Ulvac RFP-N User manual

RF0040E-18
I
In ns st tr ru uc ct ti io on n M Ma an nu ua al l
High-Frequency Power Supply
RF Generator
Matching Box
Model:
Control Panel
RFP-N
RF Generator
RFS-1305N
RFS-1310N
RFS-1330N
RFS-1350N
Matching Box
MBX-1305N
MBX-1310N
MBX-1330N
MBX-1350N
Revised 18th Edition 2023/07/19
ULVAC Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.

RF POWER SUPPLY and MATCHINGBOX
Introduction
i
Thank you for purchasing this ULVAC system.
This instruction manual is intended to serve as a guide for the safe and efficient use of the system. It
contains important information such as safety precautions and the operating, inspecting, and
maintenance procedures required to use the system. Carefully read this manual and fully understand
its contents to prevent serious accidents before they happen.
* Caution
Before using the system, carefully read this manual and fully understand the operating,
inspection, and maintenance procedures.
Do not operate the system before you fully understand the content of this manual.
Keep reading this manual until you fully understand the system and can operate it correctly.
These sections explain about safety: "Safety precautions" (page ii)
"Safety symbols" (page iii)
"For Safe Operation" (page 1)
Read and understand the information in these sections before using the system.
Carefully store this manual near the system.
When the system's installation location is changed, always include this manual with the
system.
The content of this manual may differ from the system being used because of improvements
to the system.
If you have any questions or items of concern, contact ULVAC or your exclusive dealer.
Please operate the system safely and administer it correctly.
The content listed in this manual is subject to change without prior notice because of changes in
system specifications or system improvements.
* The copyright of this manual and safety guide is held by ULVAC Inc.
You are prohibited from copying all or a portion of this manual without the consent of the
ULVAC Inc.
You are prohibited from using this instruction manual for other products or applications
except those approved by the ULVAC Inc.
You are prohibited from copying any portion of this instruction manual for use by a third
party without the consent of the ULVAC Inc.

RF POWER SUPPLY and MATCHINGBOX
Introduction
ii
1. Safety precautions
1
Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair.
Accidents happen more easily by failing to comply with the safety precautions or neglecting to
anticipate danger. Accidents can be prevented before they happen by anticipating potentially
dangerous situations.
2
Accidents involving injuries are caused by erroneous operation or inadequate maintenance and
inspection work. Never try to operate the system before carefully reading and understanding the
content related to system operation, inspection, and maintenance.
3
Warnings and precautions about safety are listed in this manual and on the system's warning
labels. Ignoring these warnings and precautions may lead to injury or loss of life, so use caution.
4
Supervisors, operators, and maintenance personnel should read this manual before operating the
system or performing maintenance work. Only those who know how to handle the system and
have received training should perform the appropriate work on the system using the correct
techniques and tools.

RF POWER SUPPLY and MATCHINGBOX
Introduction
iii
2. Safety symbols
This symbol indicates the possibility of impending death or
serious injury when the hazard cannot be avoided.
Work that ignores this warning has a high probability of severely
injuring people or damaging factory equipment (including the
system).
This symbol indicates the possibility of death or serious
personal injury when the hazard cannot be avoided.
Work that ignores this warning can severely injure people or
damage factory equipment (including the system).
This symbol indicates the possibility of minor injury or
moderate damage to the system when the hazard cannot be
avoided.
Work that ignores this warning carries the risk of minor injury to
the operator, damage to the system, or the system may require
adjustment.
There is no direct danger, but this symbol notes content you
should understand to work safely and to use the system correctly.
It is not possible to precisely anticipate all potential dangers in operation, inspection, or
maintenance in all operating environments.
The warnings listed in this manual and on the warning labels affixed to the system do not satisfy
every aspect of safety.
Workers performing maintenance on the system should pay the utmost care and work to maintain
safety so that serious accidents including injury or damage to the system do not occur.
When operating, inspecting, or maintaining the system in a manner not described in this manual,
all workers must perform that work at their own responsibility paying careful attention to the
necessary safety precautions.
