Ulvac HPS-600N User manual

EB0039-09e
Operation Manual
Electron Beam Power Supply
Electron Beam Gun Controller
Model: Power Supply Main Unit HPS-600N/HPS-1000N
Gun Controller EGC-10GS
10th edition: july, 14, 2022
ULVAC, Inc.
Components Division
Before using this product, be sure to read it.
Also, keep this manual at hand with care.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
ⅰ

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
ⅰ
Introduction
Thank you for purchasing our product.
This operation manual is a guidebook in order to your using this product safely and effectively.The basic
caution matters and the operation instructions necessary for handling, and the inspection service
instructions are described. In order to prevent the significant accidents, read thoroughly the contents
being described in this operation manual, and fully understand it.
Before using this product, be sure to read this operation manual, and fully understand the
operation and the inspection service.
Do not operate this product until you understand the description of this operation manual
completely.
•Re-read the dubious points repeatedly, please make an effort so that you can use this
product correctly.
•As to the safety, since it is explained in “Precautious points on safety”(P.ii), “Safety symbol
marks” (P.ⅲ), and “Chapter 1 For your safety use”(P.1～), use the unit after fully reading
and understanding it.
•Keep this operation manual always at hand with care.
•When changing the installation place of this product, be sure to attach this operation manual
to the product.
•Due to the unit improvement, the contents of this operation manual and your using system
may be different.
•If there are dubious points and awared points, make an inquiry to our company’s exclusive
distributor.
•You are kindly requested to safely operate and correctly manage the unit.
Please acknowledge since the described contents of the operation manual may subject to
change or revise without notice due to the specification changes of the product and the
improvements for the product.
The copyrights of the operation manual and this safety guide belong to ULVAC, Inc.
Components Division.
A part and whole part of this operation manual are prohibited to copy without a permit of ULVAC,
Inc. Components Division.
Handling for this product of this operation manual and to use the manual in the application other
than that ULVAC, Inc. Components Division agreed, are prohibited.
This operation manual can not be copied or transferred for any part for the third party's use
without approval of ULVAC, Inc. Components Division.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
ii
1. Precautious points on safety
1
Major part of the accidents occursin relation to the operation carelessly conducted by the operator,
the inspection/service and the repair work.
Also, if you do not observe the basic caution matters on safety and neglect the dangerous
preperception, it is easy to occur.
By predicting the circumstances where the danger is predicted, the accidents can be prevented in
advance.
2
The physical injury occurs due to erroneous operation and inappropriate inspection service work.
Well read the contents of the operation and the inspection/service work, and never operate this
product until you understand it.
3
The warning and the caution about the safety are clearly stated in this operation manual and the
warning labels.
If these warning and caution are neglected, caution should be taken since it may result in the
physical injury and the death accident.
4
The manager, the operator and the maintenance personnel should read this manual well before
performing the operation and the maintenance of this product.
Persons who knew a correct handling and received the prescribed education, should perform the
appropriate work by using the correct technology and tools.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
iii
2. Safety symbol marks
In this operation manual and the warning display of the product main body, the symbol marks about
the safety in order to understand the matters to be observed are being put up.
The words using the symbol mark are used separately as follows.
Failure to comply with DANGER will lead to serious
personal injury or loss of life.
Works ignoring this note can lead to serious personal injury or loss of
life and/or serious damage the facilities of the plant (including this
system) at a high probability.
Failure to comply with WARNING can lead to dangerous
situations including serious injury or loss of life.
Works ignoring this note can lead to serious personal injury or loss of
life and/or serious damage to the facilities of the plant (including this
system)
Failure to comply with CAUTION can lead to dangerous
situations including slight personal injury or medium
scale of damage to the facility.
Works ignoring this note can lead to slight personal injury and/or can
bring the system into the situation that requires readjustment.
There is no direct danger, but we describe the contents which we
want you know in order to your use the system correctly on safety of
the work.
・Danger of the operation, inspection and service in all environments can not be predicted.
・Warning being described on the warning labels in this operation manual and on the product is not
necessarily all satisfied.
・In handling the product, pay a careful attention by the persons who control, operate and perform
maintenance as to other than this operation manual description matters, and keep in mind for
securement of the safety so that the significant injury such as physical injury and the damage to the
product do not occur.
・When the operation/inspection/service other than being described in this operation manual are
performed, perform the necessary consideration related to the safety on the all workers’
responsibility.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
iv
3. Labeling Position of Warning Label
Meaning of Warning Label
High Voltage Danger Label:
This indicates a situation where a high voltage
occurs inside involving the risk of electrocution.
