Ulvac DC-10-4P User manual

DC0056e-00
O Op pe er ra at ti io on n M Ma an nu ua al l
400V input 10kW DC Pulse power supply
ｍｏｄｅｌ：DC-10-4P
First Edition: March, 2023
ULVAC, Inc.
Components Division
Before using this product, be sure to read it.
Also, keep this manual at hand with care

DC Pulse Power Supply 【DC-10-4P】
INTRODUCTION
I
INTRODUCTION
Thank you for purchasing our product.
This operation manual is a guidebook in order to your using this product safely and effectively. The basic
caution matters and the operation instructions necessary for handling, and the inspection service
instructions are described. In order to prevent the significant accidents, read thoroughly the contents being
described in this operation manual, and fully understand it.
Before using this product, be sure to read this operation manual, and fully understand the operation and
the inspection service.
Do not operate this product until you understand the description of this operation manual completely.
Re-read the dubious points repeatedly, please make an effort so that you can use this product
correctly.
As to the safety, since it is explained in “Precautious points on safety”(P.II), “Safety symbol
marks” (P.III), and “Chapter 1 For your safety use”, use the unit after fully reading and
understanding it.
Keep this operation manual always at hand with care.
When changing the installation place of this product, be sure to attach this operation manual to
the product.
Due to the unit improvement, the contents of this operation manual and your using system may
be different.
If there are dubious points and awared points, make an inquiry to our company’s exclusive
distributor.
You are kindly requested to safely operate and correctly manage the unit.
Please acknowledge since the described contents of the operation manual may subject to change or
revise without notice due to the specification changes of the product and the improvements for the
product.
The copyrights of the operation manual and this safety guide belong to ULVAC, Inc.
Components Division.
A part and whole part of this operation manual are prohibited to copy without a permit of
ULVAC, Inc. Components Division.
Handling for this product of this operation manual and to use the manual in the application
other than that ULVAC, Inc. Components Division agreed, are prohibited.
This operation manual can not be copied for any part for the third party’s use without approval
of our company.

DC Pulse Power Supply 【DC-10-4P】
INTRODUCTION
II
1. Precautious points on safety
1-1
Major part of the accidents occurs in relation to the operation carelessly conducted by the operator,
the inspection/service and the repair work.
Also, if you do not observe the basic caution matters on safety and neglect the dangerous
preperception, it is easy to occur.
By predicting the circumstances where the danger is predicted, the accidents can be prevented in
advance.
1-2
The physical injury occurs due to erroneous operation and inappropriate inspection service work.
Well read the contents of the operation and the inspection/service work, and never operate this
product until you understand it.
1-3
The warning and the caution about the safety are clearly stated in this operation manual and the
warning labels.
If these warning and caution are neglected, caution should be taken since it may result in the
physical injury and the death accident.
1-4
The manager, the operator and the maintenance personnel should read this manual well before
performing the operation and the maintenance of this product.
Persons who knew a correct handling and received the prescribed education, should perform the
appropriate work by using the correct technology and tools.

DC Pulse Power Supply 【DC-10-4P】
INTRODUCTION
III
2. Safety symbol marks
In this operation manual and the warning display of the product main body, the symbol marks about the
safety in order to understand the matters to be observed are being put up.
The words using the symbol mark are used separately as follows.
2-1 Symbol mark for the instruction manual
Failure to comply with DANGER will lead to serious
personal injury or loss of life.
Works ignoring this note can lead to serious personal injury or loss of life
and/or serious damage the facilities of the plant (including this system) at
a high probability.
Failure to comply with WARNING can lead to dangerous
situations including serious injury or loss of life.
Works ignoring this note can lead to serious personal injury or loss of life
and/or serious damage to the facilities of the plant (including this system)
Failure to comply with CAUTION can lead to dangerous
situations including slight personal injury or medium scale
of damage to the facility.
Works ignoring this note can lead to slight personal injury and/or can
bring the system into the situation that requires readjustment.
There is no direct danger, but we describe the contents which we want
you know in order to your use the system correctly on safety of the work.
・Danger of the operation, inspection and service in all environments can not be predicted.
・Warning being described on the warning labels in this operation manual and on the product is not
necessarily all satisfied.
・In handling the product, pay a careful attention by the persons who control, operate and perform
maintenance as to other than this operation manual description matters, and keep in mind for
securement of the safety so that the significant injury such as physical injury and the damage to the
product do not occur.
・When the operation/inspection/service other than being described in this operation manual are
performed, perform the necessary consideration related to the safety on the all workers’ responsibility.
DANGER
WARNING
CAUTION
REFERENCE

