Ulvac RFS-1305L User manual

RF0029E-17
I
In ns st tr ru uc ct ti io on n M Ma an nu ua al l
Solid-State RF Power Supply
Matching Box
Model:
RF Power Supply
RFS-1305L
/
RFS-1310L
/
RFS-1330L
RFS-1350LH
/
RFS-13100L
/
RFS-2750L
RFS-2775L
Control Panel
RFP-L
Matching Box
MBX-1305L
/
MBX-1305Lu
/
MBX-1310L
MBX-1330L
/
MBX-1330Lu
/
MBX-1350L
MBX-13100L
/
MBX-2750L
/
MBX-2775L
Matching Controller
AMC-8L
/
AMC-9L
AMC-8LT
/
AMC-9LT
Revised 17th edition 08/29/2023
ULVAC,Inc.
*Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

RF Power Supply and Matching Box
Introduction
Introduction
Thank you for purchasing this ULVAC system.
This instruction manual is intended to serve as a guide for the safe and efficient use of the system. It contains
important information such as safety precautions and the operating, inspecting, and maintenance procedures
required to use the system. Carefully read this manual and fully understand its contents to prevent serious
accidents before they happen.
Before using the system, carefully read this manual and fully understand the operating, inspecting
and maintaining procedures.
Do not operate the system before you fully understand the explanations in this manual.
Keep reading this manual until you fully understand the system and can operate it correctly.
System safety is explained in "Safety precautions" (page ii), "Safety symbols" (page iii), and
"1. For Safe Operation" (page 1). Carefully read and understand these sections before using
the system.
Carefully store this manual nearby so it can be used at anytime.
When the system's installation location is changed, always include this manual with the
system.
The content of this manual may differ from the system being used due to system
improvements.
If you have any questions and items of concern, contact your ULVAC’s dealer.
Please operate the system safely and administer it correctly.
The content listed in this manual is subject to change without prior notice because of changes in
system specifications or system improvements.
The copyright of this manual and safety guide is held by the ULVAC Inc.
You are forbidden from copying all or a portion of this manual without the consent of the
ULVAC Inc.
You are forbidden from using this instruction manual for systems or applications other than
those approved by the ULVAC Inc.
You may not copy any portion of this instruction manual for use by a third party without the
consent of ULVAC Inc.

RF Power Supply and Matching Box
Introduction
1. Safety precautions
1
Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair.
Failure to comply with the safety precautions or neglecting to anticipate danger causes accidents
to happen more easily. Accidents can be prevented before they happen by anticipating potentially
dangerous situations at an early stage.
2
Accidents involving injuries are caused by erroneous operation or inadequate maintenance and
inspection work.
Never try to operate the system before carefully reading and understanding the operation,
inspection, and maintenance sections.
3
Warnings and precautions about safety are listed in this manual and on the system's warning labels.
Ignoring these warnings and precautions may lead to injury or loss of life, so use caution.
4
Supervisors, operators, and maintenance personnel should read this manual before operation or
maintenance. Only those who know how to handle the system and have received training should
perform the appropriate work on the system using the correct techniques and tools.

RF Power Supply and Matching Box
Introduction
2. Safety symbols
Safety symbols are used throughout this manual and labeled on the system to call the operator's attention
to safety.
The terminology used in safety symbols is classified below.
This symbol indicates the possibility of impending death or serious injury
when the hazard cannot be avoided.
Work that ignores this warning has a high probability of severely injuring people or
damaging factory equipment (including this system).
This symbol indicates the possibility of death or serious personal injury when
the hazard cannot be avoided.
Work that ignores this warning will severely injure or damage factory equipment
(including this system).
This symbol indicates the possibility of minor injury or moderate damage to
the system when the hazard cannot be avoided.
Work that ignores this warning carries the risk of minor injury to the operator,
damage to the system, or necessary adjustment of the system.
There is no direct danger, but this symbol notes content you should know to work
safely and to use the system correctly.
It is not possible to precisely anticipate all potential dangers in operation, inspection, or maintenance in
all operating environments.
The warnings listed in this manual and on the warning labels affixed to the system do not satisfy every
aspect of safety.
When handling the system, those who administer, operate, or maintain the system should pay the utmost
care, even for items not mentioned in this manual, and work to maintain safety so that serious accidents
like injuries or damage to the system do not occur.
When operating, inspecting, or maintaining the system in a manner not described in this manual, all
workers must perform that work at their own responsibility paying careful attention to the necessary
safety precautions.
Danger
Caution
Warning
Reference