High Temperature Warning Label:
This indicates a situation where a high
temperature occurs inside involving the risk of a
burn.
Heavy Load Caution Label:
This indicates an object of 20 kg or more.
Fig. 0.1 Power Supply Main Unit Fig. 0.2 Gun Controller
Check all of these warning labels are legible and always keep them clean. Use cloths and water
for cleaning the warning labels. Do not use gasoline and organic solvents. If labels are
damaged, lost, or become illegible, contact us or special agents.
The nameplate on the back of the power supply has the serial number of the power supply.
Keep it illegible at any time.
High Temperature
Warning Label
High Voltage
Danger Label
High Voltage
Danger Label
Heavy Load Caution Label
Heavy Load
Caution Label
REFERENCE
Electrical Shock
Caution Label
High Temperature
Warning Label
High Temperature
Warning Label

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
v
4. About this product
The sentences and illustrations in this operation manual are based on the information at the time of
this operationmanual prepared. This operation manual may be subject to change without prior notice.
Since these changes give the influence on the inspection, confirm the latest information in our
company’s exclusive distributor before starting the work.
Free of charge repair rules
1.Although the product has undergone strict in-house tests before shipment, please make an inquiry to the
headquarter components division, service office, or agent if malfunction occurs with the product because of our
fault such as manufacturing error or transportation problem. The product is repaired or exchanged for free of
charge.
2. Object to be guaranteed
1) EB Power Supply Main Unit
2) EB Gun Controller
3. Period of guarantee
1) Domestic sales: One year from our shipment date
2）Direct export: One year from B/L receiving date
4. Range of guarantee
1) A product damaged by a trouble at the time of delivery or during the transport. However, for direct export,
the range of guarantee defined in the latest version of INCOTERMS is observed.
2) A product that does not meet the basic specification although the product is used under the specified use
condition including the temperature range and power supply.
5. How to apply
1) For domestic sales
①Receive a substitute product sent from us or send back the product to us or service center to repair
the product.
②If the repair needs to be carried out at your site, make an inquiry to our components division, service
office, or agent.
2) For direct export
Receive a substitute product sent from us or send back the product to us or service center to repair the
product. You are required to pay the cost for returning the product to us.
6．Exemption
1) A product with expired guaranteed period.
2) A malfunction or trouble occurred by inevitable accidents including fire, wind, flood, lightning, or war.
3) A malfunction or trouble occurred by careless or improper handling of the product.
4) A product remodeled, broken down, or repaired without our consent.
5) A malfunction or trouble occurred under abnormal environment (strong electromagnetic field, radiation,
high temperature, high humidity, flammable gas, causticity gas, and dust, etc.,).
6) A malfunction or trouble occurred by noises.
7) Secondary damage caused by the product trouble, process patent, and/or your manufactured item using
this device.
8) When our engineer determines that the use condition of the product is inappropriate.
9) Consumption articles (for consumption articles, refer to Chapter 6 "Maintenance" on this manual).
10) A malfunction or trouble occurred by inappropriate handling during post-delivery transportation and
relocation.
11) When replacement of part is necessary because of ending of the service life.
12) When the parts are no longer available because of discontinuance of production and other reasons.
13) When a voltage out of input amplitude range is applied because of lightning surge or other
reasons.(including application of spike superimposed voltage/instantaneous blackout).
7．Others
1) If there is a document describing the individual contract or specification aside from this manual, the rules
described in these documents are observed.
2) For the questions and consultation on the product, please check the model and production number, and
make an inquiry at a service office, agent, or our components division.
http://www.ulvac.co.jp/support/index.html
3) The description in this manual may be subject to change without notice.
4) The parts replaced during repair may belong to us unless otherwise instructed.
*1 For lending of substitute machine during the repair period and on-site repair*2, please note that
additional expense will be charged.
*2 For on-site repair, the actual cost for the travel expense (transportation cost and others) will be
charged.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
vi
5. Suspecting abnormality
If you notice something wrong with the product, check the symptom and the failure with reference to
the Troubleshooting in Section 7 of this manual.
To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the
trouble in order to repair the product as soon as possible.
If products seem to be broken or you have any questions, contact the repair service staff of the sales
agencies at the end of this document. When contacting the staff, always let them know the product
name or model name (the serial/lot number) and the symptom as many details as possible. The model
name and the serial number are on the name plate on the back panel.