DC Pulse Power Supply 【DC-10-4P】
INTRODUCTION
IV
2-2 Safety symbol marks on the unit main body
The following safety symbol marks are placed on the unit main body.
List of safety symbol marks
Safety symbol marks Description
Heavy loads
・There is a danger of getting injury.
・Use specified machine.
Dangerous voltage part
・There is a danger of serious injury or death by electric
shock.
・Always close the panel and the safety cover.
・Turn off the dangerous voltage power supply for main
tenance.

DC Pulse Power Supply 【DC-10-4P】
INTRODUCTION
V
Safety symbol marks Description
High temperature heated part
・Do not touch, or you may get burned.
Use copper conductors only.
The connector part shall not be lifted.
Otherwise it may be damaged. Do not hold and lift the
connector.
Weight labeling

DC Pulse Power Supply 【DC-10-4P】
INTRODUCTION
VI
3. About this product
The sentences and illustrations in this operation manual are based on the information at the time of this
operation manual prepared. This operation manual may be subject to change without prior notice. Since
these changes give the influence on the inspection, confirm the latest information in our company’s
exclusive distributor before starting the work.
This product can produce a high-frequency output of 10 kHz or more. The use of facilities using
radio-frequency current energy of 10 kHz or more in Japan requires the approval of the Minister of
Internal Affairs and Communications according to Article 100 of the Radio Act. Before use, complete the
Radio Frequency Facility Application with the necessary information and file it with the supervisory
telecommunication administration bureau for approval. The Radio Frequency Facility Application has
been uploaded to each administration bureau's website. If you have any questions about filling out the
application, contact us or our agency.
In addition, there are regulations and guidelines regarding radio protection/EMI under national/local laws
etc. and therefore you have to comply with the national/local laws for installation.
Free of charge repair rules
1. Although the product has undergone strict in-house tests before shipment, please make an inquiry to the
headquarter standard product division, service office, or agent if malfunction occurs with the product
because of our fault such as manufacturing error or transportation problem. The product is repaired or
exchanged for free of charge.
2. Object to be guaranteed
1) DC Pulse power supply main body
3. Period of guarantee
1) Domestic sales: One year from our shipment date
2）Direct export: One year from B/L receiving date
4. Range of guarantee
1) A product damaged by a trouble at the time of delivery or during the transport. However, for direct export, the
range of guarantee defined in the latest INCOTERMS is observed.
2) A product that does not meet the basic specification although the product is used under the specified use
condition including the temperature range and power supply.
5. How to apply
1) For domestic sales
①Receive a substitute product sent from us or send back the product to us or service center to repair the
product.*1
②If the repair needs to be carried out at your site, make an inquiry to our standard product division, service
office, or agent.*2
2) For direct export
Receive a substitute product sent from us or send back the product to us or service center to repair the
product. You are required to pay the cost for returning the product to us.
6. Exemption
1) A product with expired guaranteed period.
2) A malfunction or trouble occurred by inevitable accidents including fire, wind, flood, lightning, or war.
3) A malfunction or trouble occurred by careless or improper handling of the product.
4) A product remodeled, broken down, or repaired without our consent.
5) A malfunction or trouble occurred under abnormal environment (strong electromagnetic field, radiation, high
temperature, high humidity, flammable gas, causticity gas, and dust, etc.,).
6) A malfunction or trouble occurred by noises.
7) Secondary damage caused by the product trouble, process patent, and/or your manufactured item using this
device.
8) When our engineer determines that the use condition of the product is inappropriate.
9) Consumption articles (for consumption articles, refer to Chapter 6 "Maintenance" on this manual).
10) A malfunction or trouble occurred by inappropriate handling during post-delivery transportation and relocation.
11) When replacement of part is necessary because of ending of the service life.
12) When the parts are no longer available because of discontinuance of production and other reasons.
13) When a voltage out of input amplitude range is applied because of lightning surge or other reasons.(including
application of spike superimposed voltage/instantaneous blackout).

