Ulvac DC-10 User manual

DC0044E-09
O
Op pe er ra at ti io on n M Ma an nu ua al l
10kW/20kW DC Power
model：DC-10/DC-20 (800V model)
DC-10-H/DC-20-H (1000V model)
9th Edition: July 14, 2023
ULVAC, Inc.
Before using this product, be sure to read it.
Also, keep this manual at hand with care

DC Power 【DC-10/DC-20】
Introduction
I
Introduction
We thank you for purchasing our product.
This operation manual is a guidebook in order to your using this product safely and effectively. The basic
caution matters and the operation instructions necessary for handling, and the inspection service
instructions are described. In order to prevent the significant accidents, read thoroughly the contents being
described in this operation manual, and fully understand it.
Before using this product, be sure to read this operation manual, and fully understand the operation
and the inspection service.
Do not operate this product until you understand the description of this operation manual completely.
Re-read the dubious points repeatedly, please make an effort so that you can use this
product correctly.
As to the safety, since it is explained in “Precautious points on safety”(P.II), “Safety symbol
marks” (P.III), and “Chapter 1 For your safety use”(P.1～), use the unit after fully reading
and understanding it.
Keep this operation manual always at hand with care.
When changing the installation place of this product, be sure to attach this operation
manual to the product.
Due to the unit improvement, the contents of this operation manual and your using system
may be different.
If there are dubious points and awared points, make an inquiry to our company’s exclusive
distributor.
You are kindly requested to safely operate and correctly manage the unit.
Please acknowledge since the described contents of the operation manual may subject to change or
revise without notice due to the specification changes of the product and the improvements for the
product.
The copyrights of the operation manual and this safety guide belong to ULVAC, Inc.
A part and whole part of this operation manual are prohibited to copy without a permit of
ULVAC, Inc.
Handling for this product of this operation manual and to use the manual in the application
other than that ULVAC, Inc. agreed, are prohibited.
This operation manual can not be copied for any part for the third party’s use without
approval of our company.

DC Power 【DC-10/DC-20】
Introduction
II
1. Precautious points on safety
1-1
Major part of the accidents occurs in relation to the operation carelessly conducted by the operator,
the inspection/service and the repair work.
Also, if you do not observe the basic caution matters on safety and neglect the dangerous
preperception, it is easy to occur.
By predicting the circumstances where the danger is predicted, the accidents can be prevented in
advance.
1-2
The physical injury occurs due to erroneous operation and inappropriate inspection service work.
Well read the contents of the operation and the inspection/service work, and never operate this
product until you understand it.
1-3
The warning and the caution about the safety are clearly stated in this operation manual and the
warning labels.
If these warning and caution are neglected, caution should be taken since it may result in the
physical injury and the death accident.
1-4
The manager, the operator and the maintenance personnel should read this manual well before
performing the operation and the maintenance of this product.
Persons who knew a correct handling and received the prescribed education, should perform the
appropriate work by using the correct technology and tools.

DC Power 【DC-10/DC-20】
Introduction
III
2. Safety symbol marks
In this operation manual and the warning display of the product main body, the symbol marks about the
safety in order to understand the matters to be observed are being put up.
The words using the symbol mark are used separately as follows.
2-1 Symbol mark for the instruction manual
Failure to comply with DANGER will lead to serious
personal injury or loss of life.
Works ignoring this note can lead to serious personal injury or loss of life
and/or serious damage the facilities of the plant (including this system) at
a high probability.
Failure to comply with WARNING can lead to dangerous
situations including serious injury or loss of life.
Works ignoring this note can lead to serious personal injury or loss of life
and/or serious damage to the facilities of the plant (including this system)
Failure to comply with CAUTION can lead to dangerous
situations including slight personal injury or medium scale
of damage to the facility.
Works ignoring this note can lead to slight personal injury and/or can
bring the system into the situation that requires readjustment.
There is no direct danger, but we describe the contents which we want
you know in order to your use the system correctly on safety of the work.
・Danger of the operation, inspection and service in all environments can not be predicted.
・Warning being described on the warning labels in this operation manual and on the product is not
necessarily all satisfied.
・In handling the product, pay a careful attention by the persons who control, operate and perform
maintenance as to other than this operation manual description matters, and keep in mind for
securement of the safety so that the significant injury such as physical injury and the damage to the
product do not occur.
・When the operation/inspection/service other than being described in this operation manual are
performed, perform the necessary consideration related to the safety on the all workers’ responsibility.
DANGER
WARNING
CAUTION
REFERENCE

