SUSS MicroTec Delta10TT Guide

2
www.suss.com
MANUAL
OPERATOR
TECHNICAL
DOCUMENTATION
Spin Coater
Delta10TT
AK 200.347

TABLE OF CONTENTS
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TABLE OF CONTENTS
1 SAFETY INSTRUCTIONS
2 PRODUCT DESCRIPTION _____________________________________________ 1
2.1 Intended Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
2.2 System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
2.2.1 BM Model Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
2.2.2 TT Model Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.3 Media Required for Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
2.4 System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
2.4.1 Main Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.4.2 Additional Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.5 Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
2.5.1 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.5.2 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.5.3 Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.5.4 Noise Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 INSTALLATION SITE __________________________________________________ 1
3.1 Transportation and Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
3.1.1 Operating Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
3.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
3.2.1 Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3.2.2 Place of Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3.2.2.1 Mounting the Spinning Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
3.2.3 Dimension BM-Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
3.2.4 Dimension T-Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
3.2.5 Mounting the Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.2.5.1 Dimension Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.3 Starting Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
3.3.1 Placing the Chuck . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.3.2 Nivellieren. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.3.3 ConnectionMedia Supply and Media Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.3.4 Connectingto Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

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4 COMPONENTS AND CONNECTION ____________________________________ 1
4.1 System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
4.2 Spinning Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
4.2.1 Spinning Module (Underseite) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
4.2.2 Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
4.2.3 Controller backside . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
5 OPERATION _________________________________________________________ 1
5.1 The Spinning Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
5.1.1 General description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
5.1.2 Preparations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
5.1.3 Initalization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
5.2 Programming of Recipe-Number . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
5.3 Programming of Process Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
5.3.1 Programming Process Step 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
5.4 Operating the Spinning Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
5.4.1 SwitchingOn the Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
5.4.2 Starting the Spinning Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
5.4.3 Interrupting the Spinning Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
5.5 Problem Solving . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4
6 MAINTENANCE AND CLEANING _______________________________________ 1
6.1 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
6.1.1 Cover Closed Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
6.1.2 Emptying the Media Waste Bottle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
6.1.3 Emptying the Media Waste Container (Option) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
6.1.4 Checking the Exhaust Hoses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
6.2 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
6.2.1 Cleaning the Process Bowl . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
6.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
6.3.1 Disposal of the System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
6.3.2 Disposal of Chemicals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

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7 MECHANICAL DRAWINGS AND PARTS LIST ____________________________ 1
7.1 Drawing Whole Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
7.2 Vacuum coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
7.3 Parts List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3
TECHNICAL DOCUMENTATION
8 ELECTRICAL SCHEMATICS
9 CHUCK PROTOCOL
SPIN SPEED PROTOCOL
SYSTEM CHECKLIST

TABLE OF CONTENTS
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TABLE OF CONTENTS
1 SAFETY INSTRUCTIONS ______________________________________________ 1
1.1 General Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
1.2 Operating Personnel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
1.3 Transport and Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2
1.3.1 Mechanical Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.3.2 Hotplates Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.3.3 Electrical Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.3.3.1 Handling of Electronic Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.3.3.2 Electrical Drawer/CI Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.3.4 Chemicals Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.3.5 List of Hazardous Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.3.6 List of Items that become Solid Waste . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.3.7 Unintended Media Releases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.3.8 Symbols Used on System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3.8.1 Caution Symbols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3.8.2 Command Symbols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3.9 Emergencies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.4 Re-Installation of System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8
1.4.1 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.4.1.1 Separate materials: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.5 Analysis of Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10

