Aerotech ANT95LZS Series User manual

Revision 2.01
ANT95LZS Series Single-Axis Z Low-Profile
Direct-Drive Nanopositioning Stage
HARDWAREMANUAL

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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2020-2022, Aerotech, Inc., All rights reserved.

Table of Contents
ANT95LZS Series Single-Axis Z Low-Profile Direct-Drive Nanopositioning
Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 7
Safety Procedures and Warnings 8
Installation and Operation 9
Electrical Warnings 10
Motor-Related Warnings 11
Pinch Points 12
Magnetic Hazards 13
Handling and Storage 14
Chapter 1: Overview 17
1.1. Environmental Specifications 18
1.2. Accuracy and Temperature Effects 18
1.3. Basic Specifications 19
1.4. Air Requirements 20
Chapter 2: Installation 21
2.1. Dimensions 21
2.2. Securing the Stage to the Mounting Surface 22
2.2.1. Setting up the Pneumatic Counterbalance 24
2.3. Attaching the Payload to the Stage 26
Chapter 3: Electrical Installation 29
3.1. Motor and Feedback Connectors 30
3.2. Motor and Feedback Wiring 32
3.3. Motor and Feedback Specifications 33
3.4. Limits, Marker, and Machine Direction 35
3.5. Motor and Feedback Phasing 36
Chapter 4: Maintenance 39
4.1. Service and Inspection Schedule 39
4.2. Cleaning and Lubrication 40
4.3. Troubleshooting 42
Appendix A: Warranty and Field Service 43
Appendix B: Revision History 45
Index 47
ANT95LZS Hardware Manual Table of Contents
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List of Figures
Figure 1-1: Counterbalance Air Flow vs. Counterbalance Pressure 20
Figure 1-2: Air Inlet Location 20
Figure 2-1: ANT95LZS Dimensions 21
Figure 2-2: Mounting Hole Pattern 23
Figure 2-3: Counterbalance Pressure vs. External Payload 24
Figure 2-4: Load Orientations 27
Figure 2-5: Cantilevered Load Capabilities 28
Figure 3-1: ANT95LZSMotor and Feedback Wiring 32
Figure 3-2: Machine Direction 35
Figure 3-3: Hall Phasing Diagram 36
Figure 3-4: Encoder Phasing Reference Diagram (Standard/Square Wave) 37
Figure 3-5: Encoder Phasing Reference Diagram (Analog/Sine Wave) 37
List of Figures ANT95LZS Hardware Manual
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List of Tables
Table 1-1: Model Numbers and Ordering Options 17
Table 1-2: Environmental Specifications 18
Table 1-3: ANT95LZS Series Specifications 19
Table 2-1: Stage Mounting Surface Flatness Requirement 22
Table 2-2: Stage to Mounting Surface Hardware 23
Table 2-3: Payload to Stage Surface Hardware 26
Table 3-1: 25-Pin Motor and Feedback Connector Pinout 31
Table 3-2: 25-Pin Mating Connector Part Numbers 31
Table 3-3: Hall-Effect Sensor Specifications 33
Table 3-4: Thermistor Specifications 33
Table 3-5: Encoder Specifications 33
Table 3-6: Limit Switch Specifications 33
Table 3-7: ANT95LZS Motor Specifications 34
Table 3-8: Encoder Resolution 34
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EU Declaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ANT95LZS Linear Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 3/24/2022
ANT95LZS Hardware Manual EU Declaration of Incorporation
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
Shock/Electrocution Hazard Warning
General or Conditional Awareness Warning
Hot Surface Hazard Warning
Magnetic Field HazardWarning
Mechanical Shearing, Pinching, or Crushing Hazard Warning
Heavy, Bulky Lifting Hazard / Appropriate Equipment Required Warning
Trip Hazard Warning
A blue circle symbol is an action or tip that you should obey. Some examples
include:
lGeneral tip
lRead the manual/section
lWear protective safety equipment (eye protection, ear protection, gloves)
lIf applicable, do not lift unassisted
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Installation and Operation
To decrease the risk of damage to the equipment, you must obey the precautions that follow.
DANGER: General Hazard Warning!
This product can produce high forces and move at velocities that could cause injury.
The user is responsible for its safe operation. The following general equation is
provided to assist with risk assessments in regards to contact and pinch points:
WARNING: General Hazard Warning!
lOnly trained operators should operate this equipment.
lAll service and maintenance must be done by approved personnel.
lUse this product only in environments and operating conditions that are approved in
this manual.
lNever install or operate equipment that appears to be damaged.
lMake sure that the product is securely mounted before you operate it.
lUse care when you move the ANT95LZS or you could negatively affect the per-
formance of it.
WARNING:Trip Hazard!
Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could
introduce trip hazards around the system that could result in physical injury or could
damage the equipment.
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Electrical Warnings
To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the
precautions that follow.
