Aerotech ANT130XY Series User manual

Revision 2.00
ANT130XY Series Two-Axis Direct-Drive
Nanopositioning Stage
HARDWAREMANUAL

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This manual contains proprietary information and may not be reproduced,
disclosed, or used in whole or in part without the express written permission of
Aerotech, Inc. Product names mentioned herein are used for identification purposes
only and may be trademarks of their respective companies.
Copyright © 2015-2022, Aerotech, Inc., All rights reserved.

Table of Contents
ANT130XY Series Two-Axis Direct-Drive Nanopositioning Stage 1
Table of Contents 3
List of Figures 4
List of Tables 5
EU Declaration of Incorporation 6
Safety Procedures and Warnings 7
Installation and Operation 8
Electrical Warnings 9
Motor-Related Warnings 10
Pinch Points 11
Magnetic Hazards 12
Handling and Storage 13
Chapter 1: Overview 17
1.1. Environmental Specifications 18
1.2. Accuracy and Temperature Effects 18
1.3. Basic Specifications 19
1.4. Vacuum Operation 20
Chapter 2: Installation 21
2.1. Dimensions 21
2.2. Securing the Stage to the Mounting Surface 24
2.3. Attaching the Payload to the Stage 26
Chapter 3: Electrical Installation 29
3.1. Motor and Feedback Connectors 30
3.2. Motor and Feedback Wiring 34
3.3. Motor and Feedback Specifications 36
3.4. Limits, Marker, and Machine Direction 38
3.5. Motor and Feedback Phasing 39
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Troubleshooting 44
Appendix A: Warranty and Field Service 45
Appendix B: Revision History 47
Index 49
ANT130XY Hardware Manual Table of Contents
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List of Figures
Figure 1-1: GEN2 vs GEN1 Visual Comparison 17
Figure 2-1: ANT130XY Dimensions 21
Figure 2-2: Mounting Plate (MP)Dimensions 22
Figure 2-3: Cable Management Post (CMS)Dimensions 23
Figure 2-4: Mounting Hole Pattern 25
Figure 2-5: Load Orientations 27
Figure 2-6: Cantilevered Load Capabilities 27
Figure 3-1: ANT130XYMotor and Feedback Wiring [-CN1 Option] 34
Figure 3-2: ANT130XYMotor and Feedback Wiring [-CN2 Option] 35
Figure 3-3: Machine Direction 38
Figure 3-4: Hall Phasing Diagram 39
Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) 40
Figure 3-6: Encoder Phasing Reference Diagram (Analog/Sine Wave) 40
List of Figures ANT130XY Hardware Manual
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List of Tables
Table 1-1: Model Numbers and Ordering Options 17
Table 1-2: Environmental Specifications 18
Table 1-3: ANT130XY-060 Series Specifications 19
Table 2-1: Stage Mounting Surface Flatness Requirement 24
Table 2-2: Stage to Mounting Surface Hardware 25
Table 2-3: Payload to Stage Surface Hardware 26
Table 3-1: 25-Pin Motor and Feedback Connector Pinout (-CN1) 31
Table 3-2: 25-Pin Mating Connector Part Numbers 31
Table 3-3: 4-Pin Motor Connector Pinout (-CN2 Option) 32
Table 3-4: 4-Pin Motor Mating Connector Part Numbers 32
Table 3-5: 25-Pin Feedback Connector Pinout (-CN2 Option) 33
Table 3-6: 25-Pin Feedback Mating Connector Part Numbers 33
Table 3-7: Hall-Effect Sensor Specifications 36
Table 3-8: Thermistor Specifications 36
Table 3-9: Encoder Specifications 36
Table 3-10: Limit Switch Specifications 36
Table 3-11: ANT130XY Motor Specifications 37
Table 3-12: Encoder Resolution 37
ANT130XY Hardware Manual List of Tables
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EU Declaration of Incorporation
Manufacturer Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
ANT130XY Linear Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 3/24/2022
EU Declaration of Incorporation ANT130XY Hardware Manual
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
stage.
lRead all parts of this manual before you install or operate the stage or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
Shock/Electrocution Hazard Warning
General or Conditional Awareness Warning
Hot Surface Hazard Warning
Magnetic Field HazardWarning
Mechanical Shearing, Pinching, or Crushing Hazard Warning
Heavy, Bulky Lifting Hazard / Appropriate Equipment Required Warning
Trip Hazard Warning
A blue circle symbol is an action or tip that you should obey. Some examples
include:
lGeneral tip
lRead the manual/section
lWear protective safety equipment (eye protection, ear protection, gloves)
lIf applicable, do not lift unassisted
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Installation and Operation
To decrease the risk of damage to the equipment, you must obey the precautions that follow.
DANGER: General Hazard Warning!
This product can produce high forces and move at velocities that could cause injury.
