Ulvac RFS-03D User manual

RF0024E-03
INSTRUCTION MANUAL
RF POWER SUPPLY
MODEL：RFS-03D
3rd version 2023.07.01
ULVAC Inc.
※Read this manual before operation this product
Keep this manual at your hand for immediate reference.

RF POWER SUPPLY ～RFS-03D～
INTRODUCTION
i
INTRODUCTION
Thank you for purchasing our product.
This manual is intended to serve as a guide for safe and efficient use of this product. It contains important
information, such as cautions and operating, inspecting and maintenance procedures that are required in using
this product. Carefully read this manual and fully understand them before operation to prevent accidents and
troubles.
Read this manual before operation and fully understand operating, inspecting and maintaining
procedures.
Do not operate this product before you fully understand them.
Read this manual until you fully understand it and can operate the product correctly.
Carefully read and fully understand Safety Cautionsand Safety.
Keep this manual at your hand for immediate reference.
If this product is moved to other location, attach this manual to it.
The contents of this manual are subject to change without notice for improvement.
If you come up with any question or trouble, contact your local ULVAC representative or
ULVAC,Inc. .
Always use the product safely and take care of it correctly.
The contents of this manual are subject to change without notice for improvement.
All contents on this instruction manual are the copyright of ULVAC inc. .
Copying some or all of this instructions manual is forbidden without permission of ULVAC
Inc.
It is forbidden to use this instruction manual for other product or without agreement of
ULVAC Inc.
No part of this instruction manual is copied or reproduced for use by a third party without
ULVAC consent

RF POWER SUPPLY ～RFS-03D～
INTRODUCTION
ii
１．SAFTY CAUTIONS
１
Most accidents are attributed to careless operation, inspection, maintenance or repair. Also
failure to comply with safety cautions or predict potential danger is responsible for accidents.
Accidents can be prevented by predicting a potentially dangerous situation at an early stage.
２
Personal injuries are caused by erroneous operation or inadequate maintenance or inspection.
Never try to operate the product before you read sections on operation, inspection and
maintenance and fully understand them.
３
Safety denotations are used throughout this manual and are labeled on this product.
Failure to comply with these warnings or cautions may lead to personal injuries or loss of life.
４
The supervisor, operator and maintenance personnel should read this manual before operation or
maintenance. Only those who have been trained and know how to operate correctly should
operate this equipment using correct techniques and tools.

RF POWER SUPPLY ～RFS-03D～
INTRODUCTION
iii
２．SAFETY DENOTATIONS
Safety denotations are used throughout this manual and labeled on the product to call operators attention
to safety.
Safety denotations are classified as follows.
Failure to comply with this involves the possibility of impending death or
serious personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously in high ratio.
Failure to comply with this involves the possibility of death or serious
personal injury.
If you disagree with this warning, human life or plant facility, included this
product, are damaged seriously.
Failure to comply with this involves the possibility of a medium deg
ree of injury or of serious damage to the product.
If you disagree with this caution, it is possible that operator receives a minor
injury or that this product comes down or needs adjustment.
Although there isn’t direct damage, the notice was described for operation
safety and correct operation.
It is hardly possible to predict all potential dangers in operation, inspection or maintenance under all
operating environments.
Warnings on the cautionary labels in this manual and on the equipment do not mean to meet all safety
requirements.
In operating or maintaining this product, the operator or the maintenance personnel must use every
care so that any serious accident like personal injury or damage to the product does not occur.
If operation, inspection or maintenance not described in this manual is performed, it is the users
responsibility to take necessary care for safety.
DANGER
WARNING
CAUTION
NOTE