6. About disposal
When this product is disposed of, dispose of it in accordance with the ordinances of the nation and
municipalities. Note that a product includes the main unit, the accessories, the attached documents,
the medias, and so on.
Furthermore, as to the expenses related to disposal, you are kindly requested to burden it on the
customer’s side.
7. About Service Parts
To use the power supply for a longer period of time, you are recommended to periodically perform an
overhaul (such as replacement of consumable parts).
For recommended replacement (consumable) parts in an overhaul, see "6. Maintenance" of this
instruction manual.
Note in advance that the recommended replacement periods of years are not guaranteed values of
ULVAC.
8. Hazardous substances regulated by the RoHS directive
The following substances regulated by the RoHS Directive are not contained in the product itself or in
the cable assembly that comes with the standard (Revised RoHS Directive RoHS”2011/65/EU”and
（EU）2015/863）.
Controlled hazardous substances and their thresholds
Controlled hazardous substances
Threshold
Lead（Pb）/ Lead compounds
1000ppm
Mercury（Hg）/Mercury compounds
1000ppm
Cadmium（Cd）/ Cadmium compounds
100ppm
Hexavalent chromium（Cr6+）/ Hexavalent chromium compounds
1000ppm
Polybrominated biphenyls（PBBs）
1000ppm
Polybrominated dishenylethers（PBDEs）
1000ppm
Diethylhexyl phthalate（DEHP）
1000ppm
Butyl benzyl phthalate（BBP）
1000ppm
Dibutyl phthalate（DBP）
1000ppm
Diisobutyl phthalate（DIBP）
1000ppm

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Table of Contents
vii
Table of Contents
1. For your safety use .................................................................................................1
1.1 Caution on handling................................................................................................................................................... 1
1.2 When you make an inquiry..................................................................................................................................... 1
2. Overview...................................................................................................................2
2.1. Introduction..................................................................................................................................................................... 2
2.2. Feature ............................................................................................................................................................................. 2
2.3. Equipment Configuration......................................................................................................................................... 3
2.4. EB Power Supply Specifications......................................................................................................................... 5
2.5. External I/O Signal...................................................................................................................................................... 7
3. Preparation...............................................................................................................9
3.1. Precautions in Unpacking....................................................................................................................................... 9
3.1.1. Check after Unpacking ....................................................................................................9
3.2. About Transportation of Power Supply ..........................................................................................................10
3.3. Installation Site and Installation.........................................................................................................................11
3.4. Things to be Prepared............................................................................................................................................12
3.4.1. Power Receiving Equipment ........................................................................................12
3.5. Cable Connection......................................................................................................................................................14
4. Description of Each Part.......................................................................................18
4.1. Front panel of power supply main unit ...........................................................................................................18
4.2. Back panel of power supply main unit............................................................................................................20
4.3. Alarm Fuse ...................................................................................................................................................................25
4.4. Gun Controller Front Panel..................................................................................................................................27
4.5. Gun Controller Back Panel...................................................................................................................................28
4.6. Local Control Box......................................................................................................................................................36
5. Operation................................................................................................................40
5.1. Pre-operation Check................................................................................................................................................40
5.2. LOCAL Operation......................................................................................................................................................43
5.2.1. LOCAL operation with G-TYPE ....................................................................................44
5.2.2. LOCAL operation with S-TYPE.....................................................................................49
5.3. PROGRAM Operation ............................................................................................................................................55
5.4. Power supply error state........................................................................................................................................57
6. Maintenance...........................................................................................................59
6.1. Maintenance/Inspection of this product.........................................................................................................60
6.2. Periodical inspection................................................................................................................................................62
6.3. About recommended replacement parts.......................................................................................................64
7. Troubleshooting ....................................................................................................65
7.1. Troubleshooting..........................................................................................................................................................65
8. Attached Data.........................................................................................................73

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
1. For your safety use
1
1. For your safety use
In order to use this unit in a safe manner, we describe the caution
points on safety, the attached position of warning labels and the
contact party.
1.1 Caution on handling
Caution on safety related to this unit is described. After well reading the following, use this unit.
This power supply generates a voltage that is enough to pose a danger to human life and needs to
be handled with extreme care. In the event that a person contacts the voltage, it may cause a
serious accident. Take great care not to contact a high voltage. In addition, never turn on electricity
with the cover removed for safety.
