Adixen ASM 182 TD PLUS User manual

ASM 182 TD+ / ASM 192 TD+
ASM 192 T2D+
HELIUM LEAK DETECTOR
User’s Manual

Alcatel Vacuum Technology, as part of the
Alcatel Group, has been supplying vacuum
pumps, leak detection systems, vacuum
measurement and micro machining systems
for several years.
Thanks to its complete range of products, the
company has become an essential player
in multiple applications : instrumentation,
Research & Developement, industry and
semiconductors.
Alcatel Vacuum Technology has launched
Adixen, its new brand name, in recognition
of the company’s international standing in
vacuum position.
With both ISO 9001 and 14001
certifications, the French company is an
acknowlegded expert in service and
support, and Adixen products have the
highest quality and environmental standards.
GB 02834 - Edition 03 - June 05
With 40 years of experience, AVT today has a
worldwide presence, through its international network
that includes a whole host of experienced subsidiaries,
distributors and agents.
The first step was the founding of Alcatel Vacuum
Products (Hingham- MA) in the United States,
thirty years ago, reinforced today by 2 others US
subsidiaries in Fremont (CA) and Tempe (AZ).
In Europe, AVTF-France headquarters and three of its
subsidiaries, Alcatel Hochvakuumtechnik (Germany),
Alcatel Vacuum Technology UK (Scotland) and Alcatel
Vacuum Systems (Italy) form the foundation for the
European partner network.
In Asia, our presence started in 1993 with Alcatel
Vacuum Technology (Japan), and has been
strengthened with Alcatel Vacuum Technology Korea
(in 1995), Alcatel Vacuum Technology Taïwan (in
2001), Alcatel Vacuum Technology Singapore,
and more recently with Alcatel Vacuum Technology
Shanghai (China) (in 2004).
This organization is rounded off by more than 40
represensatives based in a variety of continents.
Thus, whatever the circumstances, the users of Adixen
products can always rely on quick support of our
specialists in Vacuum Technology.

CHINA
Alcatel Vacuum Technology, Shanghai
N°82 Lane 887 Zuchongzhi Road
Zhangjiang Hi-Tech Park,
Shanghai 201203 - P.R. China
Tel. (86) 21 5027 0628
Fax. (86) 21 3895 3815
FRANCE
Alcatel Vacuum Technology France
98, avenue de Brogny - BP 2069
74009 Annecy cedex
Tel. (33) 4 50 65 77 77
Fax. (33) 4 50 65 77 89
GERMANY
Alcatel Hochvakuumtechnik GmbH
Am Kreuzeck 10 - Postfach 1151
97877 Wertheim
Tel. (49) 9342 9610 00
Fax. (49) 9342 9610 30
ITALY
Alcatel Vacuum Systems
Via Trento, 30
20059 Vimercate (Mi)
Tel. (39) 0396 86 38 55
Fax. (39) 039 66 71 25
JAPAN
Alcatel Vacuum Technology Japan
4-3-10 Shimokodanaka,
Nakahara-ku
Kawasaki, Kanagawa 211-0041
Tel. (81) 44-797-5920
Fax. (81) 44-797-5932
KOREA
Alcatel Vacuum Technology Korea
4th Floor, Sunghyun B/D
10-5, Karak-Dong, Songpa-Ku -Seoul
Tel. (82) 2 409 6277
Fax. (82) 2 409 6279
SINGAPORE
Alcatel Singapore Pte Ltd
49 Jalan Pemimpin
#01-01 APS Industrial Building
577203 Singapore
Tel. (65) 6254082
Fax. (65) 62547018
TAIWAN
Alcatel Vacuum Taïwan
No. 169-3, Sec.1, Kang-Leh Rd
Song-Lin Village, Hsin-Feng 304
Hsin-Chu County, Taiwan -R.O.C.
Tel. (886) 35599230
Fax.(886) 35599231
UNITED KINGDOM
Alcatel Vacuum Technology UK Ltd
8 Bain Square
Kirkton Campus
Livingston - West Lothian
EH54 7DQ Scotland
Tel. (44) 1 506 418 000
Fax. (44) 1 506 418 002
USA
Alcatel Vacuum Products
67, Sharp Street
Hingham - MA 02043
Tel. (1) 781 331 4200
Fax. (1) 781 331 4230
Alcatel Vacuum Technology France - 98, avenue de Brogny - BP 2069 - 74009 Annecy cedex - FRANCE
Tel. (33) 4 50 65 77 77 - Fax. (33) 4 50 65 77 89
Web site: www.adixen.com
High Vacuum Technology