DC Pulse Power Supply 【DC-10-4P】
INTRODUCTION
VII
7．Others
1) If there is a document describing the individual contract or specification aside from this manual, the rules
described in these documents are observed.
2) For the questions and consultation on the product, please check the model and production number, and make
an inquiry at a service office, agent, or our standard product division.
https://www.ulvac.co.jp/mail_info/inquiry/
3) The description in this manual may be subject to change without notice.
4) The parts replaced during repair may belong to us unless otherwise instructed.
*1 For lending of substitute machine during the repair period and on-site repair*2, please note that
additional expense will be charged.
*2 For on-site repair, the actual cost for the travel expense (transportation cost and others) will be
charged.
4. Suspecting abnormality
If you notice a presence of abnormality, refer to 7."Troubleshooting" in this manual and check the
symptom and the trouble.
To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the
trouble in order to repair the product as soon as possible.
If you judge that the product is broken or have any questions, see the last page of this instruction
manual and contact the contact information. When making contact, please be sure to let us know the
product name or the model name, serial number, and symptoms as in detail as possible.
5. About disposal
When this product is disposed of, dispose of it in accordance with the ordinances of the nation and
municipalities.
Furthermore, as to the expenses related to disposal, you are kindly requested to burden it on the
customer’s side.

DC Pulse Power Supply 【DC-10-4P】
INTRODUCTION
VIII
6. About responses to RoHS
The following 10 specified environmentally hazardous chemical substances regulated by the RoHS
Directive are not contained in the main body and the cable assembly attached as standard above t
he threshold (Revised RoHS Directive 2011/65 / EU and (EU) 2015 / 863).
Target regulated hazardous substances and their thresholds
Regulated Hazardous Substances
Threshold
Lead（Pb）1000ppm
Mercury（Hg）1000ppm
Cadmium（Cd）100ppm
Hexavalent chromium（CrⅥ+）1000ppm
Polybrominated bipyenyl（PBB）1000ppm
Polybrominated diphenyl ether （PBDE）1000ppm
Diethylhexyl phthalate (DEHPs)
1000ppm
Butyl butyl phthalate (BBP)
1000ppm
Dibut
yl phthalate (DBP)
1000ppm
Diisobutyl phthalate (DIBP)
1000ppm

