Ulvac EXO-13 User manual

RF0031E-03
INSTRUCTION MANUAL
EXTERNAL OSCILLATOR UNIT
FOR RF POWER SUPPLY
MODEL：EXO-13
3rd version 2023.07.01
ULVAC Inc.
※Read this manual before operation this product
Keep this manual at your hand for immediate reference.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
INTRODUCTION
i
INTRODUCTION
Thank you for purchasing our product.
This manual is intended to serve as a guide for safe and efficient use of this product. It contains important
information, such as cautions and operating, inspecting and maintenance procedures that are required in using
this product. Carefully read this manual and fully understand them before operation to prevent accidents and
troubles.
Read this manual before operation and fully understand operating, inspecting and maintaining
procedures.
Do not operate this product before you fully understand them.
Read this manual until you fully understand it and can operate the product correctly.
Carefully read and fully understand Safety Cautionsand Safety.
Keep this manual at your hand for immediate reference.
If this product is moved to other location, attach this manual to it.
The contents of this manual are subject to change without notice for improvement.
If you come up with any question or trouble, contact your local ULVAC representative or
distributor.
Always use the product safely and take care of it correctly.
The contents of this manual are subject to change without notice for improvement.
All contents on this instruction manual are the copyright of ULVAC Inc.
Copying some or all of this instructions manual is forbidden without permission of ULVAC,
Inc.
It is forbidden to use this instruction manual for other product or without agreement of
ULVAC, Inc.
No part of this instruction manual is copied or reproduced for use by a third party without
ULVAC consent.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
INTRODUCTION
ii
１．SAFTY CAUTIONS
１
Most accidents are attributed to careless operation, inspection, maintenance or repair. Also
failure to comply with safety cautions or predict potential danger is responsible for accidents.
Accidents can be prevented by predicting a potentially dangerous situation at an early stage.
２
Personal injuries are caused by erroneous operation or inadequate maintenance or inspection.
Never try to operate the product before you read sections on operation, inspection and
maintenance and fully understand them.
３
Safety denotations are used throughout this manual and are labeled on this product.
Failure to comply with these warnings or cautions may lead to personal injuries or loss of life.
４
The supervisor, operator and maintenance personnel should read this manual before operation or
maintenance. Only those who have been trained and know how to operate correctly should
operate this equipment using correct techniques and tools.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
INTRODUCTION
iii
２．SAFETY DENOTATIONS
Safety denotations are used throughout this manual and labeled on the product to call operators attention
to safety.
Safety denotations are classified as follows.
Failure to comply with this involves the possibility of impending death or
serious personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously in high ratio.
Failure to comply with this involves the possibility of death or serious
personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously.
Failure to comply with this involves the possibility of a medium deg
ree of injury or of serious damage to the product.
If you disagree with this caution, it is possible that operator receives a minor
injury or that this product comes down or needs adjustment.
Although there isn’t direct damage, the notice was described for operation
safety and correct operation.
It is hardly possible to predict all potential dangers in operation, inspection or maintenance under all
operating environments.
Warnings on the cautionary labels in this manual and on the equipment do not mean to meet all safety
requirements.
In operating or maintaining this product, the operator or the maintenance personnel must use every
care so that any serious accident like personal injury or damage to the product does not occur.
If operation, inspection or maintenance not described in this manual is performed, it is the users
responsibility to take necessary care for safety.
DANGER
WARNING
CAUTION
NOTE

