
page 8 of 74
Contents
Safety information!............................................................. 9
Important information! ......................................................................... 9
General information............................................................................11
Intended use.......................................................................................11
Setting up and installing the equipment ............................................ 12
Ambient conditions............................................................................ 14
Operating conditions ......................................................................... 15
Safety during operation ..................................................................... 17
Maintenance and repair..................................................................... 20
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Important information: Equipment marking (ATEX)................... 22
Technical data................................................................... 24
General technical data valid for all pumps/pumping units................. 24
Gas inlet temperatures..................................................................... 25
Wetted parts..................................................................................... 28
Abbreviations.................................................................................... 29
Pump parts....................................................................................... 29
Use and operation ............................................................ 38
Installing a pump in a vacuum system .............................................. 38
During operation................................................................................ 42
Important notes regarding the use of gas ballast .............................. 44
Important notes concerning the operation of the
exhaust waste vapor condenser........................................................ 45
Shutdown & storage.......................................................................... 47
Accessories ...................................................................... 48
Troubleshooting ............................................................... 50
Replacing diaphragms and valves.................................. 52
Cleaning and inspecting the pump heads ........................................ 54
Replacing the diaphragm ................................................................. 58
Replacing the valves ........................................................................ 60
Replacing the overpressure safety relief device............................... 65
Replacing the fuse............................................................................ 66
Notes on return to the factory......................................... 67
Warranty ............................................................................ 70
EC Declaration of Conformity of the Machinery ............... 72