The user is responsible for its safe operation. The following general equation is
provided to assist with risk assessments in regards to contact and pinch points:
WARNING: General Hazard Warning!
lOnly trained operators should operate this equipment.
lAll service and maintenance must be done by approved personnel.
lUse this product only in environments and operating conditions that are approved in
this manual.
lNever install or operate equipment that appears to be damaged.
lMake sure that the product is securely mounted before you operate it.
lUse care when you move the ANT130XY or you could negatively affect the per-
formance of it.
WARNING:Trip Hazard!
Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could
introduce trip hazards around the system that could result in physical injury or could
damage the equipment.
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Electrical Warnings
To decrease the risk of electrical shock, injury, death, and damage to the equipment, obey the
precautions that follow.
DANGER: Electrical Shock Hazard!
lStage motor phase voltage levels could be hazardous live.
lPersonnel are protected from hazardous voltages unless electrical interconnections,
protective bonding (safety ground), or motor/stage enclosures are compromised.
lDo not connect or disconnect stage/motor interconnections while connected to a live
electrical power source.
lBefore you set up or do maintenance, disconnect electrical power.
lIt is the responsibility of the End User/System Integrator to make sure that stages are
properly connected and grounded per Engineering Standards and applicable safety
requirements.
lIt is the responsibility of the End User/System Integrator to configure the system
drive or controller within the Aerotech motor/stage electrical and mechanical
specifications.
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Motor-Related Warnings
Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all
applicable codes and standards when you use or operate a stage or system that incorporates
Aerotech motors.
DANGER: Hot Surface Hazard!
lThe stage/motor frame temperature could exceed 70°C in some applications.
lDo not touch the stage/motor frame while it is in operation.
lWait until the stage/motor has cooled before you touch it.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as air-born dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
DANGER: Mechanical Hazard!
Personnel must be made aware of the mechanical hazards during set up or when you
do service to the stage.
lWhen the system is not electrically energized (disabled), linear stage/motors can still
allow a stage carriage to move freely. This can create mechanical hazards such as
pinch or crush points.
lUnintentional manual movement into the stage "end-of-travel" stops, could damage
the stage or undo precision alignments.
DANGER: Magnetic Field Hazard!
Aerotech stage/motors contain magnets which can present a Magnetic Field Hazard.
lDo not disassemble a stage motor under any circumstances.
lStrong magnetic fields could interfere with external/internal medical devices.
lStrong magnetic fields could present mechanical hazards such as pinch points.
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Pinch Points
A pinch point is a mechanical hazard that can occur when there are exposed parts of the stage or
system that can move. For example, the travel of a stage tabletop could expose the user to a pinch
point between the tabletop and the stage housing. The images that follow will show you typical
external and internal pinch point locations.
DANGER: Mechanical Hazard!
lSystem travel can cause crush, shear, or pinch injuries.
lOnly trained operators should operate this equipment.
lDo not put yourself in the travel path of machinery.
lRestrict access to all motor and stage parts
owhen the system moves under power (during normal operation, for example).
owhen the system is moved manually (during the installation process or when you
do maintenance, for example).
lMotors are capable of very high speeds and acceleration rates.
Figure 1: Typical Pinch Point Locations
NOTE:Pinch points exist at both ends of each axis.
ANT130XY Hardware Manual Pinch Points
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Magnetic Hazards
The magnet track will be exposed during normal operation or when you do maintenance to the
system.
DANGER: Magnetic Field Hazard!
lOnly qualified, trained personnel should be allowed to have access to exposed mag-
net tracks during setup or when you do maintenance.
lStrong magnetic fields are present near and inside the magnet track assembly.
lDo no disassemble the magnet track components. If you do so, you will expose your-
self to mechanical crush, pinch, or impact hazards.
lMagnetic fields could interfere with external or internal medical devices (pace-
makers, for example).
lMagnetic fields can create mechanical hazards (crush, impact, or pinch points, for
example).
lLoose items such as metallic tools, watches, or keys could get drawn into and dam-
age the magnet track assembly.
IMPORTANT: Use non-magnetic tools when you install or do service to the stage.
Figure 2: Exposed Magnet Locations
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Handling and Storage
IMPORTANT: It is the responsibility of the customer to safely and carefully lift and
move the stage.
lBe careful when you move or transport the stage.
lRetain the shipping materials for future use.
lTransport or store the stage in its protective packaging.
WARNING: Electrostatic Discharge (ESD) Sensitive Components!
Wear an ESDwrist strap when you handle, install, or do service to the system assembly.
You could damage the power supply or drives if you fail to observe the correct
ESDpractices.
Inspect the shipping container for any evidence of shipping damage. If any damage exists, notify the
shipping carrier immediately.
Remove the packing list from the shipping container. Make sure that all the items specified on the
packing list are contained within the package.