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able of Contents
TABLE OF CONTENTS
INTRODUCTION..................................................................... I
1. PRECAUTIOUS POINTS ON SAFETY.........................................................................................II
2. SAFETY SYMBOL MARKS......................................................................................................III
3. ABOUT THIS PRODUCT........................................................................................................ VI
4. SUSPECTING ABNORMALITY............................................................................................... VII
5. ABOUT DISPOSAL.............................................................................................................. VII
6. ABOUT RESPONSES TO ROHS .......................................................................................... VIII
1.FOR YOUR SAFETY USE .................................................. 1
1-1.CAUTION ON HANDLING ......................................................................................................1
1-2 WARNING LABEL /NAME PLATE AFFIXING POSITION ..............................................................2
1-3 WHEN YOU CONTACT..........................................................................................................2
2.OVERVIEW ......................................................................... 3
2-1. INTRODUCTION..................................................................................................................3
2-2. FEATURES ........................................................................................................................3
2-3. COMPOSITION...................................................................................................................4
2-4. SPECIFICATIONS ...............................................................................................................5
2-4-1. Electrical specification ................................................................................................................................ 5
2-4-2. Physical Specifications ............................................................................................................................... 6
2-4-3. Oscillating Frequency and Inversion Pulse Width ......................................................................... 6
2-5. CONNECTION OF INPUT/OUTPUT SECTION .........................................................................11
2-5-1. Connection of input/output section .................................................................................................. 11
2-5-2. Connection of output section .............................................................................................................. 12
3.PREPARATION ................................................................ 13
3-1.UNPACKING .....................................................................................................................13
3-2 INSTALLATION OF POWER SUPPLY .....................................................................................13
3-2-1 Power receiving equipment ..................................................................................................................... 13
3-2-2 Class A grounding work ........................................................................................................................... 13
3-2-3. How to install ............................................................................................................................................... 14
3-2-4 About clearance ............................................................................................................................................ 15
3-3. WIRING AND CONNECTING ...............................................................................................16
3-3-1. Cables connected to DC-10-4P ......................................................................................................... 16
3-3-2. USER IO PORT process cable ............................................................................................................ 16
3-4. STRUCTURE OF M/S AND PULSE SYNCHRONOUS ...............................................................17
3-4-1. About M/S system configurations ..................................................................................................... 17
3-4-2. Name definition of power supply with M/S connected .......................................................... 18
3-4-3. M/S settings ................................................................................................................................................. 18
3-4-4. Setting on front panel in M/S ............................................................................................................ 18
3-4-5. About pulse synchronization system................................................................................................. 19

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3-4-6. About settings for pulse synchronization system ...................................................................... 20
3-4-7. Startup input sequence in M/S operation / pulse-synchronized operation ................ 21
3-4-8. Interlock at M/S ......................................................................................................................................... 23
3-5.PROTECTION SHEETS .......................................................................................................23
4. DESCRIPTION OF FUNCTIONS ..................................... 24
4-1. NAME AND FUNCTION OF EACH PART ................................................................................24
4-1-1. DC power front panel .............................................................................................................................. 24
4-1-2. DC power back panel ............................................................................................................................... 25
4-2. DESCRIPTION OF EACH OPERATION MODE.........................................................................26
4-2-1. Description of LOCAL mode function .............................................................................................. 26
4-2-2. Description of USER mode function ................................................................................................. 26
4-2-2-1. Pin allocation of USER IO PORT ................................................................................................. 27
4-2-3. Description of HOST function .............................................................................................................. 28
4-2-4. Description on HOST+ mode functions ........................................................................................... 28
4-3. SELECTION OF OUTPUT CONTROL MODE ...........................................................................28
4-3-1. Setup in LOCAL ......................................................................................................................................... 28
4-3-2. Setup in USER ............................................................................................................................................. 28
4-3-3. Setup in HOST / HOST+ ...................................................................................................................... 28
4-4. ABOUT EACH MONITOR SIGNAL AND LEVEL SIGNAL IN SYSTEM CONFIGURATION .................29
4-5. ABOUT DC OUTPUT SEQUENCE ........................................................................................29
4-6. DESCRIPTION OF PULSE PARAM FUNCTION ...................................................................30
4-7. DESCRIPTION OF OSCILLATION MODE FUNCTION................................................................32
4-8. SELECTION OF OSCILLATION MODE ...................................................................................35
4-8-1. Setup in LOCAL ......................................................................................................................................... 35
4-8-2. Setup in USER ............................................................................................................................................. 35
4-8-3. Setup in HOST/HOST+ ........................................................................................................................... 35
4-9. DESCRIPTION OF INTER-PULSE ARC FUNCTION.................................................................36
4-10. DESCRIPTION OF HARD ARC FUNCTION ........................................................................37
4-11. DESCRIPTION OF RAMP TIME FUNCTION ..........................................................................37
4-11-1. Ramp time function① ............................................................................................................................ 37
4-11-2. Ramp time function② ............................................................................................................................ 39
4-12. DISPLAY OF ERROR CODE AND WARNING CODE ON FRONT PANEL .....................................40
4-13. INDICATION WHEN MULTIPLE ERRORS AND WARNINGS OCCUR ..........................................41
4-14. SCREEN LOCK FUNCTION ...............................................................................................42
4-15. ABOUT SETPOINT .......................................................................................................42
4-16. ABOUT RESET.............................................................................................................42
5. HOW TO OPERATE ........................................................ 43
5-1. HOW TO OPERATE IN LOCAL MODE .................................................................................43
5-1-1. At Power-on ................................................................................................................................................. 43
5-1-2. Parameter tree in MENU screen ........................................................................................................ 45
5-1-3. About buttons on front panel .............................................................................................................. 46
5-1-4. About MENU screen ................................................................................................................................. 48
5-1-5. Parameter list ............................................................................................................................................... 57
5-2. HOW TO OPERATE IN USER MODE ...................................................................................60