RF POWER SUPPLY ～RFS-03D～
INTRODUCTION
iv
３．ABOUT THE PRODUCT
The description and illustrations given in this manual are based on the information that was available at the
time when the manual was written. Therefore, the contents of this manual are subject to change without
notice. Before using the product, contact your local ULVAC representative or ULVAC Inc. to confirm the
latest information.
ULVAC products are warranted free from defects in material and workmanship for a period of twelve (12)
months from the date of shipping. In addition, about the parts exchanged for repair, we will consider as
possession of our company as long as there are no directions.
No charge repair provisions
１This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is responsible for,
such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or dealer regarding repairs. The system will be repaired or
replaced at no charge.
２Subject to warranty
1) Main Unit and Accessories
３Warranty period
1) Domestic transaction: 1 year from date of shipment from ULVAC.
2) Direct export transaction: 1 year from receiving B/L.
４Warranty range
1) A system damaged by problems during shipping at time of delivery. However, for direct export transactions, pursuant to the warranty range stipulated
in latest Incoterms.
2) A system that does not meet basic specifications even though it is used within the usage conditions, such as the usage temperature range and usage
power supply.
５Response method
1) For domestic transactions
①ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC service center where it will be repaired.
②If an on-site response is required, consult separately with ULVAC, Inc. or the nearest sales office or dealer.
2) For direct export transactions
①ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC service center where it will be repaired.
Return shipping expenses are borne by the customer.
６Warranty disclaimer
1) A system that has exceeded the warranty period.
2) Malfunction or failure caused by natural disasters like fire, wind and flood damage, earthquakes, lightning, and others, or disasters from force majeure
events such as war.
3) Malfunction or failure caused by inattention during handling or mistaken usage.
4) A system modified, disassembled, or repaired without ULVAC's approval.( When it is confirmed that the sheet metal of the power supply body has
been opened.)
5) Malfunction or failure from abnormal environments (strong magnetic fields, radiation environments, high temperatures, high humidity, flammable gas
atmospheres, corrosive gas atmospheres, dust).
6) Malfunction or failure from electronic noise.
7) Secondary damage that has occurred from a system defect, process patents, and/or products manufactured by your company using this system.
8) When a defect is judged by ULVAC technicians to have occurred because usage did not meet the system's usage conditions.
9) Consumables (consumable parts are listed in “5. Maintenance”).
10) When malfunction or damage occurs from mishandling in transport/moving after delivery.
11) When replacement is necessary because of the lifespan of used parts.
12) When parts cannot be procured because their production has ended.
13) When lighting surges occur or when applying voltage outside the input fluctuation range (including applying spike voltage/during momentary power
losses).
７Others
1) When an individual contract or memorandum related to specifications exists separately from this document, the warranty conforms to that content.
2) For questions or consultations about the system, first check the model and manufacturing numbers, then contact the nearest sales office, dealer, or
ULVAC, Inc.
3) The content of this document is subject to change without prior notice.
4) Unless otherwise indicated, parts replaced during repair are the property of ULVAC, Inc.
※1 Note that the lending of replacement equipment during the repair period and dispatch repair will incur separate expenses.
※2 For on-site dispatch repairs, the actual expenses billed are the expenses related to the trip (travel expenses).

RF POWER SUPPLY ～RFS-03D～
INTRODUCTION
v
４．IN CASE OF NOTICING ABNORMALITIES OF THE PRODUCT
If any trouble is found, check the trouble symptom and verify that it is a trouble referring to "Maintenance"
in this manual. Complete information about the trouble will prevent loss on both sides due to
misunderstanding or misjudgment and allow us to take quick actions for repair.
If you encounter any trouble or come up with any question, please contact your local ULVAC
representative.
In your service call, please furnish us with as complete information as possible, including the name, model
number and serial number of your product and trouble symptom.
５．DISPOSAL
Please comply with the state regulation or the local regulation for disposal of the unit. You would be
responsible for the cost relating to disposal.