RF Power Supply and Matching Box
Introduction
3. No charge repair provisions
No charge repair provisions
1. This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure
occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please
inquire with the ULVAC Inc. The system will be repaired or replaced at no charge.
2. Subject to warranty
1) RF power supply unit
2) Matching box
3) Automatic matching controller
3. Warranty period
1) Domestic transaction: 1 year from date of shipment from ULVAC
2) Direct export transaction: 1 year from receiving B/L
4. Warranty range
1) A system damaged by problems during delivery, shipping. However, for direct export transactions, pursuant to
the warranty range stipulated in latest Incoterms.
2) A system that does not meet basic specifications even though it is used within the usage conditions, such as
the usage temperature range and usage power supply
5. Response method
1) For domestic transactions
1. ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC
service center where it will be repaired.
2. If an on-site response is required, consult separately with ULVAC, Inc.
2) For direct export transactions
ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC
service center where it will be repaired. Return shipping expenses are borne by the customer.
6. Warranty disclaimer
1) A system that has exceeded the warranty period
2) Malfunction or failure caused by natural disasters like fire, wind and flood damage, earthquakes, lightning, and
others, or disasters from force majeure events such as war
3) Malfunction or failure caused by inattention during handling or mistaken usage
4) A system modified, disassembled, or repaired without ULVAC's approval
5) Malfunction or failure from abnormal environments (strong magnetic fields, radiation environments, high
temperatures, high humidity, flammable gas atmospheres, corrosive gas atmospheres, dust, etc.)
6) Malfunction or failure from electronic noise
7) Secondary damage, process patents, and/or products manufactured by your company using this system that
has occurred from a system defect
8) When a defect is judged by ULVAC technicians to have occurred because usage did not meet the system's usage
conditions
9) Consumables (consumable parts are listed in "Chapter 6. Maintenance".)
10) When malfunction or damage occurs from mishandling in transport/moving after delivery
11) When replacement is necessary because of the lifespan of used parts
12) When parts cannot be procured because their production has ended
13) Lighting surge/when applying voltage outside the input variation range (including applying spike voltage/during
momentary power losses)
7. Others
1) When an individual contract or memorandum related to specifications exists separately from this document, the
warranty conforms to that content.
2) For questions or consultations about the system, first check the model and serial number, then contact the
ULVAC, inc.
3) The content of this document is subject to change without prior notice.
4) Unless otherwise indicated, parts replaced during repair are the property of ULVAC Inc.
*1 Please note that the lending of replacement equipment during the repair period and dispatch
repair*2 will incur separate expenses.
*2 For on-site dispatch repairs, the actual expenses billed are the expenses related to the trip
(travel expenses)

RF Power Supply and Matching Box
Introduction
4. If you notice a problem with the system
If you notice a problem with the system, see "Chapter 7. Troubleshooting" and verify the symptoms and
malfunction. In order to avoid losses on both sides due to misunderstandings or misjudgments, and to
quickly perform repairs, please work to ensure the accuracy of the information.
If you have determined there is a malfunction or if you have any questions, contact one of the locations
listed below. When contacting ULVAC, please inform us of the product names, model numbers, serial
numbers, and about the symptoms of the problem in as much detail as possible.
5. Disposal
When disposing of the system, please follow all national and local regulations.
Customers are responsible for expenses related to disposal.