DC Power 【DC-10/DC-20】
Introduction
IV
2-2 Safety symbol marks on the unit main body
The following safety symbol marks are placed on the unit main body.
List of safety symbol marks
Safety symbol marks
Description
Heavy loads
・There is a danger of getting injury.
・Use specified machine.
Dangerous voltage part
・There is a danger of serious injury or death by electric
shock.
・Always close the panel and the safety cover.
・Turn off the dangerous voltage power supply for main
tenance.

DC Power 【DC-10/DC-20】
Introduction
V
Safety symbol marks
Description
High temperature heated part
・Do not touch, or you may get burned.
Use copper conductors only.
The connector part shall not be lifted.
Otherwise it may be damaged. Do not hold and lift the
connector.
Weight labeling of DC-10/DC-10-H
Weight labeling of DC-20/DC-20-H

DC Power 【DC-10/DC-20】
Introduction
VI
3. About this product
The sentences and illustrations in this operation manual are based on the information at the time of this
operation manual prepared. This operation manual may be subject to change without prior notice. Since
these changes give the influence on the inspection, confirm the latest information in our company’s
exclusive distributor before starting the work.
Free of charge repair rules
1. Although the product has undergone strict in-house tests before shipment, please make an inquiry to the
headquarter, service office, or agent if malfunction occurs with the product because of our fault such as
manufacturing error or transportation problem. The product is repaired or exchanged for free of charge.
2. Object to be guaranteed
1) DC power supply main body
3. Period of guarantee
1) Domestic sales: One year from our shipment date
2）Direct export: One year from B/L receiving date
4. Range of guarantee
1) A product damaged by a trouble at the time of delivery or during the transport. However, for direct export, the
range of guarantee defined in the latest INCOTERMS is observed.
2) A product that does not meet the basic specification although the product is used under the specified use
condition including the temperature range and power supply.
5. How to apply
1) For domestic sales
①Receive a substitute product sent from us or send back the product to us or service center to repair the
product.*1
②If the repair needs to be carried out at your site, make an inquiry to our company, service office, or agent.*2
2) For direct export
Receive a substitute product sent from us or send back the product to us or service center to repair the
product. You are required to pay the cost for returning the product to us.
6. Exemption
1) A product with expired guaranteed period.
2) A malfunction or trouble occurred by inevitable accidents including fire, wind, flood, lightning, or war.
3) A malfunction or trouble occurred by careless or improper handling of the product.
4) A product remodeled, broken down, or repaired without our consent.
5) A malfunction or trouble occurred under abnormal environment (strong electromagnetic field, radiation, high
temperature, high humidity, flammable gas, causticity gas, and dust, etc.,).
6) A malfunction or trouble occurred by noises.
7) Secondary damage caused by the product trouble, process patent, and/or your manufactured item using this
device.
8) When our engineer determines that the use condition of the product is inappropriate.
9) Consumption articles (for consumption articles, refer to Chapter 6 "Maintenance" on this manual).
10) A malfunction or trouble occurred by inappropriate handling during post-delivery transportation and relocation.
11) When replacement of part is necessary because of ending of the service life.
12) When the parts are no longer available because of discontinuance of production and other reasons.
13) When a voltage out of input amplitude range is applied because of lightning surge or other reasons.(including
application of spike superimposed voltage/instantaneous blackout).
7．Others
1) If there is a document describing the individual contract or specification aside from this manual, the rules
described in these documents are observed.
2) For the questions and consultation on the product, please check the model and production number, and make
an inquiry at a service office, agent, or our company.
3) The description in this manual may be subject to change without notice.
4) The parts replaced during repair may belong to us unless otherwise instructed.
*1 For lending of substitute machine during the repair period and on-site repair*2, please note that
additional expense will be charged.
*2 For on-site repair, the actual cost for the travel expense (transportation cost and others) will be
charged.