Danger
Warning
Caution
Note

RF POWER SUPPLY and MATCHINGBOX
Introduction
iv
3. About the system
The descriptions and illustrations given in the manual are based on the information that was
available when the manual was written. The manual is subject to change without prior notice.
These changes can affect inspections, so check the latest information from an exclusive ULVAC
dealer before working.
4. If you notice a problem with the system
If you notice a problem with the system, check the symptoms and the malfunction. In order to
avoid losses due to misunderstandings or misjudgments, and to quickly perform repairs, please
give us your cooperation so we can clarify the content.
If you have determined there is a malfunction or if you have any questions, contact one of the
locations listed below. When contacting ULVAC, please inform us of the product name or model
number, the serial number, and the symptoms of the problem in as much detail as possible.
5. Disposal
When disposing of the system, please follow all national and local regulations.
Customers are responsible for all expenses related to disposal.

RF POWER SUPPLY and MATCHINGBOX
Introduction
v
No charge repair provisions
1. This system has been shipped after undergoing an extensive in-house inspection. However, in the event a
failure occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during
shipment, please inquire with the ULVAC Inc. The system will be repaired or replaced at no charge.
2. Subject to warranty
1) RF generator
2) Matching box
3. Warranty period
1) Domestic transaction: 1.5 year from date of shipment from ULVAC.
2) Direct export transaction: 1.5 year from receiving B/L.
4. Warranty range
1) A system damaged by problems during shipping at time of delivery. However, for direct export transactions,
pursuant to the warranty range stipulated in the latest Incoterms.
2) A system that does not meet basic specifications even though it is used within the usage conditions, such as
the usage temperature range and usage power supply.
5. Response method
1) For domestic transactions
1. ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC
service center where it will be repaired.
2. If an on-site response is required, consult separately with ULVAC, Inc.
2) For direct export transactions
1. ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC
service center where it will be repaired. Return shipping expenses are borne by the customer.
6. Warranty disclaimer
1) A system that has exceeded the warranty period.
2) Malfunction or failure caused by natural disasters like fire, wind and flood damage, earthquakes, lightning,
and others, or disasters from force majeure events such as war.
3) Malfunction or failure caused by inattention during handling or mistaken usage.
4) A system modified, disassembled, or repaired without ULVAC's approval.
5) Malfunction or failure from abnormal environments (strong magnetic fields, radiation environments, high
temperatures, high humidity, flammable gas atmospheres, corrosive gas atmospheres, dust).
6) Malfunction or failure from electronic noise.
7) Secondary damage that has occurred from a system defect, process patents, and/or products manufactured
by your company using this system.
8) When a defect is judged by ULVAC technicians to have occurred because usage did not meet the system's
usage conditions.
9) Consumables (consumable parts are listed in “7. Maintenance”).
10) When malfunction or damage occurs from mishandling in transport/moving after delivery.
11) When replacement is necessary because of the lifespan of used parts.
12) When parts cannot be procured because their production has ended.
13) When lighting surges occur or when applying voltage outside the input fluctuation range (including
applying spike voltage/during momentary power losses).
7. Others
1) When an individual contract or memorandum related to specifications exists separately from this document,
the warranty conforms to that content.
2) For questions or consultations about the system, first check the model and manufacturing numbers, then
contact the ULVAC Inc.
3) The content of this document is subject to change without prior notice.
4) Unless otherwise indicated, parts replaced during repair are the property of ULVAC, Inc.
※Note that the lending of replacement equipment during the repair period and dispatch repair will incur
separate expenses.
※For on-site dispatch repairs, the actual expenses billed are the expenses related to the trip (travel expenses).