SAFETY INSTRUCTIONS
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1 SAFETY INSTRUCTIONS
1.1 General Information
Prior to installation, starting and operation of the
system relevant safety instructions should be read
carefully and considered accordingly.
Persons charged with transport, storing, installa-
tion, starting, operation, maintenance and service
have to know the content of this manual.
This manual contains information and warnings to
be followed by the user to ensure safe operation
and to maintain the system in secure condition. It
should be located in a suitable place close to the
system.
In addition to this manual all valid, legal and other
local regulations concerning prevention of acci-
dents as well as protection of the environment are
applicable.
Please consider all instructions, in particular safety
instructions, in order to achieve safe operation of
the system.
Possible hazards harming the user or resulting in
damage to the system are clearly stated within ap-
propriate chapters of this manual.
Safety instructions plus important information are
marked in the following way:
Danger!
The word ”Danger!” combined with this or
a more specific symbol indicates an im-
mediate hazard while using the system.
Neglecting of instructions given in this
documentation or on the system itself can
result in severe personal injury or death of
the operator or of persons being close by.
The system, other equipment or the envi-
ronment can be seriously damaged as
well.
Warning!
The word ”Warning!” combined with this
or a more specific symbol indicates an im-
pending hazard while using the system.
Neglecting of instructions given in this
documentation or on the system itself can
result in severe personal injury of the op-
erator or of persons being close by.
The system, other equipment or the envi-
ronment can be damaged as well.
Caution!
The word ”Caution!” combined with this or
a more specific symbol indicates a pos-
sible hazard while using the system.
Neglecting of instructions given in this
documentation or on the system itself can
result in personal injury of the operator or
of persons being close by.
The system, other equipment or the envi-
ronment can be damaged as well.
Please consider all instructions, in particular safety
instructions, in order to achieve safe operation of
the system.
Advice contained in this chapter is intended to sup-
plement, not to supersede, the safety advice given
in other chapters of this manual and the general
safety code of behavior prevailing in the user’s
country.
1.2 Operating Personnel
This technical device may only be operated by qual-
ified and trained personnel.
No pacemakers!
No access for persons with pacemakers!
Emission levels way impact cardiac pace-
makers!
Please verify the following conditions:
• Minimum age of operator:
Observe the national regulations of your coun-
try.
• Transport and mounting:
Transport and mounting work requires person-
nel specially trained for such tasks.
• Connecting and handling of process media:
The handling of process media, hazardous
chemicals etc. requires appropriately trained
and informed personnel. Hazards for each
chemicalhave to be wellknown and precautions
strictly observed.E
• Electrical installations:
Electrical installations and repair work requires
appropriately trained and informed personnel.

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• Commissioning and operating:
Commissioning and operating of the device re-
quires appropriately trained and informed per-
sonnel. The complete knowledge of dangers
and hazards that can arise from operation and
processing is mandatory for each operator.
The Operating Instructions and other applicable
technical documents coming with the device
have to be thoroughly read and understood be-
fore using the device.
• Maintenance and repair work:
Maintenance and repair work requires appropri-
ately trained and informed personnel.
Prior to all maintenance work the device has to
be disconnected form mains/current and from
media supplies.
• Accident prevention:
National regulations for accident prevention
have to been known and observed.
1.3 Transport and Installation
Caution!
Ergonomic Hazard.
Do not lift heavy loads without assistance.
For carrying loads of
• < 18 kg (<40 lb.) one person is re-
quired
• 18 - 32 kg (40 - 70 lb.) at least two per-
sons are required.
• 32 - 55 kg (70 - 120 lb.) at least three
persons are required.
• >55 kg (>120 lb.) a forklift is required.
Caution!
Attempting to lift or move heavy object
without sufficient personnel or mechan-
ical assistance can cause damage to the
spine and can cause
Warning!
It is assumed that all basic planing work
concerning installation and all work re-
garding transport, assembly, commis-
sioning, maintenance and repair will be
carried out by qualified personnel and/or
monitored by responsible, skilled per-
sonnel.
Particular attention must be paid to the follow-
ing with regard to:
• The technical data and information concerning
permitted use (assembly, connection, ambient
and operating conditions) specified in the cata-
logue, order documentation, instructions and in
other product documentation.
• The general erecting and safety regulations,
• the local, system-specific specifications and re-
quirement,
• the proper use of tools and transportation devic-
es,
• the obligation of those responsible for installa-
tion to proved the employees with suitable safety
instructioninaccordancewithVGB4§7and§8
of the German accident prevention regulations.
This manual includes all instructions that must be
followed by qualified personnel in situations in
which the equipment is used to its intended pur-
pose.
1.3.1 Mechanical Hazards
Danger!
By applying components of other manu-
facturersadditionalandunknownhazards
may arise. No liability will be taken in this
case.
Use only genuine parts provided by the
manufacturer of the system.
Genuine parts are constructed con-
forming to applicable safety regulations.
Danger!
Moving parts may cause squeezing or
cutting of extremities.
Do not touch any moving parts of the
system while in operation.
Danger!
Operation of the system by several per-
sons may cause hazards based on mis-
conduct or missing mutual understanding.
Operation of the system by two or more
persons is not allowed.
If in case of service or maintenance tasks
the system has to be operated by two per-
sons, thesehave toconducta secure joint
procedure.
Danger!
The system may only be operated while
alldoorsandsafety coversareclosedand
any protection systems are properly posi-
tioned. Function of safety covers or doors