DC Power 【DC-10/DC-20】
Introduction
VII
4. Suspecting abnormality
If you notice a presence of abnormality, refer to 7."Trouble shooting" in this manual and check the
symptom and the trouble.
To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the
trouble in order to repair the product as soon as possible.
If the product is determined to be malfunctioning, or if you have an unclear point, please make an inquiry
to one of the contact addresses.
When you make an inquiry, let us know the product name, model, manufacturing number, and symptom
in detail as much as possible.
5. About Product Storage
Store under the conditions described in the specifications.
After a long term storage without energization, internal elements may deteriorate.
Contact us for assistance before re-energization.
6. About disposal
When this product is disposed of, dispose of it in accordance with the ordinances of the nation and
municipalities.
Furthermore, as to the expenses related to disposal, you are kindly requested to burden it on the
customer’s side.

DC Power 【DC-10/DC-20】
Introduction
VIII
7. About responses to RoHS
The following 10 specified environmentally hazardous chemical substances regulated by the RoHS
Directive are not contained in the main body and the cable assembly attached as standard above t
he threshold (Revised RoHS Directive 2011/65 / EU and (EU) 2015 / 863).
Target regulated hazardous substances and their thresholds
Regulated Hazardous Substances
Threshold
Lead（Pb）
1000ppm
Mercury（Hg）
1000ppm
Cadmium（Cd）
100ppm
Hexavalent chromium（CrⅥ+）
1000ppm
Polybrominated bipyenyl（PBB）
1000ppm
Polybrominated diphenyl ether （PBDE）
1000ppm
Diethylhexyl phthalate (DEHPs)
1000ppm
Butyl butyl phthalate (BBP)
1000ppm
Dibutyl phthalate (DBP)
1000ppm
Diisobutyl phthalate (DIBP)
1000ppm

DC Power 【DC-10/DC-20】
Table of Contents
i
TABLE OF CONTENTS
INTRODUCTION..................................................................I
1. PRECAUTIOUS POINTS ON SAFETY........................................................................................................................... II
2. SAFETY SYMBOL MARKS..............................................................................................................................................III
3. ABOUT THIS PRODUCT................................................................................................................................................. VI
4. SUSPECTING ABNORMALITY...................................................................................................................................... VII
5. ABOUT PRODUCT STORAGE ....................................................................................................................................VII
6. ABOUT DISPOSAL ..........................................................................................................................................................VII
7. ABOUT RESPONSES TO ROHS..............................................................................................................................VIII
1. FOR YOUR SAFETY USE........................................... 1
1-1. CAUTION ON HANDLING .................................................................................................................................................1
1-2 WARNING LABEL /NAME PLATE AFFIXING POSITION ............................................................................................2
1-3 WHEN YOU CONTACT....................................................................................................................................................... 2
2. OVERVIEW.................................................................... 3
2-1 INTRODUCTION ...................................................................................................................................................................3
2-2 FEATURES............................................................................................................................................................................3
2-3 COMPOSITION.....................................................................................................................................................................4
2-4 SPECIFICATIONS ................................................................................................................................................................5
2-5. CONNECTION OF INPUT/OUTPUT SECTION...............................................................................................................7
2-5-1. Connection of input/output section....................................................................................................7
2-5-2. Connection of output section ................................................................................................................8
3. PREPARATION.............................................................. 9
3-1 UNPACKING .........................................................................................................................................................................9
3-2 INSTALLATION OF POWER SUPPLY...............................................................................................................................9
3-2-1 Power receiving equipment .......................................................................................................................9
3-2-2 Class A grounding work .............................................................................................................................9
3-2-3 How to install................................................................................................................................................10
3-2-4 About clearance............................................................................................................................................11
3-3 WIRING AND CONNECTING ............................................................................................................................................11
3-3-1 Cables connected to DC-10/20 ..........................................................................................................11
3-3-2. USER IO PORT process cable............................................................................................................12
3-3-3 About system configurations (Option)...............................................................................................12
3-3-4 Name definition of power supply with M/S connected ...........................................................13
3-3-5 M/S settings..................................................................................................................................................13
3-3-6 Setting on front panel in M/S .............................................................................................................14
3-3-7 Input sequence in M/S.............................................................................................................................14
3-3-8 Interlock during M / S.............................................................................................................................15
3-4.PROTECTION SHEETS ......................................................................................................................................................15
3-5. AC INPUT CYCLE...........................................................................................................................................................15
4. DESCRIPTION OF FUNCTIONS................................ 16
4-1 NAME AND FUNCTION OF EACH PART......................................................................................................................16
4-1-1. DC power front panel ..............................................................................................................................16
4-1-2. DC power back panel...............................................................................................................................17
4-2 DESCRIPTION OF EACH OPERATION MODE..............................................................................................................18
4-2-1 Description of LOCAL control function ...........................................................................................18
4-2-2 Description of USER control function ..............................................................................................18

