Agilent Technologies XGS-600 User manual

DRAFT 4/15/14
ICES/NMB-001
XGS-600™ Gauge
Controller
Manual No. 699908410
Revision D
April 2014
INSTRUCTION MANUAL

Copyright 2014
Agilent Technologies
XGS-600 Gauge Controller

XGS-600 Gauge Controller
DRAFT 4/15/14
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-
ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-
ment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-
standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer’s expense; in addition, a charge for testing and exam-
ination may be made on Products so returned.

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Contents
Preface .............................................................................................................................................. 7
Hazard and Safety Information ................................................................................................ 7
EMC Warnings ........................................................................................................................ 8
Introduction .................................................................................................................................... 11
Backwards Compatibility ....................................................................................................... 11
Part Number Scheme ............................................................................................................. 11
XGS-600 Front and Back Description..................................................................................... 12
Unit Dimensions .................................................................................................................... 14
Installation ...................................................................................................................................... 15
Connect the Unit.................................................................................................................... 15
Operating Instructions .................................................................................................................. 23
Operational Screens............................................................................................................... 23
Service and Troubleshooting ....................................................................................................... 41
Troubleshooting ..................................................................................................................... 46
Appendix A. XGS-600 Gauge Specifications ............................................................................... 51
Instrument Specifications .......................................................................................................51
Board Specifications/Descriptions .......................................................................................... 55
I/O Pin Assignments ............................................................................................................... 60
XGS-600 vs MultiGauge and SenTorr Backwards Compatibility Detail................................... 63
Appendix B. ASCII Serial Commands .......................................................................................... 67
Appendix C. BCD Serial Commands ............................................................................................ 77
Appendix D. Gas Correction Factor Table ................................................................................... 83

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Preface
Hazard and Safety Information
This manual uses the following standard safety protocols:
WARNING The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
CAUTION The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
VOLTAGE Alerts the user to the presence of uninsulated dangerous voltage
within the product's enclosure that may be of sufficient
magnitude to constitute a risk of electric shock to persons.
NOTE The notes contain important information.
This product must only be operated and maintained by trained personnel. Board
installation/replacement requires a properly trained service technician.
Before operating or servicing equipment, read and thoroughly understand all operation/
maintenance manuals provided by Agilent Technologies. Be aware of the hazards
associated with this equipment, know how to recognize potentially hazardous conditions,
and how to avoid them. Read carefully and strictly observe all cautions and warnings. The
consequences of unskilled, improper, or careless operation of the equipment can be serious.
In addition, consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Agilent Technologies office.

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EMC Warnings
EN 55011 Class A Warning
This is a Class A product. In a domestic environment this product may cause radio
interference in which case the user may be required to take adequate measures.
The XGS-600 was tested with Agilent Technologies manufactured gauge cables whose
pigtails are connected to the XGS-600 ground stud, and with I/O cables (for remote control,
serial communications and set points) employing combined foil-braid shields and metal
shell connectors with the shields connected to the XGS-600 chassis. Compliance with FCC
Part 15 rules and the European Union's EMI requirements cannot be assured unless Agilent
Technologies supplied gauge cables, foil-braid shielded I/O cables with metal shell
connectors are used and the included clamp-on ferrite bead is installed onto the AC power
(mains) cord. Failure to install the unit in this way may result in the failure to meet the
requirements for radiated emissions and susceptibility.
When using glass BA type gauges, it is possible that the limits for radiated emissions may be
exceeded under certain operating conditions due to the lack of shielding of these devices.
Add supplemental shielding for the glass BA gauge by installing a grounded metal cage or
screen that completely surrounds the gauge, but still allows for air flow. This reduces
emissions to acceptable levels and provides additional protection against accidental
breakage of the glass BA gauge.
FCC
This device complies with Part 15 of the FCC rules. Operation is subject to the following
two conditions: (1) This device may not cause harmful interference, and (2) this device must
accept any interference received, including interference that may cause undesirable
operation.
NOTE The equipment has been tested and found to comply with the
limits for a Class A digital device, pursuant to Part 15 of the FCC
rules. These limits are designed to provide reasonable
protection against harmful interference when the equipment is
operated in a commercial environment. This equipment
generated, uses, and can radiate radio frequency energy and, if
not installed and used in accordance with the instruction
manual, may cause harmful interference to radio
communications. Operation of this equipment in a residential
area is also likely to cause harmful radio communications
interference in which case the user will be required to correct
the interference at his own expense.