The documentation for the stage is on the included installation device. The documents include
manuals, interconnection drawings, and other documentation pertaining to the system. Save this
information for future reference.
Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Unpacking and Handling
It is the responsibility of the customer to safely and carefully lift and move the stage.
IMPORTANT: All electronic equipment and instrumentation is wrapped in antistatic
material and packaged with desiccant. Ensure that the antistatic material is not
damaged during unpacking.
DANGER: Heavy Object, Lifting Hazard!
lRefer to Section 2.1. Dimensions for dimensions and Section 1.3. Basic Spe-
cificationsfor weight specifications.
lUse care when you move the ANT130XY or you could negatively affect the per-
formance of it.
lLift this product only by the base.
lFor multi-axis assemblies, always lift the system by the lower axis.
lDo not use the cables or the connectors to lift or move this product.
lMake sure that all moving parts are secure before you move the stage. Unsecured
moving parts could shift and cause injury or damage to the equipment.
Carefully remove the stagefrom its protective shipping container. Gently set the stage on a smooth,
flat, and clean surface. Use compressed nitrogen or clean, dry, oil-free air to remove any dust or
debris that has collected during shipping.
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will
ensure that all of the alignments, preloads, and tolerances are the same as they were when they
were tested at Aerotech.
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Each stage has a label listing the system part number and serial number. These numbers contain
information necessary for maintenance or system hardware and software updates. Locate this label
and record the information for later reference.
Red, anodized aluminum shipping brackets have been installed to prevent unwanted motion
damage that could occur during shipment. The brackets must be removed before the ANT130XY can
be operated. Retain the brackets and hardware for future use.
DANGER: Mechanical Hazard!
lThe product can move manually without electrical power connected.
lWhen the shipping brackets are removed, the operator could be exposed to pinch
points.
Figure 3: Shipping Brackets
Figure 4: Shipping Bracket Removal Procedure (Step 1)
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Figure 5: Shipping Bracket Removal Procedure (Step 2)
Figure 6: Shipping Bracket Removal Procedure (Step 3)
Storage
Store the stage in the original shipping container. If the original packaging included ESDprotective
packaging, make sure to store the stage in it. The storage location must be dry, free of dust, free of
vibrations, and flat.
Refer to Section 1.1. Environmental Specifications
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Chapter 1: Overview
The specifications in this manual pertain to the second generation of ANT130XY stages. The ordering
options (Table 1-1) and basic specifications (Section 1.3.) have changed. The visual differences
between second and first generation stages:
lan updated Aerotech logo
land the introduction of additive (3D-printed) parts.
Refer to Figure 1-1. Contact Aerotech if you need a first generation manual.
Figure 1-1: GEN2 vs GEN1 Visual Comparison
Table 1-1: Model Numbers and Ordering Options
ANT130XY Series Linear Motor Stage
Travel (Required)
-060 60 mm x 60 mm travel
-100 100 mm x 100 mm travel
-160 160 mm x 160 mm travel
Feedback (Required)
-E1 Incremental linear encoders, 1 Vpp amplified sine output
-E2 Incremental linear encoders, digital RS422 output, 5 nm electrical
resolution
-E4 Incremental linear encoders, 1 Vpp amplified sine output, high-
performance
Connectors (Required)
-CN1 Integral cable with a 25-pin D-style motor and feedback connector
-CN2 Integral Y cable with 4-pin high-powered D-style motor and 25-pin D-
style feedback connectors
Cable Management (Required)
-CMS2 Post for two-axis cable support
-CMS3 Post for three-axis cable support
Mounting Plate (Optional)
-MP Mounting plate
Performance Grade (Required)
-PL1 Base performance
-PL3 High-accuracy performance
-PL4 High-accuracy performance
Integration (Required)
-TAS Test as system: Testing, integration, and documentation of a group of
components as a complete system that will be used together.
-TAC Test as components:Testing and integration of individual items as
discrete components that ship together.
ANT130XY Hardware Manual Chapter 1: Overview
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1.1. Environmental Specifications
WARNING:General Hazard Warning! Do not expose this product to environments or
conditions outside of the listed specifications. You could damage the equipment if you
exceed the environmental or operating specifications.
DANGER:Risk of Explosive Atmosphere!
lStandard Aerotech stage/motors are not rated for applications with explosive
atmospheres such as air-born dust or combustible vapors.
lDo not operate stage/motors outside of Aerotech environmental specifications.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging.
The stage should be packaged with desiccant if it is to be stored for an extended
time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration Use the system in a low vibration environment. Excessive floor or acoustical
vibration can affect system performance. Contact Aerotech for information
regarding your specific application.
Protection
Rating
These stages are not suited for dusty or wet environments. This equates to an
ingress protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature
changes could cause a decrease in performance or permanent damage to the stage. At a minimum,
the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage
specifications are repeatable over an extended period of time. The severity of temperature effects
on all specifications depends on many different environmental conditions, which include how the
stage is mounted. Contact the factory for more details.
