Aerotech ALS130H User manual

Revision: 1.00.00
ALS130H Hardware Manual

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website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If
necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
To get help immediately, contact a service office or your sales representative. Include your customer order number in your
email or have it available before you call.
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Email: [e-mail]
Phone: [phone]
Fax: [phone]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2020, Aerotech, Inc., All rights reserved.

ALS130H Hardware Manual Table of Contents
Table of Contents
ALS130H Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
EU Declaration of Incorporation 7
Chapter 1: Overview 9
1.1. Environmental Specifications 10
1.2. Accuracy and Temperature Effects 10
1.3. Basic Specifications 11
1.4. Vacuum Operation 12
Chapter 2: Installation 13
2.1. Unpacking and Handling the Stage 13
2.2. Dimensions 15
2.3. Securing the Stage to the Mounting Surface 16
2.4. Attaching the Payload to the Stage 17
Chapter 3: Electrical Installation 19
3.1. Motor and Feedback Connectors 20
3.2. Motor and Feedback Wiring 22
3.3. Motor and Feedback Specifications 23
3.4. Limits, Marker, and Machine Direction 25
3.5. Motor and Feedback Phasing 26
Chapter 4: Maintenance 29
4.1. Service and Inspection Schedule 29
4.2. Cleaning and Lubrication 30
4.3. Troubleshooting 31
Appendix A: Warranty and Field Service 33
Appendix B: Revision History 35
Index 37
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Table of Contents ALS130H Hardware Manual
List of Figures
Figure 2-1: ALS130H Shipping Bracket Location 14
Figure 2-2: ALS130H Dimensions 15
Figure 3-1: Motor and Feedback Wiring 22
Figure 3-2: Machine Direction 25
Figure 3-3: Hall Phasing 26
Figure 3-4: Analog Encoder Phasing Reference Diagram 27
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 27
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ALS130H Hardware Manual Table of Contents
List of Tables
Table 1-1: ALS130H Model Numbering System 9
Table 1-2: Environmental Specifications 10
Table 1-3: ALS130H Series Specifications 11
Table 2-1: Stage to Mounting Surface Hardware 16
Table 3-1: Motor and Feedback Pinouts 21
Table 3-2: Mating Connector Pinouts 21
Table 3-3: Feedback Specifications 23
Table 3-4: ALS130H Motor Specifications 24
Table 4-1: Troubleshooting 31
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Table of Contents ALS130H Hardware Manual
Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the ALS130H. Read all parts of this
manual before you install or operate the ALS130H or before you do maintenance to your system. To prevent
injury to you and damage to the equipment, obey the precautions in this manual. The precautions that follow
apply when you see a Danger or Warning symbol in this manual. If you do not obey these precautions, injury
to you or damage to the equipment can occur. If you do not understand the information in this manual,
contact Aerotech Global Technical Support.
This product has been designed for light industrial manufacturing or laboratory environments. The protection
provided by the equipment could be impaired if the product is used in a manner not specified by the
manufacturer.
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the ALS130H and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The ALS130H stage must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the ALS130H stage. Lifting or transporting the ALS130H stage
improperly can result in injury or damage to the ALS130H.
6. This product is intended for light industrial manufacturing or laboratory use. Use of this
product for unintended applications can result in injury and damage to the equipment.
7. If the product is used in a manner not specified by the manufacturer, the protection
provided by the product can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
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ALS130H Hardware Manual Table of Contents
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ALS130H Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 RoHS3 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 2/12/2020
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Table of Contents ALS130H Hardware Manual
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ALS130H Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: ALS130H Model Numbering System
ALS130H Mechanical-Bearing Direct-Drive Linear Stage
Travel (Required)
-025 25 mm travel stage with high-accuracy1 Vpp encoder and single 25-pin connector
-050 50 mm travel stage with high-accuracy1 Vpp encoder and single 25-pin connector
-100 100 mm travel stage with high-accuracy1 Vpp encoder and single 25-pin
connector
-150 150 mm travel stage with high-accuracy1 Vpp encoder and single 25-pin
connector
NOTE: The 25-pin connector is not valid for systems using bus voltages greater than 80 V.
Cable Management (Optional)
-CMS1 External CMSfor lower-axis of XY assembly, right-side
-CMS2 External CMSfor lower-axis of XY assembly, left-side
NOTE: CMSoption is not avaialble with 25 mm travel stages. Order CMS with lower axis stage only.
Metrology (Required)
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots
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Overview ALS130H Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C, degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your spe-
cific application.