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9
NOTE It has been observed that transient electromagnetic phenomena
(electrostatic discharges and power line voltage spikes and/or
surges) can cause the XGS-600 to become blank. If this occurs,
the screen should recover in approximately five seconds. Only
the screen is affected, measurements, setpoint state, analog
outputs and serial communications are not affected.

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Chapter 1: Introduction
Congratulations on your purchase of the XGS-600. This product represents a major advance
in the simplicity, functionality and performance of vacuum gauge controllers. It was
conceived after extensive interviews with end users in a variety of applications. Its design
incorporates the latest in electronics and is certified to CE and CSA requirements, and is
RoHS compliant. It is compact, taking only ½ rack and it is simply without peer in terms of
its capacity, usability and capability.
You can view up to 8 gauges on one screen and can employ as many as 5 ion gauges or
12 convection or Agilent gauges in one unit. With its simple user interface (designed to be
operated without a manual) and its many standard features (8 set points, serial
communication, universal voltage and pressure units), vacuum measurement is simplified.
And where speed is necessary for certain critical applications it was designed to process a
signal in less than 20 milliseconds. These are just some of the many features that make the
XGS-600, a unique and powerful device. Once you have used the XGS-600, we trust that
you, too will find that it is not only a convenient and economical tool in your vacuum
system but an indispensable one as well.
Read this manual carefully to discover all the capability of this device, but if you don't have
time, simply turn it on and navigate through the screens to get started.
Backwards Compatibility
The XGS-600 is designed to be substantially backwards compatible with the SenTorr and
MultiGauge instruments. Refer to page 63 for a full description.
Part Number Scheme
** HFIG = Hot Filament Ion Gauge * IMG = Inverted Magnetron Gauge
1
AX

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DRAFT 4/15/14
XGS-600 Front and Back Description
The display is biased so as to be best viewed from directly in front or slightly above.
Figure 1-1 XGS-600 Front Panel
Figure 1-2 Backplate Connections (CNV, IMG, Analog and HFIG boards shown)
Table 1-1 Front/Rear Panel Components
Item Description Page
1
Display See “Screen Flow” on page 23.
2
Keypad/Navigation Keys See“General Navigation and Data Entry” on page 24.
3
Open-Collector Set Point
Outputs
See “Set-Point Connector Pin Assignments” on page 61.
4
Serial Communication Connector “Serial Connector Pin Assignments” on page 61.
5
Gauge Board Slots (6) See “Board Specifications/Descriptions” on page 55.
6
On/Off Power Switch and
AC Power Plug Receptacle
See “Connect the Unit” on page 15.
1 2
3
4
6
5
7
8

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NOTE The Relay board provides additional compatibility when
replacing a Multigauge or senTorr controller. However, the
relays have a maximum rating of 30 VDC at < 2 A. See
Table A-1 on page 51 for additional specifications.
7
Ground Connection See “Connect the Unit” on page 15.
8
Setpoint Relay Connector See “Connect the Unit” on page 15.
Table 1-1 Front/Rear Panel Components (Continued)
Item Description Page

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DRAFT 4/15/14
Unit Dimensions
Figure 1-3 shows the unit dimensions with mm in brackets.
Figure 1-3 XGS - 600 Dimensions

