PN: G191806
(additional lamp adapter required, item no.:
G189336)
• HBO 350 W-S - PN: G146 049
• USH 350 DS - PN: G182 538
UXM 501 MD - PN: G148 979
(additional lamp adapter required, item no.:
G202485)

FUNCTION SPECIFICATION REMARKS OPTIONS
Optics SUSS Diffraction Reducing Optics For high resolution
Micro Lenses (MO) 
optics for quick and easy
set of different illumination
angles by exchangeable il-
lumination filter plates (IFP)
Filters:
i-line, g-line, 
h-line, g/h-line
and transmis-
sion reduction
Spectral Ranges UV400: 350 ...450 nm
UV300: 280....350 nm
UV250: 240....260 nm
Types UV400
UV400 square
UV300/400
UV300/400 square
UV250
UV250/300/400
Micro Lenses (MO)
Intensity/ 
Uniformity
Measured with SUSS UV-
Optometer
200 W Lamp UV400, 100 mm round:
44 mW/cm² at 405 nm, Uniformity ± 4%
18 mW/cm² at 365 nm, Uniformity ± 4%
All values ± 10%
Definition of Uniformity:
max-min
max+min
MO with HR-IFP
(12 holes aperture)
MO with HR-IFP
(12 holes aperture)
350 W Lamp UV400, 100 mm round:
75 mW/cm² at 405 nm, Uniformity ± 3.5%
30 mW/cm² at 365 nm, Uniformity ± 3.5%
UV400, 100 mm square:
90 mW/cm² at 405 nm, Uniformity ± 3.5%
35 mW/cm² at 365 nm, Uniformity ± 3.5%
UV300, 100 mm round:
24 mW/cm² at 320 nm, Uniformity ± 3.5%
MO-UV400, 100 mm round:
65 mW/cm² at 405 nm, Uniformity ± 2.5%
24 mW/cm² at 365 nm, Uniformity ± 2.5%
500 W Lamp UV400, 100 mm round:
40 mW/cm² at 405 nm, Uniformity ± 3.5%
25 mW/cm² at 365 nm, Uniformity ± 3.5%
UV300, 100 mm square:
30 mW/cm² at 320 nm, Uniformity ± 3.5%
UV250, 100 mm round:
7.5 mW/cm² at 240 nm, Uniformity ± 5%
MO-UV400, 100 mm round:
36 mW/cm² at 405 nm, Uniformity ± 2.5%
22 mW/cm² at 365 nm, Uniformity ± 2.5%
MO-UV300, 100 mm round:
30 mW/cm² at 320 nm, Uniformity ± 2.5%
MO-UV250, 100 mm round:
7 mW/cm² at 240 nm, Uniformity ± 2.5%
INSTALLATION AND TRANSPORT
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Table 2: Optical Specification of Exposure Lamps

INSTALLATION AND TRANSPORT
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MJB4 Connections at the Rear Side for Machines with Serial Numbers < 179
2
3
5
6
7
8
9
10
1
4
1 Nitrogen
2CDA
3 Outgoing air
4 Vacuum
5 F2 - Lamp power supply
6 F3 - External power
7 F4 -Electronics
8 Lamp power supply AC 200-240 V/6 A
9 External power AC 200-240 V/6 A
10 External power 2, monitor AC 200-240 V/6 A

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14 - Original Documentation - SAFETY-INST MJB4 Rev09 17-03 INSTALLATION AND TRANSPORT
2
MJB4 Connections at the Rear Side for Machines with Serial Numbers > 179
2
3567
8
1
4
1CDA
2OFFAir
3 Vacuum
4 Nitrogen
5 Monitor Power Supply, AC 200-240 V/ 6 A
6 External, AC200-240 V/ 6 A
7 Lamp Power Supply, AC 200-240 V/ 10 A
8 Mains Connections, AC 200-240 V
F1 - Main Power
F3 - Lamp Power Supply
F4 - Electronics
F2 - External Power/ Monitor