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
INTRODUCTION
iv
３．ABOUT THE PRODUCT
The description and illustrations given in this manual are based on the information that was available at the
time when the manual was written. Therefore, the contents of this manual are subject to change without
notice. Before using the product, contact your local ULVAC representative or ULVAC Inc. to confirm the
latest information.
ULVAC products are warranted free from defects in material and workmanship for a period of twelve (12)
months from the date of shipping. In addition, about the parts exchanged for repair, we will consider as
possession of our company as long as there are no directions.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
INTRODUCTION
v
No charge repair provisions
１This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is responsible for, such
as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or dealer regarding repairs. The system will be repaired or replaced at
no charge.
２Subject to warranty
1) Main Unit and Accessories
３Warranty period
1) Domestic transaction: 1 year from date of shipment from ULVAC.
2) Direct export transaction: 1year from receiving B/L.
４Warranty range
1) A system damaged by problems during shipping at time of delivery. However, for direct export transactions, pursuant to the warranty range stipulated in
latest Incoterms.
2) A system that does not meet basic specifications even though it is used within the usage conditions, such as the usage temperature range and usage
power supply.
５Response method
1) For domestic transactions
①ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC service center where it will be repaired.
②If an on-site response is required, consult separately with ULVAC, Inc. or the nearest sales office or dealer.
2) For direct export transactions
①ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC service center where it will be repaired.
Return shipping expenses are borne by the customer.
６Warranty disclaimer
1) A system that has exceeded the warranty period.
2) Malfunction or failure caused by natural disasters like fire, wind and flood damage, earthquakes, lightning, and others, or disasters from force majeure
events such as war.
3) Malfunction or failure caused by inattention during handling or mistaken usage.
4) A system modified, disassembled, or repaired without ULVAC's approval.( When it is confirmed that the sheet metal of the power supply body has
been opened.)
5) Malfunction or failure from abnormal environments (strong magnetic fields, radiation environments, high temperatures, high humidity, flammable gas
atmospheres, corrosive gas atmospheres, dust).
6) Malfunction or failure from electronic noise.
7) Secondary damage that has occurred from a system defect, process patents, and/or products manufactured by your company using this system.
8) When a defect is judged by ULVAC technicians to have occurred because usage did not meet the system's usage conditions.
9) Consumables (consumable parts are listed in “4. Maintenance”).
10) When malfunction or damage occurs from mishandling in transport/moving after delivery.
11) When replacement is necessary because of the lifespan of used parts.
12) When parts cannot be procured because their production has ended.
13) When lighting surges occur or when applying voltage outside the input fluctuation range (including applying spike voltage/during momentary power
losses).
７Others
1) When an individual contract or memorandum related to specifications exists separately from this document, the warranty conforms to that content.
2) For questions or consultations about the system, first check the model and manufacturing numbers, then contact the nearest sales office, dealer, or
ULVAC, Inc.
3) The content of this document is subject to change without prior notice.
4) Unless otherwise indicated, parts replaced during repair are the property of ULVAC, Inc.
※1 Note that the lending of replacement equipment during the repair period and dispatch repair will incur separate expenses.
※2 For on-site dispatch repairs, the actual expenses billed are the expenses related to the trip (travel expenses).

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
INTRODUCTION
vi
４．IN CASE OF NOTICING ABNORMALITIES OF THE PRODUCT
If any trouble is found, check the trouble symptom and verify that it is a trouble referring to "
Troubleshooting " in this manual. Complete information about the trouble will prevent loss on both sides due
to misunderstanding or misjudgment and allow us to take quick actions for repair.
If you encounter any trouble or come up with any question, please contact us.
In your service call, please furnish us with as complete information as possible, including the name, model
number and serial number of your product and trouble symptom.
５．DISPOSAL
Please comply with the state regulation or the local regulation for disposal of the unit. You would be
responsible for the cost relating to disposal.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
table of contents
Table of contents
１.FOR SAFETY OPERATION......................................................................................................................................................... 1
１.１.LOCATION OF NAMEPLATE................................................................................................................................. 1
１.２.CONTACT INFORMATION ..................................................................................................................................... 1
２.GENERAL DESCRIPTION............................................................................................................................................................ 2
２.１.INTRDUCTION ............................................................................................................................................................. 2
２.２.CHARACTER................................................................................................................................................................ 2
２.３.COFIGURATION.......................................................................................................................................................... 3
２.４.SPECIFICATION.......................................................................................................................................................... 4
２.５.OUTPUT POWER AND ADAPTABLE POWER SUPPLY ............................................................................ 4
３.PREPARATION ................................................................................................................................................................................ 5
３.１.ACCESSORY AND OPTION................................................................................................................................... 5
３.２.DC INPUT CONNECTOR......................................................................................................................................... 5
３.３.NAME AND FUNCTION OF THE PRODUCT PARTS .................................................................................. 6
３.４.INSTALLATION AND CONNECTING INPUT AND OUTPUT CABLES................................................. 7
３.４.１. How to install..................................................................................................................................................................... 7
３.４.２. Clearance ............................................................................................................................................................................ 7
３.４.３. Connecting input and output cables......................................................................................................................... 8
３.４.４. Clamp of input cable....................................................................................................................................................... 8
４.MAINTENANCE................................................................................................................................................................................ 9
４.１.INSPECTION................................................................................................................................................................. 9
５.TROUBLESHOOTING..................................................................................................................................................................10
５.１.TROUBLESHOOTING .............................................................................................................................................10
６.ATTACHED MATERIALS ...........................................................................................................................................................11

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
1．FOR SAFETY OPERATION
1
１.FOR SAFETY OPERATION
This section describes precautions, location of warning labels
and contact information for safety operation.
１.１.LOCATION OF NAMEPLATE
NOTE
Figure 1.1 describes the location of nameplate. Make sure that nameplate is clean and legible at all
times. Use a cloth or water to clean the nameplate. Do not use gasoline or organic solvent. If the
label is damaged, lost or illegible, contact your local ULVAC representative.
IN BIN APOWER
MODEL
L/N
S/N
WEIGHT
EXO-13
＊＊＊＊
＊＊＊＊
＊＊＊＊
DC 8～32V / 1VA
Figure １．１ Location of nameplate.
１.２.CONTACT INFORMATION
If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your
local ULVAC representative, after confirming information of the product. In case of trouble, let us know the
product information (product model, serial No., Lot No.) and trouble symptom and situation in detail as much
as possible.
■Product information (These are described on the nameplate)
Product model
Manufacturing number on the product （Serial No. and Lot No.）

