Aerotech PRO280LM Series User manual

Revision: 1.04.00
PRO280LM Hardware Manual

Global Technical Support
Go to www.aerotech.com/global-technical-support for information and support about your Aerotech, Inc. products. The
website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If
necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
To get help immediately, contact a service office or your sales representative. Include your customer order number in your
email or have it available before you call.
United States (World Headquarters)
Email: [e-mail]
Phone: [phone]
Fax: [phone]
101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
United Kingdom China
Email: [e-mail]
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Phone: [phone]
Germany Taiwan
Email: [e-mail]
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Phone: [phone]
France
Email: [e-mail]
Phone: [phone]
This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2010-2019, Aerotech, Inc., All rights reserved.

PRO280LM Hardware Manual Table of Contents
Table of Contents
PRO280LM Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
EU Declaration of Incorporation 9
Chapter 1: Overview 11
1.1. Environmental Specifications 13
1.2. Accuracy and Temperature Effects 13
1.3. Basic Specifications 14
1.4. Vacuum Operation 16
Chapter 2: Mechanical Specifications and Installation 17
2.1. Unpacking and Handling the Stage 17
2.2. Dimensions 20
2.3. Securing the Stage to the Mounting Surface 23
2.4. Attaching the Payload to the Stage 24
2.4.1. Speed Capability 25
Chapter 3: Electrical Specifications and Installation 27
3.1. Motor and Feedback Connectors 28
3.2. Motor and Feedback Wiring 34
3.3. Motor and Feedback Specifications 36
3.4. Limits, Marker, and Machine Direction 38
3.5. Motor and Feedback Phasing 39
Chapter 4: Maintenance 41
4.1. Service and Inspection Schedule 41
4.2. Cleaning and Lubrication 42
4.3. Troubleshooting 46
Appendix A: Warranty and Field Service 47
Appendix B: Technical Changes 49
Index 51
www.aerotech.com 3

Table of Contents PRO280LM Hardware Manual
List of Figures
Figure 2-1: Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems 18
Figure 2-2: PRO280LM Series Stage with Lifting Features 19
Figure 2-3: PRO280LM Dimensions 20
Figure 2-4: PRO280LM Accessory Tabletop Dimensions (-TT3, -TT6 Options) 21
Figure 2-5: Dimensions for Stages without a Cable Management System (-CMS0 Option) 22
Figure 2-6: Cantilevered Load Capability of PRO280LM Series Stages 25
Figure 2-7: Stage Orientations 25
Figure 3-1: Ground Connection Points for the -CMS0 Option 28
Figure 3-2: Motor and Feedback Wiring 34
Figure 3-3: Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 35
Figure 3-4: Machine Direction 38
Figure 3-5: Hall Phasing 39
Figure 3-6: Analog Encoder Phasing Reference Diagram (-E1 Incremental Encoder) 40
Figure 3-7: Encoder Phasing Reference Diagram (-E2 Incremental Encoder) 40
Figure 4-1: Endplate Cover Removal (Step 2) 44
Figure 4-2: Hardcover Screw Removal (Step 3) 44
Figure 4-3: Hardcover Removal (Step 3) 45
4 www.aerotech.com

PRO280LM Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 11
Table 1-2: Environmental Specifications 13
Table 1-3: PRO280LM Series Specifications (-0300 to -0600) 14
Table 1-4: PRO280LM Series Specifications (-0800 to -1500) 15
Table 2-1: Stage Mounting Surface Flatness Requirement 23
Table 2-2: Stage to Mounting Surface Hardware 23
Table 3-1: Motor Connector Pinout 29
Table 3-2: Mating Connector Part Numbers for the Motor Connector 29
Table 3-3: Feedback Connector Pinout (-E1 and -E2 Options) 30
Table 3-4: Mating Connector Part Numbers for the Feedback Connector 30
Table 3-5: Feedback Connector Pinout (-E3 Option) 31
Table 3-6: Mating Connector Part Numbers for the Feedback Connector 31
Table 3-7: General Motor Connector Pinout (for Z or T Axes) 32
Table 3-8: Mating Connector Part Numbers for the Motor Connector 32
Table 3-9: General Feedback Connector Pinout (for Z or T axes) 33
Table 3-10: Mating Connector Part Numbers for the Feedback Connector 33
Table 3-11: Feedback Specifications 36
Table 3-12: PRO280LMLinear Motor Specifications (BLMH-262-A) 37
Table 3-13: Encoder Specifications 37
www.aerotech.com 5

Table of Contents PRO280LM Hardware Manual
6 www.aerotech.com
This page intentionally left blank.