DC Power 【DC-10/DC-20】
Table of Contents
ii
4-2-3 Description of HOST control function..............................................................................................20
4-3 SELECTION OF OUTPUT CONTROL MODE ................................................................................................................20
4-3-1 Setup in LOCAL ..........................................................................................................................................20
4-3-2. Setup in USER.............................................................................................................................................20
4-3-3. Setup in HOST............................................................................................................................................20
4-4. ABOUT EACH MONITOR SIGNAL AND LEVEL SIGNAL IN SYSTEM CONFIGURATION...................................20
4-5. ABOUT DC OUTPUT SEQUENCE ................................................................................................................................21
4-6. DESCRIPTION OF ARC MODE FUNCTION..................................................................................................................21
4-7. DESCRIPTION OF MICRO ARC FUNCTION.................................................................................................................23
4-8. DESCRIPTION OF ARC DELAY FUNCTION ................................................................................................................24
4-9. DESCRIPTION OF HARD ARC FUNCTION ..................................................................................................................24
4-10. DESCRIPTION OF LAMP TIME FUNCTION ...............................................................................................................25
4-11. DISPLAY OF ERROR CODE AND WARNING CODE ON FRONT PANEL.............................................................26
4-12. INDICATION WHEN MULTIPLE ERRORS AND WARNINGS OCCUR.......................................................................27
4-13. SCREEN LOCK FUNCTION ..........................................................................................................................................27
4-14. PRECAUTIONS FOR USE OF EXTERNAL OSCILLATOR........................................................................................27
4-15. ABOUT SETPOINT....................................................................................................................................................29
4-16. ABOUT RESET............................................................................................................................................................29
5. HOW TO OPERATE ................................................... 30
5-1. HOW TO OPERATE IN LOCAL MODE ......................................................................................................................30
5-1-1. At startup of power supply...................................................................................................................30
5-1-2. Parameter tree in MENU screen........................................................................................................32
5-1-3. About buttons on front panel ..............................................................................................................33
5-1-4. About MENU screen .................................................................................................................................34
5-1-5. Parameter list ...............................................................................................................................................43
5-2. HOW TO OPERATE IN USER MODE .........................................................................................................................45
5-2-1. Precautions for wiring of USER IO PORT....................................................................................46
5-3. RECOMMENDED DIGITAL I/O CONNECTION CIRCUIT............................................................................................48
6. MAINTENANCE ........................................................... 49
6-1. MAINTENANCE/INSPECTION OF THIS POWER SUPPLY.........................................................................................49
6-2. ABOUT RECOMMENDED REPLACEMENT PARTS......................................................................................................50
7. TROUBLESHOOTING ................................................. 51
7-1. TROUBLESHOOTING .......................................................................................................................................................51
7-1-1. LED indicator and digital/analog interface of power supply.................................................51
8. APPENDIX.................................................................... 54
8-1. OVERVIEW OF SERIAL COMMUNICATIONS ................................................................................................................57
8-1-1. Serial communication specifications ..................................................................................................57
8-1-2．How to connect...........................................................................................................................................58
8-2 HOW TO SET SERIAL COMMUNICATION.....................................................................................................................59
8-2-1 Communication message packet...........................................................................................................61
8-3. COMMUNICATION PROTOCOL ......................................................................................................................................63
8-4. COMMAND BETWEEN HOST AND DC .....................................................................................................................65