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has to be assured at any time.
In case of any safety deficiencies the
system has to be switched off and the ser-
vice personnel has to be informed accord-
ingly.
Danger!
Safety covers or doors may not be re-
moved (unless for service purposes).
The system may not be opened during
processing or after power failures or while
connected to mains supply.
Danger!
Spinning with an open cover (Open Bowl
option) is only allowed for personnel that
has been instructed on the dangers of ro-
tating chucks.
Danger!
Make sure that the GYRSET™ cover is
down if you do not operate the system for
more than 4 hours. Use the F button next
to the coater to close the cover in case of
lengthy idle time.
1.3.2 Hotplates Operation
Danger!
Hot surface
The hotplate will reach temperatures of
150°C based on option provided.
Touching of it may lead to serious injuries.
Don’t touch the hotplate surface!
The plate may still be hot, even when
switched-off.
Prior to any maintenance or repair work
please make sure that all heated parts
have reached ambient temperature.
Before touching any parts check the ac-
tual temperature displayed on tempera-
ture indictor.
Do not place any inflammable objects on
hotplate or close to it.
Warning!
Emergency Stop button
Thesystemmustnotbeoperatedwithout
an emergency stop button.
Warning!
Never open a hotplate during a running
processor or after a power failure.
Warning!
(HMDS hotplates only)
In case of a power failure the hotplate
cover may not be opened! Instead - after
operating has been re-established - the
hotplate has to be flooded with nitrogen
and vacuum in order to remove the
HMDS, which is poisonous (forced
cleaning step).
1.3.3 Electrical Hazards
Danger!
Electrical hazard
The system needs to be grounded in all
cases. Do not remove or cut off any
ground wire of power supply or inside the
system. Insufficient grounding can cause
additional electrostatic charging of plastic
parts, hoses or pipes, and the system as
a whole.
High Voltage!
This system operates under high volt-
ages. Dangerof highvoltages existseven
when the system is switched off, but still
connected to the power supply.
Danger!
Electrical hazard
While switched on, electrical connectors
will be live. Opening of covers or re-
moving of parts may result in exposure to
live parts.
Danger!
Electrical hazard
Capacitors within the system may be
charged even in case the system is
switchedoffanddisconnectedfrommains
supply line.
Danger!
Electrical hazard
Interchange of current-bearing wires may
result in danger for health and life of oper-
ator. Connection to the mains supply has
to be effected by a qualified electrician ac-
cording to prevailing regulations. Neutral
wire (blue) and ground wire (green/
yellow) have to be connected in due form.
No Pacemakers!
No access for persons with pacemakers!
Emission levels way unpack cardiac