RF POWER SUPPLY and MATCHINGBOX
Contents
Contents
1. For Safe Operation...............................................................................................................................1
1-1. Precautions when handling the system.........................................................................................1
1-2. Warning labels/nameplate.............................................................................................................2
1-3. Contact information......................................................................................................................2
2. Overview..............................................................................................................................................3
2-1. Introduction ..................................................................................................................................3
2-2. Features.........................................................................................................................................3
2-3. System configuration....................................................................................................................4
2-4. Cooling water quality standard.....................................................................................................6
2-5. Individual RF Generator specifications........................................................................................7
2-6. Common RF Generator specifications........................................................................................11
2-7. Individual controller specifications ............................................................................................13
2-8. Individual matching box specifications......................................................................................14
2-9. Common matching box specifications........................................................................................18
3. Setup ..................................................................................................................................................19
3-1. Checking the accessories............................................................................................................19
3-2. RF generator installation.............................................................................................................20
3-2-1. RF generator mounting structure.........................................................................................21
3-2-2. RF Generator installation environment ...............................................................................22
3-3. Matching box installation...........................................................................................................23
3-3-1 Matching box installation method........................................................................................23
3-3-2. In the case of connector output............................................................................................25
3-4. System wiring.............................................................................................................................27
3-4-1. Cable connections................................................................................................................27
3-4-2. Input RF Generator wiring ..................................................................................................29
3-4-3. Connecting the earth terminal..............................................................................................30
3-5.About the interlock .....................................................................................................................31
4. Functions............................................................................................................................................32
4-1. Descriptions of RF generator functions......................................................................................32
4-1-1. Descriptions of front panel functions ..................................................................................32
4-1-2. Descriptions of rear panel functions....................................................................................33
4-1-3. Descriptions of control panel functions...............................................................................37
4-1-4. Descriptions of protection functions....................................................................................38
4-1-5. Descriptions of external control functions...........................................................................39
4-2. Descriptions of Matching Box....................................................................................................43

RF POWER SUPPLY and MATCHINGBOX
Contents
4-3. Descriptions of parameter functions...........................................................................................45
4-4. Descriptions of external control (RS-232C) functions ...............................................................59
5. Operation............................................................................................................................................62
5-1. RF Generator operating procedures............................................................................................62
5-1-1. Turning on the RF Generator...............................................................................................62
5-1-2. Local operation method (panel operation)...........................................................................62
5-1-3. Remote operation (external control operation) method.......................................................66
5-1-4. Special commands...............................................................................................................68
6. MatchingAdjustment.........................................................................................................................69
6-1. Matching adjustment overview...................................................................................................69
6-1-1. Matching fundamentals.......................................................................................................69
6-1-2. Matching adjustment...........................................................................................................69
6-2. Matching box internal adjustment work.....................................................................................71
6-2-1.Adjusting the number of coil short circuits (MBX-1305N/MBX-1310N) ..........................72
6-2-2.Adjusting the number of coil short circuits (MBX-1330N/MBX-1350N) ..........................73
6-2-3.Adding a fixed capacitor......................................................................................................75
6-3. Matching box power derating.....................................................................................................76
6-3-1. MBX-1310N/MBX-1305N derating reference values ........................................................76
6-3-2. MBX-1330N derating reference values...............................................................................80
6-3-3. MBX-1350N derating reference values...............................................................................82
7. Maintenance.......................................................................................................................................84
7-1. RF Generator maintenance and inspection.................................................................................84
7-2. Matching box maintenance and inspection.................................................................................86
8. Troubleshooting .................................................................................................................................87
8-1. Troubleshooting..........................................................................................................................87
8-1-1. RF generator troubleshooting..............................................................................................87
8-1-2. Matching box troubleshooting.............................................................................................88
9. Reference Materials ...........................................................................................................................89
CE Declaration of Conformity...........................................................................................................97
People's Republic of China Electronic Industry Standard SJ/T 11364 -2014 (China RoHS2) ..........99

RF POWER SUPPLY and MATCHINGBOX
1. For Safe Operation
1
1. For Safe Operation
1-1. Precautions when handling the system
In order to safely use the system, this chapter describes the precautions, locations of warning labels,
and contact information for safe operation.
Danger
The voltage generated by this RF Generator is sufficient enough to pose a danger
to human life. The utmost care must be taken when handling the system. If a person
accidentally comes into contact with this voltage, it will lead to a serious accident.