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5-2-1. Precautions for wiring of USER IO PORT .................................................................................... 60
5-3. DIGITAL I/O CONNECTION CIR...........................................................................................62
6. MAINTENANCE ............................................................... 63
6-1. MAINTENANCE/INSPECTION OF THIS POWER SUPPLY .........................................................63
6-2. ABOUT RECOMMENDED REPLACEMENT PARTS...................................................................64
7. TROUBLESHOOTING ..................................................... 65
7-1. TROUBLESHOOTING ........................................................................................................65
8. APPENDIX ....................................................................... 67
8-1. OVERVIEW OF SERIAL COMMUNICATIONS ..........................................................................70
8-1-1. Serial communication specifications .................................................................................................. 70
8-1-2. How to connect........................................................................................................................................... 70
8-2. HOW TO SET SERIAL COMMUNICATION ..............................................................................72
8-2-1 Communication message packet ........................................................................................................... 74
8-3. COMMUNICATION PROTOCOL ...........................................................................................77
8-4. COMMAND BETWEEN HOST AND DC................................................................................79

DC Pulse Power Supply 【DC-10-4P】
1
FOR YOUR SAFETY USE
1
1.FOR YOUR SAFETY USE
In order to use this unit in a safe manner, we describe the caution points on safety,
the attached position of warning labels and the contact party.
1-1.Caution on handling
This section describes precautions for use of this product. Thoroughly understand the following
before using this product.
The voltage generated by this product is enough to pose a risk to a human life. Therefore it shall
be handled with the greatest care. In the event that a person contacts this voltage, it leads to a
serious accident. Take great care not to contact a high voltage.
This product involves a high voltage. Our or our group's personnel in charge support the internal
inspection and repair.
For exchanging this product, do not forget to turn off the breaker to secure safety by the lockout or
tagout. Before removing the cables etc., wait for five minutes or more in order to avoid the danger
of residual electric voltage.
DANGER
DANGER
DANGER

DC Pulse Power Supply 【DC-10-4P】
1
FOR YOUR SAFETY USE
2
1-2 Warning label / Name plate affixing position
The affixing position of warning labels is shown in the appendix "External View" in Chapter 8. Keep
these warning labels clean at all times so that all of them are legible. Use cloth and water for the
cleaning of the warning labels. Do not use gasoline and organic solvents. If the labels are
damaged, lost, or become illegible, contact us or our exclusive distributors.
In addition, a nameplate is affixed on the back panel of the product. Take special care so that it is
legible at all times.
1-3 When you contact
When you need to order parts, inquire about products, or inquire about damaged products, confirm the
product information and then contact us or our exclusive distributors. Especially when the product is
judged broken, please let us know the circumstances and symptoms with the product information as in
detail as possible.
■Product information (This is described on the nameplate.)
Type of the product
Manufacture number information of the product (SERIAL number)
REFERENCE