PRO280LM Hardware Manual Safety
Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the PRO280LM. Read all parts of this
manual before you install or operate the PRO280LM or before you do maintenance to your system. To
prevent injury to you and damage to the equipment, obey the precautions in this manual. The precautions
that follow apply when you see a Danger or Warning symbol in this manual. If you do not obey these
precautions, injury to you or damage to the equipment can occur. If you do not understand the information in
this manual, contact Aerotech Global Technical Support.
This product has been designed for light industrial manufacturing or laboratory environments. The protection
provided by the equipment could be impaired if the product is used in a manner not specified by the
manufacturer.
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the PRO280LM and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. All components must be properly grounded in accordance with local electrical safety
requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The PRO280LM stage must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
5. Use care when moving the PRO280LM stage. Lifting or transporting the PRO280LM stage
improperly can result in injury or damage to the PRO280LM.
6. The stage forcer temperature may exceed 75°C.
7. Operators must be trained before operating this equipment.
8. All service and maintenance must be performed by qualified personnel.
www.aerotech.com 7

Safety PRO280LM Hardware Manual
8 www.aerotech.com
This page intentionally left blank.

PRO280LM Hardware Manual Declaration of Conformity
EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
PRO280LM Linear Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, i.e., as a whole, including the equipment referred to in this
Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
2011/65/EU RoHS2 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 8/6/2019
www.aerotech.com 9

Declaration of Conformity PRO280LM Hardware Manual
10 www.aerotech.com
This page intentionally left blank.

PRO280LM Hardware Manual Overview
Chapter 1: Overview
The specifications in this manual pertain to the second generation of PRO LM stages. Second generation
stages can be distinguished from their first generation counterparts by the second generation's curved
hardcover. Contact Aerotech if you need a first generation manual.
Table 1-1: Model Numbers and Ordering Options
PRO280LM Linear Motor Stage
-0300 300 mm travel stage
-0400 400 mm travel stage
-0500 500 mm travel stage
-0600 600 mm travel stage
-0800 800 mm travel stage
-1000 1000 mm travel stage
-1200 1200 mm travel stage
-1500 1500 mm travel stage
Mounting Orientation (Required)
Normal mounting orientation
-MT1 Side mounted or vertical orientation
-MT2 Inverted mounting orientation
Tabletop (Required)
-TT1 Tabletop with metric dimension mounting
-TT2 Tabletop with English dimension mounting
-TT3 Accessory tabletop with mounting for select rotary stages
-TT4 Tabletop with metric dimension mounting and wiper brushes
-TT5 Tabletop with English dimension mounting and wiper brushes
-TT6 Accessory tabletop with mounting for select rotary stages and wipers
NOTE:-TT1 option required for lower axis of XY
Feedback (Required)
-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.1 μm digital TTL output
-E3 Absolute linear encoder; EnDat 2.2
www.aerotech.com Chapter 1 11