RF POWER SUPPLY ～RFS-03D～
table of contents
Table of contents
１.FOR SAFETY OPERATION .........................................................................................................................................................1
１.１.CAUTION For HANDLING........................................................................................................................................1
１.２.LOCATION OF WARNING LABELS AND NAMEPLATES...........................................................................2
１.３.CONTACT INFORMATION......................................................................................................................................2
２.GENERAL DESCRIPTION ............................................................................................................................................................3
２.１.INTRDUCTION..............................................................................................................................................................3
２.２.CHARACTER.................................................................................................................................................................3
２.３.COFIGURATION ..........................................................................................................................................................3
２.４.SPECIFICATION OF POWER SUPPLY MAIN BODY....................................................................................4
２.５.ASSIGNMENT OF EXTERNAL CONTROL TERMINAL PINS ....................................................................5
３.PREPARATION.................................................................................................................................................................................6
３.１.ACCESSORIES.............................................................................................................................................................6
３.２.NAME AND FUNCTION OF THE PRODUCT PARTS...................................................................................6
３.３.INSTALLATION THE PRODUCT ..........................................................................................................................7
４.OPERATION ................................................................................................................................................................................... 10
４.１.SETTING METHOD.................................................................................................................................................. 10
４.２.OPERATION METHOD........................................................................................................................................... 10
５.MAINTENANCE.............................................................................................................................................................................. 12
５.１.MAINTENANCE AND INSPECTION OF RF POWER SUPPLY............................................................... 12
５.２.RECOMMENDED REPLACEMENT PARTS OF RF POWER SUPPLY................................................. 12
６.TROUBLESHOOTING................................................................................................................................................................. 13
６.１.TROUBLESHOOTING For RF POWER SUPPLY......................................................................................... 13
７.ATTACHED MATERIALS........................................................................................................................................................... 15

RF POWER SUPPLY ～RFS-03D～
1. FOR SAFETY OPERATION
1
１.FOR SAFETY OPERATION
This section describes precautions, location of warning labels
and contact information for safety operation.
１.１.CAUTION For HANDLING
Precautions for this product are described. Carefully read these precautions and fully understand them
before operation of this product.
DANGER
Voltage generated from a power supply used when operating the product is danger enough to
endanger human lives. Take great care for handling. If perchance human touch such voltage,
serious accident is led. Take great care not to touch high voltage. Never apply current without
covering because of its danger.
DANGER
There is high voltage in a power supply used when operating the product. When checking
inside the power supply, wait for three minutes after turning the breaker off, and open the cover.
Maintenance work must be done by an expert on high voltage handling or with training.

RF POWER SUPPLY ～RFS-03D～
1. FOR SAFETY OPERATION
2
１.２.LOCATION OF WARNING LABELS AND NAMEPLATES
NOTE
Figure 1.1 describes the location of warning labels. Make sure that all warning labels are clean and
legible at all times. Use a cloth or water to clean the warning label. Do not use gasoline or organic
solvent. If the label is damaged, lost or illegible, contact your local ULVAC representative.
On the nameplate on the rear panel of the power supply is inscribed the serial number of the power
supply. See to it that it is always legible.
Figure １．１ Location of warning labels and nameplate.
１.３.CONTACT INFORMATION
If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your
local ULVAC representative, after confirming information of the product. In case of trouble, let us know the
product information and trouble symptom and situation in detail as much as possible.
■Product information (These are described on the nameplate)
Product model
Manufacturing number on the product （Serial No. and Lot No.）
Front
Back
nameplate
high voltage warning label

RF POWER SUPPLY ～RFS-03D～
2. GENERAL DESCRIPTION
3
２.GENERAL DESCRIPTION
This section describes character, construction and specification about this product.
２.１.INTRDUCTION
This system is designed to generate plasma in RF sputtering, plasma CVD, etching and other applications.
The RF power supply can supply the RF electric power of the maximum 300W to the RF load (generally, RF
electrode) with 13.56MHz by combining with the adjustment machine (matching box).
２.２.CHARACTER
Features of this system include the following.
All solid-state type
Featuring small size and high reliability by quartz crystal oscillation.
Cooling water is not needed because of air cooling.
２.３.COFIGURATION
This system consists of the following.
RF power supply main body
AC input cable JA01(3m)
D-sub connector for EXT.CONT(15pins/female)
Instruction manual(this book)
This device needs the matching box (adjustment machine).
Fig. 2.1 shows the system configuration.
The basic configuration includes the following.
RF power supply RFS-03D
Manual matching box MBX002M
RF output cable JA31
Control cable JA32
Fig 2.1 System configuration
RFS
-
03
D
MBX
002
M
AC IN
AC
100
V
JA
31
JA
32
JA
01
(
EXT
.
CONT
)
RF
OUT
CONTROL