A very wide range of helium leak
detectors
GB 00204 - Edition 04 - March 04
1/2
Alcatel Vacuum Technology France - ATH 200 User’s Manual
Dear customer,
You have just bought an
Alcatel leak detector.
We would like to thank you
and we are proud to count
you among our customers.
This product is a result of
the experience acquired
over 35 years by Alcatel in
vacuum and leak detection
technology.
The applications of helium
leak testing are extremely
diversified ranging from
high-tech installation
maintenance to high-
speed testing of industrial
products.
Each product of the
ALCATEL detector range
is designed to meet the
specific needs of each
application:
• portability,
• high sensitivity,
• pumping capacity,
• pumping type,
• automation and
integration in an industrial
process.
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

A very wide range of helium leak
detectors
2/2 Alcatel Vacuum Technology France - ATH 200 User’s Manual
GB 00204 - Edition 04 - March 04
This product complies with the requirements of European Directives,
listed in the Declaration of Conformity contained in G100 of this
manual. These Directives are amended by Directive 93/68/E.E.C
(E.C. Marking).
The Declaration of Conformity and Safety Instructions are available
in German, Spanish, Italian, Portuguese, Dutch and Danish
languages at the end of this manual.
Copyright/Intellectual property:
The use of Alcatel products are subject to copyright and intellectual
property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole or
any part without prior written authorization from Alcatel Vacuum
Technology France.
Specifications and information are subject to change without notice
by from Alcatel Vacuum Technology France.
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

GB 00986 - Edition 06 - February 05
1/3
General contents
ASM 182 TD+ - ASM 192 TD+ -
ASM 192 T2D+ User’s Manual
MANUAL REFERENCE: 109229
EDITION:07- January 2006
Software version:
L115 v3.0 r.01 (ASM 182 TD+)
L116 v3.0 r.01 (ASM 192 T2D+)
L132 v3.0 r.01 (ASM 192 TD+)
Chapter A INTRODUCTION
A 100 - Introduction to the ASM 182 / 192 series
A 200 - ASM 182 TD+ / 192 TD+ - Detector operating principle
A 201 - ASM 192 T2D+ - Detector operating principle
A 300 - Analyzer cell operating principle
A 400 - Testing methods
A 401 - About Helium and hydrogen
A 500 - Operator interface: control panel
A 501 - Operator interface: control panel
A 600 - Options
A 700 - Accessories
A 800 - ASM 182/192 TD+ - Technical characteristics
A 801 - ASM 192 T2D+ - Technical characteristics
A 900 - ASM 182 TD+ - Dimensions
A 901 - ASM 192 series - Dimensions
Chapter B INSTALLATION
B 100 - Safety instructions
B 110 - Unpacking - Storage - Transportation
B 200 - Neutral gas purge and inlet vent connection
B 210 - ASM 182 - Connecting the detector to the installation
B 211 - ASM 192 - Connecting the detector to the installation
B 300 - Controlling the detector with the I/O interface
B 310 - Controlling the detector with a PC computer through the RS 232 interface
B 320 - Connecting the detector directly to a printer or another device
B 400 - ASM 182 series - Before starting up the leak detector
B 401 - ASM 192 series - Before starting up the leak detector
Chapter C OPERATION
C 100 - Factory configuration of the leak detector parameters
C 110 - Operating principle of the control panel
C 120 - Setting and maintenance part presentation of the control panel
C 130 - Access to level
4
4
- Password
C 140 - Summary of screens
C 200 - Starting up / Switching off the leak detector
C 210 - How to use the leak detector: 2 test modes
C 211 - Operation of the leak detector
C 300 - Calibration of the leak detector
C 301 - Basic internal calibration of the leak detector
C 302 - Advanced internal calibration of the leak detector
C 303 - External calibration of the leak detector
C 304 - Correction factor
C 305 - Calibrated leak values programming
C 306 - Adaptator for calibrated leak
C 400 - Remote control
C 410 - Headphone and loudspeaker
C 420 - Gas line (option) ASM 182 TD+
C 430 - 3 masses option
C 440 - Control panel with graphic interface
C 450 - Long distance sniffer probe and Helium spray gun
Preliminary
remarks
Throughout this User’s Manual, you could find this type of message
“Summary of screen C 140”: it refers to a specific chapter of the
User’s Manual. Please read it for further information.
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