DANGER: Electrical Shock Hazard!
lStage motor phase voltage levels could be hazardous live.
lPersonnel are protected from hazardous voltages unless electrical interconnections,
protective bonding (safety ground), or motor/stage enclosures are compromised.
lDo not connect or disconnect stage/motor interconnections while connected to a live
electrical power source.
lBefore you set up or do maintenance, disconnect electrical power.
lIt is the responsibility of the End User/System Integrator to make sure that stages are
properly connected and grounded per Engineering Standards and applicable safety
requirements.
lIt is the responsibility of the End User/System Integrator to configure the system
drive or controller within the Aerotech motor/stage electrical and mechanical
specifications.
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Motor-Related Warnings
Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all
applicable codes and standards when you use or operate a stage or system that incorporates
Aerotech motors.
DANGER: Hot Surface Hazard!
lThe stage/motor frame temperature could exceed 70°C in some applications.
lDo not touch the stage/motor frame while it is in operation.
lWait until the stage/motor has cooled before you touch it.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as air-born dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
DANGER: Mechanical Hazard!
Personnel must be made aware of the mechanical hazards during set up or when you
do service to the stage.
lWhen the system is not electrically energized (disabled), linear stage/motors can still
allow a stage carriage to move freely. This can create mechanical hazards such as
pinch or crush points.
lUnintentional manual movement into the stage "end-of-travel" stops, could damage
the stage or undo precision alignments.
DANGER: Magnetic Field Hazard!
Aerotech stage/motors contain magnets which can present a Magnetic Field Hazard.
lDo not disassemble a stage motor under any circumstances.
lStrong magnetic fields could interfere with external/internal medical devices.
lStrong magnetic fields could present mechanical hazards such as pinch points.
ANT95LZS Hardware Manual Motor-Related Warnings
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Pinch Points
A pinch point is a mechanical hazard that can occur when there are exposed parts of the stage or
system that can move. For example, the travel of a stage tabletop could expose the user to a pinch
point between the tabletop and the stage housing. The images that follow will show you typical
external and internal pinch point locations.
DANGER: Mechanical Hazard!
lSystem travel can cause crush, shear, or pinch injuries.
lOnly trained operators should operate this equipment.
lDo not put yourself in the travel path of machinery.
lRestrict access to all motor and stage parts
owhen the system moves under power (during normal operation, for example).
owhen the system is moved manually (during the installation process or when you
do maintenance, for example).
lMotors are capable of very high speeds and acceleration rates.
Figure 1: Typical Pinch Point Locations
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Magnetic Hazards
The magnet track will be exposed during normal operation or when you do maintenance to the
system.
DANGER: Magnetic Field Hazard!
lOnly qualified, trained personnel should be allowed to have access to exposed mag-
net tracks during setup or when you do maintenance.
lStrong magnetic fields are present near and inside the magnet track assembly.
lDo no disassemble the magnet track components. If you do so, you will expose your-
self to mechanical crush, pinch, or impact hazards.
lMagnetic fields could interfere with external or internal medical devices (pace-
makers, for example).
lMagnetic fields can create mechanical hazards (crush, impact, or pinch points, for
example).
lLoose items such as metallic tools, watches, or keys could get drawn into and dam-
age the magnet track assembly.
IMPORTANT: Use non-magnetic tools when you install or do service to the stage.
Figure 2: Exposed Magnet Locations
ANT95LZS Hardware Manual Magnetic Hazards
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Handling and Storage
IMPORTANT: It is the responsibility of the customer to safely and carefully lift and
move the stage.
lBe careful when you move or transport the stage.
lRetain the shipping materials for future use.
lTransport or store the stage in its protective packaging.
WARNING: Electrostatic Discharge (ESD) Sensitive Components!
Wear an ESDwrist strap when you handle, install, or do service to the system assembly.
You could damage the power supply or drives if you fail to observe the correct
ESDpractices.
Inspect the shipping container for any evidence of shipping damage. If any damage exists, notify the
shipping carrier immediately.
Remove the packing list from the shipping container. Make sure that all the items specified on the
packing list are contained within the package.
The documentation for the stage is on the included installation device. The documents include
manuals, interconnection drawings, and other documentation pertaining to the system. Save this
information for future reference.
Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Unpacking and Handling
It is the responsibility of the customer to safely and carefully lift and move the stage.
IMPORTANT: All electronic equipment and instrumentation is wrapped in antistatic
material and packaged with desiccant. Ensure that the antistatic material is not
damaged during unpacking.
DANGER: Heavy Object, Lifting Hazard!
lRefer to Section 2.1. Dimensions for dimensions and Section 1.3. Basic Spe-
cificationsfor weight specifications.
lUse care when you move the ANT95LZS or you could negatively affect the per-
formance of it.
lLift this product only by the base.
lFor multi-axis assemblies, always lift the system by the lower axis.
lDo not use the cables or the connectors to lift or move this product.
lMake sure that all moving parts are secure before you move the stage. Unsecured
moving parts could shift and cause injury or damage to the equipment.
Carefully remove the stagefrom its protective shipping container. Gently set the stage on a smooth,
flat, and clean surface. Use compressed nitrogen or clean, dry, oil-free air to remove any dust or
debris that has collected during shipping.
