Aerotech MPS75SLE-025 User manual

Revision: 1.00.00
MPS75SLE
Hardware Manual

Global Technical Support
Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website
provides downloadable resources (such as up-to-date software, product manuals, and Help files), training schedules, and PC-
to-PC remote technical support. You can also complete Product Return (RMA) forms and get information about repairs and
spare or replacement parts. For immediate help, contact a service office or your sales representative. Have your customer
order number available before you call or include it in your email.
United States (World Headquarters)
Phone: [phone]
Fax: [phone]
Email: [e-mail]
101 Zeta Drive
Pittsburgh, PA 15238-2897
www.aerotech.com
United Kingdom Japan
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Email: [e-mail]
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
may be trademarks of their respective companies.
Copyright © 2015, Aerotech, Inc. All rights reserved.

MPS75SLE Hardware Manual Table of Contents
Table of Contents
Table of Contents iii
List of Figures iv
List of Tables v
Safety Procedures and Warnings vii
EC Declaration of Incorporation ix
Chapter 1: Overview 1
1.1. Environmental Specifications 2
1.2. Accuracy and Temperature Effects 2
1.3. Basic Specifications 3
1.4. Vacuum Operation 4
Chapter 2: Mechanical Specifications and Installation 5
2.1. Unpacking and Handling the Stage 5
2.2. Dimensions 6
2.3. Securing the Stage to the Mounting Surface 10
2.3.1. For XYAssemblies and Special Cases 11
2.4. Attaching the Payload to the Stage 12
Chapter 3: Electrical Specifications and Installation 15
3.1. Motor and Feedback Connectors 16
3.2. Motor and Feedback Wiring 19
3.3. Motor and Feedback Specifications 21
3.4. Limits, Marker, and Machine Direction 23
3.5. Motor and Feedback Phasing 24
Chapter 4: Maintenance 25
4.1. Service and Inspection Schedule 25
4.2. Cleaning and Lubrication 26
4.2.1. Bellows Removal for Re-Lubrication 28
4.3. Bellows Installation 29
4.4. Troubleshooting 32
Appendix A: Warranty and Field Service 33
Appendix B: Revision History 35
Index 37
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Table of Contents MPS75SLE Hardware Manual
List of Figures
Figure 2-1: MPS75SLEDimensions 6
Figure 2-2: MPS75SLEwith Bellows Dimensions 7
Figure 2-3: MPS75SLEMounting Plate Dimensions 8
Figure 2-4: MPS75SLEHDZ Angle Bracket Dimensions 9
Figure 2-5: Mounting Hole Location 10
Figure 2-6: Access To All Mounting Holes 11
Figure 2-7: Load Capability of MPS75SLE Series Stages 12
Figure 2-8: Stage Orientations 13
Figure 2-9: Torque Required to Turn Ball-Screw in Vertical Orientation 14
Figure 3-1: DCMotor and Feedback Wiring 19
Figure 3-2: Stepper Motor and Feedback Wiring 20
Figure 3-3: Machine Direction 23
Figure 3-4: Analog Encoder Phasing Reference Diagram 24
Figure 3-5: Encoder Phasing Reference Diagram (Standard) 24
Figure 4-1: Remove the Bellows Bolts 28
Figure 4-2: Slide the Stage Carriage and Bellow Compression 28
Figure 4-3: Motor Cover Screw Location 29
Figure 4-4: Bellows Support Rods 29
Figure 4-5: Secure the Bellows Support Rods 30
Figure 4-6: Attach the Bellows 30
Figure 4-7: Attach the Bellows Cover 30
Figure 4-8: Attach the Bellows Tabletop 31
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MPS75SLE Hardware Manual Table of Contents
List of Tables
Table 1-1: Model Numbers and Ordering Options 1
Table 1-2: Environmental Specifications 2
Table 1-3: MPS75SLE Series Mechanical Specifications 3
Table 3-1: Connector Pin Assignments (DC Motor) 17
Table 3-2: Encoder Connector Pin Assignments (DC Motor) 18
Table 3-3: Connector Pin Assignments (Stepper Motor) 18
Table 3-4: Feedback Specifications 21
Table 3-5: Motor Specifications 22
Table 3-6: Encoder Specifications 22
Table 4-1: Troubleshooting 32
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Table of Contents MPS75SLE Hardware Manual
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MPS75SLE Hardware Manual Electrical Safety
Safety Procedures and Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand
the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to
the statements given in this section and other handling, use, and operational information given throughout
the manual to avoid injury to you and damage to the equipment.
The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure
to observe these precautions could result in serious injury to those individuals performing the procedures
and/or damage to the equipment.
D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of
electrical shock, bodily injury, or death the following precautions must be followed.
1. Access to the MPS75SLE and component parts must be restricted while connected to a
power source.