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pacemakers!
Danger!
Electrical hazard
When the system is switched on, elec-
trical connections bear current. Opening
or removing components can make these
connections accessible.
Danger!
Electrical charging hazard
Duetoelectricalchargingplasticcompo-
nents or wiring, solvents and process
chemicalscouldbeignited.Therefore,the
system and its components have to be
grounded.
Danger!
Emergency stop button
The complete system has to be equipped
with an emergency stop button.
Danger!
Under no circumstances use makeshift
fuses or short-circuit any fuse holders.
Waning!
Max. chuck rotation 0-10,000 rpm, de-
pending on type:
2“(50mm):.............10,000rpm
4“(100mm):.............9,000rpm
6“(150mm):.............8,000rpm
8“(200mm):.............6,000rpm
Additional safety information:
• Do not take actions on the system other than de-
scribed in this manual.
• Do not operate the system while covers or other
protective systems are removed.
• Maintenance and service work may only be exe-
cuted by the manufacturer’s service personnel
or persons qualified accordingly.
• is connect all wires of power supply prior to
opening of the system. In case work has to be
done while the system remains open (for adjust-
ments, maintenance etc.) it should only be done
by qualified personnel, knowing all potentially
dangerous points and being able to prevent haz-
ards by taking appropriate precautions.
• In case fuses have to be replaced make sure
that only fuses of same type and current rating
will be used.
• In case of insufficient grounding or of damaged
ground conductormake surethatthe systemwill
be inoperable and secure it against unautho-
rized or unintentional operation.
• Whenever it is likely that the system is no longer
electrically safe, make it inoperable and secure
it against any unauthorized or unintentional op-
eration.
The system is likely to be electrically unsafe if:
- any damage is visible,
- it fails to perform according to specification,
- it has been subject to prolonged storage un-
der unfavorable conditions,
- ithasbeensubjecttoseveretransportstress.
In these cases the safety state of the ma-
chine has to be checked by the manufactur-
er’s service personnel.
1.3.3.1 Handling of Electronic Components
Electrostatic discharges can cause damage to
parts. When handling electronic components sever-
al precautions are essential:
• Wear a grounded wrist strap or work on a
grounded static-dissipating work surface. If this
not possible touch an adjacent earth ground (i.
e. central heaters or water pipes) before han-
dling electronic components or printed circuit
boards.
• Leave electronic components and printed circuit
boards in their original packaging until final in-
stallation.
• Handle electronic components by their body or
case, avoid touching of leads.
• Keep electronic components and printed circuit
boards away from such static-generating materi-
als as styrofoam, vinyls, plastic bags, wraps, en-
velopes, bubble pack foams, etc.
Maintenance and repair work required, but not list-
ed in this manual, should only be done by the man-
ufacturer’s service personnel or by persons of
equivalent qualification.

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1.3.3.2 Electrical Drawer/CI Box
Danger - High Voltage!
Electrical equipment is behind the covers.
Access only for qualified and authorized
persons and if the system is switched off.
1.3.4 Chemicals Hazards
Chemicals are provided and applied by the user.
Proper handling of chemicals is the user’s responsi-
bility.
Danger!
Explosive chemicals!
When using explosive media or explosive
combinationsofmedia,thesystemshould
have functioning gas sensor and control
unit. Also an exhaust controlling unit.
Thegassensordetectsgas concentration
inside the system, especially near elec-
trical installations and motors.
Danger!
It is the user’s responsibility to mark all
containers and supply lines of chemicals
(i.e. containers of media and waste) with
appropriate labels and warning signs.
Danger!
When handling chemicals, observe rele-
vant safety regulations as well as sup-
plier’s information (safety data sheet and
additional advice).
Danger!
When handling chemicals, ensure proper
ventilation and exhaustion of vapors.
Danger!
When handling chemicals, please ob-
serve that released chemicals may react
with each another, leading to unwanted
and unknown substances. These sub-
stances may bear major additional risks.
Danger!
Solvents
Inflammable, explosive, toxic
- Do not inhale its vapors
(danger of suffocation).
- Prevent electrostatic loading.
- Keep away from ignition sources.
- Do not smoke near the system.
- Do not eat near the system (danger of
poisoning).
- Do not touch.
Danger!
Process chemicals
Inflammable, explosive, toxic
- Do not inhale its vapors (danger of
suffocation).
- Prevent electrostatic loading.
- Beware of ignition sources.
- No not smoke near the system.
- Do not eat near the system (danger of
poisoning).
- Do not touch.
Danger!
Corrosives, Inflammable, explosive, toxic
- Do not inhale its vapors
(danger of suffocation).
- Prevent electrostatic charging.
- Beware of ignition sources.
- Do not smoke.
- Do not eat (danger of poisoning).
- Avoid contact to eyes.
- Do not touch.
Danger! Gases
Inflammable, explosive, toxic
- Do not inhale (danger of suffocation).
- Prevent electrostatic charging.
- Beware of ignition sources.
- Do not smoke.
Danger!
In case corrosive, gassing or noxious wet
media are applied you have to prevent
any peril to your staff by all means.
Danger!
Explosive chemicals
Processing substrates containing BCB or
polyimides may require organic solvents
fornegativedevelopment.Thosesolvents
or combinations of them can be haz-
ardous or explosive.
Danger!
Explosive chemicals
When using explosive media or explosive
combinations of media, the system may
never be operated without permanent ni-
trogen blow-off.
Nitrogen blow-off reduces the concentra-
tion of media inside the process chamber.
Permanent exhaust has to be ensured.

