SUSS PM5 User manual

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Contents
Safety Instructions
Manufacturerlnformation
Introduction
Scope of the Document
Purposeof the System
AcceptanceTest
Training
Safety
General Safety Precautions
General Requirements
Lockoutand Tagout Procedure
RiskValuation
User lnformation
Ergonomiclnformation
Clearances
DisplayUnits
Requirements
FacilityRequirements
EnvironmentalRequirements
NoiseLevel
RF Frequencies,ElectrostaticDischargeandNon-IonizingRadiation
Mechanical Requirements
Vibration RequirementsandEarthquakeProtection
Media Requirements
Vacuum
CompressedAir
Power(onlyforaccessories)
PowerDisconnection
Main Componentsof the System
Typical SystemLayout
The Basic Prober
BaseFrame
ChuckStage
PlatenAssembly
Microscope
Non-electricalUtilities
Electrical Utilities
OpenConnections
Accessories
MaterialRequirements

Installingthe Z StrokeandChuck
Assemblingand Installingthe Microscope
ProbeHeads
Operation
Start Up Procedure
SystemOperation
ProbecardTesting
AnalyticalProbing
MechanicalAdjustments
Chuck PlanarizingProcedure
PlatenLevellingProcedure
Scope LevellingProcedure
MicroscopeStagePneumaticUpIDownAdjustment (optional)
Controls
ChuckStageAdjustment Controls
PlatenControls
PlatenProbeHeadMountingOptions
MicroscopeControls
ProbecardAdapter
Text Tool SocketAdapter
ConnectorTerminals
Maintenance
Preventive Maintenance
AnnualOperationalCheck
Lubrication
General Maintenance
Visual Checks
InstrumentOperation
Bulb Maintenance
Troubleshooting
The Stage IsDifficultTo Move
The Wafer DoesNotHoldOnThe Chuck
The Pneumatic Microscope
Lift DoesNotFunction
Appendix
EquipmentDataBaseUnits
InstallationChecklist
Health HazardAnalysis
ProcessHealthHazardAnalysis
Useof Instruments
Safety Concept
Radiation
Earthquake Safety
Total RiskEvaluation
Warranty andLimitations

Safety Instructionsand Symbols
Achtung, bewgte TaHel Vedelzur?gsgefahrf Im slngescha~en Zustand nkht
hheingmtfen!
Attenth, movlng parts! Danger d in)wyi Do not touch tIm msEhkrs when
swkched on!
Attention, pikas en mouvm! Risque de bfeasures! Ne pas tourher pendant
le fondiwrwmsnt de la mwhhal
Attedone, parti h m~o! P&mb, non Wre se la macdna B in
funziwwl

Manufacturer Information
System: ManualProbeSystem PM5
Manufacture Date:
This manual has beenwritten for systems
that were builtfrom
1998.
Manufacturer: SUSS MicroTec Test Systems GmbH
Siiss - Strasse 1
0-01561 Sackabei Dresden
Germany
Tel:
[+49](0)35240 - 73 - 0
Fa: [+49](0)35240 - 73 - 700
Email: [email protected]
For maintenance and repairs, contact our service departments:
Germany:
Tel: [+49](0)35240 - 73 - 2201-221
Fax:
[+49](0)35240 - 73 - 722
Email: [email protected]
Japan:
Tel: [+81]45 - 931 - 5600
Fax:
[+81]45 - 931 - 5601
Asia:
Tel: [+66]2 - 938 - 44 - 261-27
Fax:
[+66]2 - 51 2 - 5569