Protection
Rating
The ALS130H stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
The accuracy specification of ALS130H series stages is measured 25 mm above the table with the stage in
an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
Extreme temperature changes could cause a decrease in performance or permanent damage to the stage.
Aerotech stages are designed for and built in a 20°C (68°F) environment. Any deviation from standard
operating temperature will affect stage accuracy. The severity of temperature effects on all stage
specifications depends on many different environmental conditions, including how the stage is mounted.
Contact the factory for more details.
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ALS130H Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: ALS130H Series Specifications
Model ALS130H-025 ALS130H-050 ALS130H-100 ALS130H-150
Travel 25 mm 50 mm 100 mm 150 mm
Drive System Linear Brushless Servomotor (BLMUC-95-A)
Bus Voltage Up to 80 VDC
Continuous
Current
Apk 2.94
Arms 2.08
Feedback Noncontact Linear Encoder
Resolution (Minimum Incremental
Motion) 0.5 nm - 1.0 µm
Maximum Travel Speed(1) 300 mm/s
Maximum Linear Acceleration 1 g (No Load)
Maximum
Load(2)
Horizontal 12.0 kg
Side 10.0 kg
Accuracy Calibrated(3) ±0.3 µm
Uncalibrated ±1.0 µm ±1.0 µm ±2.0 µm ±3.0 µm
Repeatability Mean 75 nm
Peak to Peak ±100 nm
Straightness
and Flatness
Maximum
Deviation ±1.0 µm ±1.0 µm ±1.5 µm ±2.0 µm
Pitch 5 arc sec 6 arc sec 8 arc sec 10 arc sec
Roll 5 arc sec 6 arc sec 8 arc sec 10 arc sec
Yaw 3 arc sec 3 arc sec 4 arc sec 5 arc sec
Nominal Stage Weight 3.0 kg 3.0 kg 3.8 kg 4.6 kg
Moving Mass 0.9 kg 1.1 kg 1.3 kg 1.6 kg
Construction Aluminum Body/Black Anodize Finish
1. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system
resolution.
2. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
3. Available with Aerotech controllers.
NOTE:Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is
payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
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Overview ALS130H Hardware Manual
1.4. Vacuum Operation
Contact the factory for information regarding operation in a vacuum environment.
Aerotech can specially prepare the ALS130H for operation in vacuum environments. Aerotech offers two
vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10-3 Torr) and one for
high vacuum (preparation for environments from 10-3 to 10-6 Torr). As part of this preparation, attention to
detail during modification, cleaning, and assembly results in products with optimal performance in vacuum
applications.
Vacuum Guidelines
To make sure that the ALS130H will continue to perform well in the vacuum environment, use the guidelines
that follow (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
lDo not remove the ALS130H from its sealed bag until it is ready to use.
lAlways handle the ALS130H in a clean environment and use powder-free polyethylene gloves to prevent
any contaminants from adhering to the surface of the ALS130H.
lDuring installation, use cleaned, vented, stainless steel fasteners when securing the ALS130H.
lReduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of this,
consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation in
normal atmospheric environment. Reduce motor usage accordingly.
lFor vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
lBaking vacuum components significantly reduces outgassing at initial pump-down to vacuum pressure
and evaporates water vapor that impregnates porous surfaces on the aluminum and Teflon cables.
Aerotech recommends that customers bake out vacuum systems when first installing them in the
vacuum chamber. Contact Aerotech for bakeout temperatures and times for your application.
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ALS130H Hardware Manual Mechanical Specifications and Installation
Chapter 2: Installation
W A R N I N G : ALS130H installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
Carefully remove the ALS130Hfrom its protective shipping container. Gently set the ALS130H on a smooth,
flat, and clean surface.
Before operating the ALS130H, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-free air to
remove any dust or debris that has collected during shipping.
Each ALS130H has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
W A R N I N G : Make sure that all moving parts are secure before moving the ALS130H.
Unsecured moving parts may shift and cause bodily injury.
W A R N I N G : Lift the ALS130H only by the base. Improper handling could adversely affect the
ALS130H ’s performance.
W A R N I N G : Do not attempt to move the carriage (or table top) of the ALS130H until the
shipping brackets have been removed. Moving the carriage with the shipping brackets installed
can cause permanent damage to the ALS130H.
Red, anodized aluminum shipping brackets have been installed to prevent unwanted motion and potential
damage from occurring during shipment (see Figure 2-1). The brackets must be removed before the
ALS130H can be operated. Retain the brackets and hardware for future use.
