Ulvac HPS-600N User manual

EB0039-09e
Operation Manual
Electron Beam Power Supply
Electron Beam Gun Controller
Model: Power Supply Main Unit HPS-600N/HPS-1000N
Gun Controller EGC-10GS
10th edition: july, 14, 2022
ULVAC, Inc.
Components Division
Before using this product, be sure to read it.
Also, keep this manual at hand with care.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
ⅰ

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
ⅰ
Introduction
Thank you for purchasing our product.
This operation manual is a guidebook in order to your using this product safely and effectively.The basic
caution matters and the operation instructions necessary for handling, and the inspection service
instructions are described. In order to prevent the significant accidents, read thoroughly the contents
being described in this operation manual, and fully understand it.
Before using this product, be sure to read this operation manual, and fully understand the
operation and the inspection service.
Do not operate this product until you understand the description of this operation manual
completely.
•Re-read the dubious points repeatedly, please make an effort so that you can use this
product correctly.
•As to the safety, since it is explained in “Precautious points on safety”(P.ii), “Safety symbol
marks” (P.ⅲ), and “Chapter 1 For your safety use”(P.1～), use the unit after fully reading
and understanding it.
•Keep this operation manual always at hand with care.
•When changing the installation place of this product, be sure to attach this operation manual
to the product.
•Due to the unit improvement, the contents of this operation manual and your using system
may be different.
•If there are dubious points and awared points, make an inquiry to our company’s exclusive
distributor.
•You are kindly requested to safely operate and correctly manage the unit.
Please acknowledge since the described contents of the operation manual may subject to
change or revise without notice due to the specification changes of the product and the
improvements for the product.
The copyrights of the operation manual and this safety guide belong to ULVAC, Inc.
Components Division.
A part and whole part of this operation manual are prohibited to copy without a permit of ULVAC,
Inc. Components Division.
Handling for this product of this operation manual and to use the manual in the application other
than that ULVAC, Inc. Components Division agreed, are prohibited.
This operation manual can not be copied or transferred for any part for the third party's use
without approval of ULVAC, Inc. Components Division.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
ii
1. Precautious points on safety
1
Major part of the accidents occursin relation to the operation carelessly conducted by the operator,
the inspection/service and the repair work.
Also, if you do not observe the basic caution matters on safety and neglect the dangerous
preperception, it is easy to occur.
By predicting the circumstances where the danger is predicted, the accidents can be prevented in
advance.
2
The physical injury occurs due to erroneous operation and inappropriate inspection service work.
Well read the contents of the operation and the inspection/service work, and never operate this
product until you understand it.
3
The warning and the caution about the safety are clearly stated in this operation manual and the
warning labels.
If these warning and caution are neglected, caution should be taken since it may result in the
physical injury and the death accident.
4
The manager, the operator and the maintenance personnel should read this manual well before
performing the operation and the maintenance of this product.
Persons who knew a correct handling and received the prescribed education, should perform the
appropriate work by using the correct technology and tools.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
iii
2. Safety symbol marks
In this operation manual and the warning display of the product main body, the symbol marks about
the safety in order to understand the matters to be observed are being put up.
The words using the symbol mark are used separately as follows.
Failure to comply with DANGER will lead to serious
personal injury or loss of life.
Works ignoring this note can lead to serious personal injury or loss of
life and/or serious damage the facilities of the plant (including this
system) at a high probability.
Failure to comply with WARNING can lead to dangerous
situations including serious injury or loss of life.
Works ignoring this note can lead to serious personal injury or loss of
life and/or serious damage to the facilities of the plant (including this
system)
Failure to comply with CAUTION can lead to dangerous
situations including slight personal injury or medium
scale of damage to the facility.
Works ignoring this note can lead to slight personal injury and/or can
bring the system into the situation that requires readjustment.
There is no direct danger, but we describe the contents which we
want you know in order to your use the system correctly on safety of
the work.
・Danger of the operation, inspection and service in all environments can not be predicted.
・Warning being described on the warning labels in this operation manual and on the product is not
necessarily all satisfied.
・In handling the product, pay a careful attention by the persons who control, operate and perform
maintenance as to other than this operation manual description matters, and keep in mind for
securement of the safety so that the significant injury such as physical injury and the damage to the
product do not occur.
・When the operation/inspection/service other than being described in this operation manual are
performed, perform the necessary consideration related to the safety on the all workers’
responsibility.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
iv
3. Labeling Position of Warning Label
Meaning of Warning Label
High Voltage Danger Label:
This indicates a situation where a high voltage
occurs inside involving the risk of electrocution.
High Temperature Warning Label:
This indicates a situation where a high
temperature occurs inside involving the risk of a
burn.
Heavy Load Caution Label:
This indicates an object of 20 kg or more.
Fig. 0.1 Power Supply Main Unit Fig. 0.2 Gun Controller
Check all of these warning labels are legible and always keep them clean. Use cloths and water
for cleaning the warning labels. Do not use gasoline and organic solvents. If labels are
damaged, lost, or become illegible, contact us or special agents.
The nameplate on the back of the power supply has the serial number of the power supply.
Keep it illegible at any time.
High Temperature
Warning Label
High Voltage
Danger Label
High Voltage
Danger Label
Heavy Load Caution Label
Heavy Load
Caution Label
REFERENCE
Electrical Shock
Caution Label
High Temperature
Warning Label
High Temperature
Warning Label