Take great care not to come into contact with high voltages. DANGER: Never
energize the RF Generator with the cover removed. Do not open any covers other
than those specified in this instruction manual.
Danger
In order to prevent electric shock, always ground the cases of this equipment and
ground the wiring before energizing the system. In order to prevent electric shock
from ground leakage, do not use the system in environments where there is a
possibility of condensation. DANGER: Risk of electric shock and accidents from
ground leakage if liquids leak into the interior of the equipment.
Danger
The RF generator and matching box handle high voltages internally. When
performing maintenance on the interior of the equipment, always shut off the primary
side breaker for the power supply used and confirm that the AC power supply has
been shut off, then wait three minutes or more before opening the specified cover.
Interior maintenance work must be done by a technician specified by ULVAC or
under the direction of such a person. For maintenance work where the interior may be
opened, see "Chapter 7 Maintenance".

RF POWER SUPPLY and MATCHINGBOX
1. For Safe Operation
2
Danger
In order to prevent fires and explosion accidents, do not use this system in
locations with a flammable gas atmosphere or locations with dust.
1-2. Warning labels/nameplate
Note
The locations where warning labels are affixed to the system are shown in
"Reference Materials". Ensure that these warning labels are always clean and entirely
legible. Use a cloth and water to clean the warning labels. Do not use gasoline or
organic solvents. If a label is damaged, missing, or illegible, contact ULVAC or an
exclusive dealer. A nameplate has also been attached to the top of the RF generator.
Take special care to ensure the nameplate is always legible.
1-3. Contact
To order parts, ask questions about products, and to make inquires related to product malfunctions,
first verify the product information and then contact ULVAC or an exclusive dealer. Especially when
you have determined the system has malfunctioned, inform us of the system information along with
the system's history and symptoms in as much detail as possible.
■ System information (listed on the nameplate)
Model
Manufacturing number information (Serial No. and Lot No.)

RF POWER SUPPLY and MATCHINGBOX
2. Overview
3
2. Overview
This chapter describes the system's features, configuration, and specifications.
2-1. Introduction
This system has been designed for plasma generation in RF sputtering, plasma CVD, etching, and
other plasma processing applications. This system combines an RF Generator and matching box. It
can continuously output its rated power at a single frequency of 13.56 MHz for high frequency loads.
This system also has a control terminal that makes external control by a PLC possible.
2-2. Features
Saves energy through a construction with an RF circuit featuring good power conversion
efficiency.
Maintainability has been markedly improved by creating a small and light weight system.
High-speed auto-matching is possible with with high-speed algorithm.
The system can be controlled in various ways through external analog control, serial
communication control, and the controller.
Our accumulated knowledge as an equipment manufacturer has been reflected in the design of
the system.
A stabilized oscillation frequency can be obtained with the quartz crystal oscillation system.
Accurate power can be read by the linearized power meter.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
4
2-3. System configuration
This system is composed of a RF generator, a control panel, and a matching box.
The system configuration is shown in "Figure 2-1/Figure 2-2 System configuration".
The basic configuration requires the equipment below.
①RF generator (RFS-****N)
②Matching box (MBX-****N)
③Control panel (RFP-N) * Not used in external control and with built-in types.