RF POWER SUPPLY ～RFS-03D～
2. GENERAL DESCRIPTION
4
２.４.SPECIFICATION OF POWER SUPPLY MAIN BODY
2.1 RF Power Supply Specification
Item
Specification
RFS-03D
Input
Input voltage
100 VAC, single phase, 50/60 Hz
Input variable range
90 V to 120V
Input capacity
600 VA
Leakage current
5mA or less
Input connector
IEC connector (special cable JA01 is used)
Output
Oscillation system
Quartz crystal oscillation
Oscillation frequency
13.56 MHz ±0.05% (by change of oscillator)
Output impedance
50 
Rated output
300W (continuous)
Output adjustment range
0 or 2 % to 100%
Output power stability
Within 1 % of rated output (excluding initial drift)
Harmonic distortion
Not more than - 20 dB (at 50 dummy load/rated output)
Power monitor accuracy
Within 5% of the rated output
Maximum reflected power
50 W
RF output connector
BNC connector
External
OSC
Input impedance
50 
Input level
10±3dBm
Input connector
UM-QR connector(option)
Cooling
Cooling system
Forced air –cooling
Calorific power (at 50
dummy load/rated
output)
258 kcal
Protective function
Protection against excessive reflected power
Protection of last stage output amplifier against
over-voltage/over-current
Protection against damage by temperature rise
Protection of the last stage amplifier against progress of damage
External interlock
Panel interlock
Operation mode
Output mode selectable on operation panel and by external
command signal.
Environm-
ent
Ambient temperature
+ 10 C to 40C
Ambient humidity
30 % to 80 % (not condensing)
Outside dimensions (W D H)
(without protrusion)
200 400 99 (mm)
When rack-mount unit is installed: W240(mm)
Weight
6 kg

RF POWER SUPPLY ～RFS-03D～
2. GENERAL DESCRIPTION
5
２.５.ASSIGNMENT OF EXTERNAL CONTROL TERMINAL PINS
For external control, make connection using the supplied connectors, referring to Fig. 2.2. Even if the
external control terminal is not used, short-circuit pins between 14 and 15 (INTERLOCK) .
Table 2.1 Assignment of External Control Terminal Pins, D-sub15p
Pin
No.
Name
Content
1-2
RF ON/OFF
When RF ON/OFF mode is in REMOTE mode and No.1 and No.2 pins are connected, RF
turns ON.
3-4
RF ON signal
When RF is ON, contact point closes.
5-6
INTERLOCK signal out
When INTLOCK is released (when RF ON is available), contact point closes.
7-8
FAILURE
When ALARM is output, contact point closes.
10-9
Pf monitor
Pf power monitor: Voltage DC 0 to + 10V / 0 to rated Pf power
11-9
Pr monitor
Pr power monitor: Voltage DC 0 to + 10V / 0 to rated Pr power
12-13
POWER set
When POWER CONTROL mode is in REMOTE mode, Pf power order signal.
DC 0 to + 10 V / 0 to rated Pf power.
14-15
INTERLOCK
RF ON is available at “CLOSE.”RF turns OFF when “CLOSE”is switched to “OPEN.”
Fig. 2.2 Specifications of EXT. CONT connector
+12V
RF ON/OFF
+24V
RF ON SIG
INTERLOCK
POWER SET
Pr MONITOR
Pf MONITOR
FAIURE
INTERLOCK SIG OUT
2mA max
2mA max
+ -
+10V
1
6
4
3
2
5
7
8
9
11
10
15
14
13
12
40mA max
40mA max
40mA max
+12V
RF Main Body
External control system

RF POWER SUPPLY ～RFS-03D～
３．PREPARATION
6
３.PREPARATION
The section describes necessary preparation
and precaution before operation of the product.
３.１.ACCESSORIES
The following accessories are included in a RF power supply.
1) Standard accessories of RF power supply
No.
Name
Type
Quantity
1
AC input cable
3m
1
2
Connector plug for RF power supply external control signal
1
3
Instruction manual
This book
1 copy
３.２.NAME AND FUNCTION OF THE PRODUCT PARTS
■Front panel
Fig. 3.1 RF power supply front panel
Table 3.1 Names and Functions of Components of Operation Panel
Name of component
Function
①POWER SWITCH
Main switch that starts this power supply.
②RF ON/OFF
REMOTE/LOCAL switching
Switch that selects whether REMOTE (external control) or LOCAL (power supply
front panel) for RF ON/OFF. Lights green when REMOTE mode is set.
③POWER CONT.
REMOTE/LOCAL switching
Switch that selects whether REMOTE (external control) or LOCAL (power supply
front panel) for RF POWER set. Lights green at REMOTE mode is set.
④RF ON/OFF switching
When LOCAL is selected by ②, selects whether RF ON or OFF.
Lights green when RF is ON.
⑤POWER SET
Switch to set the power of RF when LOCAL is selected by ③.
⑥Pf MONITOR
Display Pf monitor.
⑦Pr MONITOR
Display Pr monitor.
⑧INTERLOCK LED
Lights green when ｔhe condition of INTERLOCK is met and RF can be ON
⑨FAILURE LED
Lights red when the power supply is abnormal. (Ex. The temperature rise inside
the power supply etc.
⑧
⑥
⑤
④
③
②
①
⑨
⑦