2. Do not connect or disconnect any electrical components or connecting cables while
connected to a power source.
3. Disconnect electrical power before servicing equipment.
4. Make sure the MPS75SLE and all components are properly grounded in accordance with
local electrical safety requirements.
5. Operator safeguarding requirements must be addressed during final integration of the
product.
W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the
following precautions must be followed.
1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts
must be restricted while connected to a power source.
2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid
potential hazards.
3. Do not expose the MPS75SLEto environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
4. The MPS75SLE must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
5. Use care when moving the MPS75SLE. Lifting or transporting the MPS75SLE improperly
can result in injury or damage to the MPS75SLE.
6. The MPS75SLE is intended for light industrial manufacturing or laboratory use. Use of the
MPS75SLE for unintended applications can result in injury and damage to the equipment.
7. If the MPS75SLE is used in a manner not specified by the manufacturer, the protection
provided by the MPS75SLE can be impaired and result in damage, shock, injury, or death.
8. Operators must be trained before operating this equipment.
9. All service and maintenance must be performed by qualified personnel.
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Electrical Safety MPS75SLE Hardware Manual
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MPS75SLE Hardware Manual Declaration of Conformity
EC Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2897
USA
herewith declares that the product:
MPS75SLE Stage
is intended to be incorporated into machinery to constitute machinery covered by the Directive
2006/42/EC as amended;
and that the following harmonized European standards have been applied:
ISO 12100
Safety of machinery - General principles for design
- Risk assessment and risk reduction
EN 60204-1
Safety of machinery - Electrical equipment of machines
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it
is to be incorporated or of which it is to be a component has been found and
declared to be in conformity with the provisions of the Directive 2006/42/EC and
with national implementing legislation, i.e. as a whole, including the equipment
referred to in this Declaration.
Authorized Representative:
Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln
Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
www.aerotech.com ix
This is to certify that the aforementioned product is in accordance with the applicable requirements of
the following Directive(s):
2011/65/EU RoHS 2 Directive

Declaration of Conformity MPS75SLE Hardware Manual
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MPS75SLE Hardware Manual Overview
Chapter 1: Overview
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-1: Model Numbers and Ordering Options
MPS Series Screw-Driven Stage
-025 25 mm travel stage with ball-screw, linear encoder, and limits
-050 50 mm travel stage with ball-screw, linear encoder, and limits
-075 75 mm travel stage with ball-screw, linear encoder, and limits
-100 100 mm travel stage with ball-screw, linear encoder, and limits
Linear Encoder
-LTAS Amplified sine output 1 Vpp (20 um signal period), requires signal multiplier
-LTX100 0.05 um line driver output
Tabletop
-TTM Metric pattern/thread tabletop
Drive Screw
-B1MM 1 mm/rev precision-ground ball-screw
Motor
-DC DC servomotor with 3 meter integral cable
-SM Stepping motor with 3 meter integral cable
Limits
-5V-NC 5 V normally-closed limits
Way Cover Options
-BELLOWS Bellows way cover
Options
-MP Breadboard mounting plate
Testing
-PLOTS Straightness, Flatness, Accuracy and Repeatability plots
-NO PLOTS No performance plots
Accessories (to be ordered as a separate line item)
HALAR High-accuracy system – linear error correction for accuracy and repeatability
HDZ-MPS75SLE Right-angle L-bracket
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Overview MPS75SLE Hardware Manual
1.1. Environmental Specifications
W A R N I N G : Do not expose the MPS75SLEto environments or conditions outside of the
listed specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
Table 1-2: Environmental Specifications
Ambient
Temperature
Operating: 10° to 35° C (50° to 95° F)
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The MPS75SLE is not suited for dusty or wet environments. This equates to an ingress
protection rating of IP00.
Use Indoor use only
1.2. Accuracy and Temperature Effects
The accuracy specification of MPS75SLE series stages is measured 25 mm above the table with the stage
in a horizontal position. The stage is assumed to be fully supported by a mounting surface meeting or
exceeding the specification in Section 2.3.
The accuracy of the screw is a key element in the overall positioning accuracy. A scale error can be
expected if temperature of the screw differs from 20° C (68° F). The greater the temperature difference, the
greater the error. The temperature of the screw depends on the speed and duty cycle of the stage. The faster
the movement and higher the duty cycle, the more the stage accuracy will be affected by heat. The thermal
expansion coefficient of the screw is 11.7 ppm/°C.