In the power supply, a high voltage is applied. When checking the inside, be sure to shut off the
primary switch of the power supply you use and leave it for 5minutes or more, before opening the
cover. Maintenance shall be performed by or under the instructions of an expert operator for
handling high voltage.
In maintenance etc. of a one-sided electron gun with the simultaneous or alternate use (special
model) of two sources, turn off the high voltage of this power supply and never use other electron
guns.
1.2 When you make an inquiry
When you place an order for parts, make an inquiry for the product, and make an inquiry about the product
in failure, after confirming the product information, contact our company or the exclusive distributor. If you
judge as the failure in particular, please notify us the history and symptoms together with the product
information (Serial No., Lot No. etc. )as more details as possible.
Product information (This is described on the nameplate.)
Type of the product
Manufacture number information of the product (Serial number, Lot number)
DANGER
DANGER
DANGER

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
2. Overview
2
2. Overview
This chapter describes characteristics/configuration/specification of this product.
2.1. Introduction
This power supply (HPS-600N/1000N) supports the electron beam evaporation source (hereinafter
referred to as an EB power supply)
with more stable circuits and higher performance based on ULVAC's years of accumulation of technologies
and actual achievement. In combination with an EB gun controller (EGC-10GS), it can support both of
optical thin film EB guns and metallic thin film EB guns.
This can input high density energy into a micro area, which enables evaporation of high melting
point metal, such as W, Ta, and Mo, and oxides, such as SiO2 and Al2O3.
With a water-cooled copper crucible, the pollution from the contact part with evaporation
materials is very low and high-purity vapor-deposited film can be obtained.
A normal heat resistance evaporation source needs frequent replacement of the filament, the
boat, etc. depending on the evaporation material, whereas an electron beam evaporation
source is essentially low in wear of the component parts.
2.2. Feature
(1) For the high-voltage variable range, 600N is -2 to -6 kV and 1000N is -4 to -10 kV, both in stable.
(2) High-voltage ripple is eliminated, which enables the spot size of the electron gun to be stable.
(3) Continuous operation is possible with a maximum output of 6 kW / 10 kW.
(4) In the event of an unusual electrical discharge of an electron gun, the high voltage supply is fast
stopped. This limits the unusual electrical discharge and enables auto recovery.
(5) The circuit architecture minimizes the reduction of the vapor deposition rate of an EB gun caused by
an unusual electrical discharge.
(6) A stable beam current is supplied. (A stability ratio of 1% or less)
(7) A beam current stabilization circuit is built in, enabling control even with a low current.
(8) With an X-axis and Y-axis sweep circuit, the optical thin film setting (hereinafter referred to as G-TYPE)
is able to scan the electron beam in the X and Y directions with 800 Hz at a maximum, respectively,
whereas the metallic thin film setting (hereinafter referred to as S-TYPE) the electron beam in the X
and Y directions with 5 Hz and 22 Hz at a maximum, respectively. In addition, the S-TYPE setting is
also able to scan the beam spot in the X-axis direction at 100 Hz by its high-voltage sweep function.
Furthermore, various scan forms are available.
(9) The items below can be program-controlled by external input signals.
a) High voltage b) Beam current c) Deflection coil current *1
d) X-axis direction position e) X-axis direction sweep amount f) Y-axis direction position
g) Y-axis direction sweep amount h) HV SWEEP *1
*1 c) is a function only with G-TYPE and h) is a function only with S-TYPE.
(10) The gun controller can be set away from the power supply main unit.
(11) All the screen configurations and the monitor configurations are touch panel displays, providing easier
operation than that of former units.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
2. Overview
3
2.3. Equipment Configuration
This equipment consists of the power supply main unit (HPS-1000N) and the gun controller (EGC-10GS).
In addition, the configuration in combination with an EB gun is as shown in Fig. 2.1. EARTH GUN GND
of the power supply connects to SYSTEM GND.
R
S
T
3φAC 200 ～ 220V
Vacuum Chamber
DEF及びCOMは端子台に入る。
他信号（X Y）はシールドに入った後にコネクタへ
GROUND LOW IMPEDANCE
FIRST CLASS 10ΩOR LESS
EARTH GUN GND CABLE
DEF/XY OUT CABLE
OUTPUT CABLE
LOCAL CONTROL
BOX
Front Panel Connecter
OUTPUT SHIELD CABLE
Chamber
System
GND
端子台
コネクタ
CONTROL
POWER
COIL OUT
OUTPUT
POWER1
CONTROL1
INPUT
Figure 2.1: EB System Configuration Example
In addition, the type is classified by the number of outputs as shown in Table 2.1.