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
v
4. About this product
The sentences and illustrations in this operation manual are based on the information at the time of
this operationmanual prepared. This operation manual may be subject to change without prior notice.
Since these changes give the influence on the inspection, confirm the latest information in our
company’s exclusive distributor before starting the work.
Free of charge repair rules
1.Although the product has undergone strict in-house tests before shipment, please make an inquiry to the
headquarter components division, service office, or agent if malfunction occurs with the product because of our
fault such as manufacturing error or transportation problem. The product is repaired or exchanged for free of
charge.
2. Object to be guaranteed
1) EB Power Supply Main Unit
2) EB Gun Controller
3. Period of guarantee
1) Domestic sales: One year from our shipment date
2）Direct export: One year from B/L receiving date
4. Range of guarantee
1) A product damaged by a trouble at the time of delivery or during the transport. However, for direct export,
the range of guarantee defined in the latest version of INCOTERMS is observed.
2) A product that does not meet the basic specification although the product is used under the specified use
condition including the temperature range and power supply.
5. How to apply
1) For domestic sales
①Receive a substitute product sent from us or send back the product to us or service center to repair
the product.
②If the repair needs to be carried out at your site, make an inquiry to our components division, service
office, or agent.
2) For direct export
Receive a substitute product sent from us or send back the product to us or service center to repair the
product. You are required to pay the cost for returning the product to us.
6．Exemption
1) A product with expired guaranteed period.
2) A malfunction or trouble occurred by inevitable accidents including fire, wind, flood, lightning, or war.
3) A malfunction or trouble occurred by careless or improper handling of the product.
4) A product remodeled, broken down, or repaired without our consent.
5) A malfunction or trouble occurred under abnormal environment (strong electromagnetic field, radiation,
high temperature, high humidity, flammable gas, causticity gas, and dust, etc.,).
6) A malfunction or trouble occurred by noises.
7) Secondary damage caused by the product trouble, process patent, and/or your manufactured item using
this device.
8) When our engineer determines that the use condition of the product is inappropriate.
9) Consumption articles (for consumption articles, refer to Chapter 6 "Maintenance" on this manual).
10) A malfunction or trouble occurred by inappropriate handling during post-delivery transportation and
relocation.
11) When replacement of part is necessary because of ending of the service life.
12) When the parts are no longer available because of discontinuance of production and other reasons.
13) When a voltage out of input amplitude range is applied because of lightning surge or other
reasons.(including application of spike superimposed voltage/instantaneous blackout).
7．Others
1) If there is a document describing the individual contract or specification aside from this manual, the rules
described in these documents are observed.
2) For the questions and consultation on the product, please check the model and production number, and
make an inquiry at a service office, agent, or our components division.
http://www.ulvac.co.jp/support/index.html
3) The description in this manual may be subject to change without notice.
4) The parts replaced during repair may belong to us unless otherwise instructed.
*1 For lending of substitute machine during the repair period and on-site repair*2, please note that
additional expense will be charged.
*2 For on-site repair, the actual cost for the travel expense (transportation cost and others) will be
charged.