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Chapter 2: Installation
Each XGS-600 unit is inspected and carefully packed prior to shipment. If the unit arrives
damaged, save the packing materials and immediately notify the carrier. Because the
packing materials are designed specifically for this instrument, always use them when
transporting the unit. The shipping container is packed with the following contents:
Connect the Unit
The unit comes shipped with sensor boards configured according to customer requirements.
CAUTION Do not block air vents. Allow approximately 3/4" clearance at
each side of the enclosure for proper air flow.
1. Install the included ferrite bead onto the AC power (Mains) cable near the XGS-600
chassis. Ensure that the locking tab is fully engaged.
2. Plug the AC line cord into the receptacle on the rear panel of the unit and into the
power source. Keep power off while connecting the remaining cables.
3. Connect gauge and I/O cables depending on controller configuration according to
Figure 2-1:
Figure 2-1 Gauge Board Rear Connections
❑XGS-600 gauge controller ❑AC line cord
❑Operating manual ❑Rubber feet, adhesive
❑Clamp-On Ferrite Bead
BA Gauge
I/O Connector
Gauge Connection
Hot Filament Board Convection Board IMG Board
I/O Connector
Gauge Connection
Gauge Connection
I/O
Gauge
CNV1, 3, 5, 7, 9, B
CNV2, 4, 6, 8, A, C
Power Connector
I/O
Dsub
Analog Board
Connection
Connector
Dsub
Connector
Connector
(AUX1,3,5,
7,9,B)
(AUX2,4,6,
8,A,C)
Connector

XGS-600 Gauge Controller
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DRAFT 4/15/14
NOTE When installing and HFIG cable, make sure to connect the pig
tails from the ground cable to the ground stud. See item 7 in
Figure 1-2.
The Analog Board is identified by the Dsub connector pin
contacts versus the Convection Board socket contacts.
4. Turn on the unit using the rear panel power switch.
NOTE Gauges and accessories are available for the XGS-600
controller such as rack mount hardware, gauge and I/O
cables, and a tilt stand. See Table 2-1 and Table 2-2.
Table 2-1 XGS-600 Accessories
Cables Part Number
Cable Description 3 ft.10 ft.25 ft. 50 ft. 65 ft 75 ft 90 ft 100 ft
UHV-24/UHV-24p PTFE UHV,
bakeable to 250° C
R32463010 R32463025 R32463050
UHV-24/UHV-24p Standard,
non-bakeable
R32453010 R32453025 R32453050
Glass BA Gauge Standard,
non-bakeable
R32443010 R32443025 R32443050
Ion Gauge Extension R32473065 R32473090
MBA-l00 Gauge R32483010 R32483025 R32483050
IMG-100 Gauge R03113010 R03113025 R03113050 R03113075 R03113100
IMG-UHV Gauge R03413010 R03413025 R03413065 R03413100
Thermocouple Gauge L91313010 L91313025 L91313050 L91313075 L91313100
ConvecTorr Gauge, Non-Bakeable L91223010 L91223025 L91223050 L91223100
XGS-600 I/O R32493010 R32493025 R32493050 Special Order
CT-100 with Analog Input Card R35883003 R35883010 R35883025 R35883050
FRG700/PVG/PCG with Analog Input
Card
R35893003 R35893010 R35893025 R35893050
CDG500, MKS with Analog Input
Card
R35903003 R35903010 R35903025 R35903050
FRG720/730 with Analog Input Card R35913003 R35913010 R35913025 R35913050

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Other Accessories Part No. Power Cord Selection Part No.
HFIG** PCB, Field Install R3075301 Europe, 1OA /220-230 VAC, 2.5 Meter 656494220
IMG* PCB, Field Install R3080301 Denmark, 10A/220-230 VAC, 2.5 Meter 656494225
Thermocouple/Convector Gauge card
PCB, Field Install
R3084301 Switzerland, 10A/230 VAC, 2.5 Meter 56494235
Analog Input PCB, Field Install R3487301 UK/Ireland, 13A/230 VAC, 2.5 Meter 656494250
Tilt Stand Accessory R3124301 India, 10A/220-250 VAC, 2.5 Meter 656494245
Center Rack Mount Kit L6423301 Israel, 10A/230 VAC, 2.5 Meter 656494230
Off-Center Rack Mount Kit L6422301 Japan, 12A/100 VAC, 2.3 Meter 656494240
Dual Mount Rack Mount Kit L6426301 North America, 15A/125 VAC, 2.0 Meter 656458203
Four Channel TC Cable Adapter R3299301 North America, 10A/230 VAC, 2.5 Meter 656494255
MHV-SHV Adapter 648072683
Table 2-1 XGS-600 Accessories (Continued)
Cables Part Number