Table 2.1: Equipment Configuration List
Type
Power Supply Main
Unit
HPS-600N
HPS-1000N
Gun controller
EGC-10GS
1-source type
1 unit *1
1 unit
2-source type
1 unit *2
2 units
*1: A 1-source type has "-100" after the model. (HPS-600N-100/HPS-1000N-100)
*2: A 1-source type has "-200" after the model. (HPS-600N-200/HPS-1000N-200)
A 2-source model is a type with two output lines for operation with two EB guns sharing one power
supply main unit. Two EB guns can be operated simultaneously and alternately. Even in
simultaneous operation with two EB guns, the maximum output electric power from the power supply
is 6 kW for 600N, and 10 kW for 1000N. The high-voltage setting can be made only from EB gun 1
and cannot be made from EB gun 2. The high-voltage setting of EB gun 2 follows that of EB gun 1.
The standard model is a 1-source type.
DEF and COM are input to the terminal
block.
Other signals are input to the shield and
then to the connector.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
2. Overview
4
An equipment configuration example with a 2-source type is shown in Fig. 2.2.
EARTH GUN GND of the power supply connects to SYSTEM GND.
R
S
T
3φAC 200 ～ 220V
Vacuum Chamber
GROUND LOW IMPEDANCE
FIRST CLASS 10ΩOR LESS
EARTH GUN GND CABLE
DEF/XY OUT CABLE
OUTPUT CABLE
LOCAL CONTROL
BOX
Front Panel Connecter
OUTPUT SHIELD CABLE
OUTPUT CABLE
LOCAL CONTROL
BOX
Front Panel Connecter
OUTPUT SHIELD CABLE
DEF/XY OUT CABLE
CONTROL
POWERCOIL OUT
CONTROL
POWER
COIL OUT
Chamber
System
GND
OUTPUT 1
CONTROL1
OUTPUT 2
CONTROL2
POWER 1POWER 2
INPUT
Figure 2.2: EB System Configuration Example - 2-source Type
A change from a 1-source to a 2-source type, it is required to be modified by us. Be sure to contact
us.
CAUTION

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
2. Overview
5
2.4. EB Power Supply Specifications
Table 2.2: EB Power Supply Specifications
Category
Item
Specification value
HPS-600N
HPS-1000N
Input type
Phase number, Frequency
Three-phase 50/60Hz
Input voltage
AC200 ～220V
Variation range
AC190 ～231V
Input capacity
1-source
9.0 kVA or less
14.0kVA or less
2-source
10.0kVA or less
15.0kVA or less
Leakage current
(5 mA or less for each phase (in combination with the power
supply)
Output type
Rated output power
1-source
6kW
10kW
2-source
6 kW (the sum of all source
output)
10 kW (the sum of all source
output)
High-voltage output
Variable
range
-2kV ～-6kV
-4kV ～-10kV
Stability
±1% or less
Ripple
ratio
±2%p-p or less (for each rated output)
Beam current
Variable
range
0～1000mA
0～1000mA
Fluctuation
ratio
±2% or less (for each rated output)
Output for filament
Voltage
0～6V/12VAC
Current
0A～45Amax
Main power supply to
gun controller (per
source)
Voltage
AC200 ～220V
AC200 ～220V
Capacity
382VA or less
382VA or less
Breakdown
voltage
protection
Operation method
Switching method by semiconductor device
High-voltage breaking time
1 ms or less (High-voltage OFF in about 1 sec. for in the case of
a mechanical short circuit)
Downtime
10ms
High-voltage rise time
2 ms or less (10 to 90% of the rated value)
Cooling
system
Cooling system
Forced air cooling by fan
Insulation
resistance
Input insulation resistance
5 MΩ or more using 500 VDC megohmmeter (between AC LINE
and CASE)
Dielectric
strength
voltage
Input dielectric strength voltage
Input: 1,500 VAC/min. (between AC LINE and CASE)
Output dielectric strength voltage
12.5 kVDC/min. (depending on an increase in no-load self-
output voltage)
Ambient temperature
10 to 40 ﾟC (Besides, it is necessary to install in an area with
sufficient ventilation.)
Ambient humidity
30 to 70 %RH (And no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibration.
Overvoltage category II
2,000 m or less above sea level
No corrosive gas and inflammable gas allowed. No splash of
water, oil, and chemical agents allowed.