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
2．GENERAL DESCRIPTION
2
２.GENERAL DESCRIPTION
This section describes character, construction and specification about this product.
２.１.INTRDUCTION
This unit is designed as an external oscillation source for RF power supply. It outputs rated signal on a
single frequency of 13.56 MHz. Also, this unit is provided with 4 BNC output ports, and can make high
frequency oscillations in the same phase, up to two power supplies for standard and up to four power
supplies by using the additional cables.
* An external input terminal of connected power supply terminates at 50Ωand it is necessary to be
operated by 10mW to 100mW.
２.２.CHARACTER
Stabilized oscillation frequency can be obtained by quartz crystal oscillation.
The high frequency oscillations can be made at the same time regarding four RF power supplies
that are provided with the external input port operated by 10mW to 100mW.
Unlike using a fan, natural air cooling does not make dust raise.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
2．GENERAL DESCRIPTION
3
２.３.COFIGURATION
This unit consists of the main body and two BNC cables, and can supply the oscillation
signal to two RF power supplies. Fig 2. 1 shows the system configuration.
RF POWER SUPPLY
OSC-RFS CABLE
OUT1
OUT2
OUT3
OUT4
OSC IN
OSC IN
OSC IN
OSC IN
IN A
AC
ADAPTOR
EXTERNAL
OSCILLATOR
OSC-RFS CABLE
Fig 2.1 System configuration

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
2．GENERAL DESCRIPTION
4
２.４.SPECIFICATION
Item
EXTERNAL OSCILLATOR UNIT
Input
Input voltage
DC 9V/10Ｖ/12V/15Ｖ/24V
Input variable range
DC 8 to 32Ｖ
Input capacity
1VA or less
Input connector
D1200D four pole connector Xkey type （Made by TYCO/AMP）
DC jack 2.1mm(inside diameter)/5.5mm(outside diameter)
（core：＋polarity /outside：－polarity）
Oscillation system
Quartz crystal oscillation
Oscillation frequency
13.56MHz ±0.05％
Output
Output impedance
50Ω
Output wave form
Sine wave
Rated output
10mW to 100mW
10mW or more per output and 100mW or less for 4 outputs total.
Number of connected
power supplies
1 to 4
Output connector
BNC
Cooling system
natural air cooling
Protective function
Input steps fuse for internal damage progress prevention
Diode for input polarity reverse-connection protection
Environ-
ment
Ambient temperature
+5 to 40℃
Ambient humidity
35 to 80％(not condensing)
Storage temperature
-5 to 50℃
Outside dimensions
145W×110D×44H （Including main body installation part）
Weight
500g
２.５.OUTPUT POWER AND ADAPTABLE POWER SUPPLY
This unit internally divides output (total power) that is adjusted to 100mW or less into four outputs equally.
The output power from each port depends on the number of connected power supplies.
However, it is adjusted that the power of 10mW or more outputs from each output port when the maximum
four power supplies are connected.
output of each port ＝
connected power supplies number
total output（adjusted to 100mW or less ）
＞ 10ｍW
The specifications of the external input terminal for adaptable power supplies are as follows:
1) 50Ω terminal
・To operate when input oscillation signal is from 10mW to 100mW