2/3
General contents
ASM 182 TD+ - ASM 192 TD+ -
ASM 192 T2D+ User’s Manual
GB 00986 - Edition 06 - February 05
MANUAL REFERENCE: 109229
EDITION:07 -January 2006
Software version:
L115 v3.0 r.01 (ASM 182 TD+)
L116 v3.0 r.01 (ASM 192 T2D+)
L132 v3.0 r.01 (ASM 192 TD+)
C 500 - Inlet vent
C 510 - Bargraph zoom
C 520 - Audio alarm/Digital voice
C 530 - Cycle end
C 540 - Zero function
C 550 - Memo function
C 560 - Helium pollution prevention
C 570 - Date - Time - Language - Unit
C 580 - Fault / information indicator and display
Chapter D MAINTENANCE - TROUBLESHOOTING
D 100 - Table of preventive maintenance intervals
D 200 - Maintenance message
D 300 - General troubleshooting guide
D 400 - Symptoms description
Chapter E MAINTENANCE SHEETS
E 100 - Maintenance operations introduction
E 110 - ASM 182 TD+ - Access to internal components
E 111 - ASM 192 TD+/T2D+ - Access to internal components
E 120 - Sending the leak detection for reparation to a service center
E 400 - Basic maintenance of the analyzer cell
E 530 - Valves installation and maintenance
E 560 - Replacement of the internal calibrated leak
E 600 - Remote control
E 610 - Long distance sniffer probe and Helium spray gun
E 700 - ASM 182 TD+ - Maintenance of the ACP 28 pump
E 701 - ASM 192 TD+/T2D+ - Maintenance of the ACP 28 pump
E 730 - Restarting of the molecular and turbomolecular pumps
E 740 - Greasing molecular and turbomolecular pumps
Chapitre F COMPONENTS
F 000 - Spare parts instructions of use
F 001 - AVTF Customer Service offer
F 100 - Tools
F 200 - ASM 182 TD+ - Monitoring and display
F 200 - ASM 192 TD+ / T2D+ - Monitoring and display
F 300 - ASM 182 TD+ - Power and electrical supply
F 300 - ASM 192 TD+ - Power and electrical supply
F 300 - ASM 192 T2D+ - Power and electrical supply
F 400 - ASM 182 TD+ - Automatic control system and electronic circuits
F 400 - ASM 192 TD+ - Automatic control system and electronic circuits
F 400 - ASM 192 T2D+ - Automatic control system and electronic circuits
F 500 - ASM 182 TD+ - Measurement
F 500 - ASM 192 TD+ - Measurement
F 500 - ASM 192 T2D+ - Measurement
F 600 - ASM 182 TD+ - Pumpings
F 600 - ASM 192 TD+ - Pumpings
F 600 - ASM 192 T2D+ - Pumpings
F 700 - ASM 182 / 192 TD+ - Valves
F 700 - ASM 192 T2D+ - Valves
F 800 - ASM 182 TD+ - Pipes - Connections - Seals
F 800 - ASM 192 TD+ - Pipes - Connections - Seals
F 800 - ASM 192 T2D+ - Pipes - Connections - Seals
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