1 Introduction
1.1 Scope of the Document
This documentcontains thefacilities design and equipment installation requirements
for the PM5andconformsto SEMI E6and SEMIS13 guidelinesandformats. Design
andinstallationrequirementsvarywitheachownerand project. Thereforethisguideline
is designed to cover all possibletasks that can be carried out usingthe equipment.
The successful installation and operation of semiconductor equipment is the mutual
objective of the owner, the operator, the installer and the supplier. Within the
semiconductor industry, the diversity and complexity of equipment have created
significant problemsfor those who design the facilities and install the systems. It is
difficulttostaycurrentwiththeeverchanging requirementsnecessaryforthe individual
pieces of equipment. As a result, it is also difficultto guaranteethat the facilities will
meetthe needs of each piece of equipment.
It is recommended that this manual is read and understood thoroughly before any
work isstartedwiththePM5andthatallsafety instructionsaretaken intoconsideration.
1.2 Purpose of the System
TheSUSS PM5analytical probesystem is intendedforthe preciseanalysis of wafers
andsubstrates upto 150mm (6"). Itcan be usedfor DCand
HF measurementsand
isalsosuitableas afailureanalysistoolallowingthe useof upto 12SUSSprobeheads
at onetime.
The PM5 conforms to the EEC EMC Guidelines (89/336/EWG including all
corresponding alterations) and to the German EMVG law (for the electromagnetic
tolerance of devices) from 1
81h September 1998.
The electrical assemblies which belong to and are delivered with the system are
listed on the Delivery Note according to configuration. You will receive this with the
delivery of the system. All parts of the system therefore correspond to the EC
Conformity Declarationfor PM5.
Furtherelectricalassemblies (accordingto EMVGuidelines)can bedelivered as long
asthey appear inthe SUSS accessory guide.
The PM5conformsto EN 61010
- 1 : 1993-04which correspondsto UL 3101-1 : 1993
and IEC1010-1
: 1992.
1-3 Accentancc? Test

6
2 Safety
IMPORTANT: This section contains informationthat the operator must know
and understandto minimizethe risk of injuries.This information
is consistent with German local and federal safety regulations.
SUSS equipment is designed to protect the user against all possible hazards. After
review by qualified safety personnel, the user should generate specific safety
procedureswith regardto the particular application ofthe equipmentand localcodes.
Itshould also be made certain that operators are familiar with the procedures. Ifthe
equipment is being usedto probe high voltage devices, the safety proceduresshould
alsobe postedinanobvious locationwhere all operators of theequipmentcannotfail
to readthem.
A 2.1 General Safety Precautions
1. Read and understandthe User manual before usingthe system.
2. This system must be handled carefully to ensure no harm comesto the user.
During usethere isthe danger of crushing, tripping, burningor beingcaught
up inthe equipment. Thesedangers cannot beavoided dueto the function of
the devices but any possible danger areas are labelledwith the signs onthe
following pagesand will also be highlighted throughout this manual. These
should be studied carefully inorder to avoid any unnecessary risk.
Donotreachintothe proberwhen it is plugged intothe mains. Avoid reaching
intothe chuck area as there is a danger of getting caught. The reararea is
open when workingwith a probe adapter which increasesthis risk.
Never usethe equipment with an open or removed safety cover as
this will increasethe danger of injurythrough moving parts.
A
6.
The device is underlow voltage (upto 28 V DC). Incaseof equipmentfailure
the lowvoltage can bepresent untilthe operator switchesthecurrentoff atthe
main switch. Do not touch the electrical connections.
7. Do nottouch the probehead needles with your fingers as this will
dirtythem and may result in injury.
A
Pleasetake noteof the nationaland international safety regulationsfor example
- , .

7
2.2 General Requirements
Safety relatedchecksshould be performedinaccordancewith supplierspecifications
prior to the system acceptance. These safety checks which are carried out at
installation, should be accepted by boththe supplier and the customer.
The installationsiteacceptancetest shouldbesignedbythesupplierandthe customer.
The following test should be performed prior to acceptance in orderthat the system
meets certain requirements:
Statement of Conformanceto SEMI
S2
Safety interlocksfunction and shut-down correct hazards
Ability to lock out hazardous energy sources prior to
maintenance
Site-specific installationdoes not degrade the tools'ergonomic designfactors
Interfaceto building systems function as intended
Radiofrequencies, electrostaticdischarge and non-ionizingradiation.
ElectricalPrecautions
A
When probing highvoltage devices, lethalhighvoltages may bepresent atthe probe
tips, probe head connectors and on non-shielded or non-isolated probe arms. It is
therefore essential that the operator avoids coming in to contact with these system
components during testing.
MovingParts
A
The operator should becarefulto keep loose clothing or long hairfrom gettingcaught
inthe system.
The operator should be careful when raising and loweringthe microscopeto prevent
trapping histher hands.
llluminator bulbs get very hot. Personnel replacing bulbs should be careful to allow
adequatetimefor the bulbto cool down before replacing it.
Laser Precautions
A
The prober may beequippedwith a lasercutter. Avoid eye and skinexposureto
direct or scattered radiation. The accompanying manual should be readthoroughly
hofnr~tho lacor rl ~ttoric I tend
All cafnttr inctrl~rtinnc rn~ ~cthntcaltnn intn