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
3．PREPARATION
5
３.PREPARATION
The section describes necessary preparation
and precaution before operation of the product.
３.１.ACCESSORY AND OPTION
The followings are standard accessory and options.
Please confirm parts regarding the excess and deficiencies, and damage when opening.
2) Standard accessory
No.
Name
Type
Quantity
1
AC adapter
Cable length 1m
1
2) Options
No.
Name
Type
1
OSC-RFS cable
Coaxial cable for output (1m/2m/4m/8m/16m/20m)
*1 Needed one for each output
３.２.DC INPUT CONNECTOR
This product can be used by supplied the direct current electric power from either of two ports.
.
ＩＮ Ａport：ＤＣ jack、φ２．１ｍｍ／φ５．５ｍｍ
ＩＮ Ｂport：４pins connector、Ｄ１２００Ｄ Ｘkey type （Made by Tyco Electronics）
CAUTION
Please do not use both input ports at the same time.
In the worst case, the product may be damaged.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
3．PREPARATION
6
３.３.NAME AND FUNCTION OF THE PRODUCT PARTS
Table 3.1 Names and Functions of Components
Name of component
Function
①POWER LED
Lights green when a voltage is applied to the power supply
②ＩＮ Ａ
Connector that supplies DC power (8 to 32V).
Connect the optional AC adapter plug
* Both IN A and IN B are not used at the same time.
③ＩＮ B
Connector that supplies DC power (8 to 32V).
Connect the optional DC connector cable and supplies electric power
* Both IN A and IN B are not used at the same time.
④ADAPTER CABLE CLAMP
Clip that prevents AC adaptor connector from coming off
Used with AC adapter.
⑤ＯＵＴ １
Oscillation signal output connector.
Connect RF power supply with the accessory BNC cable.
⑥ＯＵＴ ２
Oscillation signal output connector.
Connect RF power supply with the accessory BNC cable.
⑦ＯＵＴ ３
Oscillation signal output connector.
Connect RF power supply with the optional BNC cable.
⑧ＯＵＴ ４
Oscillation signal output connector.
Connect RF power supply with the optional BNC cable.
IN BIN APOWER
OUT1 OUT2 OUT3 OUT4
②① ③ ④
⑤ ⑥ ⑦ ⑧
Fig. 3.1 Layout drawing
* Fig. 3.1 may have some differences from an actual product.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
3．PREPARATION
7
３.４.INSTALLATION AND CONNECTING INPUT AND OUTPUT CABLES
Install this unit according to the following procedure.
CAUTION
This product does not accept lightning surge, spike voltage and moment power failure. If lightning
surge, spike voltage or moment power failure are input, damage or error are led. Operate it without
lightning surge, spike voltage and moment power failure.
３.４.１.How to install
Place this unit on the flat and fix it. Refer to Fig. 3.2 as for the fixing screw positions.
３.４.２.Clearance
The main body has natural air cooling system through the side slit. Provide a clearance around the
product. When using rack etc, enable to ventilate enough in order that the temperature in a rack will
not exceed specification temperature. If it is operated at the temperature besides specification, it
may be damaged in the worst. Refer to "Fig. 3.2 Mounting main body and clearance"
clearance
2mm or more
Fixing screw
4 positions
Fig. 3.2 Mounting main body and clearance

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
3．PREPARATION
8
３.４.３.Connecting input and output cables
Before connecting the RF power supply or connected anything, check the names of connectors and
then connect them with special cables. Refer to " Fig 2.1 System configuration"
WARNING
Turn off your main breaker before input and output connector joint.
WARNING
This unit does not have a power switch. As soon as the input connector is plugged in and the
electric power is supplied, the output signal starts.
３.４.４.Clamp of input cable
When AC adaptor is used, we recommend that the cable clamp should be used to keep the adaptor
plugging in. Refer to " Fig 3.3 AC adaptor with clamp "
IN BIN APOWER
OUTLET
Fig.3.3 AC adaptor with clamp

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
4．MAINTENANCE
9
４.MAINTENANCE
The section describes necessary maintenance to use the product for years.
If you fail to do maintenance, wear of the product would be accelerated and shutdown
of the product would be led. Read this section carefully and do maintenance
４.１.INSPECTION
The main body has natural air cooling system through the side slit. Please check whether the slit is clogged
up with dust etc. once half a year.
The parts life spans of this unit are as follows.
Table 4.1 External oscillator unit internal parts general lives
Parts
Period of regular maintenance
or exchange
notes
1
Electrolytic condenser
Per 10 to 13 years
Control circuit
2
Fuse
Per 5 to 7 years
Note: The lives in the table are not guaranteed. The consumptive speed of these parts changes greatly with
operating frequency of your device.

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
5．TROUBLESHOOTING
10
５.TROUBLESHOOTING
The section describes action on trouble.
５.１.TROUBLESHOOTING
If trouble occurs, diagnose it referring to table 5.1.
Table 5．1 Troubleshooting for RF Power Supply
No.
Trouble symptom
Possible cause and corrective action
1
POWER LED does not light.
Required voltage is not applied. Connector is disconnected.
2
RF does not output.
"External oscillation signal error"
is displayed on the RF power
supply.
Required voltage is not applied. Connector is disconnected.
BNC cable is disconnected or in a bad connection. Try it again
after checking cable or changing connecting port
In case of internal substrate failure, part exchange is needed.
Contact ULVAC.
3
When connected power supply is
increased, "External oscillation
signal error" is displayed on the RF
power supply.
The external oscillation signal input impedance of the connected
power supply is small, and so, more power is needed.
Refer to RF manual.
In case internal substrate adjustment is needed,
contact ULVAC.
In case of internal substrate failure, part exchange is needed.
Contact ULVAC.
Regarding errors for RF power supply or matching box, refer to each manual.