RF POWER SUPPLY ～RFS-03D～
３．PREPARATION
7
■Back panel
Fig. 3.2 RF power supply back panel
Table 3.2 Names and Functions of Components
Name of component
Function
①AC INPUT
Connect the power input cable.
②Earth terminal
Connect this to the earth(GND).（class D earth）
③RF OUT connector
Connector that outputs RF power
④EXT. CONT connector
Connect wiring in external control. (If external control is not used,
short pins 14 - 15.
⑤MBX connector
Connect the CONTROL connectors on the matching box(MBX002M) .
⑥EXT OSC IN connector
Connector for input of signal from external OSC.(option)
⑦Fan
Cools the power supply interior
３.３.INSTALLATION THE PRODUCT
■The following AC input equipment is necessary to operate this power supply.
single phase 90 V to 120V, 50/60 Hz, 600 VA
CAUTION
This product does not accept lightning surge, spike voltage and moment power failure. If lightning
surge, spike voltage or moment power failure are input, damage or error are led. Operate it without
lightning surge, spike voltage and moment power failure.
④
⑤
③
⑦
②
①
⑥

RF POWER SUPPLY ～RFS-03D～
３．PREPARATION
8
■How to install and make holes in the rack
The RF power supply can be mounted on a rack. Refer to Fig. 3.3 below how to make mounting holes
in a rack.
Fig. 3.3 Rack installation hole position
■Structure for mounting RF power supply
In mounting the RF power supply in a front panel, see to it that undue force is not exerted to the
front panel of the RF power supply, which is not designed to bear the weight of the power supply.
See Fig. 3.4 below. Also provide a clearance for air intake around the power supply.
And, when using rack-mount, enable to ventilate enough in order that the temperature in a rack does
not exceed specification temperature. If it is operated at the temperature besides specification,
alarm may detect or it may damage in the worst. See Fig. 3.5 below.
RF Power supply
Rack
Rack
Spport from below
No undue force on
the front panel
power supply
Fig. 3.4 Mounting rack-mount type RF power supply (example)
100mm or more
40mm or more
50mm or
more
FAN
Top view of
a power supply
Front panel of
a power supply
Fig. 3.5 Clearance around power supply

RF POWER SUPPLY ～RFS-03D～
３．PREPARATION
9
■WIRING OF SYSTEM
1)Connecting cables
Before connecting the RF power supply and matching box, check the names of connectors and
cables for exclusive use and connect the wiring referring to Fig. 2.1. and Fig. 3.6.
2）Wiring of input power
WARNING
First, connect the connector of the supplied input cable to the RF power supply and then connect
the other end. Turn OFF your main breaker before making wiring arrangement of input power.
*Connect the input connector pins as shown below
Fig 3.6 Wiring of power input terminals
①
②
③
Single phase AC100V
E
GND
RF power supply