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Rack Mounting Instructions
Depending on Rack Mounting kit selected, assemble per Figure 2-2.
Figure 2-2 Rack Mounting Instructions

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Table 2-2 Gauge Selection Chart
Controller Gauge Card
Vacuum Regime
Convection Hot Filament Cold Cathode Analog
Gauge
Type Recommendation Gauge Characteristics
CHMA
Rough ATM to 10-3
✔ConvecTorr Best overall convection gauge
for accuracy repeatability,
secure connection
• Stainless steel
• Pipe thread, KF and CFF
• Locking bayonet connector
✔536 Same vacuum performance
as the ConvecTorr but
without bayonet connector
• Stainless steel
• Pipe thread, KF and CFF
✔531 Most economical rough
gauge
•Lowestcost
• Mild steel
• Pipe thread
✔CT-100 Most economical gauge • Active gauge - TC
✔PVG Series Smallest active gauge for
rough vacuum applications
• Active gauge - Pirani
✔PCG Series Combination CDG and Pirani • Active gauge CDG and Pirani - Good for rapid venting
to atmosphere
✔CDG500 Accurate and reliable, fast
response
Capacitance diaphragm gauge - Fast response, gas
independent over whole range
High 10-3 to 10-9
✔572 (glass) Most popular general purpose
HV gauge (hot filament)
• Measures to 1 x 10-9 To r r
• Tungsten filaments - More accurate and repeatable
• Glass - Can see when it is on
✔563 (glass) Best general purpose HV
gauge (hot filament) for
overall performance and
reliability
• Measures to 1 x 10-9 To r r
• Thoriated iridium filament -
More robust with better burnout resistance
• Glass - Can see when it is on
• Platinum coating - Provides higher performance in the
10-4 range and a measure of EMI shielding
✔571 (glass) Same as 563 without
platinum coating
• Less expensive than the 563
✔MBA-100
(one
filament,
metal case)
Break resistant HV gauge
(hot filament)
• Measures to 10-9 Torr
• General purpose hot filament with metal housing (not
glass) , so it will not break
• Uses less power than glass gauges.
• Well shielded
• Available in tungsten and thoriated iridium filament
(see 572 and 563 above)
MBA-200/
MBA2
(two
filaments,
metal case)

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✔IMG-100
Inverted
Magnetron
Most durable and fastest
responding HV gauge (cold
cathode)
• General purpose-measures to 2 x 10-9 Torr
• Small, reliable, extremely rugged - Will not burn out
• Very fast response - < 20 milliseconds
• Less accurate and repeatable than hot filament
• Longer starting in high vacuum than a hot filament
• Can be cleaned
✔FRG700/702 Combination full range gauge • Active gauge - Pirani/Cold Cathode
✔FRG720/730 Combination full range gauge • Active gauge - Pirani/Hot Filament
Ultra High 10-9 to 10-12
✔IMG-300
Inverted
Magnetron
Most durable and fastest
responding UHV gauge
(cold cathode)
• Measures to 1 x 10-11 Tor r
• Bakeable with magnet to 250 °C
• Bakeable without magnet to 450 °C
• Reliable, rugged, will not burn out
• Can be cleaned
✔UHV-24
(nude)
Most popular UHV gauge
(hot filament)
• Measures to 1 x 10-10 To r r
• Bakeable with magnet to 250 °C
• Thoriated iridium filaments run cooler - less outgassing
• Dual tungsten filaments run hotter -
More outgassing but measurements are more accurate
and repeatable
✔UHV-24p
(nude)
UHV gauge providing the
highest vacuum reading
• Same as UHV-24 except it measures to 2 x 10-11 To r r
Table 2-2 Gauge Selection Chart (Continued)
Controller Gauge Card
Vacuum Regime
Convection Hot Filament Cold Cathode Analog
Gauge
Type Recommendation Gauge Characteristics
CHMA