Figure 2-1 System configuration (standalone controller type)
Figure 2-2 System configuration (built-in controller type)

RF POWER SUPPLY and MATCHINGBOX
2. Overview
5
Table 2-1 Details on the system configuration diagram codes
Wiring diagram code
Supported model
Remarks
RFS-****N
RFS-1305N
13.56 MHz/500 W RF Generator
RFS-1310N
13.56 MHz/1000 W RF Generator
RFS-1330N
13.56 MHz/3000 W RF Generator
RFS-1350N
13.56 MHz/5000 W RF Generator
MBX-****N
MBX-1305N
13.56 MHz/500 W matching box
MBX-1310N
13.56 MHz/1000 W matching box
MBX-1330N
13.56 MHz/3000 W matching box
MBX-1350N
13.56 MHz/5000 W matching box
AC**-N
AC01-N
Use for RFS-1305N/ RFS-1310N
AC05-N
Use for RFS-1330N/ RFS-1350N
RF**-N
RF01-N
Use for RFS-1305N/ RFS-1310N
RF03-N
Use for RFS-1330N
RF05-N
Use for RFS-1350N

RF POWER SUPPLY and MATCHINGBOX
2. Overview
6
2-4. Cooling water quality standard
Table 2-2 Cooling water quality standard*
Item
Substance
Water quality standard
Water temperature
25°C or lower (no condensation)
Specific resistance
5 kΩ∙cm or higher
pH
7.0 to 8.0
Chlorine ions
Cl－
100 ppm or lower
Acid consumption (pH 4.8)
CaCO3
100 ppm or lower
Total hardness
CaCO３
50 ppm or lower
Calcium hardness
CaCO3
50 ppm or lower
Ionic silica
SiO2
20 ppm or lower
Iron
Fe
0.5 ppm or lower
Copper
Cu
0.3 ppm or lower
Sulfide ions
S2-
Not detected (ppm)
Ammonium ions
NH4+
Not detected (ppm)
Residual chlorine
Cl
0.3 ppm or lower
Free carbonic acid
CO2
4 ppm or lower
Stability index (Ryznar index)
-----
6.0 to 7.0
Mattsson ratio
HCO3-/SO42-
1 or higher (SO42-/HCO3- < 1)
Oxygen amount (DO)
-----
0.1 ppm or lower
Aluminum
Al
0.2 ppm or lower
Manganese
Mn
0.1 ppm or lower
Nitrate ions
NO3-
100 ppm or lower
Sodium ions
Na+
20 ppm or lower
Phosphate
PO43−
2 ppm or lower
Ammonia
NH3
0.5 ppmor lower
Manganese ions
Mn+
10 ppm or lower
Hydrogen sulfide
H2S
0.05 ppm or lower
Dissolved solids
-----
50 ppm or lower
Turbidity
-----
2 degrees or lower
Mixture
Must pass through a 50 mesh filter, not form deposits or scale in a water temperature of 60°C.
Total amount of solid material is 250 mg/l or less
* Water quality test is compliant to JIS K0101 or a test conforming to that standard.
* Using cooling water that does not meet these conditions may shorten the service life of the RF Generator or cause malfunctions.
* Avoid using deionized water.
(If deionized water is exposed to the atmosphere, it absorbs atmospheric carbon dioxide which becomes free carbonic acid in the
water and lowers its pH. If the water temperature and the flow rate are high when the pH is low, erosion*1 and corrosion*2 may
occur.)
*1: Erosion
A phenomenon where solid particles in the fluid collide with a material. The material is damaged or material is removed from the
surface of the material that was hit.
*2: Corrosion
Rust (green rust) forms due to free carbonic acid that occurs from water and carbon dioxide. This phenomenon degrades the
system's mechanical properties by the formation of rust
* Caution
Always ensure that the water temperature and water volume follow the specifications.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
7
2-5. Individual RF Generator specifications
Table 2-3 RFS-1305N specifications
Classification
Item
Specification value
RFS-1305N
Input
Input frequency
Single-phase 50 to 60 Hz
Input voltage
200 to 220 VAC
Fluctuation range
Rated voltage ±10% (180 to 242 VAC)
Input capacity
Approx. 1.2 kVA or less
Short circuit interrupting capacity
500 A
Rated input current
10 A
Input connector
DCA3102E16-10P-D (bayonet-lock round receptacle)
Leakage current
5 mA or less
External OSC input
13.56 MHz ± 0.05%/10 dBm ± 3 dBm/BNC receptacle
Output
Oscillation frequency
13.56 MHz ± 0.01% (internal quartz oscillator)
Rated traveling wave power
500 W (at 50 Ω load)
Maximum reflected wave power
100 W
Output impedance
50 Ω
Harmonic distortion
-35 dB or lower (continuous mode at rated output/50 Ω load)
Power stability
±2% or lower (rated output/50 Ω load)
Rise time
Minimum 100 ms or lower
Linearity
±2% or less of rated output
Coaxial output connector
N-type receptacle
Cooling
Cooling method
Forced air cooling by fan
Operation mode
Controllable by the control panel and external command
signal.