GB 00986 - Edition 06 - February 05
3/3
General contents
ASM 182 TD+ - ASM 192 TD+ -
ASM 192 T2D+ User’s Manual
MANUAL REFERENCE: 109229
EDITION:07 -January 2006
Software version:
L115 v3.0 r.01 (ASM 182 TD+)
L116 v3.0 r.01 (ASM 192 T2D+)
L132 v3.0 r.01 (ASM 192 TD+)
F 900 - ASM 182 TD+ - Cover
F 900 - ASM 192 TD+ - Cover
F 900 - ASM 192 T2D+ - Cover
F 1000 - Options - Accessories
F 1100 - Pictures of components
Chapter G APPENDIX
G 100 - Declaration of conformity
G 200 - ASM 182 TD+ - Wiring diagrams
G 201 - ASM 192 TD+ - Wiring diagrams
G 202 - ASM 192 T2D+ - Wiring diagrams
G 300 - 0 - 8 Volts Analog output
G 400 - Long distance sniffer probe user manual
G 500 - Helium spray gun user manual
G 600 - Safety questionnaire
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

GB 00978 - Edition 04 - February 05
1/2
Introduction
ASM 182 TD+ - ASM 192 TD+ - ASM 192 T2D+
User’s Manual
Detailed contents
A
A 100 Introduction to the ASM 182 / 192 series
A 200 ASM 182 TD+ / 192 TD+ - Detector operating principle
- Vacuum circuit
- Pumping capacities
- Test capacities
- Operation in vacuum test mode: 3 stages
- Operation in sniffing mode (LDS)
- Operation in internal calibration mode
A 201 ASM 192 T2D+ - Detector operating principle
- Vacuum circuit
- Pumping capacities
- Test capacities
- Operation in vacuum test mode: 3 stages
- Operation in sniffing mode (LDS)
- Operation in internal calibration mode
A 300 Analyzer cell operating principle
- Description
- Design and manufacture
A 400 Testing methods
- Overview
- Helium concentration and signal displayed
- Spray method (inboard testing)
- Sniffer method (outboard testing)
- Bombing method
A 401 About Helium and hydrogen
- Helium
- Helium and leak detection: which purity?
- Hydrogen
- Helium, Hydrogen and sensitivity
- And now some wrong ideas
A 500 Operator interface : control panel
Preliminary
remarks
Throughout this User’s Manual, you could find this type of message
“Summary of screen C 140”: it refers to a specific chapter of the
User’s Manual. Please read it for further information.
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

2/2
Introduction
ASM 182 TD+ - ASM 192 TD+ - ASM 192 T2D+
User’s Manual
Detailed contents
GB 00978 - Edition 04 - February 05
A
A 501 Operator interface : control panel
A 600 Options
- Which options for which model?
- Metal seals
- Inlet port
- Units
- Languages
- 3 masses
- Automatic test chambers
- Roughing system
- Interface board
- Remote control cable length
- Test of gas line
- Stainless steel cover (UCT)
- Control panel with graphic interface
A 700 Accessories
- Which accessories for which model?
- Remote control
- Long Distance Sniffer probe
- 10 m/30 feet LDS extension
- Headphone connector
- Transport cart
- Foot pedal for cycle command (1.5 m/5 feet)
- Calibrated Helium leaks
- Calibration accessory
- Spray probe
- Inlet adaptator
- Printer
- Inlet filters
- Short distance sniffer probe (to be connected to the inlet part of a leak detector)
- Bombing chamber
- Test chambers (required interface board)
- Neutral gas vent line kit
- 4 swiveling wheels kit (Ø125 mm)
- Covered sniffer probe and remote control kit
- Bottle handle for cart
A 800 ASM 182/192 TD+ - Technical characteristics
A 801 ASM 192 T2D+ - Technical characteristics
A 900 ASM 182 TD+ - Dimensions
A 901 ASM 192 series - Dimensions
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

GB 00976 - Edition 04 - September 04
1/2
A 100
Introduction to the ASM 182/192 series
Compact model
Console model
Example: ASM 182 T
Example: ASM 192 T2D+
The ASM 182/192 series are the latest evolutions of ALCATEL
leak detectors of which thousands are in successful daily operation
throughout the world in various applications like automotive industry,
chemical and mechanical, electrical, electronics or packaging
industries, quality controls and maintenance of semiconductor process
systems, vacuum components quality control, blister tests in the
pharmaceutical industry,… These leak detectors offer unique features
such as high sensitivity (5.10-12 mbar.l/s) and fast response time in
spraying mode.
The ASM 182/192 series are extremely flexible and easy to
operate. They provide automatic operation throughout the range
from atmospheric sniffer tests, test of long gas line or tubing, large
gross leak mode and ultra sensitive vacuum fine leak mode, readily
available basic functions, combined digital and analogic display,
advanced functions for convenience.
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