DC Pulse Power Supply 【DC-10-4P】
2
OVERVIEW
3
2.OVERVIEW
This chapter describes features, composition, and
specifications of this product.
2-1. Introduction
DC-10-4P is designed as a DC pulse power supply of producing 10kW output for sputtering with 400V
input specifications.
Due to the charging-up by reactive sputtering etc., this product is effective on a load to which a normal
DC sputtering cannot respond.
The rated power can be supplied to the load by optimizing the load impedance of plasma.
2-2. Features
■Depending on the application, three oscillation modes are available on the front panel.
"Continuous mode": Outputs the inversion pulse in the set cycle.
"One pulse mode": Outputs inversion pulse when an unusual electrical discharge (hereinafter
referred to as ARC) is detected.
"DC mode": Outputs a DC output without outputting a reverse pulse. When an ARC is
generated, only the inverter is stopped.
■On the continuous mode, the oscillated frequency from 5 to 250 kHz can be used.
The steps of frequency possible to set are as follows:
From 5 to 150 kHz : Unit of one kHz
From 150 to 250 kHz : Unit of five kHz
(For the relationship between the oscillating frequency and the pulse width, refer to Fig. 2-1).
■Due to the inter-pulse ARC function, the ARC generated between the reverse-pulse outputs can be
erased.
■The reverse-pulses of different systems can be synchronized. (*Pulse synchronization optical cable
(option) is required)
This product is effective for discharging electricity on different targets in the same chamber.
(Maximum 12 units can be synchronized).
■Maximum six units can be connected in master-slave manner (hereinafter referred to as "M/S").
(*An M/S cable (option) is required).
(*M/S is available only for the same models).
■On the front panel, each parameter, such as the oscillating frequency, can be set.
■Depending on the situation, each status, such as errors and pulse settings, appears on the front
display.
■This product supports input from 380V to 400V.

DC Pulse Power Supply 【DC-10-4P】
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OVERVIEW
4
2-3. Composition
This power supply consists of the parts below.
Power main unit: 1
[Standard accessory]
D-Sub connector for USER IO PORT (product of JAE: DC-C4-J12-F1/DC-37Pf-N): 1 set
M/S setting insulation driver: 1
[Option]
AC input cable (Cable length: 1m, 2m, 4m, 6m, 8m, 10m）1
DC pulse output cable (Cable length: 4m,10m) 1
Pulse synchronization optical cable (Cable length: 1m, 5m, 10m, 15m, 20m, 25m, 30m) 1
M/S cable (Cable length: 1.2m) 1
We recommend using an output cable of 10m or less.
A cable of 10m or more may cause distortions on the output waveform, resulting in
insufficient performance.
The output cable provided as an option uses RG393.
The RG393 is not a double shielded structure.
We do not recommend installation that separates the anode wiring.
We recommend connecting one to the anode and one to the cathode.
Recommended specifications(Factory specifications)
Deprecated specifications
CAUTION
CAUTION