DC Power 【DC-10/DC-20】
1. For your safety use
1
1. For your safety use
In order to use this unit in a safe manner, we describe the caution points on
safety, the attached position of warning labels and the contact party.
1-1. Caution on handling
This section describes precautions for use of this product. Thoroughly understand the following before
using this product.
The voltage generated by this power supply is enough to pose a risk to a human life. Therefore it shall
be handled with the greatest care. In the event that a person contacts this voltage, it leads to a
serious accident. Take great care not to contact a high voltage.
In addition, never energize with the cover removed since it is dangerous.
This power supply involves a high voltage. Our or our group's personnel in charge support the
internal inspection and repair.
Before replacement etc. of the power supply, be sure to turn the upstream breaker to OFF and
remove the cable wires etc.
DANGER
DANGER
DANGER

DC Power 【DC-10/DC-20】
1. For your safety use
2
1-2 Warning label / Name plate affixing position
The affixing position of warning labels is shown in the appendix "External View" in Chapter 8. Keep
these warning labels clean at all times so that all of them are legible. Use cloth and water for the
cleaning of the warning labels. Do not use gasoline and organic solvents. If the labels are damaged,
lost, or become illegible, contact us or our exclusive distributors.
In addition, a nameplate is affixed on the top panel of the power supply. Take special care so that it
is legible at all times.
1-3 When you contact
When you need to order parts, inquire about products, or inquire about damaged products, confirm the
product information and then contact us or our exclusive distributors. Especially when the product is
judged broken, please let us know the circumstances and symptoms with the product information as in
detail as possible.
■Product information (This is described on the nameplate.)
Type of the product
Manufacture number information of the product (SERIAL number)
REFERENCE

DC Power 【DC-10/DC-20】
2. Overview
3
2. Overview
This chapter describes features, composition, and
specifications of this product.
2-1 Introduction
This power supply is designed as a DC power supply for sputtering with an output of 10/20 kW.
The rated power can be supplied to the load by optimizing the load impedance of plasma.
2-2 Features
・The output value can be checked on the monitor in the front of the power supply and the each
parameter setting on the panel.
・The output can be produced over the USER control, via the SERIAL communication, and by the panel
operation in the front of the power supply (LOCAL control).
・An error in each power supply can be checked on the monitor in front of the power supply.
・With the air-cooling system, cooling water is not necessary.
・There are two models with a different rated output voltage: 800V and 1,000V.
・As an option, it can be customized to master slave specifications (*1). It can be used as a power
supply system of 10 to 240 kW by connecting power supplies with each other using master slave
cables. 10 kW and 20 kW can be combined flexibly and respectively and up to 12 units can be
connected. Note that power supplies with a rating of 800V and 1,000V cannot be combined on a
master-slave basis.
・A low energy circuit (*2) can be attached as an option. If an unusual electrical discharge (*3) is
detected, the low arc energy circuit quickly disconnect the load, reducing the arc energy.
・As an option, accuracy can be guaranteed in the low power range of 1% to 10% of the rated power.
The standard guarantees accuracy from 10% to 100%. Check the items in [2-4. Specifications] for
accuracy and warranty range. Accuracy-guaranteed products in the low power range are described as
S specifications.
・Depending on the rated specification and the optional configurations of power supplies, the machinery
number (*4) is identified as shown in Table 2-1. When the power breaker is closed, the corresponding
machinery number appears on the monitor in the front of the power supply. For the front monitor
display when the breaker is closed, see section 5-1-1.
*1: Hereinafter a master slave is referred to as MS.
*2: Hereinafter a low arc energy circuit is referred to as LARC.
*3: Hereinafter an unusual electrical discharge is referred to as ARC.
*4: Hereinafter a machinery number is referred to as M/N.