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will
ensure that all of the alignments, preloads, and tolerances are the same as they were when they
were tested at Aerotech.
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Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Red, anodized aluminum shipping brackets have been installed to prevent unwanted motion
damage that could occur during shipment. The brackets must be removed before the ANT95LZS can
be operated. Retain the brackets and hardware for future use.
DANGER: Mechanical Hazard!
lThe product can move manually without electrical power connected.
lWhen the shipping brackets are removed, the operator could be exposed to pinch
points.
Figure 3: Shipping Brackets
Storage
Store the stage in the original shipping container. If the original packaging included ESDprotective
packaging, make sure to store the stage in it. The storage location must be dry, free of dust, free of
vibrations, and flat.
Refer to Section 1.1. Environmental Specifications
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Chapter 1: Overview
Table 1-1: Model Numbers and Ordering Options
ANT95LZS Single-Axis Z Direct-Drive Nanopositioning Stage
Travel (Required)
-025 25 mm travel
-050 50 mm travel
-075 75 mm travel
-100 100 mm travel
Feedback (Required)
-E1 Incremental linear encoders, 1 Vpp amplified sine output
-E2 Incremental linear encoders, digital RS422 output, 5 nm electrical
resolution
-E4 Incremental linear encoders, 1 Vpp amplified sine output, high-
performance
Mounting Plate (Optional)
-MP Mounting plate
Performance Grade (Required)
-PL1 Base performance
-PL2 High-accuracy performance
Integration (Required)
-TAS Test as system: Testing, integration, and documentation of a group of
components as a complete system that will be used together.
-TAC Test as components:Testing and integration of individual items as discrete
components that ship together.
ANT95LZS Hardware Manual Chapter 1: Overview
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1.1. Environmental Specifications
WARNING:General Hazard Warning! Do not expose this product to environments or
conditions outside of the listed specifications. You could damage the equipment if you
exceed the environmental or operating specifications.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as air-born dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
The stage should be packaged with desiccant if it is to be stored for an extended
time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration Use the system in a low vibration environment. Excessive floor or acoustical
vibration can affect system performance. Contact Aerotech for information
regarding your specific application.
Protection
Rating
These stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature
changes could cause a decrease in performance or permanent damage to the stage. At a minimum,
the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage
specifications are repeatable over an extended period of time. The severity of temperature effects
on all specifications depends on many different environmental conditions, which include how the
stage is mounted. Contact the factory for more details.
The thermal expansion coefficient of the encoder scale is 3.25 ppm/°C. Travel will increase or
decrease at this rate as the temperature of the encoder scale temperature deviates from 20°C (68°F).
The accuracy specification of stage is measured 25 mm above the table with the stage in an
unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.2.
1.1. Environmental Specifications ANT95LZS Hardware Manual
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1.3. Basic Specifications
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT95LZS Series Specifications
ANT95LZS-025 ANT95LZS-050 ANT95LZS-075 ANT95LZS-100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy(1)
-PL1 ± 3.25 µm ± 3.25 µm ± 4.5 µm ± 5.5 µm
-PL2 (-E1, -E2) ± 275 nm ± 275 nm ± 300 nm ± 300 nm
-PL2 (-E4) ± 175 nm ± 175 nm ± 200 nm ± 200 nm
Bidirectional Repeatability(1) ± 75 nm
Resolution (Minimum
Incremental Motion)
-E1 2 nm
-E4 1 nm
Straightness(1) ± 1.75 µm ± 1.75 µm ± 2.5 µm ± 3.0 µm
Flatness(1) ± 1.75 µm ± 1.75 µm ± 2.5 µm ± 3.0 µm
Pitch 10 arc sec
Roll 10 arc sec
Yaw 5 arc sec
Maximum Speed 200 mm/s
Maximum Acceleration (No Load) 1 g
In-Position Stability(2) -E1 <2 nm
-E4 <1 nm
Load Capacity (Vertical)(3) 5 kg
Moving Mass 0.50 kg 0.72 kg 0.85 kg 1.08 kg
Stage Mass 1.17 kg 1.63 kg 1.90 kg 2.40 kg
Material Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Certified with each stage.
2. In-position stability is reported as 3-sigma value (requires a 1 Vpp encoder).
3. Payload specifications assume that the payload is centered on-axis.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
5. -PL2 performance requires the use of an Aerotech controller.
6. To ensure the achievement and repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information.
7. The air supply for the pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better.
Use nitrogen at 99.9% purity for best results. Supply pressure is determined by the amount of payload carried by the stage.
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1.4. Air Requirements
The air supply to the counterbalance should be clean and liquid water should not be present.
lIf nitrogen is used, it must be 99.99% pure and filtered to 0.25 microns. [Recommended]
lIf compressed air is used, it must be filtered to 0.25 microns, dry to 0º F dew point, and oil free.
The maximum allowable input pressure specification is 0.6 MPa (87 psi).
The low friction air cylinder consumes air as described in Figure 1-1.
Figure 1-1: Counterbalance Air Flow vs. Counterbalance Pressure
Figure 1-2: Air Inlet Location
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