Outside dimension W x D x H
494 mm x 700.5 mm x 711.6 mm (protrusions not included)
Mass
130kg or less
Standard certification
EN_61010-1 : 2010/A1 : 2019
EN_61000-6-4 : 2007/A1 : 2011
EN_61000-6-2 : 2005

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
2. Overview
6
Table 2.3: Gun Controller Specifications
Category
Item
Specification value
G-TYPE
S-TYPE
Input type
Phase number, Frequency
Three-phase 50/60Hz
Input voltage
AC200～220V
Variation range
190 ～231V
Input capacity
382VA or less
Leakage current
5 mA or less for each phase (in combination with the power
supply)
Output type
X-axis Magnet Coil
Output
Variable
range
-1.5A ～＋1.5A
0.4A ～＋3.5A
Voltage
±24V
±24V
Fluctuation
ratio
±2% or less
±2% or less
Frequency
Variable to 800 Hz at a
maximum in steps of 1 Hz
Variable to 5 Hz at a maximum
in steps of 1 Hz
Waveform
Triangular wave, Sine wave
Triangular wave, Sine wave
Y-axis Magnet Coil
Output
Variable
range
0A ～±1.5A
0A ～±1.2A
Voltage
±24V
±24V
Fluctuation
ratio
±2% or less
±2% or less
Frequency
Variable to 800 Hz at a
maximum in steps of 1 Hz
Variable to 22 Hz at a
maximum in steps of 1 Hz
Waveform
Triangular wave, Sine wave
Triangular wave, Sine wave
Deflection coil output
(Deflection coil) (G-
TYPE Gun only)
Variable
range
0.4A ～＋3.5A
Voltage
＋24V
Fluctuation
ratio
±2% or less
Frequency
DC
Waveform
DC
Cooling
system
Cooling system
Forced air cooling by fan
Insulation resistance
5 MΩ or more using 500 VDC megohmmeter (between AC LINE
and CASE)
Dielectric
strength
voltage
Input dielectric strength voltage
Input: 1,500 VAC/min. (between AC LINE and CASE)
Ambient temperature
10 to 40 ﾟC (Besides, it is necessary to install in an area with
sufficient ventilation.)
Ambient humidity
30 to 70 %RH (And no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibration.
Overvoltage category II
2,000 m or less above sea level
Pollution Degree 2
No corrosive gas and inflammable gas allowed. No splash of
water, oil, and chemical agents allowed.
Outside dimension W x D x H
420.5 mm (Front panel: 480.5 mm) x 499mm x 143 mm
(protrusions not included)
Mass
11.5kg
Standard certification
EN_61010-1 : 2010/A1 : 2019
EN_61000-6-4 : 2007/A1 : 2011
EN_61000-6-2 : 2005

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
2. Overview
7
Table 2.3: LOCAL CONTROLLER BOX Specifications
Category
Item
Specification value
G-TYPE
S-TYPE
Input
(Voltage/Current)
X-POS、Y-POS
±5VDC/10mA or less
±5VDC/10mA or less
X-SWP、Y-SWP
10VDC/10mA or less
10VDC/10mA or less
DEF
10VDC/10mA or less
EMISSION
10VDC/10mA or less
10VDC/10mA or less
Output
(Voltage/Current)
X-POS、Y-POS
±5VDC/10mA or less
±5VDC/10mA or less
X-SWP、Y-SWP
10VDC/10mA or less
10VDC/10mA or less
DEF
10VDC/10mA or less
EMISSION
10VDC/10mA or less
10VDC/10mA or less
2.5. External I/O Signal
External I/O signals are shown below.
Table 2.5: External I/O Signal
Unit
External I/O signal name
Signal level (Voltage signal)
Remarks
HPS-600N
HPS-1000N
Power Supply
Main Unit
Monitor
output
FIL. CUR.