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1.3.5 List of Hazardous Materials
Note!
Only use the materials prescribed by the
manufacturer.
The use of other materials than the pre-
scribed is not allowed without written ok
from SUSS MicroTec Lithography GmbH.
Always wear recommended protective
equipment (safety goggles, gloves, face
shield etc.) in accordance with the haz-
ardous materials you are handling.
Consider and observe Material Safety
Data Sheets of the corresponding mate-
rials.
Hazardous
Materials Type of Material
Lubricants
•THKAFE
Avoid contact with benzine and diluent.
Max. operating temperature 80°C.
• Special Grease Klüber
• STABURAGS NPU 12/300
•ISOFLEX
®NBU 15
•FINLUBETF
• FIN Assembly grease
Cleaning chemicals
The kind of solvent depends on process chemicals used.
• Isopropyl alcohol (IPA): used for cleaning
Cleaning agent Isopropyl alcohol is a flammable solvent and must be used in accor-
dance with Federal, State an dlocal requirements. Some environmental regulatorory
restrictions may exist concerning the total amount of such solvents allowed at a fa-
cility. Proper precautions must be taken in the storage, use and disposal of the
chemical which should be treated as hazardous material.
Warning!
Isopropyl alcohol (IPA) is flammable. Use in well-ventilated areas, away
from flames and sparks. Avoid skin contact and breathing vapors.
Warning!
Flammable solvents can cause injury or death if ignited. keep all sources of
ignition away. Only properly trained personnel should be engaged in han-
dling the cleaning agent isopropyl alcohol.
• Benzine (Kerosine): used for cleaning
Benzine is a flammable solvent and must be used in accordance with Federal, State
and local requirements. Some environmental regulatory restrictions may exist con-
cerning the total amount of such solvents allowed at a facility. Proper precautions
must be taken in the storage, use and disposal of the chemical which should be
treated as hazardous material.
Warning!
Benzine is flammable. Use in well-ventilated areas, away from flames and
sparks. Avoid skin contact and breathing vapors.
Warning!
Flammable solvents can cause injury or death if ignited. Keep all sources
of ignition away. Only properly trained personnel should be engaged in
handling Benzine.

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1.3.6 Listof Items that become Solid
Waste
1.3.7 Unintended Media Releases
it is most important to conduct a thorough visual
check of the system on a daily basis.
We recommend checking hoses and hose connec-
tions as part of the routine maintenance. This also
includes:
- Daily checking of media lines for escaping
liquid.
- Daily checking of external exhaust and drain
connections
- Daily checking of the central filling of media.
Media drawers and drip pans are equipped with
leakage sensors. These sensors are used to detect
escapingliquid. Incaseofaleakagealarman alarm
message in given at the Tool Controller.
For more detailed and complete information about
the safety installations the system is equipped with
please refer to chapter 3.
Items To Do
Parts contaminated
by resist Clean contaminated parts using corresponding solvent. Therefore see respective Material Safety Data Sheet (MSDS) of the supplier.
Heavilycontaminated
parts
Disassemble heavily contaminated parts.
Note!
Never clean heavily contaminated parts in or in the vicinity of the system.
Take contaminated part away from system and clean it below a conduit, if
available.
Filter Units
Dispose of filter unit according to the local and environmental regulations.
Note!
A used filter unit can not be disposed of in domestic refuse.
Warning!
Wear chemically-resistant garment and eye protection during filter change-
out.
Electronic Parts,
Boards Dispose of electronic parts, boards according to the local and environmental regula- tions.