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MPS75SLE Hardware Manual Overview
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: MPS75SLE Series Mechanical Specifications
Mechanical Specifications MPS75SLE-025 MPS75SLE-050 MPS75SLE-75 MPS75SLE-100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy Standard ±1.75 µm ±2.25 µm ±2.75 µm ±3.25 µm
HALAR(1) ±0.75 µm ±0.75 µm ±1.0 µm ±1.0 µm
Resolution (Minimum Incremental
Motion)(2) ±0.025 µm
Repeatability (Bi-Directional)(2) ±0.1 µm
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed
(1.0 mm/rev Ball-
Screw)
-DC 50 mm/s 50 mm/s 50 mm/s 35 mm/s
-SM 30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity(3)
Horizontal 15 kg
Side 15 kg
Vertical 4 kg
Stage Mass 2.3 kg 2.4 kg 2.5 kg 2.6 kg
Material Anodized Aluminum Body
(1) With Aerotech controllers.
(2) Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both
the rotary and linear encoders.
(3) Payload specifications are single-axis system.
(4) Excessive duty cycle may impact stage accuracy.
(5) Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis system is payload and
workpoint dependent. Consult factory for multi-axis or non-standard applications.
(6) Contact Aerotech for specifications of stages with bellows option.
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Overview MPS75SLE Hardware Manual
1.4. Vacuum Operation
Aerotech can specially prepare the MPS75SLE series stage for operation in vacuum environments. As part
of this preparation, attention to detail during modification, cleaning, and assembly results in stages with
optimal performance in vacuum applications. This section will outline preparation techniques for stages that
will operate in a vacuum:
lLubrication with vacuum-compatible lubricants
lUse of materials, fasteners, and coatings with vacuum outgas performance compatible with the level of
vacuum specified
lFor high vacuum stages, elimination of situations that may allow gases to become temporarily trapped
during pump down
lExtensive cleaning prior to assembly in a clean environment and packaging in a special polyethylene
bag
Vacuum Guidelines
To ensure that the MPS75SLE will continue to perform well in the vacuum environment, follow the guidelines
listed below (in addition to standard handling, installation, and lubrication guidelines outlined in this manual).
1. Do not remove the MPS75SLE from the sealed bag until it is ready for use.
2. Always handle the MPS75SLE in a clean environment and use powder-free polyethylene gloves to
prevent any contaminants from adhering to the surface of the MPS75SLE.
3. During installation, use cleaned, vented, stainless steel fasteners when securing the MPS75SLE.
4. Reduced air pressure eliminates significant convective heat transfer. This, coupled with the viscous
vacuum-compatible lubricants, could result in excessive motor operating temperatures. Because of
this, consider all continuous torque ratings to be 40 to 60% lower than the value specified for operation
in normal atmospheric environment. Reduce motor usage accordingly.
5. For vacuum applications, the recommended lubricant is a small quantity of Braycote® 602EF grease
or a compatible substitute of equal quality.
6. Baking vacuum components between 100 and 125 °C for 24 to 48 hours significantly reduces
outgassing at initial pump-down to vacuum pressure and evaporates water vapor that impregnates
porous surfaces on the aluminum surfaces and Teflon cables. Aerotech recommends that customers
bake out vacuum systems when first installing them in the vacuum chamber.
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MPS75SLE Hardware Manual Mechanical Specifications and Installation
Chapter 2: Mechanical Specifications and Installation
W A R N I N G : MPS75SLE installation must be in accordance to instructions provided by this
manual and any accompanying documentation. Failure to follow these instructions could result
in injury or damage to the equipment.
2.1. Unpacking and Handling the Stage
N O T E : If any damage has occurred during shipping, report it immediately.
Carefully remove the MPS75SLE from the protective shipping container. Before operating the MPS75SLE, it
is important to let the MPS75SLE stabilize at room temperature for at least 12 hours. Allowing the
MPS75SLE to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances
are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to
remove any dust or debris that has collected during shipping. Set the MPS75SLE on a smooth, flat, and
clean surface.
Each MPS75SLE has a label listing the system part number and serial number. These numbers contain
information necessary for maintaining or updating system hardware and software. Locate this label and
record the information for later reference. If any damage has occurred during shipping, report it immediately.
W A R N I N G : Make sure that all moving parts are secure before moving the MPS75SLE.
Unsecured moving parts may shift and cause bodily injury.
W A R N I N G : Improper handling could adversely affect the MPS75SLE’s performance. Use
care when moving the MPS75SLE.
W A R N I N G : An unsecured MPS75SLE could be dragged off of a mounting surface by its
unsupported cable. The weight of the MPS75SLE is less than the integral cable and connector.
W A R N I N G : Do not use the drive-screw or motor as lifting points.
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Mechanical Specifications and Installation MPS75SLE Hardware Manual
2.2. Dimensions
N O T E : All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. The most recent system drawings and schematics can be found on your software DVD
or on www.aerotech.com.