MONITOR
50A/1V(50Amax)
50A/1V(50Amax)
Waveform
output
EMISSION
MONITOR
0～1.0A/0～+5V
0～1.0A/0～+5V
DC output
HV MONITOR
-2～-6kV/+2～+5V
-4～-10kV/+2～+5V
Waveform
output
Gun controller
G-TYPE
Monitor
output
DEF CUR
MONITOR
1A/1V(Max 3.5A)
DC output
X CUR MONITOR
1A/1V(Max ±1.5A)
Waveform
output
Y CUR MONITOR
1A/1V(Max ±1.5A)
Waveform
output
Program
input
HV CONTROL
-2～-6kV/0～+10V
-4～-10kV/0～+10V
DC input
EMISSION
CONTROL
0～1.0A/0～±10V
0～1.0A/0～±10V
DC input
DEF CONTROL
0.4～3.5A/0～+10V
DC input
X POSITION
-1.5A～0～+1.5A/-5～0～+5V
DC input
X SWEEP
0～±1.5Ap-p/0～+10V
DC input
Y POSITION
-1.5A～0～+1.5A/-5～0～+5V
DC input
Y SWEEP
0～±1.5Ap-p/0～+10V
DC input
Gun controller
S-TYPE
Monitor
output
X CUR MONITOR
1A/1V(Max 3.5A)
Waveform
output
Y CUR MONITOR
1A/1V(Max ±1.2A)
Waveform
output
Program
input
HV CONTROL
-4～-10kV/0～+10V
DC input
HV SWEEP
0～3kV/0～+10V
DC input
EMISSION
CONTROL
0～1.0A/0～±10V
DC input
X POSITION
-0.4～－3.5A/0～+10V
DC input
X SWEEP
-0.4～－3.5Ap-p/0～+10V
DC input
Y POSITION
-1.2A～0～+1.2A/0～+10V
DC input
Y SWEEP
0～±1.2Ap-p/0～+10V
DC input

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
2. Overview
8
The variable range of EMISSION CONTROL, DEF CONTROL, and X/Y-axis CONTROL (POSITION and
SWEEP) is that set on the front panel of the gun controller. For details, see "4.4 Gun Controller Front
Panel."
The variable range of EMISSION CONTROL, DEF CONTROL, and X/Y-axis CONTROL
(POSITION and SWEEP) is that set on the front panel of the gun controller.
Use a device which can show a waveform, such as an oscilloscope when checking the Monitor
output.
1. Only for EMISSION CONTROL, operation can be done even if the signal source is a negative
voltage with the same pin number.
2. Common ports (high-voltage, beam current, and magnet coil common ports) of each program
connector and each monitor terminal need to be in a floating condition at a withstand voltage
of 1,500 VAC or more above the earth and the portions between the common ports need to be
insulated. If the power supply equipment you use connects to the earth, use isolation amplifiers
to insulate signals.
3. High-voltage common ports are in a floating condition.
4. Beam current common ports connect to the system ground of the EB gun via GUN GND.
5. The magnet coil common port is introduced into the vacuum device via the vacuum current
feedthrough. Due to the possibility of a short circuit to the earth, insulate signals input from the
program connector.
REFERENCE
REFERENCE

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
3．Preparation
9
3. Preparation
We describe necessary preparation and caution matters in step
where after this unit is delivered at your hand, you use this unit.
3.1. Precautions in Unpacking
Carefully unpack the box of the power supply main unit. Check for damage by external forces during
transportation. The standard accessories are packed in another box.
3.1.1. Check after Unpacking
Unpack the main unit, take all standard accessories out of the box, and then check the following items.
1) Check the appearance for flaws and dents.
2) Check the protrusions from the panel, such as the knobs, meters, switches, and connectors, for any
damage.
3) Based on the standard accessories list, check the number of parts. (See Table 3.1.)
Table 3.1: Standard Accessories List (G TYPE)
Accessories Name
Specifications
Quantity
1-source
2-source
EARTH GUN GND Cable
14mm2×1×6m
1
1
INPUT Cable
14mm2×3×6m
1
1
OUTPUT Cable
※1
8mm2×2×6m
1
2
DEF/XY OUT Cable
0.5mm2×6×6m
1
2
POWER Cable
0.75mm2×4×6m
1
2
CONTROL Cable
0.15mm2×24×6m
1
2
LOCAL CONTROL BOX
1
2
Alarm fuse
※2
HP20 (2.0A)
3
6
Alarm fuse
※2
HP32 (3.2A)
1
1
Alarm fuse
※2
GP50 (5.0A)
2
4
Key for SERVICE KEY
※3
AR9C022-A
2
2
Key for KEY SWITCH
※3
KG9Z-SK-231 PN02
2
4
PROGRAM plug
(JC)57-30240
1
2
INTERLOCKS plug
JR 21PK-16P(71)
1
2
PSG plug
※4
XM3A-0921+XM2S-0913
1
2
SIGNAL plug
※4
(JC)57-30140
1
2
EXT. START plug
NCS-308-PM
1
1
Truss head machine screw
M12 × 20
4
4
*1: Attached to the power supply main unit.