Insulation resistance
50 MΩ or more with a 500 VDC insulation tester
(between AC_LINE and CASE)
Withstand voltage
1500 VAC (50 Hz/60Hz)/1 minute
(between AC_LINE and CASE)
Ambient operating temperature
10°C to 40°C (install in a well ventilated location)
Ambient operating humidity
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibrations
Indoor use.
Overvoltage category II
Altitude 2000 m or lower
Pollution degree 2 (No corrosive or flammable gases, no
contact with water, oils, or chemicals)
Exterior
External dimensions
240W-495D-150H (not including protrusions)
Configuration
Rack mount configuration
Weight
Approx. 11 kg
Compliant standard
EN_61010-1:2010/A1:2019
EN_55011:2016
EN_61000-6-2:2005
RoHS(EU Directive)
* Connect to a single-phase 200 to 240 VAC (50 to 60 Hz) 1.2 kVA or higher power supply line and install a 15 A
breaker compliant with UL489/IEC60947-1 for the RF Generator.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
8
Table 2-4 RFS-1310N specifications
Classification
Item
Specification value
RFS-1310N
Input
Input frequency
Single-phase 50 to 60 Hz
Input voltage
200 to 220 VAC
Fluctuation range
Rated voltage ±10% (180 to 242 VAC)
Input capacity
Approx. 1.8 kVA or less
Short circuit interrupting capacity
500 A
Rated input current
10 A
Input connector
DCA3102E16-10P-D (bayonet-lock round receptacle)
Leakage current
5 mA or less
External OSC input
13.56 MHz ± 0.05%/10 dBm ± 3 dBm/BNC receptacle
Output
Oscillation frequency
13.56 MHz ± 0.01% (internal quartz oscillator)
Rated traveling wave power
1000 W (at 50 Ω load)
Maximum reflected wave power
100 W
Output impedance
50 Ω
Harmonic distortion
-35 dB or lower (continuous mode at rated output/50 Ω load)
Power stability
±2% or lower (rated output/50 Ω load)
Rise time
Minimum 100 ms or lower
Linearity
±2% or less of rated output
Coaxial output connector
N-type receptacle
Cooling
Cooling method
Forced air cooling by fan
Operation mode
Controllable by the control panel and external command
signal.
Insulation resistance
50 MΩ or more with a 500 VDC insulation tester
(between AC_LINE and CASE)
Withstand voltage
1500 VAC (50 Hz/60Hz)/1 minute
(between AC_LINE and CASE)
Ambient operating temperature
10°C to 40°C (install in a well ventilated location)
Ambient operating humidity
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibrations
Indoor use.
Overvoltage category II
Altitude 2000 m or lower
Pollution degree 2(No corrosive or flammable gases, no
contact with water, oils, or chemicals)
Exterior
External dimensions
240W-495D-150H (not including protrusions)
Configuration
Rack mount configuration
Weight
Approx. 11 kg
Compliant standard
EN_61010-1:2010/A1:2019
EN_55011:2016
EN_61000-6-2:2005
RoHS(EU Directive)
* Connect to a single-phase 200 to 240 VAC (50 to 60 Hz) 1.8 kVA or higher power supply line and install a 15 A
breaker compliant with UL489/IEC60947-1 for the RF Generator.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
9
Table 2-5 RFS-1330N specifications
Classification
Item
Specification value
RFS-1330N
Input
Input frequency
Three-phase 50 to 60 Hz
Input voltage
200 to 220 VAC
Fluctuation range
Rated voltage ±10% (180 to 242 VAC)
Input capacity
Approx. 5 kVA or less
Short circuit interrupting capacity
1000 A
Rated input current
25 A
Input connector
DCA3102E22-22P-D (bayonet-lock round receptacle)
Leakage current
5 mA or less
External OSC input
13.56 MHz ± 0.05%/10 dBm ± 3 dBm/BNC receptacle
Output
Oscillation frequency
13.56 MHz ± 0.01% (internal quartz oscillator)
Rated traveling wave power
3000 W (at 50 Ω load)
Maximum reflected wave power
500 W
Output impedance
50 Ω
Harmonic distortion
-35 dB or lower (continuous mode at rated output/50 Ω load)
Power stability
±2% or lower (rated output/50 Ω load)
Rise time
Minimum 100 ms or lower
Linearity
±2% or less of rated output
Coaxial output connector
HN-type receptacle
Cooling
Cooling method
Forced air cooling by fan/water cooling (4 l/min)
Connector: Rc1/4 (PT1/4) female
Water pressure:0.5MPa.See page 6 for water quality.