123
B
A
33 TYP
(8) MOUNTING HOLES
X/2
D
A
STAGE CABLE EXITS
3M LENGTH CABLES
50
6 TYP
(8) MOUNTING HOLES
4.5 TYP
8 TYP
C
32
75
100
33
5035
25
77
64.5
4X M4X0.7 HELICOIL
7 MAX
THREAD NO DEEPER
DAMAGE TO STAGE CAN RESULT
4X M3X0.5 HELICOIL
6 MAX
THREAD NO DEEPER
DAMAGE TO STAGE CAN RESULT
DETAIL A
SCALE 1 : 2
DIMENSIONS: MILLIMETERS
BASIC MODEL A B C D
X NOMINAL
TRAVEL
X ELECTRICAL
LIMIT TRAVEL
X MECHANICAL
LIMIT TRAVEL
MPS75SLE-025 260 68.5 108 227 25 29 34
MPS75SLE-050 290 83.5 138 227 50 54 58
MPS75SLE-075 320 98.5 125 282 75 79 84
MPS75SLE-100 350 113.5 150 282 100 104 108
Figure 2-1: MPS75SLEDimensions
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MPS75SLE Hardware Manual Mechanical Specifications and Installation
DIMENSIONS: MILLIMETERS
BASIC MODEL A B C D
X NOMINAL
TRAVEL
X ELECTRICAL
LIMIT TRAVEL
X MECHANICAL
LIMIT TRAVEL
MPS75SLE-025 260 68.5 108 227 25 29 34
MPS75SLE-050 290 83.5 138 227 50 54 58
MPS75SLE-075 320 98.5 125 282 75 79 84
MPS75SLE-100 350 113.5 150 282 100 104 108
123
B
A
X/2
D
A
STAGE CABLE EXITS
3M LENGTH CABLES
50
6 TYP
(8) MOUNTING HOLES
4.5 TYP
8 TYP
C
75
37
33 TYP
(8) MOUNTING HOLES
100
33
5035
25
77
4X
4.8 5
M4X0.7 HELICOIL 12 MAX
THREAD NO DEEPER
DAMAGE TO STAGE CAN RESULT
4X
3.4 5
M3X0.5 HELICOIL
11 MAX
THREAD NO DEEPER
DAMAGE TO STAGE CAN RESULT
75
DETAIL A
SCALE 1 : 2
Figure 2-2: MPS75SLEwith Bellows Dimensions
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Mechanical Specifications and Installation MPS75SLE Hardware Manual
50.85033
203.2
200
150
50
227
M4x0.7 HELICOIL 8
(8) PLACES
11.3 6.8 SLOT
7.1 THRU
(4) PLACES
MP-MPS75SL-100
10
75
50.85033
152.4
150
125
50
197
M4x0.7 HELICOIL 8
(8) PLACES
11.3 6.8 SLOT
7.1 THRU
(4) PLACES
MP-MPS75SL-075
10
75
50.85033
127
125
138
50
167
M4x0.7 HELICOIL 8
(8) PLACES
11.3 6.8 SLOT
7.1 THRU
(4) PLACES
MP-MPS75SL-050
10
75
50.85033
101.6
100
108
50
137
M4x0.7 HELICOIL 8
(8) PLACES
11.3 6.8 SLOT
7.1 THRU
(4) PLACES
MP-MPS75SL-025
10
75
DIMENSIONS: MILLIMETERS
Figure 2-3: MPS75SLEMounting Plate Dimensions
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MPS75SLE Hardware Manual Mechanical Specifications and Installation
253
8 TYP
13
28
75
43
20.5
25
7.5
33
75
M4X0.7 HELICOIL THRU ALL
(22) PLACES
14
12.5
17.5
23.5
14
12.5
23.5
3350
33
50
4.5 THRU ALL
8 TO DEPTH SHOWN
(8) PLACES
DIMENSIONS: MILLIMETERS
Figure 2-4: MPS75SLE HDZ Angle Bracket Dimensions
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Mechanical Specifications and Installation MPS75SLE Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The MPS75SLE must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the MPS75SLE stage. When it is mounted to a non-flat surface, the stage can be distorted
as the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the
mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm.
N O T E : The MPS75SLE is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the MPS75SLE. Shimming should be avoided if possible. If shimming is required, it
should be minimized to improve the rigidity of the system.
Mount the stage to the mounting surface using M4 socket head cap screws (SHCS) in the [QTY 4] outer
mounting holes. Additional mounting holes are hidden under the stage table and should only be used for
mounting XYassemblies or, in special cases, when advised to by Aerotech. Securing the stage using the
inner mounting holes requires special instructions, refer to Section 2.3.1.
Refer to Section 2.2. for the dimension drawing for mounting hole locations and screw lengths.
D A N G E R : To minimize the possibility of bodily injury or death, disconnect all electrical
power prior to performing any maintenance or making adjustments to the equipment.
W A R N I N G : An unsecured MPS75SLE could be dragged off of a mounting surface by its
unsupported cable. The weight of the MPS75SLE is less than the integral cable and connector.
Figure 2-5: Mounting Hole Location
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