Overview PRO280LM Hardware Manual
PRO280LM Linear Motor Stage
CableManagement (Required)
-CMS0 No external CMS; motor/feedback connector bracket on carriage
-CMS1 External CMS for single axis
-CMS2 External CMS for lower-axis of two-axis PRO (XY) assembly
-CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly
-CMS4 External CMS for upper-axis of two-axis PRO (XY) assembly
-CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly
-CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly
-CMS7 External CMS for lower-axis of three-axis (XZT) assembly
-CMS8 External CMS for upper-axis of four-axis (XYZT) assembly
-CMS9 External CMS for lower-axis of four-axis (XYZT) assembly
Lifting Hardware (Optional)
-LF Lifting hardware
NOTE:Lifting option available on all travels. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-
axis)
ThermoComp™ (Optional)
-TCMP ThermoComp™ integrated thermal compensation, single or lower axis
NOTE: An A3200 controller must be used with the -TCMP option
Metrology (Required)
-PL0 No metrology performance plots
-PL1 Uncalibrated with performance plots
-PL2 Calibrated with performance plots
Accessories (To be Ordered as a Separate Line Item)
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 µm orthogonality for
short travel stages.
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc sec orthogonality. Alignment to within 10
µm orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 µm orthogonality for
short travel stages
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc sec orthogonality. Alignment to within 5
µm orthogonality for short travel stages.
12 Chapter 1 www.aerotech.com

PRO280LM Hardware Manual Overview
1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The PRO280LM stages have limited protection against dust, but not water. This
equates to an ingress protection rating of IP50.
Use Indoor use only
1.2. Accuracy and Temperature Effects
The accuracy specification of PRO280LM series stages is measured 25 mm above the table with the stage
in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
The accuracy specifications listed in Section 1.3. assume a 20°C operating environment. If the temperature
of the stage differs from 20°C, the encoder scale in the stage will expand or contract at the rate of 3.25 ppm
per °C.
The ThermoComp™ option is a hardware and software solution that uses the functionality of the A3200
controller to mitigate the effects of changing temperature by detecting and compensating for thermal
changes. ThermoComp™ is effective at compensating for both self-heating and environmental temperature
changes.
www.aerotech.com Chapter 1 13

Overview PRO280LM Hardware Manual
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: PRO280LM Series Specifications (-0300 to -0600)
PRO280LM -0300 -0400 -0500 -0600
Travel 300 mm 400 mm 500 mm 600 mm
Accuracy (1) Standard ±10 μm ±12 μm ±14 μm ±15.5 μm
Calibrated ±1 μm ±1 μm ±1 μm ±1 μm
Resolution (Minimum Incremental
Motion)
5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability (1) ±0.4 μm ±0.4 μm ±0.4 μm ±0.4 μm
Horizontal Straightness (1) ±3 μm ±4 μm ±5 μm ±6 μm
Vertical Straightness (1) ±3 μm ±4 μm ±5 μm ±6 μm
Pitch 49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
Roll 49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
Yaw 49 μrad
(10.1 arc sec)
60 μrad
(12.4 arc sec)
70 μrad
(14.4 arc sec)
78 μrad
(16.1 arc sec)
Maximum Speed (2) 2 m/s
Maximum Acceleration (2) 3 g
Maximum Force, Continuous 266.2 N – Standard
437.1 N – With Air Cooling (20 psig)
Load Capacity (3) Horizontal 150 kg
Side 150 kg
Moving Mass 13.8 kg
Stage Mass 51.7 kg 56.9 kg 62.2 kg 67.4 kg
Material Anodized Aluminum
Mean Time Between Failure 20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
14 Chapter 1 www.aerotech.com

PRO280LM Hardware Manual Overview
Table 1-4: PRO280LM Series Specifications (-0800 to -1500)
PRO280LM -0800 -1000 -1200 -1500
Travel 800 mm 1000 mm 1200 mm 1500 mm
Accuracy (1) Standard ±17 μm ±18 μm ±21 μm ±22 μm
Calibrated ±1.5 μm ±1.5 μm ±2 μm ±2 μm
Resolution (Minimum Incremental
Motion)
5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability (1) ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm
Horizontal Straightness (1) ±7 μm ±8 μm ±8.5 μm ±9.5 μm
Vertical Straightness (1) ±7 μm ±8 μm ±8.5 μm ±9.5 μm
Pitch 90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Roll 90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Yaw 90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Maximum Speed (2) 2 m/s
Maximum Acceleration (2) 3 g
Maximum Force, Continuous 266.2 N – Standard
437.1 N – With Air Cooling (20 psig)
Load Capacity (3) Horizontal 150 kg
Side 150 kg
Moving Mass 13.8 kg
Stage Mass 78.0 kg 88.5 kg 99.0 kg 114.8 kg
Material Anodized Aluminum
Mean Time Between Failure 20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
www.aerotech.com Chapter 1 15