8
2.3 Lockout and Tagout Procedure
For safety reasons,this procedure is only necessaryfor devices containingelectrical
or non-electrical parts which store hazardous energy. As
SUSS probers do not
contain such parts, this procedure is not applicable.
A 2.4 Risk Valuation
A
Thefollowing risks correspondto KSD risk valuation categories.
Reaching in during normal operation is not necessary.
A
Reaching in with a bare hand in the case of a default without stopping the system
doesnotproduceany immediatedangerthe movingpartsare restrictedandtherefore
unableto squashanything inside.
2.5 User Information
A
It should be noted that the position of the system is important where safety is
concerned. If
SUSS recommendations are taken into consideration and followed
injury riskscan be kept minimal.
2.6 Ergonomic lnformation
A
Note :
The user should take into considerationthe ergonomic conditions
according to the demands of SEMI. It is the responsibility of the
customer to ensure that these requirementsare met.
Transient overvoltage
Pollutiondegree
Vacuum supply
Air pressure supply
Usage position
As per overvoltage category II
Grade 1 as per IEC 664
Lessthan 200 mbar (-0.8 bar gauge)
Filtered, dry, oil-free air of at least
4 bar,
max. pressure is
10 bar
Probe station
- horizontal

9
2.6.1 Clearances
Itshouldbenotedthatthesemeasurementsare intendedfor anaveragesizedperson!
Recommended liftover height
(loading wafer onto
chuck)
Microscopeeyepieces
2.6.2 DisplayUnits
890 mm - 965 mm
loll mm - 1364 mm
SEMl hasprovidedguidelinesinorderto makeaccessand maintenanceeasier,thus
creatinga saferworking environment.The PM5Analytical Proberisinfullcompliance
with SEMl S2-93, SEMl
S8-95 "Safety Guidelines for Ergonomic/Hurnan Factors-
Engineeringof Semiconductor ManufacturingEquipment".
User in sitting position
Height of high usage controls
Height of low usage controls
762 mm - 1067mm
533 rnm
- 1397mm
User in standing position
Height of high usage controls
Height of low usage controls
940 mm - 1270 mm
813 mm
- 1651mm

10
3 Reauirements
A
I
Note: All values given inthis sectionare dependenton the rangeof equipment
that has been ordered.
3.1 Facility Requirements
3.1.1 Environmental Requirements
The system should be locatedinan area which is as free as possiblefrom dust and
acid fumes. It should be placed on a vibration isolation table or other stable table
capable of firmly supportinga weight of 100kg; minimum surface dimensionsshould
be 490 mm wide and 490 mm deep with an approximateworking height of 480
mm.
It is recommendedthat the PM5 is set on a SUSS vibration isolatingtable as a VIT
makesa mechanicalunittogetherwiththe basicproberequipment. As this equipment
has bracketsand other mechanismsto secure for earthquake andtremor protection,
drifting will not occur. Please ask your
SUSS correspondentfor moreinformation.
Temperature
Humidity
Max. rate
of
change1
hour
Not
specified
Not
specified
Tool area
Support
Equipment
Area
Optimal
operating
range
minlmax
("C)
19 - 24 "C
19 - 24 "C
Operating
range
minlmax
("C)
5 - 40 "C
5 - 40 "C
Target
temp.
("C)
22 "C
22°C
Tolerance
+I-
IK
lK