N O T E : After removing the lifting features or shipping brackets, retain them for future use. In the event
that the product requires service at the factory, the lifting features or shipping brackets should be reat-
tached to ensure that the ALS130H ships safely.
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Mechanical Specifications and Installation ALS130H Hardware Manual
Figure 2-1: ALS130H Shipping Bracket Location
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ALS130H Hardware Manual Mechanical Specifications and Installation
2.2. Dimensions
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Figure 2-2: ALS130H Dimensions
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Mechanical Specifications and Installation ALS130H Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The ALS130H must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
W A R N I N G : Make sure that all moving parts are secure before moving the ALS130H.
Unsecured moving parts may shift and cause bodily injury.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the ALS130H stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm over the entire stage
footprint.
Get access to the mounting holes (see Section 2.2.) in the base of the stage by sliding the carriage all the
way to one end of travel.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in Table 2-1 are typical values and may not be accurate for your
mounting surface. Refer to Section 2.2. for specific model mounting locations and dimensions.
Table 2-1: Stage to Mounting Surface Hardware
Mounting Hardware Typical Screw
Torque
M6 x 18 mm (1/4 x 3/4 in) SHCS 5.4 N·m
W A R N I N G : Do not attempt to manually move the ALS130H if it is connected to a power
source.
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ALS130H Hardware Manual Mechanical Specifications and Installation
2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint free cloth and isopropyl alcohol and allow the cleaning solvent to completely dry.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to Electrical Specifications and Installation and the documentation
delivered with the stage.
N O T E : If your ALS130H was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the ALS130H is started up
without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : For valid system performance, the mounting interface should be flat within .
W A R N I N G : Refer to the dimensions in Section 2.2. for maximum allowable thread
engagement. A screw extending through the stage table can affect travel and damage the
stage.
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure). If cantilevered loads are
applied, contact Aerotech customer support for allowable load conditions.
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Mechanical Specifications and Installation ALS130H Hardware Manual
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ALS130H Hardware Manual Electrical Specifications and Installation
Chapter 3: Electrical Installation
W A R N I N G : Electrical installation must be performed by properly qualified personnel.
Electrical installation requirements will vary depending on product options. Installation instructions in this
section are for ALS130H stages equipped with standard Aerotech motors intended for use with an Aerotech
motion control system. Contact Aerotech for further information regarding products that are otherwise
configured.
Aerotech motion control systems are adjusted at the factory for optimum performance. When the ALS130H
is part of a complete Aerotech motion control system, setup usually involves connecting the ALS130H to the
appropriate drive chassis with the cables provided. Labels on the system components usually indicate the
appropriate connections.
If system level integration was purchased, an electrical drawing showing system interconnects has been
supplied with the system (separate from this documentation).
The electrical wiring from the motor and encoder are integrated at the factory. Refer to the sections that
follow for standard motor wiring and connector pinouts.
W A R N I N G : Applications requiring access to the stage while it is energized will require
additional grounding and safeguards. The System Integrator or qualified installer is responsible
for determining and meeting all safety and compliance requirements necessary for the
integration of this stage into the final application.
D A N G E R : Remove power before connecting or disconnecting electrical components or
cables. Failure to do so may cause electric shock or damage to the equipment.
W A R N I N G : Operator access to the base and tabletop must be restricted while connected to
a power source. Failure to do so can expose the operator to electric shock and mechanical
hazards.
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Electrical Specifications and Installation ALS130H Hardware Manual
3.1. Motor and Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and
assembled.
N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech
representative if there are any questions on system configuration.
N O T E : If using standard Aerotech motors and cables, motor and encoder connection adjustments are
not required.
The protective ground connection of the ALS130H provides motor frame ground protection only. Additional
grounding and safety precautions are required for applications requiring access to the stage while it is
energized. The System Integrator or qualified installer is responsible for determining and meeting all safety
and compliance requirements necessary for the integration of this stage into the final application.
D A N G E R : Remove power before connecting or disconnecting electrical components or
cables. Failure to do so may cause electric shock or damage to the equipment.
W A R N I N G : The protective ground connection must be properly installed to minimize the
possibility of electric shock.
W A R N I N G : Operator access to the base and tabletop must be restricted while connected to
a power source. Failure to do so may cause electric shock.
C A U TI O N : The stage controller must provide over-current and over-speed protection. Failure
to do so may result in permanent damage to the motor and stage components.
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