The thermal expansion coefficient of the encoder scale is 3.25 ppm/°C. Travel will increase or
decrease at this rate as the temperature of the encoder scale temperature deviates from 20°C (68°F).
The accuracy specification of stage is measured 25 mm above the table with the stage in an
unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.2.
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1.3. Basic Specifications
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT130XY-060 Series Specifications
ANT130XY-060 ANT130XY-060 ANT130XY-060
Travel 60 mm x 60 mm 110 x 110 mm 160 mm x 160 mm
Accuracy (1,2)
-PL1 ±2.5 µm ±4.0 µm ±5.0 µm
-PL2 (-E1, -E2) ±250 nm ±300 nm ±300 nm
-PL2 (-E4) ±200 nm ±225 nm ±225 nm
-PL3 (-E1, -E2) ±250 nm ±300 nm ±300 nm
-PL3 (-E4) ±200 nm ±225 nm ±225 nm
Bidirectional Repeatability(2) ±75 nm
Resolution (Minimum
Incremental Motion)
-E1 1 nm
-E4 0.5 nm
Straightness (2)
-PL1 ±1.5 µm ±1.5 µm ±2.0 µm
-PL2 ±1.5 µm ±1.5 µm ±2.0 µm
-PL3 ±250 µm ±300 µm ±300 µm
Flatness (2)
-PL1 ±1.5 µm ±1.5 µm ±2.0 µm
-PL2 ±1.5 µm ±1.5 µm ±2.0 µm
-PL3 ±1.0 µm
Pitch 10 arc sec 12 arc sec 15 arc sec
Roll 10 arc sec 12 arc sec 15 arc sec
Yaw 5 arc sec 6 arc sec 8 arc sec
Orthogonality (3)
-PL1 10 arc sec
-PL2 3 arc sec
-PL3 1 arc sec 0.5 arc sec 0.5 arc sec
Maximum Speed
(Upper Axis) (4)
-E1, -E4 350 mm/s
-E2 145 mm/s
Maximum Acceleration
(No Load / Upper Axis) (4) 1 g
In-Position Stability (5) -E1 <1 nm
-E4 <0.5 nm
Load Capacity (horizontal) (6) 12.0 kg
Moving Mass Upper Axis 1.4 kg 1.9 kg 2.3 kg
Lower Axis 4.2 kg 5.6 kg 6.9 kg
Stage Mass 5.7 kg 7.5 kg 9.2 kg
Material Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Specifications for -PL1 and -PL2 options are per-axis, measured 25 mm above the tabletop. Specifications for the -PL3
option are XY, measured 25 mm above the tabletop. -PL2 and -PL3 performance options require the use of an Aerotech
controller.
2. Certified with each stage.
3. Requires an Aerotech controller.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. In-position stability is reported as 3-sigma value (requires a 1 Vpp encoder).
6. Payload specifications assume that the payload is centered on-axis.
5. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system depend
upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
6. To ensure the achievement and repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information.
ANT130XY Hardware Manual 1.3. Basic Specifications
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1.4. Vacuum Operation
There are two vacuum preparation options:
lLow Vacuum (for use in atmospheric pressures to 10-3 Torr)
lHigh Vacuum (preparation for environments from 10-3 to 10-6 Torr).
Special preparations include:
lParts are lubricated with vacuum-compatible lubricants.
lMaterials, fasteners, and coatings are selected to be compatible with the specified level of
vacuum.
lHigh-vacuum systems are designed to eliminate trapped volumes.
lPrior to assembly, stage parts are thoroughly cleaned in a clean environment.
lThe stage is packaged in a special polyethylene bag.
Vacuum Guidelines
To ensure that the stage will continue to perform well in the vacuum environment, use the
guidelines that follow (in addition to standard handling, installation, and lubrication guidelines
outlined in this manual).
1. Do not remove the stage from its sealed bag until it is ready to use.
2. Always handle the stage in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the stage.
3. During installation, use cleaned, vented, stainless steel fasteners to secure the stage.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the
viscous vacuum-compatible lubricants, could result in excessive motor operating temperatures.
Because of this, consider all continuous torque ratings to be 40 to 60% lower than the value
specified for operation in normal atmospheric environment. Reduce motor usage accordingly.
5. We recommend that you use a small quantity of Braycote® 602EF grease or a compatible
substitute of equal quality lubricant in vacuum applications.
6. To reduce outgassing during the initial pump-down to vacuum pressure, Aerotech recommends
that you bake out vacuum systems when you first install them into the vacuum chamber. Bake
the vacuum components at 60 °C for 24 to 48 hours to desorb water vapor from surfaces and
degas polymers (such as cable insulation).
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