DC Pulse Power Supply 【DC-10-4P】
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OVERVIEW
5
2-4. Specifications
2-4-1. Electrical specification
Table 2-1: Electrical specification
Item Specifications
Type DC-10-4P
Input specification
Rated input voltage AC380V/AC400V
Input voltage variation range AC342V～440V
Number of phases / Frequency 3 phase: 50/60 Hz
Input connection Connector
Input current 30A or less *1
Input capacity 13.5kVA or less *1
Leakage current 5mA or less
Efficiency 87% or more *1
Power factor 0.84 or more *1
Output specification
Rated power 10kW
Rated current 25A
Rated voltage 5kHz～150kHz：800V 155kHz～250kHz：650V *2
Ignition voltage 1500V
Inversion pulse width 0.4μs～5μs: Selectable in the unit of 0.1μs*2
Output range
Oscillating frequency
5kHz～150kHz
Oscillating frequency
155kHz～250kHz
V2
800
V
2.5A 25A
V4
200V
12.5A
V3
400
V
10k
W
I3
I2I1
V1
1500V
V2
650V
2.5A 25A
V4
200V
15.38A
V3
400V
10kW
I3
I2
I1
V
1
1500V
V1 1500V V1 1500V
V2 800V V2 650V
V3 400V V3 400V
V4 200V V4 200V
I1 2.5A I1 2.5A
I2 12.5A I2 15.4A
I3 25A I3 25A
Output polarity Negative polarity
Turnover voltage 10 to 20% of the output voltage with rated output and fixed resistance (reference value)
ARC control Inter-pulse ARC function: Reverse pulse output (Continuous mode)
HARD ARC function: In addition to reverse pulse output, output stop
(Continuous mode, One-pulse mode, and DC mode*)
*In DC mode, the reverse pulse is not output and only the output is stopped
Output connection Connector
Control
Operation mode system LOCAL mode / USER mode /
HOST mode (SERIAL communication control (RS232C or RS485) /
HOST+ mode(USER + HOST mode)
Output control system Constant power control (P control) / Constant current control (I control) /
Constant voltage control (V control)
The control guarantee range is the larger of ± 0.5% or less of the rated output or ± 1% or less of
the set value.
Guaranteed control range Constant power control: 10 to 100% of the rated power value
*1 Subject to change according to the customer's use condition and the input facility.
*2 Limited by present oscillated frequency. For details, refer to Fig.2-1.

DC Pulse Power Supply 【DC-10-4P】
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OVERVIEW
6
2-4-2. Physical Specifications
Table 2-2: Other specifications
Item Specifications
Cooling method Forced air cooling system
Outer dimensions 483mm（W）×630mm（D）×133mm（H）* No protrusions included.
Mass 36kg
Usage environment Indoor use at 1,000m or less above sea level without direct sunlight and corrosive gas.
Working temperature 5～40℃
Storage temperature -20℃～60℃
Humidity, Relative humidity In operation: 35 to 85%; In storage: 25 to 85%; No condensation in either case
Storage environment ・pollution degree 2
・No corrosive gas, no large amount of dust, no conductive dust
・Basically a clean room environment.
Overvoltage category CategoryⅡ
2-4-3. Oscillating Frequency and Inversion Pulse Width
The maximum value of the selectable inversion pulse width is determined by the current oscillated
frequency.
Refer to the following figure and table.
0.0
1.0
2.0
3.0
4.0
5.0
6.0
0
10 20 30 40 50 60 70 80 90
100 110 120 130 140 150 160 170 180 190 200 210 220 230 240 250
逆パルス幅[us]
発振周波数[kHz]
最小値
最大値
Figure.2-1: Inversion-pulse width by oscillated frequency
Maximum inversion pulse
Minimum inversion pulse
Inversion pulse width [μs]
Oscillating frequency [kHz]
0.4