Operation mode
Controllable by the control panel and external command
signal.
Insulation resistance
50 MΩ or more with a 500 VDC insulation tester
(between AC_LINE and CASE)
Withstand voltage
1500 VAC (50 Hz/60Hz)/1 minute
(between AC_LINE and CASE)
Ambient operating temperature
10°C to 40°C (install in a well ventilated location)
Ambient operating humidity
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibrations
Indoor use.
Overvoltage category II
Altitude 2000 m or lower
Pollution degree 2(No corrosive or flammable gases, no
contact with water, oils, or chemicals)
Exterior
External dimensions
480 W x 500 D x 150 H (excluding protrusions)
Configuration
Rack mount configuration
Weight
Approx. 23 kg
Compliant standard
EN_61010-1:2010/A1:2019
EN_55011:2016
EN_61000-6-2:2005
RoHS(EU Directive)
* Connect to a three-phase 200 to 240 VAC (50 to 60 Hz) 5.0 kVA or higher power supply line and install a 40 A
breaker compliant with UL489/IEC60947-1 for the RF Generator.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
10
Table 2-6 RFS-1350N specifications
Classification
Item
Specification value
RFS-1350N
Input
Input frequency
Three-phase 50 to 60 Hz
Input voltage
200 to 220 VAC
Fluctuation range
Rated voltage ±10% (180 to 242 VAC)
Input capacity
Approx. 8 kVA or less
Short circuit interrupting capacity
1000 A
Rated input current
30 A
Input connector
DCA3102E22-22P-D (bayonet-lock round receptacle)
Leakage current
5 mA or less
External OSC input
13.56 MHz ± 0.05%/10 dBm ± 3 dBm/BNC receptacle
Output
Oscillation frequency
13.56 MHz ± 0.01% (internal quartz oscillator)
Rated traveling wave power
5000 W (at 50 Ω load)
Maximum reflected wave power
500 W
Output impedance
50 Ω
Harmonic distortion
-35 dB or lower (continuous mode at rated output/50 Ω load)
Power stability
±2% or lower (rated output/50 Ω load)
Rise time
Minimum 100 ms or lower
Linearity
±2% or less of rated output
Coaxial output connector
7/16 DIN receptacle
Cooling
Cooling method
Forced air cooling by fan/water cooling (6 l/min)
Connector: Rc1/4 (PT1/4) female
Water pressure:0.5MPa.See page 6 for water quality
Operation mode
Controllable by the control panel and external command
signal.
Insulation resistance
50 MΩ or more with a 500 VDC insulation tester
(between AC_LINE and CASE)
Withstand voltage
1500 VAC (50 Hz/60Hz)/1 minute
(between AC_LINE and CASE)
Ambient operating temperature
10°C to 40°C (install in a well ventilated location)
Ambient operating humidity
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibrations
Indoor use.
Overvoltage category II
Altitude 2000 m or lower
Pollution degree 2(No corrosive or flammable gases, no
contact with water, oils, or chemicals)
Exterior
External dimensions
480 W x 500 D x 150 H (excluding protrusions)
Configuration
Rack mount configuration
Weight
Approx. 23kg
Compliant standard
EN_61010-1:2010/A1:2019
EN_55011:2016
EN_61000-6-2:2005
RoHS(EU Directive)
* Connect to a three-phase 200 to 240 VAC (50 to 60 Hz) 8.0 kVA or higher power supply line and install a 40 A
breaker compliant with UL489/IEC60947-1 for the RF Generator.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
11
2-6. Common RF Generator specifications
Table 2-7 Common RF Generator specifications (protection functions)
Classification
Item
Protection operation
Protection
function
OVER_REF
Suppresses the output power when reflected wave power is too large.