DC Power 【DC-10/DC-20】
2. Overview
4
Table 2-1: Optional combination list
Model
M/N
Rating
LARC,M/S
(Yes ○ / No ×)
Power
Voltage
Current
①
DC-10
DC-10
10kW
800V
25A
×
②
DC-10-AM
10kW
800V
25A
○
③
DC-10-H
DC-10-H
10kW
1000V
18A
×
④
DC-10-H-AM
10kW
1000V
18A
○
⑤
DC-20
DC-20
20kW
800V
50A
×
⑥
DC-20-AM
20kW
800V
50A
○
⑦
DC-20-H
DC-20-H
20kW
1000V
40A
×
⑧
DC-20-H-AM
20kW
1000V
40A
○
2-3 Composition
This power supply consists of the parts below.
Power main unit: 1
[Standard accessory]
D-Sub connector for USER IO PORT (product of JAE: DC-C4-J12-F1/DC-37PF-N): 1 set
M/S setting insulation driver: 1
[Option]
AC input cable (Cable length: 2m,4m,6m,8m,10m）1
DC output cable (Cable length: 5m,10m,15m,20m,25m,30m,35m,40m) 1
M/S cable (Cable length: 1.2m) 1
The input cable, output cable, M/S cable are sold separately. We offer the options. Please let us know
your desired cable length separately. ( ) shows a cable length we offer.
A long output cable may increase arc energy. For use of other cable lengths, contact us.

DC Power 【DC-10/DC-20】
2. Overview
5
2-4 Specifications Table 2-2: Electrical specification; 800V
Item
Specifications
Model
DC-10
DC-20
Input specification
Rated input voltage
AC208V
AC208V
Input voltage variation
range
AC187V～229V
Number of phases /
Frequency
Three-phase for 50/60Hz
Input connection
Connector
Input current
50A or less*1
80A or less*1
Input capacity
13.5 kVA or less*1
25 kVA or less*1
Leakage current
5 mA or less
Efficiency
87％or more*2
87％or more*2
Power factor
0.85 or more*2
0.92 or more*2
Output specification
Rated power
10kW
20kW
Rated current
25A
50A
Rated voltage
800V
800V
Ignition voltage
1500V
1500V
Output range
10kW
V1
1500V
1A
I4
Standard
S specifications
V2
800V
V3
400V
V4
200V
V5
100V
5A
I1
12.5A
I2
25A
I3
20kW
V1
1500V
2A
I4
Standard
S specifications
V2
800V
V3
400V
V4
200V
V5
100V
5A
I1
25A
I2
50A
I3
V1
1500V
V1
1500V
V2
800V
V2
800V
V3
400V
V3
400V
V4
200V
V4
200V
V5
100V
V5
100V
I1
5A
I1
5A
I2
12.5A
I2
25A
I3
25A
I3
50A
I4
1A
I4
2A
Output polarity
Negative polarity
ARC control
If ARC is detected, the inverter is stopped and LARC separates the load side*3.
Output connection
Connector
Control
Control mode system
LOCAL control / USER control / SERIAL communication control (RS232C or RS485)
Output control system
Constant power control (P control) / Constant current control (I control) / Constant voltage
control (V control)
Control accuracy
The higher of ±0.5% or less of the rated output or ±1% of the set value
In addition to the above, the S specification is 1 to 10% of the rated power value and ± 5% or
less of the set value.
Guaranteed control
range
Constant power control: 10 to 100% of the rated power value
In addition to the above, S specifications are constant power control 1 to 100% of the rated
power value.
*1: This depends on the working condition at your site.
*2: This depends on an input voltage of 187 to 229 VAC. This may depend on the equipment on the input
side.
*3: When an Active Arc Killer is used, only the inverter stops.
When an oscillator is used, change the settings in reference to 4-14 "Precautions for use of External
oscillator."