11
3.1.3 RFFrequencies, Electrostatic Discharge and Non-Ionizing
Radiation
This equipment does not produce dangerous electromagnetic radiation,
electromagnetic interference, radio frequency, acoustical vibrations or electrostatic
discharge.
The PM5 system is class A equipment and is designed for use inlaboratories.
During operation or service the user should avoid touching unearthed contacts. In
equipmentoperationor serviceitisthe user'sresponsibilityto unloadunearthedparts.
3.2 Mechanical Requirements
3.2.1 Vibration Requirements and Earthquake Protection
This equipment does not producevibrations. Incase of vibrationsensitivity, however,
it is suggested that the PM5 is set on a vibration isolation table in order that the
equipment isnotdisturbed by movementfrom outside i.e.: earthquakesortremors,to
provide maximumversatility.
3.3 Media Requirements
3.3.1 Vacuum
Morethan 24"of Hgor lessthan 200 mbar (lessthan -0.8 bar gauge);consumptionis
negligible so the flow rate is insignificant. All connections to house vacuum system
should beseparateto avoidvacuum interference.
3.3.2 CompressedAir
Only necessary if pneumatic microscope lift option is present. Approximately a
minimum of 4 barto a maximumof 10bar; consumption is negligibleso the flow rate
is insignificant.
3.3.3 Power (onlyfor accessories)
U.S. Market
The system requiresfour grounded (3-prong) 11 OV/60Hz/20A outletswithin 1.8m of
the unit location;two duplex outlets may also be used.
International Market

Main Components of the System
Typical System Layout
Platen travel
Vacu
u m
distributor
/ CON~C~:' \I.":"" \ stage drive and rest
separation stroke
Z stroke and chuck adjustment
Contactlseparation Base frame
stroke lock

4.2 The Basic Prober
77
Manual tilt
Side view with manual tilt microscope movement and platen supports
Pneumatic Microscope adapter
microscope
/ - Microscope
fixture
m
bridge
Platen

14
4.2.1 Base Frame
The baseframe rests onthree levellingfeet; an aluminum base plate is located inthe
centeroftheframealongwith amicroscopemountingbridge. Together,these elements
providea stable mounting surfacefor the wafer stage, probe platen and microscope.
4.2.2 Chuck Stage
The chuck stage hasa loadstrokelimitedto 90 mm inthe Y direction. The movement
in X and Y is 155 mm (coaxial). The
Z axis fine movement is 0..3 mm within the
adjustable height rangeof 0-10 mm. Thetheta movement is usually 360" unless it is
limited bythe use of a thermochuck and thefine theta adjustment is 10".
Chuck Groundingand Biasing
The chuck is isolated from ground and includes ajack that can be usedto ground or
bias the chuck.
4.2.3 PlatenAssembly
The platenissupported by 2 Z axiscolumns,oneforeachhalfofthe platen,containing
precisionspindles and ball bearingcages.
The platen assembly provides 45 mm of adjustment and 0.4 mm of contact and
separationtravel. The imageremainsinfocuseven at highest magnification because
thechuckandthemicroscoperemainconstantduringcontactlseparationmovements.
The platen provides a mounting surface for four probe head mounting options: full
surface vacuum, semiring mechanical SUSS clamping, semiring vacuum/magnetic
and boltdown. Each side of the platen will accommodate either four PHI50
ProbeHeads,six PHI00 ProbeHeadsor two microwave ProbeHeads.
4.2.4 Microscope
The X-Y stage assembly for the microscope issupported by a bridge. The assembly
has adjustment knobs for
X and Y control mounted on the sides. An adapter with
microscope lift mounts on top of the microscope stage. Several microscope types
are available and each has its own separate adaption kit. Please ask your SUSS
representativefor more information.
4.2.5 Non-electricalUtilities
If the system is equipped with acccessories that require vacuum, nitrogen or
compressed air, connect these as necessary.
Two earth contacts can befound onthe PM5 base system: on the outer side of each
-I-&-- L-11