OVER_POW
Suppresses the output power when the RF amplifier's input power is too
large.
OVER_VOLTAGE
Stops the output power when there is RF amplifier overvoltage.
OVER_CURRENT
Stops the output power when there is RF amplifier overcurrent.
VPP_OVER
Stops the output power when VPP voltage has exceeded the rating.
INTERLOCK
Stops the output power when the external interlock has operated.
TUNE_LIMIT
Limits the TUNE variable capacitor movement range to be within the
configured range.
MATCH_LIMIT
Limits the MATCH variable capacitor movement range to be within the
configured range.
HARD_LIMIT
Stops the output power when the variable capacitor position is less than
0% or greater than 100%.
WATER SHORTAGE
Stops the output power when the cooling water volume has dropped.
ALARM
Stops the output power when an error has occurred.

RF POWER SUPPLY and MATCHINGBOX
2. Overview
12
Table 2-8 Common RF Generator specifications (ALARM)
Alarm name
Alarm occurrence conditions
EXT.INTER LOCK
When the external interlock was disengaged while RF-ON.
RF COVER OPEN
When the coaxial connector cover was removed while RF-ON.
MBX COVER OPEN
When the matching box interlock was disengaged while RF-ON.
RF FAN TOO SLOW
When the fan speed of the generator has fallen.
MBX FAN TOO SLOW
When the fan speed of the matching box has fallen.
RF AMP OVER HEAT
When AMP section overheating was detected.
MBX VPP OVER
When matching box VPP detection has exceeded the set value.
RF VOLTAGE OVER
When the RF amplifier input voltage becomes too large.
RF CURRENT OVER
When the RF amplifier section experiences overcurrent.
ARC ERROR
When the ARC detection count has exceeded the set count.
CPU BOAD ERROR
An error was detected on the CPU circuit board.
RF BOAD ERROR
An error was detected on the AMP section circuit board.
OSC ERROR
When the OSC signal cannot be detected during RF-ON.
MBX HARD LIMIT
When the variable capacitor position is less than 0% or greater than 100%.
PR OVER
When the set time has elapsed in the state where PR has exceeded the set value.
PF OUT OF RANGE
When the set time has elapsed in the state where Pf has exceeded the set value.
CONT PANEL REMOVED
By a panel operation when the panel has been removed during RF-ON.
DC SOURCE ERROR
When an error has occurred in the AC/DC unit.
AMP DRIVER ERROR
When an error has occurred in the RF amplifier unit section.
BOARD TEMP OVER
When the circuit board temperature inside the RF generator has increased.
RF ON BREAK
When RF-ON was performed but RF-ON did not turn on in the hardware.
RF OUT OF RANGE(V)
When the RF amplifier section overvoltage state has continued.
RF OUT OF RANGE(C)
When the RF amplifier section overcurrent state has continued.
RF OUT OF RANGE(D)
When the chopper overcurrent state has continued.
RF OUT OF RANGE(P)
When the state has continued where the Pf output is lower than the setting value.
PF SET OVER LIMIT
When a setting was configured that exceeds the POWER_LIMIT setting value.
WATER SHORTAGE
When the cooling water volume is insufficient.
CONTROLABORT
When the Pf output setting value is 10 W or higher and the output is less than 5 W.
AC VOLTAGE DROP
When the breaker is turned off.
VC UNIT ERROR
When abnormality is detected by variable capacitor and motor control.
FBUS BOARD ERROR
When the FBUS board communication is not established inside the power supply
FBUS DISCONNECTION
When FBUS communication is not established during RF-ON
CRC ERROR
When parameters cannot be saved or read normally.
* When an alarm occurs, RF output is turned off, and the alarm name is displayed on the controller.
* The alarm is cleared by removing the cause of the alarm and resetting.