DC Power 【DC-10/DC-20】
2. Overview
6
Table 2-3: Electrical specification; 1000V
Item
Specifications
Model
DC-10-H
DC-20-H
Input specification
Rated input voltage
AC208V
AC208V
Input voltage variation
range
AC187V～229V
Number of phases /
Frequency
Three-phase for 50/60Hz
Input connection
Connector
Input current
50A or less*1
80A or less*1
Input capacity
13.5 kVA or less*1
25 kVA or less*1
Leakage current
5 mA or less
Efficiency
87％or more*2
87％or more*2
Power factor
0.85 or more*2
0.92 or more*2
Output specification
Rated power
10kW
20kW
Rated current
18A
40A
Rated voltage
1000V ※3
1000V ※3
Ignition voltage
1500V
1500V
Output range
10kW
V1
1500V
1A
I4
Standard
S specifications
V2
1000V
V3
555V
V4
200V
V5
100V
5A
I1
10A
I2
18A
I3
20kW
V1
1500V
2A
I4
Standard
Sspecifications
V2
1000V
V3
500V
V4
200V
V5
100V
5A
I1
20A
I2
40A
I3
V1
1500V
V1
1500V
V2
1000V
V2
1000V
V3
555V
V3
500V
V4
200V
V4
200V
V5
100V
V5
100V
I1
5A
I1
5A
I2
10A
I2
20A
I3
18A
I3
40A
I4
1A
I4
2A
Output polarity
Negative polarity
ARC control
Inverter stops when an unusual electrical discharge is detected *4.
Output connection
Connector
Control
Control mode system
LOCAL control / USER control / SERIAL communication control (RS232C or RS485)
Output control system
Constant power control (P control) / Constant current control (I control) / Constant voltage
control (V control)
Control accuracy
The higher of ±0.5% or less of the rated output or ±1% of the set value
Guaranteed control
range
Constant power control: 10 to 100% of the rated power value
*1: This depends on the working condition at your site.
*2: This depends on an input voltage of 187 to 229 VAC. This may depend on the equipment on the input
side.
*3: When a device for preventing unusual electrical discharge is used, the output voltage is limited to
800V.
*4: A low arc energy circuit can be installed as an option. When a device for preventing unusual electrical
discharge is used, only the inverter stops.

DC Power 【DC-10/DC-20】
2. Overview
7
Table 2-4: Other specifications
Item
Specifications
Cooling system
Forced air cooling system
Outer dimensions
483 mm (W × 630 mm (D) × 133 mm (H) or less *No protrusions included.
Mass
DC-10：29kg DC-20：36kg
Usage environment
Indoors, no more than 1000 m above sea level, no direct sunlight, no corrosive gases
Operating temperature
5～40℃
Storage temperature
-20℃～60℃
Humidity relative humidity
Operation: 35% to 85%, Storage: 25% to 85%, both non-condensing
Atmospheric pressure
1000 meters above sea level
Acquisition standard
CE（EN61000－6－2、EN61000－6－4、EN61010－1）
SEMI F47、RoHS Compliant (Europe)
Storage environment
Contamination Level 2
No corrosive gas, no large amount of dust, no conductive dust
It is basically used in a clean room.
Overvoltage category
Category Ⅱ
2-5. Connection of input/output section
2-5-1. Connection of input/output section
Input voltage: Three-phase, 50/60 Hz, and AC187 to 229V
[HARTING] connector is employed for the input section.
Although the genuine cable can be purchased from us, if you prepare a cable by yourself, purchase
connector component parts with reference to the items of [Table 2-5.HARTING connector configuration
at the cable side of input section], select a suitable wiring material, and complete the installation.
A special tool is required. Contact the manufacturer for the details of installation conditions etc. When
selecting a wiring material used for the cable, refer to [Table 2-2. Electrical specification], and select
the one that would satisfy the rating specification. In addition, select a suitable cable ground based on
the line shape of the wiring material selected.
Figure 2-1. Assignment of input connector at the product side
Table 2-5. HARTING connector configuration at the cable side of input section
Name
Model
Q’ty
100A single module female
09 14 001 3131
3
Hinged frame 10B（A-C）
09 14 010 0303
1
10B-gg-R-M40
19 30 010 0448
1
Han TC100 female contact 16mm²
09 11 000 6216
3
Han-Mod PE contact, extension special cab
09 14 000 9912
1
R
相
S
相
T
相
GND