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Introduction
vi
5. Suspecting abnormality
If you notice something wrong with the product, check the symptom and the failure with reference to
the Troubleshooting in Section 7 of this manual.
To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the
trouble in order to repair the product as soon as possible.
If products seem to be broken or you have any questions, contact the repair service staff of the sales
agencies at the end of this document. When contacting the staff, always let them know the product
name or model name (the serial/lot number) and the symptom as many details as possible. The model
name and the serial number are on the name plate on the back panel.
6. About disposal
When this product is disposed of, dispose of it in accordance with the ordinances of the nation and
municipalities. Note that a product includes the main unit, the accessories, the attached documents,
the medias, and so on.
Furthermore, as to the expenses related to disposal, you are kindly requested to burden it on the
customer’s side.
7. About Service Parts
To use the power supply for a longer period of time, you are recommended to periodically perform an
overhaul (such as replacement of consumable parts).
For recommended replacement (consumable) parts in an overhaul, see "6. Maintenance" of this
instruction manual.
Note in advance that the recommended replacement periods of years are not guaranteed values of
ULVAC.
8. Hazardous substances regulated by the RoHS directive
The following substances regulated by the RoHS Directive are not contained in the product itself or in
the cable assembly that comes with the standard (Revised RoHS Directive RoHS”2011/65/EU”and
（EU）2015/863）.
Controlled hazardous substances and their thresholds
Controlled hazardous substances
Threshold
Lead（Pb）/ Lead compounds
1000ppm
Mercury（Hg）/Mercury compounds
1000ppm
Cadmium（Cd）/ Cadmium compounds
100ppm
Hexavalent chromium（Cr6+）/ Hexavalent chromium compounds
1000ppm
Polybrominated biphenyls（PBBs）
1000ppm
Polybrominated dishenylethers（PBDEs）
1000ppm
Diethylhexyl phthalate（DEHP）
1000ppm
Butyl benzyl phthalate（BBP）
1000ppm
Dibutyl phthalate（DBP）
1000ppm
Diisobutyl phthalate（DIBP）
1000ppm

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
Table of Contents
vii
Table of Contents
1. For your safety use .................................................................................................1
1.1 Caution on handling................................................................................................................................................... 1
1.2 When you make an inquiry..................................................................................................................................... 1
2. Overview...................................................................................................................2
2.1. Introduction..................................................................................................................................................................... 2
2.2. Feature ............................................................................................................................................................................. 2
2.3. Equipment Configuration......................................................................................................................................... 3
2.4. EB Power Supply Specifications......................................................................................................................... 5
2.5. External I/O Signal...................................................................................................................................................... 7
3. Preparation...............................................................................................................9
3.1. Precautions in Unpacking....................................................................................................................................... 9
3.1.1. Check after Unpacking ....................................................................................................9
3.2. About Transportation of Power Supply ..........................................................................................................10
3.3. Installation Site and Installation.........................................................................................................................11
3.4. Things to be Prepared............................................................................................................................................12
3.4.1. Power Receiving Equipment ........................................................................................12
3.5. Cable Connection......................................................................................................................................................14
4. Description of Each Part.......................................................................................18
4.1. Front panel of power supply main unit ...........................................................................................................18
4.2. Back panel of power supply main unit............................................................................................................20
4.3. Alarm Fuse ...................................................................................................................................................................25
4.4. Gun Controller Front Panel..................................................................................................................................27
4.5. Gun Controller Back Panel...................................................................................................................................28
4.6. Local Control Box......................................................................................................................................................36
5. Operation................................................................................................................40
5.1. Pre-operation Check................................................................................................................................................40
5.2. LOCAL Operation......................................................................................................................................................43
5.2.1. LOCAL operation with G-TYPE ....................................................................................44
5.2.2. LOCAL operation with S-TYPE.....................................................................................49
5.3. PROGRAM Operation ............................................................................................................................................55
5.4. Power supply error state........................................................................................................................................57
6. Maintenance...........................................................................................................59
6.1. Maintenance/Inspection of this product.........................................................................................................60
6.2. Periodical inspection................................................................................................................................................62
6.3. About recommended replacement parts.......................................................................................................64
7. Troubleshooting ....................................................................................................65
7.1. Troubleshooting..........................................................................................................................................................65
8. Attached Data.........................................................................................................73

ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～
1. For your safety use
1
1. For your safety use
In order to use this unit in a safe manner, we describe the caution
points on safety, the attached position of warning labels and the
contact party.
1.1 Caution on handling
Caution on safety related to this unit is described. After well reading the following, use this unit.
This power supply generates a voltage that is enough to pose a danger to human life and needs to
be handled with extreme care. In the event that a person contacts the voltage, it may cause a
serious accident. Take great care not to contact a high voltage. In addition, never turn on electricity
with the cover removed for safety.
In the power supply, a high voltage is applied. When checking the inside, be sure to shut off the
primary switch of the power supply you use and leave it for 5minutes or more, before opening the
cover. Maintenance shall be performed by or under the instructions of an expert operator for
handling high voltage.
In maintenance etc. of a one-sided electron gun with the simultaneous or alternate use (special
model) of two sources, turn off the high voltage of this power supply and never use other electron
guns.
1.2 When you make an inquiry
When you place an order for parts, make an inquiry for the product, and make an inquiry about the product
in failure, after confirming the product information, contact our company or the exclusive distributor. If you
judge as the failure in particular, please notify us the history and symptoms together with the product
information (Serial No., Lot No. etc. )as more details as possible.
Product information (This is described on the nameplate.)
Type of the product
Manufacture number information of the product (Serial number, Lot number)
DANGER
DANGER
DANGER