*2: Spare. The required number of the parts is attached to the actual unit.
*3: One is used for the actual unit and the other is a spare.
*4: Optional function

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
3．Preparation
10
Table 3.2: Standard Accessories List (S TYPE)
Accessories Name
Accessories Name
Quantity
1-source
2-source
EARTH GUN GND Cable
14mm2×1×6m
1
1
INPUT Cable
14mm2×3×6m
1
1
OUTPUT Cable
※1
8mm2×2×6m
1
2
XY OUT Cable
1.25mm2×4×6m
1
2
POWER Cable
0.75mm2×4×6m
1
2
CONTROL Cable
0.15mm2×24×6m
1
2
LOCAL CONTROL BOX (For S TYPE)
Cable length: 3m
1
2
Alarm fuse
※2
HP20 (2.0A)
3
6
Alarm fuse
※2
HP32 (3.2A)
1
1
Alarm fuse
※2
GP50 (5.0A)
2
4
Key for SERVICE KEY
※3
AR9C022-A
2
2
Key for KEY SWITCH
※3
KG9Z-SK-231 PN02
2
4
PROGRAM plug
(JC)57-30240
1
2
INTERLOCKS plug
JR 21PK-16P(71)
1
2
PSG plug
※4
XM3A-0921+XM2S-0913
1
2
SIGNAL plug
※4
(JC)57-30140
1
2
EXT. START plug
NCS-308-PM
1
1
Truss head machine screw
M12 × 20
4
4
*1: Attached to the power supply main unit.
*2: Spare. The required number of the parts is attached to the actual unit.
*3: One is used for the actual unit and the other is a spare.
*4: Optional function
The lengths of cables follow this table unless otherwise specified. These are the standard set
lengths and depend on the customer's specifications.
3.2. About Transportation of Power Supply
For HPS-600N/1000N, eyebolts and casters are attached for transportation of the power supply.
Transportation with a crane using the eyebolts requires four-point hanging.
In addition, these eyebolts can be removed at the time of installation. Attach the truss head machine
screws, which are the standard accessories, to where the eyebolts are removed.
The weight of HPS-600N/1000N is approx. 120 kg. Transport with careful attention to the
surroundings during the transportation.
Hanging operation especially with a crane requires four-point hanging.
CAUTION
DANGER

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
3．Preparation
11
3.3. Installation Site and Installation
Install the EB power supply and the gun controller in a site with a temperature of 15to30 ﾟC, a humidity of
60% or less, and a low amount of dust and vibration. In addition, avoid installing in a site with an uneven
floor.
Install the EB power supply 1m or more away from the back wall in order for FAN and exhaust holes not
to block. Pay attention also to garbage at the bottom. After installation, adjust the foot adjuster of each
caster to securely fix the power supply to the floor.
The EB gun controller has a rack-mountable external shape. Drill the rack mounting holes in reference to
the attached external dimension drawing. The front panel structure of the EB gun controller does not
support it's self weight. Make the structure so that the front panel is not loaded.
Like the EB power supply, secure clearance around the gun controller for air intake and exhaust. The use
with a rack mount needs to provide sufficient ventilation so that the temperature in the rack does not exceed
the specification temperature.
Provide sufficient ventilation so that the ambient temperature of the EB power supply and the EB gun
controller does not exceed the specification value. If operation is performed with an out-of-specification
temperature, it has an effect on equipment downtime due to an alarm caused, malfunctions of the EB
power supply and the gun controller, and the product lifetime.
ガンコントローラ
正面パネル
300mm以上
100mm以上 100mm以上
EB電源
正面パネル
1000mm以上
100mm以上 100mm以上
Figure 3.1: Clearance around EB Power Supply and Gun Controller
Installation environment: A site with a temperature of 15 to 30 ﾟC, a humidity of 60 % or less,
and a low amount of dust and vibration
Installation site: Installation in an uneven floor with the back of the power supply1m
or more away from walls
Pay attention also to garbage at the bottom. After installation,
adjust the foot adjuster of each caster to make sure that the
power supply is securely fixed to the floor.
CAUTION
1,000 mm or more
100 mm or more
100 mm
or more
100 mm
or more
100 mm or more
300 mm or more
EB Power Supply
Front Panel
Gun Controller
Front Panel