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OVERVIEW
7
Table 2-3: Inversion pulse width by oscillating frequency (5kHz to 150 kHz: In the unit of 1 kHz)
Oscillating
frequency
[kHz]
Minimum
inversion pulse
width [μs]
Minimum
Duty ratio [%]
Maximum
inversion pulse
width [μs]
Maximum
Duty ratio [%] V LIMIT[V]
5 0.4 0.2 5.0 2.5 800
6 0.4 0.2 5.0 3.0 800
7 0.4 0.3 5.0 3.5 800
8 0.4 0.3 5.0 4.0 800
9 0.4 0.4 5.0 4.5 800
10 0.4 0.4 5.0 5.0 800
11 0.4 0.4 5.0 5.5 800
12 0.4 0.5 5.0 6.0 800
13 0.4 0.5 5.0 6.5 800
14 0.4 0.6 5.0 7.0 800
15 0.4 0.6 5.0 7.5 800
16 0.4 0.6 5.0 8.0 800
17 0.4 0.7 5.0 8.5 800
18 0.4 0.7 5.0 9.0 800
19 0.4 0.8 5.0 9.5 800
20 0.4 0.8 5.0 10.0 800
21 0.4 0.8 5.0 10.5 800
22 0.4 0.9 5.0 11.0 800
23 0.4 0.9 5.0 11.5 800
24 0.4 1.0 5.0 12.0 800
25 0.4 1.0 5.0 12.5 800
26 0.4 1.0 5.0 13.0 800
27 0.4 1.1 5.0 13.5 800
28 0.4 1.1 5.0 14.0 800
29 0.4 1.2 5.0 14.5 800
30 0.4 1.2 5.0 15.0 800
31 0.4 1.2 5.0 15.5 800
32 0.4 1.3 5.0 16.0 800
33 0.4 1.3 5.0 16.5 800
34 0.4 1.4 5.0 17.0 800
35 0.4 1.4 5.0 17.5 800
36 0.4 1.4 5.0 18.0 800
37 0.4 1.5 5.0 18.5 800
38 0.4 1.5 5.0 19.0 800
39 0.4 1.6 5.0 19.5 800
40 0.4 1.6 5.0 20.0 800
41 0.4 1.6 5.0 20.5 800
42 0.4 1.7 5.0 21.0 800
43 0.4 1.7 5.0 21.5 800
44 0.4 1.8 5.0 22.0 800
45 0.4 1.8 5.0 22.5 800
46 0.4 1.8 5.0 23.0 800
47 0.4 1.9 5.0 23.5 800
48 0.4 1.9 5.0 24.0 800
49 0.4 2.0 5.0 24.5 800
50 0.4 2.0 5.0 25.0 800

DC Pulse Power Supply 【DC-10-4P】
2
OVERVIEW
8
Oscillating
frequency
[kHz]
Minimum
inversion pulse
width [μs]
Minimum
Duty ratio [%]
Maximum
inversion pulse
width [μs]
Maximum
Duty ratio [%] V LIMIT[V]
51 0.4 2.0 5.0 25.5 800
52 0.4 2.1 5.0 26.0 800
53 0.4 2.1 5.0 26.5 800
54 0.4 2.2 5.0 27.0 800
55 0.4 2.2 5.0 27.5 800
56 0.4 2.2 5.0 28.0 800
57 0.4 2.3 5.0 28.5 800
58 0.4 2.3 5.0 29.0 800
59 0.4 2.4 5.0 29.5 800
60 0.4 2.4 5.0 30.0 800
61 0.4 2.4 5.0 30.5 800
62 0.4 2.5 5.0 31.0 800
63 0.4 2.5 5.0 31.5 800
64 0.4 2.6 5.0 32.0 800
65 0.4 2.6 5.0 32.5 800
66 0.4 2.6 5.0 33.0 800
67 0.4 2.7 5.0 33.5 800
68 0.4 2.7 5.0 34.0 800
69 0.4 2.8 5.0 34.5 800
70 0.4 2.8 5.0 35.0 800
71 0.4 2.8 5.0 35.5 800
72 0.4 2.9 5.0 36.0 800
73 0.4 2.9 5.0 36.5 800
74 0.4 3.0 5.0 37.0 800
75 0.4 3.0 5.0 37.5 800
76 0.4 3.0 5.0 38.0 800
77 0.4 3.1 5.0 38.5 800
78 0.4 3.1 5.0 39.0 800
79 0.4 3.2 5.0 39.5 800
80 0.4 3.2 5.0 40.0 800
81 0.4 3.2 4.9 39.7 800
82 0.4 3.3 4.9 40.2 800
83 0.4 3.3 4.8 39.8 800
84 0.4 3.4 4.8 40.3 800
85 0.4 3.4 4.7 40.0 800
86 0.4 3.4 4.7 40.4 800
87 0.4 3.5 4.6 40.0 800
88 0.4 3.5 4.5 39.6 800
89 0.4 3.6 4.5 40.1 800
90 0.4 3.6 4.4 39.6 800
91 0.4 3.6 4.4 40.0 800
92 0.4 3.7 4.3 39.6 800
93 0.4 3.7 4.3 40.0 800