Overview PRO280LM Hardware Manual
1.4. Vacuum Operation
Aerotech can specially prepare the PRO280LM for operation in vacuum environments. Aerotech offers two
vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10-3 torr) and one for
high vacuum (preparation for environments from 10-3 to 10-6 torr). As part of this preparation, attention to
detail during modification, cleaning, and assembly results in products with optimal performance in vacuum
applications.
Special Guidelines
To make sure that the PRO280LM will continue to perform well in the vacuum environment, use the
guidelines that follow (in addition to standard handling, installation, and lubrication guidelines outlined in this
manual).
1. Do not remove the PRO280LM from its sealed bag until it is ready to use.
2. Always handle the PRO280LM in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the PRO280LM.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the PRO280LM.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease or
a compatible substitute of equal quality.
6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces
outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates
porous surfaces on the aluminum and Teflon cables. Aerotech recommends that customers bake out
vacuum systems when first installing them in the vacuum chamber.
16 Chapter 1 www.aerotech.com

PRO280LM Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : PRO280LM installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
D A N G E R / H E A V Y : Refer to Section 1.3. for stage mass specifications.
lDo not attempt to lift heavy loads single handed.
lLift only by the base. Use lifting hardware if it has been provided (refer to Figure 2-2).
lDo not use the tabletop or cables as lifting points.
lFor multi-axis assemblies, always lift the system by the lower axis.
W A R N I N G : It is the customer's responsibility to safely and carefully lift and move the
PRO280LM.
lSecure all moving parts before lifting or moving the PRO280LM to a new location.
Unsecured moving parts could shift and cause bodily injury.
lImproper handling could adversely affect the performance of the PRO280LM. Use care
when moving the PRO280LM.
Carefully remove the PRO280LMfrom its protective shipping container. Gently set the PRO280LM on a
smooth, flat, and clean surface.
Before operating the PRO280LM, it is important to let it stabilize at room temperature for at least 12 hours.
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are
the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping.
Each PRO280LM has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference.
Shipping Brackets
All PRO280LM series stages are packaged with shipping brackets installed to prevent unwanted stage
motion and potential damage from occurring during shipment. The brackets are red anodized aluminum (the
only red anodized pieces Aerotech uses) that attach to the stage base on either side of the stage carriage.
The rubber pads on the shipping brackets compress slightly to gently hold the carriage in place. Two
shipping brackets are used on single axis and upper axis stages in a multi-axis stack, while four shipping
brackets are used on lower axis stages in multi-axis stacks. They must be removed from the stage for the
stage to operate. Retain the brackets for future use.
www.aerotech.com Chapter 2 17

Mechanical Specifications and Installation PRO280LM Hardware Manual
Figure 2-1: Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems
N O T E : After removing the shipping brackets, retain them for future use. Do not transport or ship the
PRO280LM without the shipping brackets attached.
18 Chapter 2 www.aerotech.com

PRO280LM Hardware Manual Mechanical Specifications and Installation
Lifting Instructions
This section applies only to stages equipped with lifting features. The lifting features should come attached
to the system and contain (QTY 4) eye bolts and (QTY 4) standoffs (see Figure 2-2). The eyebolts are
threaded into the standoffs and the standoffs are threaded into the stage base. These must be removed for
the stage to operate. Retain the lifting hardware for future use.
If the stage must be lifted in the future, reattach the shipping brackets and the lifting hardware. If the stage is
part of a multi-axis system, attach the lifting features to the lower axis.
Figure 2-2: PRO280LM Series Stage with Lifting Features
N O T E : After removing the shipping brackets, retain them for future use. Do not transport or ship the
PRO280LM without the shipping brackets attached.
www.aerotech.com Chapter 2 19

Mechanical Specifications and Installation PRO280LM Hardware Manual
2.2. Dimensions
Figure 2-3: PRO280LM Dimensions
20 Chapter 2 www.aerotech.com