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1.3.8 Symbols Used on System
The following safety instructions (caution and com-
mand symbols) may be seen on the system.
1.3.8.1 Caution Symbols
General hazard
Electrical hazard
Fire hazard
Corrosion hazard
Toxic hazard
Explosion hazard
Squeezing hazard
Hot surface
Pacemakers
1.3.8.2 Command Symbols
Wear safety goggles
Wear protective gloves
The above symbols refer to manufacturer’s compo-
nentsandparts.However, componentsandpartsof
sub suppliers may show other symbols, not ex-
pressly mentioned or referred to in this manual.
Danger!
The owner of the system is responsible to
place adequate danger signals and labels
in suitable places.
This applies in particular to signals and la-
bels concerning process chemicals used.
Irrespective ofnumberofcautionsymbols
and information placed on or around the
system all safety instructions of this
manual have to be observed
1.3.9 Emergencies
In case of an emergency (accident with
material or personal damage), please ob-
serve the following instructions:
Danger!
In case of an emergency immediately
push the emergency stop button of the
system and a wait complete stand-still of
the system within a safe distance.
Prior to checking of risk area operate the
main switch and disconnect the system
from mains and media supply (i.e. com-
pressed air, nitrogen, cleaning medium,
and other).
Danger!
Reactivation of the system after an emer-
gency stop may only be done by qualified
persons. Prior to restarting, the system
has to be checked for eventual hazards.
Danger!
In case of emergency while handling
chemicals (i.e. cleaning or developer
media), please call immediately for a
safety expert or for a physician and act
according to instructions of the data sheet
of the applied process chemical.
1.4 Re-Installation of System
For re-installation, refurbishment or reuse of the
system the following actions have to be carried out:
Warning! - Toxic chemicals
Toxic chemicals may be present.
Contact with these chemicals and/or inha-
lation of their vapors may result in ever
health risk.
Warning! - Irritating media
Warning of harmful to health and irritating
media.
Observe and consider the Material Safety
Data sheet of the corresponding media.

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Always wear safety goggles, gloves and
protective clothing when working with
hazardous materials.
• Drain all chemical and cooling liquid lines of the
system.
Note!
Disposalof drained liquidaccording to the
corresponding local and environmental
laws and regulations.
• Clean all contaminated parts.
• Disposal of consumable (filters) according to the
corresponding local and environmental law.
1.4.1 Disposal
Warning! - Toxic chemicals
Toxic chemicals may be present.
Contact with these chemicals and/or inha-
lation of their vapors may result in severe
health risk.
Warning! - Irritating media
Warning of harmful to heath and irritating
media.
Observe and consider the Material Safety
Data sheet of the corresponding media.
Always wear safety goggles, gloves and
protective clothing when working with
hazardous materials.
Note!
Ensure that drained liquid, contaminated
materials, used chemicals etc. are de-
posed of according to the applicable local
and environmental laws and regulations.
1.4.1.1 Separate materials:
• Forward al used piping to a special waste dis-
posal process.
• Forward all electrical/electronic parts (boards) to
a special waste disposal process.
• Forward plastic parts to a recycling process.
• Forward metals (Stainless Steel, Aluminium) to
a recycling process.
• Chemically used in processes have to be dis-
posed of according to the applicable local and
environmental laws and regulations.
Prior to sideposal always consider and observe
the corresponding Material Safety Data Sheet
(MSDS) for detailed information.

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1.5 Analysis of Hazards
Hazard Preventive measures
1 Squeezing/shearing of hand or fingers
during maintenance work within the
range of moving parts.
Cleaning and maintenance work is to be ef-
fected by specially qualified persons only.
No bypassing of safety installations
Disconnect from power and media supply
prior to maintenance work.
Spinning chuck and dispense arm are
switched off as soon as the safety door
opens.
2 Squeezing of hand or fingers when
reaching to the rotating chuck.
Squeezing of hand or fingers while
closing the cover lid.
Chuck stops when cover is open.
The safety door prevents parts from es-
caping.
3 Burning of han dor fingers by touching
substrate, hotplate or cover lid. Temperature controller diplays actual tem- perature.s
4 Don´t use the machine of the sensor
isn´t working. see chapter 6.
1
2
4
3