RF POWER SUPPLY ～RFS-03D～
４．OPERATION
10
４.OPERATION
The section describes setting method and operation method of the product.
And connection with each unit is also described in the section.
４.１.SETTING METHOD
This power supply can control RF ON/OFF and RF POWER SET using the power supply front panel or the
external control.
There are four kinds of control systems by the combinations as follows.
The LOCAL/REMOTE changing-over switch lights in the state of REMOTE (green).
Please confirm whether the setting of the front panel is correct when you use the power supply.
Fig 4.1 LOCAL/REMOTE setting of POWER SET and RF ON/OFF
SWITCH
Control
Ⅰ
Ⅱ
Ⅲ
Ⅳ
RF ON/OFF
LOCAL/REMOTE SWITCH
LOCAL
Front panel
LOCAL
Front panel
REMOTE
External control
REMOTE
External control
POWER SET
LOCAL/REMOTE SWITCH
LOCAL
Front panel
REMOTE
External control
LOCAL
Front panel
REMOTE
External control
４.２.OPERATION METHOD
This is a description of when selecting I from Fig 4.1
１． Confirm both switch ②and③are turned off.
２． Set ⑤（POWER SET）to 0W.
３． Turn on ①POWER switch . If INTERLOCK is satisfied, ⑧INTERLOCK LED lights.
Meanwhile confirm whether FAN turns. (If ⑧doesn't light, ｒefer to "Chapter 6 troubleshooting ②")
４． Turn on ④RF ON/OFF switch. Green lights when RF is ON
５． If the POWER SET switch is turned gradually clockwise, ｔhe display values of ⑥Pf display and ⑦Pr
display increase.
６． Turn the switch of ⑤up to the maximum Pr value. Confirm that discharge is initiated, and adjust the
matching. When matching is achieved, Pr value decreases.
７． After discharge, increase Pf value little by little in the same way as Pr value while watching the output
Pr. In case the matching point deviates extremely, the Pr value reaches the maximum reflected power
and Pf droops. In this case, it is easier to get the matching achievement that Pf setting value is
lowered and make it less than 50W before readjustment
８． Adjust the matching again when the Pf power reached a desired value.
If the operating power is determined and the matching point meets that point, turn it OFF. Then it is
possible to be turned ON again. The matching point may not deviate extremely. However, it is
necessary to make sure that discharge is set up.
９． Before shutdown, gradually lower the Pf power setting and press the RF ON/OFF switch finally. Turn
OFF the POWER switch on the RF power supply (about three minutes later).

RF POWER SUPPLY ～RFS-03D～
４．OPERATION
11
⑧
⑥
⑤
④
③
②
①
⑨
⑦
Fig 4.1 Power supply switch position
Table 4.1 Switch names
Name
①POWER switch
②RF ON/OFF
REMOTE/LOCAL switching
③POWER CONT.
REMOTE/LOCAL switching
④RF ON/OFF switching
⑤POWER SET
⑥Pf MONITOR
⑦Pr MONITOR
⑧INTERLOCK LED
⑨FAILURE LED

RF POWER SUPPLY ～RFS-03D～
5．MAINTENANCE
12
５.MAINTENANCE
The section describes necessary maintenance to use the product for years.
If you fail to do maintenance, wear of the product would be accelerated and shutdown
of the product would be led. Read this section carefully and do maintenance
５.１.MAINTENANCE AND INSPECTION OF RF POWER SUPPLY
For inspection/maintenance of the RF power supply, proceed as follows. Once every six months check
the connector for possible corrosion and clogging.
WARNING
Turn off the main breaker of the power supply used when operating the product when you do
maintenance and inspection of the unit. And, wait for three minutes after turning the breaker off
and disconnecting a plug. A voltage may be left in the cable. If you touch by mistake, it may
become an accident resulting in injury or death.
DANGER
Never open a cover of the power supply in power distribution. Voltage generated from a power
supply used when operating the product is danger enough to endanger human lives. If perchance
human touch such voltage, serious accident is led. And Never distribute power with a cover
opened.
５.２.RECOMMENDED REPLACEMENT PARTS OF RF POWER SUPPLY
We recommend a regular overhaul to use the power supply for a longer span.
Please refer to Table 5.1 recommended replacement parts below.
Table 5.1 Recommended replacement parts of RF power supply
No.
Parts
Service life
Period of regular maintenance or
replacement
1
Cooling fun
30000ｈ/50℃
Per 3 years
2
Operation switch
10000 times
Per 3 years（10 times/day）
3
Switching power supply
8 years/50℃
Per 6 to 8 years
4
Power switch
10000 times
Per 7 to 9 years（3 times/day）
5
Electrolytic condenser
10 years/50℃
Per 7 to 9 years
Note: Neither service life nor recommended exchange period of the parts means the product life guarantee.
The consumptive speed of these parts changes greatly with operating frequency of your device.