2/2
A 100
Introduction to the ASM 182/192 series
GB 00976 - Edition 04 - September 04
Compact model Compact version for leak testing applications where space is limited.
Compactness has always been synonymous with limited performance
and poor lay out: Alcatel has challenge this belief.
Transportability: the ASM 182 T/TD+ products are self-contained units
which can be installed on a cart for easier manœuverability.
Using its rotaty vane pump 2021SD, Alcatel designed an unmatched
concept delivering high performance in a well laid out system.
Its well-proven concept for the roughing/backing oil-free pump
(frictionless compact multi-stage roots) has been designed to achieve
high roughing capacity (25 m3/h - 15 cfm) with minimum dimensions.
Comfortable workstation and several roughing configurations for
extended and adapted capability.
Console version ASM 182 T with extended pumping speed capability
(T2) or leak testing large chamber.
Console version ASM 182 TD+.
Console version ASM 192 T2D+ with a extended pumping speed
capability for leak testing large chambers.
ASM 182 T
ASM 182 TD+
THE VERSIONS ACCORDING THE DETECTOR TYPES
PUMPING COMPACT VERSION CONSOLE VERSION
1 Rotary vane pump RVP 2021
1 Hybrid pump TMP 5154 ASM 182 T ASM 192 T
2 Rotary vane pumps RVP 2021
1 Hybrid pump TMP 5154
ASM 192 T
with 40 m3/h
roughing option
1 Rotary vane pump RVP 2021
1 Turbomolecular pump ATP 100
1 Hybrid pump TMP 5154 ASM 192 T2
2 Rotary vane pumps RVP 2021
1 Turbomolecular pump ATP 100
1 Hybrid pump TMP 5154
ASM 192 T2
with 40 m3/h
roughing option
1 Dry pump Type ACP 28
1 Molecular drag pump MDP 5011
1 Hybrid pump TMP 5154 ASM 182 TD+ ASM 192 TD+
1 Dry pump Type ACP 28
1 Molecular drag pump MDP 5006 HDS
1 Turbomolecular pump ATP 100
1 Hybrid pump TMP 5154
ASM 192 T2D+
Console model
ASM 192 T/T2
ASM 192 TD+
ASM 192 T2D+
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

GB 00977 - Edition 04 - September 04
1/4
A 200
ASM 182 TD+ / 192 TD+
detector operating principle
Pumping capacities 25 m3/h (15 cfm) roughing (dry primary pump ACP 28)
+ 10 l/s (molecular drag pump MDP 5011).
Helium pumping speed at inlet port: 4.4 l/s.
Test capacities Short test cycle.
Quick response time.
Auto-calibration with integrated calibrated leak.
ASM 182 TD+ with gas line option C 420
1Preamplifier
2Analyzer cell
3Detector inlet port
4Internal calibrated leak
5
Inlet pressure gauge (PI3C)
6Outlet pressure gauge (PI1)
7Vent connector
8Long distance sniffer connector
9Nitrogen purge connector
15 Roughing primary pump
(ACP 28)
16 Roughing molecular pump
(MDP 5011)
18 Detection turbomolecular pump
(TMP 5154)
VA1 Inlet vent valve
VR1 Roughing valve
VBBy-pass valve
VT1 Exhaust valve
VT4 Detection valve
VSSniffing valve
VC2 Calibration valve - Detection
VC1 Calibration valve - Roughing
VC3 Calibration valve - Inlet vent
Vacuum circuit
12
1
2
18
VS
8
6
4VC2
VC3
VC1
VT1
VB
9
15
16
5
VR1
VA1 7
3
VT4
VAT valve
Bacosol valve
Minisol valves
Reference correspondence between valve/vacuum block marks E 530
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