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2 PRODUCT DESCRIPTION
2.1 Intended Use
Delta10BM/T spinning system is applied exclusive-
ly to coat, dry, clean and develop wafers and sub-
strates using spinning techniques, according to the
specifications agreed upon mutually.
Delta 10BM/T is applied exclusively to process sub-
strate with sizes up to:
max. . . . . . . . . . . . . . . . . . . . . . . . . . . . ∅ 150 mm (6“)
max.................. 4“x4“(100x100mm)
The substrate is put on specially constructed
chucks.
Possible applications:
• test or small series productions in laboratories
and research institutions.
• large series productions in industrial clean room.
Danger!
The system is not suited or designed for
any other applications than the ones
stated above.
Any modification of the system requests
manufacturer’s prior consent as well as
his confirmation in writing.
Danger!
Without proper protection the system is
not suited for the application of explosive
or hazardous chemicals.
Our products are continuously modified and im-
proved due to innovation, legal requirements and
standards. As a consequence, the information giv-
en in this documentation may not accurately reflect
everydetailofthesystemactuallydelivered.Please
contact the manufacturer in cases of uncertainty.

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2.2 System Components
2.2.1 BM Model Overview
The spinning bowl is mounted into a aluminium
plate. The vacuum indicator shows the vacuum
[bar] if the vacuum switch is on.
The spinning bowl is covered by a transparent cov-
er which is manually operated. The spinning motor
stops whenever the cover is opened.
The controller is used to program and operate all
system functions
5
1
No.: Denomination
1 Spinning bowl
2Controller

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2.2.2 TT Model Overview
1
2
No.: Denomination
1 Power and vacuum inlet
2 Connection for waste air exhaust

PRODUCT DESCRIPTION
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2.3 Media Required for Opera-
tion
According to the version following media are re-
quired for the operation:
• Compressed air (Option)
• Nitrogen (Option)
• Vacuum
• DI-Water (Option)
• Coating media (e.g. resist, option)
• Chemicals (e.g. developer or cleaning media,
option)
• Exhaust (option)
For detailed information and connection values see
chapter 3.
2.4 System Configuration
2.4.1 Main Components
•AC-Servomotor
• Programmable controller
• Process time programmable between 1 and 999
seconds.
• Programmable rotation speed between 100 and
6,000 rpm ± 50 U/min.
• Programmable acceleration ramp, 10 steps
• Upto10processsteps
• Vacuum indicator
• Vacuum switchable.
2.4.2 Additional Components
• Vacuum chuck
• Low contact chuck
• Adapter for media supply
• N2 blow-off, manually switchable
2.5 Technical Data
2.5.1 Dimensions
Delta 10BM
Mounting dimensions
Spinning module
Lenght:...........................305mm
Width:............................305mm
Depth:...........................285mm
........................without waste bottle
.............................. (45°edges)
Controller
Width:............................214mm
Height:...........................108mm
Depth:...........................320mm
Overall dimentsions
Spinning module
Length:...........................325mm
Width.............................325mm
Depth:...........................330mm
Controller
Width:...........................233,3mm
Height:..........................142,5mm
Depth:...........................320mm
Delta 10TT
Housing
Length:...........................630mm
Width.............................340mm
Height:...........................346mm
2.5.2 Weight
ModelBM:....................approx. 15 kg
.........................withoutpackaging
ModelTT:.....................approx. 20 kg
.........................withoutpackaging
2.5.3 Requirements
Electrical
Powersupply:.................110/230VAC
................................ 50/60Hz
.............................mind.6Amp.
Powerconsumption: .................0,5kW
............EmergencyOFFusesafetysocket

PRODUCT DESCRIPTION
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110V:......................... max.4.5A
230V:......................... max.2.2A
Vacuum
Hose connection: . . . . . . . . . . . . . . . . . . . . ∅ 5/3 mm
Vacuum:..................... -0,8± 0,2 bar
...............................controlled
Media Waste
System:.......................Wastebottle
Exhaust
Connection:......................... PG11
Danger!
The unit may never operated without
system connected.
When operating without exhaust system
hotplates and other components installed
may be ruined and media fumes may be
set free.
Chemicals
Chemicals to be provieded and applied by the user.
Danger!
Whenhandlingchemicals pleaseobserve
relevant safety regulations as well as sup-
plier‘s instructions (safety data sheet plus
additional instructions).
2.5.4 Noise Emission
Noiseleveloftheunit:...............<70dbA