Aerotech ANT95LZS Series User manual

Revision 2.01
ANT95LZS Series Single-Axis Z Low-Profile
Direct-Drive Nanopositioning Stage
HARDWAREMANUAL

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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2020-2022, Aerotech, Inc., All rights reserved.

Table of Contents
ANT95LZS Series Single-Axis Z Low-Profile Direct-Drive Nanopositioning
Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 7
Safety Procedures and Warnings 8
Installation and Operation 9
Electrical Warnings 10
Motor-Related Warnings 11
Pinch Points 12
Magnetic Hazards 13
Handling and Storage 14
Chapter 1: Overview 17
1.1. Environmental Specifications 18
1.2. Accuracy and Temperature Effects 18
1.3. Basic Specifications 19
1.4. Air Requirements 20
Chapter 2: Installation 21
2.1. Dimensions 21
2.2. Securing the Stage to the Mounting Surface 22
2.2.1. Setting up the Pneumatic Counterbalance 24
2.3. Attaching the Payload to the Stage 26
Chapter 3: Electrical Installation 29
3.1. Motor and Feedback Connectors 30
3.2. Motor and Feedback Wiring 32
3.3. Motor and Feedback Specifications 33
3.4. Limits, Marker, and Machine Direction 35
3.5. Motor and Feedback Phasing 36
Chapter 4: Maintenance 39
4.1. Service and Inspection Schedule 39
4.2. Cleaning and Lubrication 40
4.3. Troubleshooting 42
Appendix A: Warranty and Field Service 43
Appendix B: Revision History 45
Index 47
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List of Figures
Figure 1-1: Counterbalance Air Flow vs. Counterbalance Pressure 20
Figure 1-2: Air Inlet Location 20
Figure 2-1: ANT95LZS Dimensions 21
Figure 2-2: Mounting Hole Pattern 23
Figure 2-3: Counterbalance Pressure vs. External Payload 24
Figure 2-4: Load Orientations 27
Figure 2-5: Cantilevered Load Capabilities 28
Figure 3-1: ANT95LZSMotor and Feedback Wiring 32
Figure 3-2: Machine Direction 35
Figure 3-3: Hall Phasing Diagram 36
Figure 3-4: Encoder Phasing Reference Diagram (Standard/Square Wave) 37
Figure 3-5: Encoder Phasing Reference Diagram (Analog/Sine Wave) 37
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List of Tables
Table 1-1: Model Numbers and Ordering Options 17
Table 1-2: Environmental Specifications 18
Table 1-3: ANT95LZS Series Specifications 19
Table 2-1: Stage Mounting Surface Flatness Requirement 22
Table 2-2: Stage to Mounting Surface Hardware 23
Table 2-3: Payload to Stage Surface Hardware 26
Table 3-1: 25-Pin Motor and Feedback Connector Pinout 31
Table 3-2: 25-Pin Mating Connector Part Numbers 31
Table 3-3: Hall-Effect Sensor Specifications 33
Table 3-4: Thermistor Specifications 33
Table 3-5: Encoder Specifications 33
Table 3-6: Limit Switch Specifications 33
Table 3-7: ANT95LZS Motor Specifications 34
Table 3-8: Encoder Resolution 34
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EU Declaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ANT95LZS Linear Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 3/24/2022
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
Shock/Electrocution Hazard Warning
General or Conditional Awareness Warning
Hot Surface Hazard Warning
Magnetic Field HazardWarning
Mechanical Shearing, Pinching, or Crushing Hazard Warning
Heavy, Bulky Lifting Hazard / Appropriate Equipment Required Warning
Trip Hazard Warning
A blue circle symbol is an action or tip that you should obey. Some examples
include:
lGeneral tip
lRead the manual/section
lWear protective safety equipment (eye protection, ear protection, gloves)
lIf applicable, do not lift unassisted
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Installation and Operation
To decrease the risk of damage to the equipment, you must obey the precautions that follow.
DANGER: General Hazard Warning!
This product can produce high forces and move at velocities that could cause injury.
The user is responsible for its safe operation. The following general equation is
provided to assist with risk assessments in regards to contact and pinch points:
WARNING: General Hazard Warning!
lOnly trained operators should operate this equipment.
lAll service and maintenance must be done by approved personnel.
lUse this product only in environments and operating conditions that are approved in
this manual.
lNever install or operate equipment that appears to be damaged.
lMake sure that the product is securely mounted before you operate it.
lUse care when you move the ANT95LZS or you could negatively affect the per-
formance of it.
WARNING:Trip Hazard!
Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could
introduce trip hazards around the system that could result in physical injury or could
damage the equipment.
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Electrical Warnings
To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the
precautions that follow.
DANGER: Electrical Shock Hazard!
lStage motor phase voltage levels could be hazardous live.
lPersonnel are protected from hazardous voltages unless electrical interconnections,
protective bonding (safety ground), or motor/stage enclosures are compromised.
lDo not connect or disconnect stage/motor interconnections while connected to a live
electrical power source.
lBefore you set up or do maintenance, disconnect electrical power.
lIt is the responsibility of the End User/System Integrator to make sure that stages are
properly connected and grounded per Engineering Standards and applicable safety
requirements.
lIt is the responsibility of the End User/System Integrator to configure the system
drive or controller within the Aerotech motor/stage electrical and mechanical
specifications.
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