RF Power Supply and Matching Box
Table of Conte
nts
Table of Contents
1. For Safe Operation............................................................................................................................................................................. 1
1-1. Precautions when handling the system ............................................................................................................................ 1
1-2. Warning label/nameplate locations..................................................................................................................................... 2
1-3. Contact information.................................................................................................................................................................. 2
2. Overview................................................................................................................................................................................................. 3
2-1. Introduction.................................................................................................................................................................................. 3
2-2. Features ........................................................................................................................................................................................ 3
2-3. Configuration............................................................................................................................................................................... 4
2-4. Specifications.............................................................................................................................................................................. 6
3. Setup......................................................................................................................................................................................................21
3-1. Accessories ...............................................................................................................................................................................21
3-2-1. Installation and drilling rack holes...........................................................................................................................22
3-2-2. RF power supply mounting structure.....................................................................................................................22
3-3. Matching box installation......................................................................................................................................................23
3-3-1. Matching box installation location...........................................................................................................................23
3-3-2. Installation ........................................................................................................................................................................23
3-4. Automatic matching controller installation....................................................................................................................23
3-5. System wiring............................................................................................................................................................................24
3-5-1. Connecting cables .........................................................................................................................................................24
3-5-2. Input power supply wiring ...........................................................................................................................................26
3-5-3. Connecting the ground terminal...............................................................................................................................27
3-5-4. Connecting the water cooling tube.........................................................................................................................28
4. Functions..............................................................................................................................................................................................29
4-1. RF power supply ......................................................................................................................................................................29
4-1-1. RF power supply part names and functions........................................................................................................29
4-1-2. Control panel functions and explanations............................................................................................................30
4-1-3. Measurement display....................................................................................................................................................31
4-1-4. Protective functions.....................................................................................................................................................31
4-1-5. External control terminal pin assignments...........................................................................................................32
4-1-6. Caution when using the external control terminal (INTERFACE)...............................................................35
4-1-7. RF power supply parameters ....................................................................................................................................36
4-2. Automatic matching controller functions.......................................................................................................................38
4-2-1. Automatic matching controller part names and functions ............................................................................38
4-2-2. Control panel functions and explanations............................................................................................................39
4-2-3. Automatic matching controller AMC.EXT pin assignments ..........................................................................40
4-2-4. Automatic matching controller PRESET pin assignments.............................................................................41
4-2-5. Caution when using the external control terminals (AMC.EXT/PRESET)..............................................44
4-2-6. Matching controller parameters...............................................................................................................................45
5. Operation.........................................................................................................................................................................................46
5-1. Operating the RF power supply .........................................................................................................................................46
5-1-1. Setup before operation................................................................................................................................................46
5-1-2. Local operation method (panel operation)...........................................................................................................47
5-1-3. Remote operation method (external control) .....................................................................................................49
5-1-4. RF output timing.............................................................................................................................................................50
5-1-5. Measurement value display........................................................................................................................................51
5-2. Automatic matching controller operation ......................................................................................................................52
5-2-1. Local operation method (panel operation)...........................................................................................................52

RF Power Supply and Matching Box
Table of Conte
nts
5-2-2. Remote operation method (external control)..................................................................................................... 55
5-2-3. Remote operation method (external preset operation).................................................................................. 56
5-3. Matching adjustment.............................................................................................................................................................. 58
5-3-1. Matching fundamentals ............................................................................................................................................... 58
5-3-2. Matching adjustment.................................................................................................................................................... 59
5-3-3. Increasing and decreasing the number of coil short circuits....................................................................... 60
5-3-4. Adding a fixed capacitor............................................................................................................................................. 61
6. Maintenance........................................................................................................................................................................................ 62
6-1. RF power supply maintenance and inspection ............................................................................................................ 62
6-2. Matching box maintenance and inspection................................................................................................................... 63
7. Troubleshooting................................................................................................................................................................................. 65
7-1. Troubleshooting ....................................................................................................................................................................... 65
7-1-1. Troubleshooting related to the RF power supply ............................................................................................. 65
7-1-2. Troubleshooting related to the matching box .................................................................................................... 66
8. Reference materials......................................................................................................................................................................... 67

RF Power Supply and Matching Box
1. For Safe Operation
1
1. For Safe Operation
In order to safely use the system, this chapter describes the precautions, locations of warning labels, and
contact information for safe operation.
1-1. Precautions when handling the system
This section describes safety precautions for the system. Carefully read and fully understand the items
below before using the system.
Danger
The voltage generated by this power supply is sufficient enough to pose a danger to human life.
The utmost care must be taken when handling the system. If by some chance a person touches
this high voltage current, it will lead to a serious accident. Take great care not to come into
contact with high voltage current. Danger: Never energize the power supply with the cover
removed.
Danger
This power supply internally handles high voltages. When inspecting inside the power supply,
always shut off the primary-side switch of the power supply used and then wait for three
minutes or more before opening the cover.
Maintenance work must be done by a technician with experience handling high voltages or
under the direction of such a person.

RF Power Supply and Matching Box
1. For Safe Operation
2
1-2. Warning label/nameplate locations
Reference
The locations where warning labels are affixed to the system are shown in the reference
materials in Chapter 8. Make sure these warning labels are always clean and legible. Use a cloth
and water to clean the warning labels. Do not use gasoline or organic solvents. If a label is
damaged, missing, or illegible, contact ULVAC or an exclusive dealer. A nameplate is also affixed to
the top surface of the power supply. Take special care to ensure the nameplate is always legible.
1-3. Contact information
To order parts, ask questions about the system, and to make inquires related to system malfunctions,
first verify the system information and then contact ULVAC. Especially when you have determined the
system has malfunctioned, inform us of the system information along with the system's history and
symptoms in as much detail as possible.
■System information (listed on the nameplate)
Model
Manufacturing number information (Serial No. and Lot No.)