extra care when connecting other components. Generally all plugs and jacks will
have number orfunction labelsto matchup. The strapping wires should be mounted
properly and laid so that accidents can be ruled out.
A
Note: Unused jump cables must not be used for anything else.
4.2.8 Accessories
A wide range of compatible accessories are available for use with a PM5 system,
A
please refer to our catalog or brochuresfor further details.
Please refer to the separate user guides before starting work with any
accessories that have been ordered and delivered with the base system.
5 Material Requirements
5.1 Wafer Handling
YES / W
Wafers are inserted manually,one at a time, intothis equipment
YE / NO
This equipment is provided with a single-wafer transport mechanism
andportincompliancewithSEMI
E8 (SpecificationforWaferTransport
Systems: Interface Co-ordinates)
YES / NO
Wafers are inserted into this equipment in wafer carriers (cassettes)
5.2 Wafer Carriers
This equipment does not accept wafers delivered in SEMI standard carriers
(cassettes).
5.3 Wafer Alignment
Wafer flatlnotch alignment is not required.

6 Installation
6.1 General lnstallation and Systrem Specifications
Priorto the shipment of your probesystem, it is possible to obtain details concerning
the utilities and space requirementsfor your probe system.Havingthe work areafully
prepared will expedite and ensure a complete installation. Please ask your sales
representativeforfurther details. We recommendthat all potentialusersofthe system
be scheduled for training subsequent to installation so the system will be used at its
full potential.
ProbeHead Platen
Range of travel
Contactlseparationstroke
Repeatability
Utilities
40 mm
0.4 mm
1 IJm

17
6.2 Shipping and Receiving Requirements
6.2.1 Receivingthe Shipment
SUSS will provide your company an estimated date of arrival before shipping the
equipmentto yourfacility. Ifthereareanyspecialrequirementsat your site concerning
shipment and receipt of containers used to pack the probe system, please get in
touchwithourCustomerSewice Departmentimmediately.Uponarrivalof theshipment,
the containers should be inspected for evidence of damage or mishandling. It is
importantthat your shipping departmentpersonnelnoteanydamagetotheequipment
onthe paperwork which they sign for the carrier.
6.2.2 Clearances Requiredfor Containers
The numberandweight of the boxesinwhichthe PM5 will besenttoyou isdependent
onthe size of the order you have placed. For example if the
PM5 has beenordered
with a dark boxthe size of the container will be much larger!
Any additional cartons includedwith the shipment are smaller in size. The receiving
doors should be wide enough to allow the crate to be moved inside the buildingfor
unpacking.
Itshould benotedthat all packagingmaterialsare recyclablemakingit possibleto re-
usethem or returnthem to the supplier.
A 6.2.3 Unpackingthe PM5
Length
920mm
Note: The PM5 should be unpacked and set up by a qualified SUSS engineer
unless other arrangements have been made.
Before unpacking the system, review any special instructions and the packing slip.
Make arrangements to store special shipping hardware and transport locks in case
the system needs to be moved to another location in the future.
Width
710mm
1. Usinga screwdriver, removethescrewsfromthetop panel ofthe crate. Unpack
the partsand subassemblieswhichareindividuallywrapped;beespeciallycareful
when handlingthe microscopeand otherfragile parts.
Gross
weight
115kg
Height
890mm
2.
Remove all screws and remove the four sides of the crate. Unboltthe system
frnm the crate hawat the fn~Ir rnrner nncitinnc R~nlar~thoco hrarkotc with
Net
weight
l00kg

6.2.4 Removingthe Transport Locks
The brackets needto be removed and the handles mounted before the PM5 can be
transportedto itsfinal location.The transport locks canthen be removed by carrying
out thefollowing procedure.
Carrying Handle Bridgeistrap
\
plate
plate
/
Bracket
1. Removethe platentransport lock bracket which is markedwith a yellowarrow,
locatedonthe left handside of the platen.
2. Removethe chuck stagetransport lock located at the front on the right hand
side. This is also marked with a yellow arrow.
3. If applicable, removethe microscope stage X and Y transport locks locatedon
the front left and right sides of the microscope platform.