2/4
A 200
ASM 182 TD+ / 192 TD+
detector operating principle
GB 00977 - Edition 04 - September 04
GB 00977 - Edition 04 - September 04
3/4
A 200
ASM 182 TD+ / 192 TD+
detector operating principle
2.10-2 mbar < Inlet Pressure < 1 mbar
Gross leak test mode
1 mbar < Inlet Pressure < 6 mbar
Operation in
vacuum test mode:
3 stages
1
Primary roughing
Note: Only operational parts are represented.
2
3
V
R1
15
VB
5
12
16
3
VR1
VT1
9
VB
18
1
15
16
5
2
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

2/4
A 200
ASM 182 TD+ / 192 TD+
detector operating principle
GB 00977 - Edition 04 - September 04
GB 00977 - Edition 04 - September 04
3/4
A 200
ASM 182 TD+ / 192 TD+
detector operating principle
Operation in
sniffing mode (LDS)
Operation in
vacuum test mode:
3 stages
(continued)
High sensitivity test mode (HS)
3
VS
8
VT1
18
15
16
1
2
9
3
V
T4
VT1
18
15
16
1
2
9
Sniffer probe
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

4/4
A 200
ASM 182 TD+ / 192 TD+
detector operating principle
GB 00977 - Edition 04 - September 04
4VC3
Operation
in internal
calibration mode 1Roughing of calibrated
leak 2Calibration
3 Venting of calibrated leak
The leak is returned to atmospheric pressure.
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

GB 01358 - Edition 03 - September 04
1/5
A 201
ASM 192 T2D+
detector operating principle
Pumping capacities 27 m3/h (16 cfm) roughing (dry primary pump ACP 28) or
54 m3/h (32 cfm) + 100 l/s (turbomolecular pump ATP 100).
Helium pumping speed at inlet port: 20 l/s.
Test capacities Short test cycle on big volumes.
Quick response time on big volumes.
Auto-calibration with integrated calibrated leak.
1Preamplifier
2Analyzer cell
3Detector inlet port
4Internal calibrated leak
5
Inlet pressure gauge (PI3C)
6Outlet pressure gauge (PI1)
7Vent connector
8Long distance sniffer
connector
9Nitrogen purge connector
15 Roughing primary pump
(ACP 28)
15’ Second roughing dry primary
pump (ACP 28)
16 Roughing molecular pump
(ATP 100)
17 Roughing molecular pump
(MDP 5006HDS)
18 Detection turbomolecular
pump
(TMP 5154)
VA1 Inlet vent valve
VR1 Roughing valve
VBBy-pass valve
VT1 Exhaust valve
VT4 Detection valve
VSSniffing valve
VC2 Calibration valve - Detection
VC1 Calibration valve - Roughing
VC3 Calibration valve - Inlet vent
Vacuum circuit
VAT valve
Bacosol valve
Minisol valves
Reference correspondence between valve/vacuum block marks E 530
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

2/5
A 201
ASM 192 T2D+
detector operating principle
GB 01358 - Edition 03 - September 04
GB 01358 - Edition 03 - September 04
3/5
A 201
ASM 192 T2D+
detector operating principle
3
Gross leak test mode
3 mbar < Inlet Pressure < 30 mbar
Note : Only operational parts are represented.
1
Stand by
V
S
V
T1
18
15
2
17
1
Primary roughing
2
3
15
VT1
Operation in vacuum
test mode
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+

2/5
A 201
ASM 192 T2D+
detector operating principle
GB 01358 - Edition 03 - September 04
GB 01358 - Edition 03 - September 04
3/5
A 201
ASM 192 T2D+
detector operating principle
4Normal test mode
5
High Sensitivity test mode
inlet pressure < 2.10-2 mbar
5.10-1 mbar < Inlet Pressure
< 3 mbar
2.10-2 mbar < Inlet Pressure
< 5.10-1 mbar
Operation in vacuum
test mode
(ctd)
Alcatel Vacuum Technology France - User's Manual ASM 182/192 TD+ - ASM 192 T2D+
This manual suits for next models
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