DC Power 【DC-10/DC-20】
2. Overview
8
Table 2-6. HARTING connector pin assignment at the cable side of input section
Connector Pin Number
Connection destination
A
L1(R phase)
B
L2(S phase)
C
L3(T phase)
frame
GND
2-5-2. Connection of output section
As with the input section, a [HARTING] connector is employed also in the output section.
Although the genuine cable can be purchased from us, if you prepare a cable by yourself, purchase
connector component parts with reference to the items of [Table 2-7. HARTING connector
configuration at the cable side of output section], select a suitable wiring material, and complete the
installation.
A special tool is required. Contact the manufacturer for the details of installation conditions etc.
When selecting a wiring material used for the cable, refer to [Table 2-2. Electrical specification], and
select the one that would satisfy the rating specification.
In addition, select a suitable cable ground based on the line shape of the wiring material selected.
Figure 2-3. Assignment of output connector at the product side(Common to DC-5-P and DC-10-P)
Table 2-7. HARTING connector configuration at the cable side of output section
Name
Model
Q’ty
Han 70A crimp module,male
09 14 002 3041
1
Carrier hood
09 14 001 0311
1
Hood Top Entry M25
72 14 001 0401
1
70A contact,male 10mm2
09 11 000 6131
2
Ferrule 6mm2 L=12
1
Table 2-8. HARTING connector pin assignment at the cable side of output section
Connector Pin Number
Connection destination
1
Cathode
2
Anode
It is recommended to use our cable for I/O cables.
We shall not take any responsibility on malfunctions and defects as a result of
using a cable which is prepared by the customers. Please acknowledge
beforehand.
Cathode
Anode
Shield
CAUTION

DC Power 【DC-10/DC-20】
3. Preparation
9
3. Preparation
We describe necessary preparation and caution matters in
step where after this unit is delivered at your hand, you
use this unit.
3-1 Unpacking
Unpack the product package and take out the products.
After unpacking, check the number of accessories and the apperance of the main unit and the
accessories.
When taking the main unit out of the transportation box, be sure to work together with other
one or more persons.
3-2 Installation of power supply
3-2-1 Power receiving equipment
Operation of this power supply needs the following AC input equipment. (For details, see Table 2-1.)
Model
Number of
phases
Voltage
Frequency
Capacity
Remarks
DC-20
Three-phase
187～229V
50/60Hz
25kVA
The power receiving
equipment shall be
designed with an
allowance*.
DC-10
13.5kVA
DC-20-H
25kVA
DC-10-H
13.5kVA
* The above shows the required power receiving capacity for one power supply. The number of power
supplies depends on the system configurations and the suitable power receiving capacity depends
on the number under actual working conditions.
3-2-2 Class A grounding work
The output voltage of this power supply is 1,000V or more and therefore classified into high-voltage
equipment. For this reason, Class A (formerly called Class 1) grounding with grounding resistance of
10Ω or less is necessary.
Of the Japanese standards, the Class A grounding work defined in the guide for electrical
equipment fits. In sufficient grounding may damage the target devices and have an
excessive effect on a human body. In a country outside Japan, install the product following
its national rules.
CAUTION
CAUTION